公开(公告)号：JP2000215851A

公开(公告)日：2000-08-04

申请号：JP1700299

申请日：1999-01-26

Applicant: SONY CORP

Inventor： KAWASHIMA TOSHITAKA ,  OSAKO JUNICHI

IPC: H01J61/35

Abstract: PROBLEM TO BE SOLVED: To improve the luminous efficiency of a metal halide discharge tube by arranging an IR dichroic mirror reflecting infrared rays or/and a UV filter absorbing ultraviolet rays as an optical filter at a translucent section. SOLUTION: A translucent section 3 is provided on the front face of an envelope 2, and the translucent section 3 is covered with a front lens 4. A metal halide discharge tube 5 is arranged in the envelope 2, and a reflecting face is formed on the inner face of the envelope 2. An IR dichroic mirror 6 reflecting the light in the infrared ray range is coated on the front face of the front lens 4 as an optical filter. The IR dichroic mirror 6 reflects only the light in the infrared ray range within the light emitted from the metal halide discharge tube 5 and transmits visible light. Infrared rays are returned to the inside to heat the metal halide discharge tube 5, the halogen vapor pressure in the metal halide discharge tube 5 is increased, and luminescence intensity is increased.

公开(公告)号：JPH1018034A

公开(公告)日：1998-01-20

申请号：JP17697096

申请日：1996-07-08

Applicant: SONY CORP

Inventor： KITAGAWA KOJI ,  OSAKO JUNICHI

IPC: C23C14/34 ,  C23C14/52 ,  C23C14/54

Abstract: PROBLEM TO BE SOLVED: To provide a film forming device and film forming method which make it possible to obtain the three-dimensional information of an object to be formed with a film at the time of forming the films and are capable of forming the homogeneous film on the object to be formed with the film in accordance with this information. SOLUTION: The light from a light source 32 is condensed by a condenser lens 33, is passed through slit glass 34 and is extended by an extending lens 35 to form grid pattern light 55 which is then projected to a film 50. The projected grid patterns are subjected image pickup by a CCD camera 36 and the image signals thereof are subjected to image processing by a computer 40, by which the three-dimensional information of the film 50 is obtd. The tension of the film 50 is adjusted in accordance with this information. The three-dimensional information of a target 12 is similarly obtd. Further, the interference light of the film 50 is measured by a photodetector 37 and the measurement signal thereof is processed by the computer 40 by which the film thickness is obtd.