STATIC RANDOM-ACCESS MEMORY (SRAM) CELL ARRAY

    公开(公告)号:US20170317091A1

    公开(公告)日:2017-11-02

    申请号:US15635190

    申请日:2017-06-27

    CPC classification number: H01L29/6681 H01L27/1104 H01L27/1116 H01L29/785

    Abstract: A static random-access memory (SRAM) cell array forming method includes the following steps. A plurality of fin structures are formed on a substrate, wherein the fin structures include a plurality of active fins and a plurality of dummy fins, each PG (pass-gate) FinFET shares at least one of the active fins with a PD (pull-down) FinFET, and at least one dummy fin is disposed between the two active fins having two adjacent pull-up FinFETs thereover in a static random-access memory cell. At least a part of the dummy fins are removed. The present invention also provides a static random-access memory (SRAM) cell array formed by said method.

    Method for separating photomask pattern
    60.
    发明授权
    Method for separating photomask pattern 有权
    分离光掩模图案的方法

    公开(公告)号:US08741507B1

    公开(公告)日:2014-06-03

    申请号:US13742361

    申请日:2013-01-16

    CPC classification number: G03F1/70

    Abstract: A method for separating photomask pattern, including the following steps: first, a layout pattern is provided, wherein the layout pattern is defined to have at least one critical pattern and at least one non-critical pattern. Then, a first split process is performed to separate the critical pattern into a plurality of first patterns and a plurality of second patterns. A second split process is performed to separate the non-critical pattern into a plurality of third patterns and a plurality of fourth patterns. Finally, the first patterns and the third patterns are output to a first photomask, and the second patterns and the fourth patterns are output to a second photomask.

    Abstract translation: 一种用于分离光掩模图案的方法,包括以下步骤:首先,提供布局图案,其中布局图案被定义为具有至少一个关键图案和至少一个非关键图案。 然后,执行第一分割处理以将关键图案分离成多个第一图案和多个第二图案。 执行第二分割处理以将非关键图案分离成多个第三图案和多个第四图案。 最后,将第一图案和第三图案输出到第一光掩模,并将第二图案和第四图案输出到第二光掩模。

Patent Agency Ranking