公开(公告)号：US09487388B2

公开(公告)日：2016-11-08

申请号：US13923998

申请日：2013-06-21

Applicant: NextInput, Inc.

Inventor： Amnon Brosh

IPC: H01L21/306 ,  B81B3/00 ,  B81C1/00 ,  G01L1/04 ,  G01L1/18 ,  G01L5/00 ,  G01L5/16

CPC classification number: B81B3/0072 ,  B81B3/0021 ,  B81C1/00158 ,  B81C1/00666 ,  G01L1/044 ,  G01L1/18 ,  G01L5/0028 ,  G01L5/0057 ,  G01L5/162

Abstract: Described herein are ruggedized wafer level MEMS force dies composed of a platform and a silicon sensor. The silicon sensor employs multiple flexible sensing elements containing Piezoresistive strain gages and wire bonds.

Abstract translation: 这里描述的是由平台和硅传感器组成的坚固耐用的晶片级MEMS力模。 硅传感器采用多个灵活的感应元件，它们包含压阻应变片和引线键。

公开(公告)号：US20160069732A1

公开(公告)日：2016-03-10

申请号：US14848012

申请日：2015-09-08

Applicant: Fresenius Medical Care Holdings, Inc.

Inventor： Barry Neil Fulkerson ,  Joe Fazio ,  Alec Huang ,  Brian Thomas Kelly ,  Tam Nolan ,  Mark Smith

IPC: G01G17/04 ,  G01G19/14 ,  G01G3/15 ,  A61M1/36

CPC classification number: G01G17/04 ,  A61M1/3621 ,  A61M2205/3393 ,  B01D61/30 ,  G01G3/15 ,  G01G19/14 ,  G01L1/04 ,  G01L1/044 ,  G01L1/046

Abstract: A load suspension and weighing system for a removable reservoir unit of a portable dialysis machine includes a centrally located flexure assembly. The flexure assembly includes magnets and a number of flexure rings which allow for movement of the magnets about a fixed circuit board. Sensors in the circuit board sense changes in the magnetic field as the magnets move in relation to the circuit board. The magnetic field changes produce a voltage output which is used by a processor to generate weight calculations. The top of the flexure assembly is attached to the interior of the dialysis machine. The entirety of the reservoir unit is suspended by a first internal frame that is attached to the bottom of the flexure assembly. Having a single flexure assembly positioned above the reservoir unit provides more accurate weight measurements while also preventing damage to the assembly from water spillage.

Abstract translation: 用于便携式透析机的可移动储存器单元的负载悬挂和称重系统包括位于中心的挠曲组件。 挠曲组件包括磁体和允许磁体围绕固定电路板移动的多个挠性环。 当磁体相对于电路板移动时，电路板感应器中的传感器磁场的变化。 磁场变化产生电压输出，由处理器用于产生重量计算。 挠曲组件的顶部连接到透析机的内部。 储存器单元的整体由连接到挠曲组件的底部的第一内部框架悬挂。 设置在储存器单元上方的单个挠曲组件提供更精确的重量测量，同时还防止组件从水溢出中的损坏。

公开(公告)号：US08829367B2

公开(公告)日：2014-09-09

申请号：US13104566

申请日：2011-05-10

Applicant: Otto Kuhlmann ,  Tanja Mueck ,  Volker Relling ,  Gerald Petzold

Inventor： Otto Kuhlmann ,  Tanja Mueck ,  Volker Relling ,  Gerald Petzold

IPC: G01G3/14 ,  G01L1/22 ,  G01L1/04 ,  G01G23/00

CPC classification number: G01G23/002 ,  G01G3/1414 ,  G01L1/044

Abstract: Force plate (1) having a plate-shaped carrier (2) which, when arranged vertically, has an upper carrier section (3) at the top in the vertical direction and a lower carrier section (4) at the bottom in the vertical direction. A first end carrier section (5) is connected, on the one hand, to the upper carrier section (3) via a vertical rod (7) and, on the other hand, to the lower carrier section (4) via a horizontally oriented spring element (6). That end of the lower carrier section (4) which faces away from the first end carrier section (5) is connected to the upper carrier section (3) via a horizontal rod (8). A second end carrier section (15) connects the horizontal rod (8) to the lower carrier section (4) via a vertically arranged spring element (16).

Abstract translation: 具有板状载体（2）的力板（1），当垂直布置时，在垂直方向上具有上托架部分（3）和在垂直方向上的底部的下托架部分（4） 。 一方面，第一端部承载部分（5）通过竖直杆（7）连接到上部承载部分（3），另一方面通过水平定向连接到下部承载部分（4） 弹簧元件（6）。 背离第一端部承载部分（5）的下部承载部分（4）的端部经由水平杆（8）连接到上部承载部分（3）。 第二端部承载部分（15）通过垂直布置的弹簧元件（16）将水平杆（8）连接到下部承载部分（4）。

公开(公告)号：US20100219842A1

公开(公告)日：2010-09-02

申请号：US12694052

申请日：2010-01-26

Applicant: Gilbert P. Gianetti

Inventor： Gilbert P. Gianetti

IPC: G01R27/26

CPC classification number: G01R27/26 ,  G01D5/24 ,  G01D5/2417 ,  G01L1/044 ,  G01L1/144

Abstract: A detection circuit for detecting changes in capacitance. The detection circuit includes a tuned ratio circuit and an alternating current (AC) source AC-coupled to the tuned ratio circuit. The tuned ratio circuit includes first and second tuned circuits that are tuned to, or close, to the frequency of the AC source. Output circuitry is coupled between the two tuned circuits. During use as a transducer, an active capacitive transducer is inductively coupled to the first tuned circuit. Changes in the capacitance of the active capacitive transducer cause changes in the tuning of the first tuned circuit. The output circuitry generates an output signal that is a function of the difference between the tunings of the first and second tuned circuits.

Abstract translation: 用于检测电容变化的检测电路。 检测电路包括调谐比电路和交流耦合到调谐比电路的交流（AC）源。 调谐比电路包括调谐到或接近AC电源频率的第一和第二调谐电路。 输出电路耦合在两个调谐电路之间。 在用作换能器期间，有源电容换能器感应耦合到第一调谐电路。 有源电容式换能器的电容变化导致第一调谐电路的调谐变化。 输出电路产生作为第一和第二调谐电路的调谐之间的差异的函数的输出信号。

公开(公告)号：US07633603B2

公开(公告)日：2009-12-15

申请号：US12341729

申请日：2008-12-22

Applicant: Hiroto Sugahara

Inventor： Hiroto Sugahara

IPC: G01P3/36 ,  G01F1/00

CPC classification number: G01F1/28 ,  B41J2/175 ,  G01L1/044 ,  G01L1/24 ,  G01L1/26

Abstract: A flow velocity detector for detecting a flow velocity of a fluid flowing through a flow passage is provided, the flow velocity detector including a flow passage-forming section which defines the flow passage; a stress light-emitting section which is arranged at the flow passage-forming section to receive a stress having a magnitude depending on the flow velocity of the fluid and which emits a light of which amount corresponds to a change of the received stress; and a light-receiving sensor which receives the light emitted by the stress light-emitting section. The flow velocity of the fluid is detected based on an amount of the light received by the light-receiving sensor to generate a detection signal. Accordingly, the structure is simple and small-sized, and the flow velocity of the fluid can be detected at low cost.

Abstract translation: 提供了一种用于检测流过流路的流体的流速的流速检测器，所述流速检测器包括限定所述流路的流路形成部; 应力发光部，其布置在所述流路形成部处，以接收具有取决于流体的流速的大小的应力，并且发射与所述接收应力的变化相对应的光量的光; 以及受光传感器，其接收由应力发光部发出的光。 基于由光接收传感器接收的光的量来检测流体的流速，以产生检测信号。 因此，结构简单，体积小，可以低成本地检测流体的流速。

公开(公告)号：US07104140B2

公开(公告)日：2006-09-12

申请号：US11011198

申请日：2004-12-15

Applicant: Lichun Zou ,  Ken Kan Deng

Inventor： Lichun Zou ,  Ken Kan Deng

IPC: G01B7/16

CPC classification number: G01L1/044 ,  G01L1/16 ,  H01L41/1132

Abstract: A piezoelectric flexural sensing structure having increased sensitivity and decreased noise, without sacrifice of the sensor bandwidth. The structure is made up of a proof mass, a beam with a base and optionally having castellated bonding surfaces and two poled bonding mode PMN-PT crystal plates mounted on the beam.

Abstract translation: 一种具有增加灵敏度和降低噪声的压电弯曲感测结构，而不牺牲传感器带宽。 该结构由检测质量块，具有基座的梁和可选地具有雉形粘结表面以及安装在梁上的两个<011>极化粘合模式PMN-PT晶体板组成。

公开(公告)号：US20040139808A1

公开(公告)日：2004-07-22

申请号：US10755181

申请日：2004-01-09

Inventor： Christopher Guild Keller

IPC: G01L001/00 ,  G01L005/00

CPC classification number: G01L1/044

Abstract: The invention is a microfabricated silicon cantilever with a stiffness appropriate to resolve forces of interest in working with micro objects. Stiffnesses may range from about 10 piconewtons per micron of deflection, to about 1 millinewton per micron of deflection. There is a set of micro weights of appropriate masses that is used to calibrate the force gages. The weights are captive to a ring on a handle so that they are free to move, but will not get lost.

Abstract translation: 本发明是一种微制造的硅悬臂，具有适合于解决与微物体一起使用的感兴趣力的刚度。 刚度可以在每微米偏转约10piconewtons至每微米偏转约1毫牛顿的范围内。 有一组用于校准力量规的适当质量的微重量。 重量是手柄上的戒指，以便它们可以自由移动，但不会迷路。

公开(公告)号：US20040079175A1

公开(公告)日：2004-04-29

申请号：US10406773

申请日：2003-04-03

Inventor： Anton Dukart

IPC: G01L001/26

CPC classification number: G01L1/14 ,  B60N2/002 ,  B60R21/01516 ,  G01G7/02 ,  G01G19/4142 ,  G01L1/044

Abstract: A force measuring device for seat weight determination in a motor vehicle, comprising a taking up element which has at least two bearing points spaced from one another and arranged so that one of the bearing points is loadable with a force to be measured perpendicularly relative to a longitudinal axis of the taking up element, means forming a first recess in the taking up element in a region between at least two bearing points, a rod-shaped element which extends in the longitudinal axis of the taking up element and is not loaded by bending forces, the rod-shaped element having a free end which deviates from the longitudinal axis of the taking up element when a force to be measured acts on the taking up element, and a measuring unit for detecting the deviation of the free end of the rod-shaped element, the measuring unit having a magnet and a magnetic field-sensitive sensor, the magnet and the magnetic field-sensitive sensor being arranged immovably relative to one another and the magnet is arranged close at a distance to a ferromagnetic material so that the distance from the magnet to a ferromagnetic material changes under a loading with the force to be measured.

Abstract translation: 一种用于机动车辆中的座椅重量确定的力测量装置，包括具有彼此间隔开的至少两个轴承点的卷取元件，并且被布置成使得一个轴承点能够以相对于 拾取元件的纵向轴线，在至少两个支承点之间的区域中在卷取元件中形成第一凹部的装置，在吸收元件的纵向轴线上延伸并且不通过弯曲加载的杆状元件 所述棒状元件具有自由端，当待测量的作用力作用在所述卷取元件上时，所述自由端偏离所述卷取元件的纵向轴线;以及测量单元，用于检测所述杆的自由端的偏差 所述测量单元具有磁体和磁场敏感传感器，所述磁体和所述磁场敏感传感器相对于彼此不可移动地布置，并且所述磁体 t被布置成与铁磁材料相距一定距离，使得从磁体到铁磁材料的距离在被测量的力的负载下变化。

公开(公告)号：US20040025598A1

公开(公告)日：2004-02-12

申请号：US10634606

申请日：2003-08-05

Applicant: FESTO AG & CO.

Inventor： Karl-Heinz Forster ,  Frank J. Langro ,  Frank Latino ,  Josef Binder ,  Wolfgang Benecke ,  Thomas Starz ,  Oliver Ahrens

IPC: G01F001/28

CPC classification number: G01F1/6842 ,  F15B13/0814 ,  F15B13/0839 ,  F15B13/0853 ,  F15B13/0857 ,  F15B13/086 ,  G01F1/28 ,  G01F5/00 ,  G01F15/14 ,  G01F15/18 ,  G01L1/044 ,  G01L1/26 ,  G05D7/0652 ,  Y10T137/7761 ,  Y10T137/87885

Abstract: A circuit board, which includes one or more sensors, is integrated in a fluid control device, such as a valve manifold and a base plate. The fluid control device selectively directs a fluid used to control pneumatic or hydraulic equipment. The sensors are used to measure physical characteristics of the fluid, such as flow rate, pressure, and temperature. A flow sensor includes a paddle and a support member. The paddle is disposed at least partially in an orifice and is displaced in response to fluid flow. The support member positions the paddle in the orifice and includes a plurality of strain gauges. The strain gauges are disposed on only one side of the support member and are mechanically stressed in response to the paddle being displaced by the fluid flow.

Abstract translation: 包括一个或多个传感器的电路板集成在诸如阀歧管和基板的流体控制装置中。 流体控制装置选择性地引导用于控制气动或液压设备的流体。 传感器用于测量流体的物理特性，如流量，压力和温度。 流量传感器包括桨叶和支撑构件。 桨叶至少部分地设置在孔中并且响应于流体流动而移位。 支撑构件将桨定位在孔中并且包括多个应变计。 应变计设置在支撑构件的仅一侧上，并且响应于桨被流体流动而偏移而被机械地应力。

公开(公告)号：US06422077B1

公开(公告)日：2002-07-23

申请号：US09543992

申请日：2000-04-06

Applicant: Alan R. Krauss ,  Dieter M. Gruen ,  Michael J. Pellin ,  Orlando Auciello

Inventor： Alan R. Krauss ,  Dieter M. Gruen ,  Michael J. Pellin ,  Orlando Auciello

IPC: G01P1508

CPC classification number: G01H9/00 ,  B82Y35/00 ,  G01D5/30 ,  G01H11/06 ,  G01L1/005 ,  G01L1/044 ,  G01P15/0888 ,  G01P15/0894 ,  G01P15/093 ,  Y10S977/732 ,  Y10S977/932

Abstract: An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/N2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.

Abstract translation: 在一个高灵敏度的超小型传感器中，采用悬臂结构形成的超微晶金刚石（UNCD）元件用于在宽动态范围内测量加速度，冲击，振动和静压力。 悬臂UNCD元件可以与单个阳极组合使用，测量光学或电容测量。 在另一个实施例中，悬臂UNCD元件设置在两个阳极之间，其中DC电压施加到两个阳极。 通过施加到UNCD悬臂元件的小的AC调制电压，并且由于Fowler-Nordheim方程中施加的电压和阳极 - 阴极间隙距离的对称性，维持指定的阳极电压比V1 / N2的任何变化 电流比精确匹配UNCD悬臂元件的任何位移与平衡。 通过测量维持指定电流比所需的阳极电压比的变化，可以精确地确定UNCD悬臂的偏转。 通过适当地调制在UNCD悬臂与两个阳极之间施加的电压或极限电极，可以精确地独立测量压力，单轴加速度，振动和冲击。 本发明还考虑了用于制造用于传感器的悬臂UNCD结构的方法。