公开(公告)号：WO2015187803A1

公开(公告)日：2015-12-10

申请号：PCT/US2015/033940

申请日：2015-06-03

Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN

Inventor： OKWUDIRE, Chinedum E. ,  YOON, Deokkyun D.

IPC: H01L21/66 ,  H01L21/677 ,  H01L21/68 ,  H01L21/027

CPC classification number: F16M11/043 ,  F16M11/18 ,  G01N21/9501 ,  G01N2201/103 ,  G03F7/70758 ,  G03F7/70858 ,  G03F7/709 ,  H01L21/67259 ,  H01L21/68

Abstract: A magnet assisted stage system for scanning applications having a scanning table being moveable from a first position to a second position, a scanning actuator operably associated with the scanning table to move the scanning table along a scanning direction from the first position to the second position, and an actively variable magnetic spring system being operably augmented to the scanning table to exert a magnetic repulsion force upon the scanning table in the scanning direction.

Abstract translation: 一种用于扫描应用的磁体辅助平台系统，其具有可从第一位置移动到第二位置的扫描台;扫描致动器，其可操作地与所述扫描台相关联，以将所述扫描台沿着从所述第一位置到所述第二位置的扫描方向移动， 以及可操作地增加到扫描台以在扫描方向上对扫描台施加磁力排斥力的主动可变磁弹簧系统。

公开(公告)号：WO2010098179A1

公开(公告)日：2010-09-02

申请号：PCT/JP2010/051441

申请日：2010-02-02

Applicant: 株式会社日立ハイテクノロジーズ ,  岡 健次 ,  三友 健司 ,  米田 健一郎

Inventor： 岡　健次 ,  三友　健司 ,  米田　健一郎

IPC: G01N21/956 ,  H01L21/66

CPC classification number: G01N21/9501 ,  G01N21/93 ,  G01N2201/103

Abstract: 　照明光学系２により標準異物ウエハ１１０の表面に照明光を照射しつつ、その照射光により標準異物ウエハ１１０の表面を走査し、検出光学系３の検出器３１～３４により標準異物ウエハ１１０の表面からの散乱光を検出し、その散乱光の検出結果と予め定めた基準値とを用いて検出器３１～３４の光電子増倍管３３１～３３４の検出感度を補正するための補正パラメータＣｏｍｐを算出し、その補正パラメータＣｏｍｐを経時劣化パラメータＰ、光学的特性パラメータＯｐｔ、及びセンサ特性パラメータＬｒに分離して管理する。　これにより、検出感度の校正を容易に行うことができる。

Abstract translation: 用照明光扫描具有参考异物的晶片（110）的表面，同时借助照明光学系统（2）向照射光照射晶片（110）的表面，从 通过检测光学系统（3）中的检测器（31-34）检测晶片（110），用于调节检测器（31-34）的光电倍增管（331-334）的检测灵敏度的调整参数（Comp） 34）使用散射光的检测结果和预定的参考值进行计算，并且通过将调整参数分离为劣化参数（P），光学特性参数（Opt）和传感器来控制调整参数（Comp） 特征参数（Lr）。 因此，可以容易地校正检测灵敏度。

公开(公告)号：WO2010076874A1

公开(公告)日：2010-07-08

申请号：PCT/JP2009/071366

申请日：2009-12-16

Applicant: CANON KABUSHIKI KAISHA ,  OUCHI, Toshihiko ,  KASAI, Shintaro

Inventor： OUCHI, Toshihiko ,  KASAI, Shintaro

IPC: G01N21/35

CPC classification number: G01N21/3581 ,  G01N21/3563 ,  G01N21/8806 ,  G01N21/9505 ,  G01N2201/103

Abstract: In an examining apparatus or method, values of thickness and characteristic of an object, or distributions thereof can be simultaneously acquired. The examining apparatus includes a portion 9 for irradiating an object 2 with radiation, a portion 10 for detecting the radiation from the object, an acquiring portion 26, a storing portion 21 and a calculating portion 20. The acquiring portion acquires transmission time associated with detection time of radiation, and amplitude of the radiation. The storing portion beforehand stores relationship data between the transmission time and amplitude, and representative values of characteristic of the object. The calculating portion obtains values of thickness and characteristic of the object based on the transmission time, amplitude and relationship data.

Abstract translation: 在检查装置或方法中，可以同时获取对象的厚度和特征值或其分布。 检查装置包括用于对物体2照射辐射的部分9，用于检测来自物体的辐射的部分10，获取部分26，存储部分21和计算部分20.获取部分获取与检测相关的传输时间 辐射时间和辐射幅度。 存储部预先存储发送时间和振幅之间的关系数据以及对象的特征的代表值。 计算部分根据传输时间，幅度和关系数据，获得对象的厚度和特征值。

公开(公告)号：WO2006128321A1

公开(公告)日：2006-12-07

申请号：PCT/CN2005/000771

申请日：2005-06-02

Applicant: CAPITALBIO CORPORATION ,  TSINGHUA UNIVERSITY ,  WANG, Xianhua ,  XU, Hui ,  YE, Jianxin ,  SUN, Yelei ,  HUANG, Guoliang ,  CHENG, Jing

Inventor： WANG, Xianhua ,  XU, Hui ,  YE, Jianxin ,  SUN, Yelei ,  HUANG, Guoliang ,  CHENG, Jing

IPC: G01N21/64

CPC classification number: G01N21/6458 ,  G01N21/6428 ,  G01N21/6452 ,  G01N2021/6421 ,  G01N2201/10 ,  G01N2201/103

Abstract: The invention provides a laser microarray scanner for microarray scanning, comprising an optical system, a scanning platform, and a data processing system. During scanning, the optical system remains fixed, and the microarray placed on the scanning platform moves relative to the optical system. The microarray scanner disclosed herein has high scanning speed, high sensitivity, high resolution, and high signal-to-noise ratio, thus is ideal for use in microarray scanning

Abstract translation: 本发明提供一种用于微阵列扫描的激光微阵列扫描器，包括光学系统，扫描平台和数据处理系统。 在扫描期间，光学系统保持固定，并且放置在扫描平台上的微阵列相对于光学系统移动。 本文公开的微阵列扫描器具有高扫描速度，高灵敏度，高分辨率和高信噪比，因此是理想的用于微阵列扫描

公开(公告)号：EP2895847B1

公开(公告)日：2018-03-14

申请号：EP13837066.3

申请日：2013-08-23

Applicant: Luoyang Landglass Technology Co., Ltd.

Inventor： LI, Yanbing ,  LIU, Bin

IPC: G01N21/88 ,  G01N21/958 ,  G01B11/00 ,  G01N21/896 ,  G01B11/25 ,  G01B11/16 ,  G01B11/06 ,  C03B35/00

CPC classification number: G01N21/958 ,  C03B35/00 ,  G01B11/0691 ,  G01B11/167 ,  G01B11/2518 ,  G01B11/2522 ,  G01N21/49 ,  G01N21/8806 ,  G01N21/896 ,  G01N2201/06113 ,  G01N2201/103 ,  H04N7/00

Abstract: A detection system based on modulation of line structured laser image of glass includes a processing section, a control system, and roller conveying mechanisms. Detection mechanism provided over entrance of the processing section includes shell and camera with laser which emits beam on the surface of the glass in the gap between sliding rollers. Focal plane of the camera corresponds to the beam irradiation surface, and signal output terminal of the camera is connected with the control system in such a way that when glass passes the detection area, laser irradiates the glass surface and the line structured laser is modulated based on the glass to form laser modulation image with distribution of light and shade, staggered movement direction, or distorted laser lines. The camera transmits the captured glass information and parameters to the control system.

公开(公告)号：EP3256856A1

公开(公告)日：2017-12-20

申请号：EP15871090.5

申请日：2015-12-17

Applicant: Singulex, Inc.

Inventor： LIVINGSTON, Richard ,  GILBERT, Michelle ,  FELBERG, Jacqueline ,  BISHOP, Jeffrey

IPC: G01N33/58 ,  G01N33/53 ,  G01N21/62

CPC classification number: G01N21/6428 ,  G01J3/4406 ,  G01N21/645 ,  G01N21/6452 ,  G01N33/5302 ,  G01N33/536 ,  G01N33/58 ,  G01N33/6845 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2021/6441 ,  G01N2201/0612 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/105

Abstract: Analyzers and analyzer systems that include an analyzer for determining multiple label species, methods of using the analyzer and analyzer systems to analyze samples, are disclosed herein. The analyzer includes one or more sources of electromagnetic radiation to provide electromagnetic radiation at wavelengths within the excitation bands of one or more fluorophore species to an interrogation space that is translated through the sample to detect the presence or absence of molecules of different target analytes. The analyzer may also include one or more detectors configured to detect electromagnetic radiation emitted from the one or more fluorophore species. The analyzer for determining multiple target molecule species provided herein is useful for diagnostics because the concentration of multiple species of target molecules may be determined in a single sample and with a single system.

公开(公告)号：EP1815234B1

公开(公告)日：2017-04-12

申请号：EP05851964.6

申请日：2005-11-21

Applicant: Honeywell International Inc.

Inventor： BESELT, Ronald ,  DOS SANTOS, Ulysse, S. ,  HARJUA, John, A. ,  HARAN, Frank, M.

IPC: G01N21/89 ,  G01N21/31 ,  G01N21/86

CPC classification number: G01N21/89 ,  G01N21/3554 ,  G01N21/3559 ,  G01N21/8806 ,  G01N2201/103

公开(公告)号：EP2829901B1

公开(公告)日：2016-12-14

申请号：EP13763578.5

申请日：2013-02-20

Applicant: Sharp Kabushiki Kaisha

Inventor： WATANABE, Yukio

IPC: G02B21/00 ,  G01N21/64 ,  G02B21/02 ,  G02B19/00

CPC classification number: G01N21/645 ,  G01N21/6456 ,  G01N21/6486 ,  G01N2021/6471 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/10 ,  G01N2201/103 ,  G01N2201/105 ,  G02B19/0028 ,  G02B19/0076 ,  G02B19/008 ,  G02B19/0085 ,  G02B21/0076 ,  G02B2207/113

公开(公告)号：EP3052924A1

公开(公告)日：2016-08-10

申请号：EP14777135.6

申请日：2014-09-30

Applicant: Renishaw PLC

Inventor： MASON, Thomas Anthony

IPC: G01N21/65 ,  G01J3/44 ,  G01J3/28

CPC classification number: G01N21/65 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0248 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/44 ,  G01J2003/2826 ,  G01N2201/025 ,  G01N2201/06113 ,  G01N2201/103 ,  G01N2201/11 ,  G01N2201/117 ,  G01N2201/122

Abstract: This invention concerns spectroscopy apparatus comprising a light source (101) arranged to generate a light profile (110) on a sample, a photodetector (103) having at least one photodetector element (104) for detecting characteristic light generated from interaction of the sample with light from the light source (101), a support (109) for supporting the sample, the support (109) movable relative to the light profile (110), and a processing unit (121). The processing unit (121) is arranged to associate a spectral value recorded by the photodetector element (104) at a particular time with a point on the sample predicted to have generated the characteristic light recorded by the photodetector element (104) at the particular time based on relative motion anticipated to have occurred between the support (109) and the light profile (110).

公开(公告)号：EP2378273A3

公开(公告)日：2012-03-14

申请号：EP10182395.3

申请日：2004-12-03

Applicant: Candela Instruments

Inventor： Meeks, Steven W.

IPC: G01N21/21 ,  G01N21/47 ,  G01N21/95 ,  H01L21/66

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for measuring a defect on a surface of an object (4501), comprising:
directing a first light beam in a first plane of incidence toward a first position on the object (4501);
directing a second light beam in a second plane of incidence toward a second position on the object (4501), wherein the angle between the first plane of incidence and the second plane of incidence is zero and wherein the first light beam is directed in a circumferential direction (4504) and the second light beam is directed in a radial direction of said object (4501);
detecting a first scattered light beam; and
detecting a second scattered light beam; wherein the first scattered light beam comprises scattered light intensity from the first position and the second scattered light beam comprises scattered light intensity from the second position, the method further comprising a step of comparing the first scattered light beam and the second scattered light beam to determine a first aspect ratio of a defect on the surface of the object (4501).