GERMANIUM-SILICON ELECTROABSORPTION MODULATOR
    51.
    发明公开
    GERMANIUM-SILICON ELECTROABSORPTION MODULATOR 审中-公开
    锗硅电吸附调制器

    公开(公告)号:EP3163359A1

    公开(公告)日:2017-05-03

    申请号:EP14898811.6

    申请日:2014-07-31

    CPC classification number: G02F1/025 G02F2001/0157 G02F2201/063 H01L27/15

    Abstract: An electro-absorption modulator (100) is provided, including: a substrate layer (110), including a silicon substrate (112) and an oxide layer (114) disposed on the silicon substrate; top-layer silicon (120), formed on the oxide layer (114), where a waveguide layer (122) is formed on the top-layer silicon (120); a doping layer, including a first doping panel (132) and a second doping panel (133), where a first-type light doping area (134) is formed on the first doping panel (132), a second-type light doping area (135) is formed on the second doping panel (133), and the first-type light doping area (134), the waveguide layer (122), and the second-type light doping area (135) form a PIN junction; and a modulation layer (140), disposed on the waveguide layer (122) and connected in parallel to the PIN junction. For an incident beam with a specific wavelength, when a modulating electrical signal is reversely applied to the PIN junction, a light absorption coefficient of the modulation layer (140) for the beam changes with the modulating electrical signal, and after the beam passes through a modulation area, optical power of the beam also correspondingly changes, so that electro-optic modulation is implemented for the beam.

    Abstract translation: 提供一种电吸收调制器(100),包括:衬底层(110),其包括硅衬底(112)和设置在硅衬底上的氧化物层(114) 形成在所述氧化物层上的顶层硅层,其中在所述顶层硅层上形成有波导层; 包括第一掺杂面板132和第二掺杂面板133的掺杂层,其中在所述第一掺杂面板132上形成第一类型的轻掺杂区域134, (135)形成在所述第二掺杂面板(133)上,所述第一类型轻掺杂区(134),所述波导层(122)和所述第二类型轻掺杂区(135)形成PIN结; 和设置在波导层(122)上并与PIN结并联连接的调制层(140)。 对于具有特定波长的入射光束,当调制电信号反向施加到PIN结时,用于该光束的调制层(140)的光吸收系数随着调制电信号而改变,并且在光束穿过 调制区域,光束的光功率也相应地发生变化,从而对光束进行电光调制。

    INJEKTIONSMODULATOR
    60.
    发明公开
    INJEKTIONSMODULATOR 审中-公开

    公开(公告)号:EP3198750A1

    公开(公告)日:2017-08-02

    申请号:EP15798323.0

    申请日:2015-09-21

    Abstract: The invention relates inter alia to an injection modulator (10) for modulation of optical radiation (P), comprising an optical waveguide (20) and a diode structure (30), which has at least two p-doped semiconductor portions (110), at least two n-doped semiconductor portions (210) and at least one lightly doped or undoped intermediate portion (300) between the p-doped and n-doped semiconductor portions (110, 210). The p-doped semiconductor portions (110) - when viewed in the longitudinal direction (L) of the waveguide (20) - are offset with respect to the n-doped semiconductor portions (210) and the diode structure (30) is arranged in a resonance-free portion of the waveguide (20), in which - apart from waveguide attenuation - the radiation intensity of the radiation (P) guided in the waveguide (20) is constant. According to the invention, the p-doped semiconductor portions (110) lie on one side of the waveguide (20) - when viewed in the longitudinal direction (L) of the waveguide (20) and with respect to the waveguide center - , the n-doped semiconductor portions (210) lie on the other side of the waveguide (20) and the intermediate portion (300) lies in the region of the waveguide center, each semiconductor portion (110, 210) extends transversely with respect to the waveguide longitudinal direction (L) in the direction of the waveguide center of the waveguide (20) and no p-doped semiconductor portion (110) - when viewed in the longitudinal direction (L) of the waveguide (20) - overlaps any n-doped semiconductor portion (210).

    Abstract translation: 本发明特别涉及用于调制光辐射(P)的注入调制器(10),其包括光波导(20)和具有至少两个p掺杂半导体部分(110)的二极管结构(30) 至少两个n掺杂半导体部分(210)以及p掺杂和n掺杂半导体部分(110,210)之间的至少一个轻掺杂或未掺杂中间部分(300)。 当沿波导(20)的纵向(L)观察时,p掺杂半导体部分(110)相对于n掺杂半导体部分(210)偏移,并且二极管结构(30)布置在 (20)的无谐振部分,其中除了波导衰减之外,在波导(20)中引导的辐射(P)的辐射强度是恒定的。 根据本发明,当沿波导(20)的纵向(L)和相对于波导中心观察时,p掺杂的半导体部分(110)位于波导(20)的一侧上 - n型掺杂的半导体部分(210)位于波导(20)的另一侧,并且中间部分(300)位于波导中心的区域中,每个半导体部分(110,210)相对于波导 (20)的波导中心方向上的纵向方向(L),并且当沿波导(20)的纵向方向(L)观察时,没有p掺杂半导体部分(110)与任何n掺杂 半导体部分(210)。

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