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公开(公告)号：US20170261376A1
公开(公告)日：2017-09-14
申请号：US15606575
申请日：2017-05-26
Applicant: The Government of the United States of America, as represented by the Secretary of the Navy
Inventor： Virginia D. Wheeler , Francis J. Kub , Charles R. Eddy, JR. , Marko J. Tadjer
CPC classification number: G01J5/20 , C23C16/45525 , G01J5/024 , G01J5/0275 , G01J5/084 , G01J5/0853 , G01J5/089 , G01J2005/204 , G02B1/10 , G02B1/11 , G02B1/14 , G02B1/18 , G02B5/003 , G02F1/0147 , H01L37/00 , Y10T156/10
Abstract: A method of making a variable emittance window comprising providing a metal foil substrate, applying an antireflection material layer onto the metal foil substrate, applying a protection material layer onto the antireflection material layer, applying a variable emittance material layer onto the protection material layer, annealing to form a two-step variable emittance layer, applying a transparent low emittance material layer to the two-step variable emittance layer, adhering a transparent substrate to the transparent low emittance material layer, and removing the metal foil substrate.
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公开(公告)号：US09377363B2
公开(公告)日：2016-06-28
申请号：US14294090
申请日：2014-06-02
Applicant: FLIR Systems, Inc.
Inventor： Pierre Boulanger , Marcel Tremblay , Jim Goodland , Barbara Sharp , Farhad Mirbod , Theodore R. Hoelter
IPC: G01J5/10 , G01J5/04 , H04N5/225 , H04N5/33 , G01J5/02 , G01J5/20 , G01J1/02 , G01J1/44 , H01L27/146 , G01J5/00
CPC classification number: G01J5/20 , G01J1/0204 , G01J1/44 , G01J5/02 , G01J5/0215 , G01J5/023 , G01J5/046 , G01J5/10 , G01J2005/0077 , G01J2005/204 , H01L22/14 , H01L22/32 , H01L27/146 , H01L27/14618 , H01L27/1462 , H01L27/14632 , H01L27/14636 , H01L27/14669 , H01L27/14687 , H01L27/14698 , H01L37/02 , H04N5/2251 , H04N5/33 , Y10T29/49826
Abstract: An infrared camera architecture includes, for an embodiment, an infrared detector, a substrate, a plurality of electrical components coupled to the substrate, and a pedestal made of a thermally conductive material and having a leg coupled to the substrate. The infrared detector is supported by and thermally coupled to the pedestal, with the pedestal thermally isolating the infrared detector from the plurality of electrical components.
Abstract translation: 对于一个实施例，红外线照相机结构包括红外检测器，衬底，耦合到衬底的多个电气部件，以及由导热材料制成并具有连接到衬底的腿部的基座。 红外检测器由支架支撑并热耦合到基座，基座将红外检测器与多个电气部件热隔离。
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公开(公告)号：US20160047691A1
公开(公告)日：2016-02-18
申请号：US13750709
申请日：2013-01-25
Applicant: FLIR Systems, Inc.
Inventor： Gregory A. Carlson , Alex Matson , Andrew Sharpe , Davey Beard , Paul Schweikert , Robert Simes
IPC: G01J5/10 , H01L27/146 , G01J1/02 , G01J1/44 , G01J5/02
CPC classification number: G01J5/20 , G01J1/0204 , G01J1/44 , G01J5/02 , G01J5/0215 , G01J5/023 , G01J5/046 , G01J5/10 , G01J2005/0077 , G01J2005/204 , H01L22/14 , H01L22/32 , H01L27/146 , H01L27/14618 , H01L27/1462 , H01L27/14632 , H01L27/14636 , H01L27/14669 , H01L27/14687 , H01L27/14698 , H01L37/02 , H04N5/2251 , H04N5/33 , Y10T29/49826
Abstract: An infrared detector useful in, e.g., infrared cameras, includes a substrate having an array of infrared detectors and a readout integrated circuit interconnected with the array disposed on an upper surface thereof, for one or more embodiments. A generally planar window is spaced above the array, the window being substantially transparent to infrared light. A mesa is bonded to the window. The mesa has closed marginal side walls disposed between an outer periphery of a lower surface of the window and an outer periphery of the upper surface of the substrate and defines a closed cavity between the window and the array that encloses the array. A solder seal bonds the mesa to the substrate so as to seal the cavity.
Abstract translation: 用于例如红外相机的红外检测器包括具有红外检测器阵列的基板和与设置在其上表面上的阵列互连的读出集成电路，用于一个或多个实施例。 大致平面的窗口在阵列上方间隔开，窗口基本上对于红外光是透明的。 台面粘合到窗户。 台面已经封闭了边缘侧壁，其设置在窗口的下表面的外周边和基板的上表面的外周之间，并且在窗口和包围阵列的阵列之间限定了封闭的空腔。 焊接密封件将台面连接到基板以便密封空腔。
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公开(公告)号：US08743207B2
公开(公告)日：2014-06-03
申请号：US12844124
申请日：2010-07-27
Applicant: Pierre Boulanger , Marcel Tremblay , Jim Goodland , Barbara Sharp , Farhad Mirbod , Theodore R. Hoelter
Inventor： Pierre Boulanger , Marcel Tremblay , Jim Goodland , Barbara Sharp , Farhad Mirbod , Theodore R. Hoelter
CPC classification number: G01J5/20 , G01J1/0204 , G01J1/44 , G01J5/02 , G01J5/0215 , G01J5/023 , G01J5/046 , G01J5/10 , G01J2005/0077 , G01J2005/204 , H01L22/14 , H01L22/32 , H01L27/146 , H01L27/14618 , H01L27/1462 , H01L27/14632 , H01L27/14636 , H01L27/14669 , H01L27/14687 , H01L27/14698 , H01L37/02 , H04N5/2251 , H04N5/33 , Y10T29/49826
Abstract: An infrared camera architecture includes, for an embodiment, an infrared detector, a substrate, a plurality of electrical components coupled to the substrate, and a pedestal made of a thermally conductive material and having a leg coupled to the substrate. The infrared detector is supported by and thermally coupled to the pedestal, with the pedestal thermally isolating the infrared detector from the plurality of electrical components.
Abstract translation: 对于一个实施例，红外线照相机结构包括红外检测器，衬底，耦合到衬底的多个电气部件，以及由导热材料制成并具有连接到衬底的腿部的基座。 红外检测器由支架支撑并热耦合到基座，基座将红外检测器与多个电气部件热隔离。
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55.发明申请DEVICE HAVING A MEMBRANE STRUCTURE FOR DETECTING THERMAL RADIATION, AND METHOD FOR PRODUCTION THEREOF 有权具有用于检测热辐射的膜结构的装置及其生产方法公开(公告)号：US20110006211A1
公开(公告)日：2011-01-13
申请号：US12601556
申请日：2008-05-28
Applicant: Carsten Giebeler , Matthias Schreiter , Christian Paulus
Inventor： Carsten Giebeler , Matthias Schreiter , Christian Paulus
CPC classification number: G01J5/34 , G01J5/00 , G01J5/0205 , G01J5/0225 , G01J5/023 , G01J5/04 , G01J5/041 , G01J5/045 , G01J5/14 , G01J5/22 , G01J2005/0077 , G01J2005/204 , G01N2021/0106 , H01L27/14683 , H01L41/0973 , Y10T156/10
Abstract: In a device for detecting thermal radiation, at least one membrane is provided on which at least one thermal detector element is mounted for the conversion of the thermal radiation into an electric signal and at least one circuit support for carrying the membrane and for carrying at least one readout circuit for reading out the electrical signal, the detector element and the readout circuit being connected together electrically by an electric contact which passes through the membrane. In addition, a method of producing the device with the following method steps is provided: a) provision of the membrane with the detector element and of at least one electrical through-connection and provision of the circuit support and b) bringing together the membrane and the circuit support in such a manner that the detector element and the readout circuit are connected together electrically by an electrical contact passing through the membrane. Production activity is preferably carried out at wafer level: functionalised silicon substrates are stacked upon one another, firmly bonded to one another and then divided into individual elements. Preferably, the detector elements comprise of pyro-electrical detector elements. The device finds application in motion detectors, presence detectors and in thermal imaging cameras.
Abstract translation: 在用于检测热辐射的装置中，提供至少一个膜，其上安装有至少一个热检测器元件，用于将热辐射转换成电信号，以及至少一个用于承载膜的电路支架， 一个用于读出电信号的读出电路，检测器元件和读出电路由通过膜的电接点电连接在一起。 此外，提供了一种通过以下方法步骤制造该装置的方法：a）提供具有检测器元件的膜和至少一个电气通过连接和提供电路支撑件，以及b）将膜和 电路支撑件以检测器元件和读出电路通过穿过膜的电接触电连接在一起的方式。 生产活动优选在晶片级进行：功能化的硅衬底彼此堆叠，彼此牢固地结合，然后分成单个元件。 优选地，检测器元件包括热电检测元件。 该设备在运动检测器，存在检测器和热成像相机中可以应用。
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Patent Agency Ranking
56.发明授权公开(公告)号：US07375333B1
公开(公告)日：2008-05-20
申请号：US11494455
申请日：2006-07-28
Applicant: Nathan Bluzer , David C. Harms
Inventor： Nathan Bluzer , David C. Harms
IPC: G01J5/20
CPC classification number: G01J5/20 , G01J5/08 , G01J5/0837 , G01J5/24 , G01J2005/204
Abstract: A bolometer type ultra-sensitive silicon sensor pixel of a multi-pixel sensor wherein each pixel includes a detector stage, an intermediate stage, and a heat bath stage. The detector stage, the intermediate stage and a portion of the heat bath stage are generally co-planar and are interconnected by I-beam bridges so as to permit mutually co-planar rotation in response to stress and strain. Electrical coupling is improved between a micro-antenna and the detector stage by a two stage transformer assembly that couples the micro-antenna to the detector stage.
Abstract translation: 多像素传感器的辐照热计型超灵敏硅传感器像素，其中每个像素包括检测器级，中间级和热浴级。 检测器级，中间级和热浴级的一部分通常是共面的并且通过I型梁桥互连，以便响应于应力和应变来允许相互共平面的旋转。 通过将微型天线耦合到检测器级的两级变压器组件，微型天线和检测器级之间的电耦合得到改善。
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57.发明公开PROCEDE DE FABRICATION D'UN DETECTEUR DE RAYONNEMENT ELECTROMAGNETIQUE A MICRO-ENCAPSULATION 审中-公开制造微型包封电磁辐射探测器的方法
公开(公告)号：EP3196615A1
公开(公告)日：2017-07-26
申请号：EP17151542.2
申请日：2017-01-16
Inventor： VILAIN, Michel , FAVIER, Jérôme , YON, Jean-Jacques , FREY, Laurent
IPC: G01J5/20 , H01L27/146 , G01J5/08 , G01J5/04
CPC classification number: H01L27/14618 , G01J5/024 , G01J5/045 , G01J5/20 , G01J2005/204 , H01L27/1462 , H01L27/14629 , H01L27/14649 , H01L27/14685 , H01L27/14687
Abstract: Un procédé de fabrication d'un détecteur apte à détecter une gamme de longueurs d'onde [λ 8 ; λ 14 ] centrée sur une longueur d'onde λ 10 , le détecteur comprenant un dispositif de détection apte à détecter ladite gamme [λ 8 ; λ 14 ] et un boitier hermétique sous une pression prédéterminée dans laquelle est logé ledit dispositif, ledit boitier étant formé d'un substrat, de parois latérales solidaires du substrat et d'un capot supérieur solidaire des parois latérales et comprenant une partie au droit du dispositif qui est transparente dans ladite gamme [λ 8 ; λ 14 ], le procédé comprenant :
- la réalisation dudit dispositif sur le substrat, ladite réalisation comprenant le dépôt d'une couche sacrificielle noyant totalement ledit dispositif ;
- la réalisation du capot sur la couche sacrificielle, ledit capot étant constitué d'un empilement de première, seconde et troisième structures optiques transparentes dans ladite gamme [λ 8 ; λ 14 ], la seconde et la troisième structures optiques ayant des indices de réfraction équivalents à la longueur d'onde λ 10 respectivement supérieur ou égal à 3,4 et inférieur ou égal à 2,3 ;
- suite à la réalisation d'une partie du capot comprenant au moins la première structure optique, la réalisation d'un évent d'accès à la couche sacrificielle au travers de ladite partie du capot, suivie de l'application, au travers de l'évent, d'une gravure pour retirer en totalité la couche sacrificielle.
- l'épaisseur optique de la première structure optique est supérieure ou égale à λ 10 /10 ;
- l'indice de réfraction équivalent n e q 1 à la longueur d'onde λ 10 de la première structure optique est inférieur ou égal à 2,6 ; et
- la face de la première structure optique formée sur la couche sacrificielle, est inerte à la gravure mise en oeuvre pour retirer la couche sacrificielle.Abstract translation: 一种制造能够检测波长范围[λ8; λ14]以波长λ10为中心，所述检测器包括检测装置，所述检测装置能够检测所述范围[λ8; λ14]并在其中容纳所述装置的预定压力的密封外壳，所述由基板形成壳体，侧壁与所述衬底和一体顶盖侧壁和包括该装置的右侧的部分形成一体 在所述范围内是透明的[λ8; 所述方法包括：在所述衬底上制造所述器件，所述实施例包括沉积完全嵌入所述器件的牺牲层; - 实现牺牲层上的覆盖层，所述覆盖层由在所述范围内的第一，第二和第三透明光学结构的叠层组成[λ8; λ14]，折射率等于波长λ10的第二和第三光学结构分别大于或等于3.4且小于或等于2.3; - 在实现至少包括第一光学结构的覆盖物的一部分之后，实现通过覆盖物的所述部分到达牺牲层的进入端口，接着进行应用，通过 通气，蚀刻以完全去除牺牲层。 第一光学结构的光学厚度大于或等于λ10/ 10; 第一光学结构的波长λ10处的等效折射率neq1小于或等于2.6; 并且形成在牺牲层上的第一光学结构的表面对用于去除牺牲层的蚀刻是惰性的。
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58.发明授权TWO STAGE TRANSFORMER COUPLING FOR ULTRA-SENSITIVE BOLOMETER TYPE RADIATION SENSOR 有权STAGE变压器耦合的超敏感BOLOMETERARTIGE辐射传感器
公开(公告)号：EP2069735B1
公开(公告)日：2012-01-11
申请号：EP07874504.9
申请日：2007-07-24
Applicant: Northrop Grumman Systems Corporation
Inventor： BLUZER, Nathan , HARMS, David, C.
CPC classification number: G01J5/20 , G01J5/08 , G01J5/0837 , G01J5/24 , G01J2005/204
Abstract: A bolometer type ultra-sensitive silicon sensor including a detector stage (14), an intermediate stage (16), and a heat bath stage (17). The detector stage, the intermediate stage and a portion of the heat bath stage are generally co-planar and are interconnected by I-beam bridges so as to permit mutually co-planar rotation. Mechanical and electrical coupling is improved between a micro-antenna and the detector stage by a two stage transformer assembly (L1-L2, L5-L6) coupled between the micro-antenna and a detector element of the detector stage.
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59.发明公开
公开(公告)号：EP2076745A1
公开(公告)日：2009-07-08
申请号：EP07875007.2
申请日：2007-10-17
Applicant: Sensormatic Electronics Corporation , University of Central Florida Research Foundation, Inc.
Inventor： LIAN, Ming-Ren , COFFEY, Kevin R.
IPC: G01J5/20
CPC classification number: G01J5/20 , G01J2005/204
Abstract: A conduction structure for infrared microbolometer sensors and a method for sensing electromagnetic radiation may be provided. The microbolometer may include a first conductor layer (64) and a second conductor layer (68). The microbolometer further may include a bolometer layer (62) between the first conductor layer and the second conductor layer.
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公开(公告)号：EP2732253B1
公开(公告)日：2015-07-08
申请号：EP12742821.7
申请日：2012-07-13
Applicant: Centre National de la Recherche Scientifique (CNRS) , Office National d'Etudes et de Recherches Aérospatiales , Commissariat à l'Énergie Atomique et aux Énergies Alternatives
Inventor： KOECHLIN, Charlie , BOUCHON, Patrick , HAIDAR, Riad , PELOUARD, Jean-Luc , YON, Jean-Jacques , DESCHAMPS, Joël , PARDO, Fabrice , COLLIN, Stéphane
CPC classification number: G01J5/20 , G01J5/08 , G01J5/0853 , G01J2005/204 , H01L27/14685 , H04N5/33
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