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公开(公告)号：US10689251B2
公开(公告)日：2020-06-23
申请号：US16522301
申请日：2019-07-25
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Enri Duqi , Lorenzo Baldo , Roberto Carminati
Abstract: MEMS device, in which a body made of semiconductor material contains a chamber, and a first column inside the chamber. A cap of semiconductor material is attached to the body and forms a first membrane, a first cavity and a first channel. The chamber is closed on the side of the cap. The first membrane, the first cavity, the first channel and the first column form a capacitive pressure sensor structure. The first membrane is arranged between the first cavity and the second face, the first channel extends between the first cavity and the first face or between the first cavity and the second face and the first column extends towards the first membrane and forms, along with the first membrane, plates of a first capacitor element.
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公开(公告)号：US10649202B2
公开(公告)日：2020-05-12
申请号：US16225881
申请日：2018-12-19
Applicant: STMicroelectronics S.r.l.
Inventor： Sonia Costantini , Marta Carminati , Daniela Angela Luisa Gatti , Laura Maria Castoldi , Roberto Carminati
Abstract: A micro-electro-mechanical (MEMS) device is formed in a first wafer overlying and bonded to a second wafer. The first wafer includes a fixed part, a movable part, and elastic elements that elastically couple the movable part and the fixed part. The movable part further carries actuation elements configured to control a relative movement, such as a rotation, of the movable part with respect to the fixed part. The second wafer is bonded to the first wafer through projections extending from the first wafer. The projections may, for example, be formed by selectively removing part of a semiconductor layer. A composite wafer formed by the first and second wafers is cut to form many MEMS devices.
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公开(公告)号：US10310253B2
公开(公告)日：2019-06-04
申请号：US15594287
申请日：2017-05-12
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Domenico Giusti , Sonia Constantini
Abstract: A MEMS device includes a fixed structure and suspended structure including an internal structure and a first arm and a second arm. Each arm has a first end fixed to the fixed structure and a second end fixed to the internal structure. The ends are angularly arranged at a distance apart. Piezoelectric actuators mounted to the arms are driven so as to cause deformation of the arm and produce a rotation of the internal structure. In a resting condition, each of the first and second arms has a respective elongated portion with a respective concavity. The internal structure extends in part within the concavities of the elongated portions of the first and second arms.
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54.发明授权公开(公告)号：US10018835B2
公开(公告)日：2018-07-10
申请号：US15280704
申请日：2016-09-29
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Guido Chiaretti , Fabio Luigi Grilli , Roberto Carminati , Bruno Murari , Lorenzo Sarchi
CPC classification number: G02B26/103 , G02B6/0006 , G02B6/322 , G02B6/3502 , G02B6/3506 , G02B6/3508 , G02B6/4202 , G02B6/4225 , G02B6/4226 , G03B21/28 , H01S5/02284 , H04N9/3129
Abstract: A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.
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55.发明申请公开(公告)号：US20180180873A1
公开(公告)日：2018-06-28
申请号：US15594287
申请日：2017-05-12
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Domenico Giusti , Sonia Constantini
CPC classification number: G02B26/0858 , B81B3/0083 , B81B2201/032 , B81B2203/0118 , G02B26/105 , H04N9/3129
Abstract: A MEMS device includes a fixed structure and suspended structure including an internal structure and a first arm and a second arm. Each arm has a first end fixed to the fixed structure and a second end fixed to the internal structure. The ends are angularly arranged at a distance apart. Piezoelectric actuators mounted to the arms are driven so as to cause deformation of the arm and produce a rotation of the internal structure. In a resting condition, each of the first and second arms has a respective elongated portion with a respective concavity. The internal structure extends in part within the concavities of the elongated portions of the first and second arms.
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Patent Agency Ranking
公开(公告)号：US20180059405A1
公开(公告)日：2018-03-01
申请号：US15245805
申请日：2016-08-24
Applicant: STMicroelectronics S.r.l.
Inventor： Giorgio Allegato , Sonia Costantini , Federico Vercesi , Roberto Carminati
CPC classification number: G02B26/105 , B81B2201/042 , B81C1/00317 , B81C2203/0109 , B81C2203/019 , G02B26/0833
Abstract: Disclosed herein is a micro-electro mechanical (MEMS) device including a substrate, and a MEMS mirror stack on the substrate. A first bonding layer seals against ingress of environmental contaminants and mechanically anchors the MEMS mirror stack to the substrate. A cap layer is formed on the MEMS mirror stack. A second boding layer seals against ingress of environmental contaminants and mechanically anchors the cap layer to the MEMS mirror stack.
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57.发明申请公开(公告)号：US20170160540A1
公开(公告)日：2017-06-08
申请号：US15165547
申请日：2016-05-26
Applicant: STMicroelectronics S.r.l.
Inventor： Domenico Giusti , Roberto Carminati , Massimiliano Merli
CPC classification number: G02B26/105 , B81B3/0048 , B81B3/0083 , B81B2201/042 , G02B26/0858 , H04N9/3173
Abstract: A micromechanical device includes a tiltable structure that is rotatable about a first rotation axis. The tiltable structure is coupled to a fixed structure through an actuation structure of a piezoelectric type. The actuation structure is formed by spring elements having a spiral shape. The spring elements each include actuation arms extending transversely to the first rotation axis. Each actuation arm carries a respective piezoelectric band of piezoelectric material. The actuation arms are divided into two sets with the piezoelectric bands thereof biased in phase opposition to obtain rotation in opposite directions of the tiltable structure about the first rotation axis.
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公开(公告)号：US20170031153A1
公开(公告)日：2017-02-02
申请号：US15293061
申请日：2016-10-13
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Sebastiano Conti , Sonia Constantini
CPC classification number: G02B26/0833 , G01B11/2518 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/105 , G03B21/008 , H04N5/2254 , H04N5/2256 , H04N5/2257 , H04N13/211 , H04N13/236 , H04N13/254 , Y10T29/49
Abstract: A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.
Abstract translation: 镜面微机械结构具有携带镜子元件的移动质量。 质量可旋转驱动，以反射具有期望角度范围的入射光束。 移动块悬挂在支撑体中获得的空腔上方。 空腔的形状使得支撑体不会将反射的光束阻碍在期望的角度范围内。 特别地，腔延伸到反射镜微机械结构的支撑体的第一侧边缘壁。 腔体在第一侧边缘壁处朝着反射镜微机械结构的外部打开并且与其连通。
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公开(公告)号：US20150217990A1
公开(公告)日：2015-08-06
申请号：US14607714
申请日：2015-01-28
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Sebastiano Conti
CPC classification number: B81B3/0062 , B81B3/0043 , B81B7/008 , B81B2201/018 , B81B2201/033 , B81B2201/042 , B81B2201/045 , B81B2203/058 , G02B26/0841 , G03B21/142 , G03B21/2033 , G03B21/28
Abstract: The MEMS device has a suspended mass supported via a pair of articulation arms by a supporting region. An electrostatic driving system, coupled to the articulation arms, has mobile electrodes and fixed electrodes that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies, arranged on opposite sides of a respective articulation arm and connected to the articulation arm through connection elements. Each actuation assembly extends laterally to the suspended mass and has an auxiliary arm carrying a respective plurality of mobile electrodes. Each auxiliary arm is parallel to the articulation arms. The connection elements may be rigid or formed by linkages.
Abstract translation: MEMS器件具有通过支撑区域经由一对关节臂支撑的悬挂质量。 耦合到关节臂的静电驱动系统具有彼此耦合的移动电极和固定电极。 静电驱动系统由两对致动组件形成，这两对致动组件布置在相应的关节臂的相对侧上，并通过连接元件连接到关节臂上。 每个致动组件横向延伸到悬挂质量块，并具有一个载有相应多个移动电极的辅助臂。 每个辅助臂平行于铰接臂。 连接元件可以是刚性的或通过连杆形成。
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公开(公告)号：US12084341B2
公开(公告)日：2024-09-10
申请号：US17499297
申请日：2021-10-12
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' Boni , Lorenzo Vinciguerra , Roberto Carminati , Massimiliano Merli
CPC classification number: B81B3/0072 , B81C1/00182 , B81C1/00198 , B81B2203/033 , B81C2201/019
Abstract: A MEMS device is formed by a body of semiconductor material which defines a support structure. A pass-through cavity in the body is surrounded by the support structure. A movable structure is suspended in the pass-through cavity. An elastic structure extends in the pass-through cavity between the support structure and the movable structure. The elastic structure has a first and second portions and is subject, in use, to mechanical stress. The MEMS device is further formed by a metal region, which extends on the first portion of the elastic structure, and by a buried cavity in the elastic structure. The buried cavity extends between the first and the second portions of the elastic structure.
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