公开(公告)号：JPH06194220A

公开(公告)日：1994-07-15

申请号：JP34290392

申请日：1992-12-22

Applicant: MATSUSHITA ELECTRIC WORKS LTD

Inventor： ISHIDA TAKUO ,  SAKAI ATSUSHI ,  AIZAWA KOICHI ,  AWAI TAKAYOSHI ,  KAKINOTE KEIJI

IPC: G01J1/02 ,  G01J5/02 ,  G01J5/20 ,  H01L37/02

Abstract: PURPOSE:To provide a pad part formation method, that is not followed by peeling-off at the pad part even with a thinner film of a conduction layer to be used as an electrode, relating to an infrared ray sensor. CONSTITUTION:Relating to a formation method for a pad part 4 of an infrared ray sensor, in manufacturing the infrared ray sensor where a thin film thermistor to be used as a detection part, and an infrared ray absorption layer are laminated on a heat insulation film, with at least a part of a surface layer 21 consisting of SiO2, a conductive layer, which is going to be a thermistor's electrode 32, is formed on an SiO2 surface layer, then after forming an SiO2 film, which is going to be an infrared ray absorption layer, on tap of that, the SiO2 film is removed by etching to expose a part, of the conductive layer, that is going to be a pad part, and on the exposed part, a conductive layer 35 for said pad is formed, and as a feature, before forming the conductive layer to be an electrode, the part corresponding to the bottom side of pad part in the SiO2 surface layer, is removed by etching in advance, and then proceeds to the processes in which the conductive layer to be an electrode, is formed.

公开(公告)号：JPH06137940A

公开(公告)日：1994-05-20

申请号：JP28912892

申请日：1992-10-27

Applicant: MATSUSHITA ELECTRIC WORKS LTD

Inventor： AIZAWA KOICHI ,  SAKAI ATSUSHI ,  AWAI TAKAYOSHI ,  ISHIDA TAKUO ,  KAKINOTE KEIJI

IPC: G01J1/02 ,  G01J5/02

Abstract: PURPOSE:To facilitate detection of abnormally reduced pressure in package by providing a thermal infrared detecting part, a heating element, and a temperature difference detecting means, and reducing pressure in the package. CONSTITUTION:Constant current is fed from a power supply section 21 to a heating element 5. Heat generated from the heating element 5 raises temperature of a temperature-sensitive resistor 14 located above thus varying the resistance thereof. Variation of resistance is detected at a resistance detecting section 22 which then produces a signal proportional to the variation of resistance. This is a temperature difference signal corresponding to temperature variation caused by conduction of the heating element 5 and the temperature difference signal is generated using an output signal from an infrared detecting part 2. The temperature signal is fed to a comparator 23 which delivers an output signal to a sense output section 24 if the temperature difference signal exceeds a threshold value corresponding to an allowable extent of pressure reduction. The output section 24 notifies pressure reduction in a package below an allowable level by means of light or sound. Consequently, unoperatable/replacing time of sensor can be known.

公开(公告)号：JPH06137939A

公开(公告)日：1994-05-20

申请号：JP28912692

申请日：1992-10-27

Applicant: MATSUSHITA ELECTRIC WORKS LTD

Inventor： AWAI TAKAYOSHI ,  SAKAI ATSUSHI ,  AIZAWA KOICHI ,  ISHIDA TAKUO ,  KAKINOTE KEIJI

IPC: G01J1/02 ,  G01J5/02 ,  G01J5/20

Abstract: PURPOSE:To provide an infrared detecting element having a diaphragm structure in which a thermal insulating film is protected against distortion or fracture. CONSTITUTION:In an infrared detecting element comprising a substrate 16 having a hollow section 12, a thermal insulating film 14 covering the hollow section 12 while being supported, at the peripheral part thereof, by the substrate, and an infrared detecting part having a thermistor 30 and a pair of electrodes 20, 20 disposed at a part covering the hollow part 12 of the thermal insulating film 14, the substrate 16 and the thermal insulating film 14 are formed integrally with a same material, e.g. silicon oxide.

公开(公告)号：JPH05242788A

公开(公告)日：1993-09-21

申请号：JP3810492

申请日：1992-02-25

Applicant: MATSUSHITA ELECTRIC WORKS LTD

Inventor： SAKAI ATSUSHI ,  KASANO FUMIHIRO ,  NISHIMURA HIROMI ,  AIZAWA KOICHI ,  AWAI TAKAYOSHI ,  ISHIDA TAKUO ,  KAKINOTE KEIJI ,  KUZUMI HIDEKI

IPC: H01H59/00

Abstract: PURPOSE:To provide an electrostatic relay having fixed base bodies set on both sides of a movable plate, in which deformation caused by thermal expansion is hard to be generated, unbalance between the sizes of the upper and lower base bodies can be diminished, and moreover, connecting electrodes for leading to an outer circuit can be easily formed. CONSTITUTION:A pair of fixed base bodies 7, 8 and a movable plate 6 are formed of conductive base boards, and connecting electrodes 74, 84 for electrically connecting fixed side driving electrodes 70, 80 to an outer circuit, are set on the surfaces of the fixed base bodies 7, 8, opposite to the fixed side driving electrodes 70, 80. The connecting electrodes 74, 84 and fixed driving side electrodes 70, 80 are mutually conducted through fixed base bodies 7, 8 formed of the conductive base boards.

公开(公告)号：JPH05231947A

公开(公告)日：1993-09-07

申请号：JP3811292

申请日：1992-02-25

Applicant: MATSUSHITA ELECTRIC WORKS LTD

Inventor： AWAI TAKAYOSHI ,  SAKAI ATSUSHI ,  AIZAWA KOICHI ,  ISHIDA TAKUO ,  KAKINOTE KEIJI

IPC: G01J1/02 ,  G01J5/02 ,  G01J5/12

Abstract: PURPOSE:To obtain an infrared detector wherein a strain and a breakdown of a heat insulation film are not caused by a residual stress at the time of formation of a film, of which a manufacture yield is high and which shows high sensitivity and durability at the time of use. CONSTITUTION:An infrared detector has a pair of electrode layers 30 and 50 and a thermistor 40 held between the two electrode layers 30 and 50, on a heat insulation film 20. By forming the heat insulation film 20 of oxide nitride silicon, the element is made to have the heat insulation film 20 of which a residual stress is small and, in addition, which is excellent in a heat insulation property.

公开(公告)号：JPH05231946A

公开(公告)日：1993-09-07

申请号：JP3810592

申请日：1992-02-25

Applicant: MATSUSHITA ELECTRIC WORKS LTD

Inventor： AWAI TAKAYOSHI ,  SAKAI ATSUSHI ,  AIZAWA KOICHI ,  ISHIDA TAKUO ,  KAKINOTE KEIJI

IPC: G01J1/02 ,  G01J5/02 ,  G01J5/12 ,  G01J5/20

Abstract: PURPOSE:To obtain an infrared detector wherein a strain and a breakdown are not caused by an internal stress even when a heat insulation film is thinned, of which a manufacture yield is high and which shows high sensitivity and durability in use. CONSTITUTION:An infrared detector has a film-form body of a plurality of layers comprising a pair of electrode layers 30 and 50 and a thermistor layer 40 held between the two electrode layers 30 and 50, on a heat insulation film 20. The film-form body of at least one layer is formed in separation in a narrow width in a pattern wherein strip-shaped narrow-width parts separated by a break are juxtaposed in a folded and continuous manner.

公开(公告)号：JPH052975A

公开(公告)日：1993-01-08

申请号：JP15192391

申请日：1991-06-24

Applicant: MATSUSHITA ELECTRIC WORKS LTD

Inventor： SAKAI ATSUSHI ,  AIZAWA KOICHI ,  KAKINOTE KEIJI ,  NISHIMURA HIROMI ,  KASANO FUMIHIRO ,  AWAI TAKAYOSHI

IPC: H01H59/00

Abstract: PURPOSE:To accomplish an electrostatic relay with higher possibility of practical application, which presents a good large electrostatic power when a driving voltage i s impressed. CONSTITUTION:An electrostatic relay concerned is equipped with a stationary side base 2, which has a stationary contact 21 and a stationary side driving electrode. and a movable plate 13 having a movable contact 22 and a movable side driving electrode, wherein such an arrangement is introduced that see-saw motions are possible in the condition the movable plate 13 confronts the stationary side base 2 The movable contact 22 is positioned facing the stationary contact 21 at least on one side viewed from the fulcrum P of the see-saw motions, and the stationary side driving electrode and movable side driving electrode confront on the two sides of the fulcrum P, and at either of these two electrodes, electrets 8, 9 having different polarities are installed on both sides of the fulcrum, Thus the see-saw motions of the movable plate 13 are generated by impressing a voltage on the driving electrodes.

公开(公告)号：JPH052974A

公开(公告)日：1993-01-08

申请号：JP15192091

申请日：1991-06-24

Applicant: MATSUSHITA ELECTRIC WORKS LTD

Inventor： SAKAI ATSUSHI ,  AIZAWA KOICHI ,  KAKINOTE KEIJI ,  NISHIMURA HIROMI ,  KASANO FUMIHIRO ,  AWAI TAKAYOSHI

IPC: H01H59/00

Abstract: PURPOSE:To accomplish an electrostatic relay with higher possibility of practical application, which presents a good large electrostatic power when a driving voltage is impressed and with which it is easy to take a variety of modes. CONSTITUTION:An electrostatic relay concerned is equipped with a stationary side base 2a. which has a stationary contact 21 and a stationary side driving electrode 11, and a movable plate 13 having a movable contact 22 and a movable side driving electrode, wherein cantilever supporting is made so that displacement in the direction of approaching and separating is possible in the condition that the movable plate 13 confronts the stationary side base 2a. The stationary contact 21 is positioned facing the movable contact 22, and the stationary side driving electrode 11 positioned facing the movable side driving electrode, and electrets 8, 9 having different polarities are installed ahead of both sides of the movable plate 13, which is thus displaced with impression of a voltage on the driving electrodes.