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公开(公告)号：JP2011222184A
公开(公告)日：2011-11-04
申请号：JP2010087813
申请日：2010-04-06
Inventor： KUWABARA HAJIME
IPC: H01J65/08 , H01L21/027 , H05G2/00
Abstract: PROBLEM TO BE SOLVED: To provide a plasma light source and a plasma light generating method that achieve higher output of EUV light by substantially shortening an emission cooling time of excitation level at which EUV light in an effective wavelength region (nearby 13.5 nm) is emitted.SOLUTION: Plasma 8 is confined in an axial direction by supplying a plasma medium 6 having a light emission line nearby 13.5 nm and an additive 7 having a light emission line nearby 13.5 nm and also having a shorter emission cooling time than the plasma medium to space between a pair of coaxial electrodes 11 and generating a tubular discharge 2 in between the pair of coaxial electrodes, and resonance energy transfer is caused in between ions of the plasma medium 6 excited in the plasma 8 and ions of the additive 7 which is not excited, thereby emitting EUV light nearby 13.5 nm from both the plasma medium 6 and the additive 7.
Abstract translation: 解决的问题：提供一种等离子体光源和等离子体光产生方法，其通过基本上缩短有效波长区域（13.5nm附近的EUV光）的激发等级的发射冷却时间来实现更高的EUV光输出 ）被发射。 解决方案：通过提供具有13.5nm附近的发光线的等离子体介质6和具有13.5nm附近的发光线的添加剂7，等离子体8被限制在轴向方向上，并且具有比等离子体更短的发射冷却时间 在一对同轴电极11之间的中间到空间，并且在一对同轴电极之间产生管状放电2，并且在等离子体8中激发的等离子体介质6的离子和添加剂7的离子之间引起共振能量转移， 不激发，从而从等离子体介质6和添加剂7发射13.5V的EUV光。版权所有（C）2012，JPO＆INPIT
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公开(公告)号：JP3908247B2
公开(公告)日：2007-04-25
申请号：JP2004342116
申请日：2004-11-26
Applicant: 三星コーニング株式会社
IPC: G02F1/13357 , H01J61/30 , F21S2/00 , F21Y103/00 , G02F1/133 , G02F1/1335 , H01J1/62 , H01J9/02 , H01J9/24 , H01J9/395 , H01J63/04 , H01J65/00 , H01J65/04 , H01J65/08
CPC classification number: G02F1/133604 , H01J9/247 , H01J61/305 , H01J65/046
Abstract: A surface light source device includes a light source body, a partition member, an isolating member and a voltage applying part. The light source body has an internal space into which discharge gas is injected. The partition wall divides the internal space into discharge spaces. The partition wall has a connection hole that connects the discharge spaces with each other. The isolating member is disposed such that the isolating member corresponds to the connection hole. The isolating member seals the connection hole to isolate the discharge spaces from each other. The voltage applying part induces discharge of the discharge gas in the discharge spaces. Thus, current drift is prevented.
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公开(公告)号：JP2006521539A
公开(公告)日：2006-09-21
申请号：JP2006500229
申请日：2004-01-22
Applicant: ラックス バイオテクノロジー リミテッド
Inventor： ヒッキー，パトリック，コリン
IPC: G01J1/08 , C09K20060101 , C09K11/04 , F21K2/00 , F21V9/08 , F21Y111/00 , G21H3/02 , H01J65/08
Abstract: 本発明は、発光性デバイスに係わる。 発光性デバイス１は、気体トリチウム光源（ＧＴＬＳ）３を備える。 ＧＴＬＳ３は、外部容器内に配置可能な容器２内に保持される。 光出力を所定レベルに調整するために、減光フィルタ等のフィルタを使用してもよい。 このデバイスは、照度計等の、光学出力を測定する装置を較正するために使用することができる。
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Patent Agency Ranking
公开(公告)号：JPS5438795A
公开(公告)日：1979-03-23
申请号：JP10509177
申请日：1977-09-01
Applicant: SUWA SEIKOSHA KK
Inventor： KODAIRA TOSHIMOTO
Abstract: PURPOSE:To even the brightness of lighting and achieve the reduction in the thickness of watches by using a tritium lamp as a glass plate constituting the digital display panel.
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公开(公告)号：JPS5422968A
公开(公告)日：1979-02-21
申请号：JP8679377
申请日：1977-07-20
Applicant: SUWA SEIKOSHA KK
Inventor： OGUCHI KOUICHI
Abstract: PURPOSE:To simplify the structure, perform mass production and onesided light generation and increase the quantity of generated light, by filling tritium gas in a cavity defined by a metal plate and a transparent insulator plate or a half mirror plate.
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公开(公告)号：JPS5418698A
公开(公告)日：1979-02-10
申请号：JP8384377
申请日：1977-07-13
Applicant: SUWA SEIKOSHA KK
Inventor： KAWAMURA KIICHI
IPC: H01J65/08 , G02F1/13 , G02F1/1335 , G09F9/00
Abstract: PURPOSE:To increase the display capacity at night or in a dark place for the display unit which uses the nematic liquid crystal, by coating the fluorescent paint or a mixture of the fluorescent paint and the radioactive material to part of the back of one polarizing plate.
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公开(公告)号：JPS53101997A
公开(公告)日：1978-09-05
申请号：JP1638278
申请日：1978-02-15
Applicant: SIEMENS AG
Inventor： GIYUNTAA BAUERU , WARUDEMAARU GUREIBERU , HANSU KURIYUUGAA , AROISU SHIYAUERU
Abstract: A display device for representation of a bright image on a background which device has a light valve comprising a liquid crystal cell having a medium which can be switched zone-wise between at least two optical states and a light trap or body which consists of a material having an index of refraction greater than 1, contains a fluorescent material, and is provided with an outlet window for each of the switchable zones characterized by means coacting with the switchable medium to control the passage of the light through the device so that in a rest or inactive state of the medium, the medium and means allow the passage of the excitation light for the fluorescent particles and the passage of the fluorescent light therefrom and in an "on" or activated state of the medium, the means and medium are impermeable at least to the fluorescent light so that each of the switchable zones of the medium is placed in an "on" state only when it belongs to the background of the image. The means may be a pleochroic dye operating with a single polarizer or a pair of cross polarizers, which cooperate with the material of the liquid crystal which forms a twisted cell.
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公开(公告)号：EP3574253B1
公开(公告)日：2020-12-02
申请号：EP18700401.5
申请日：2018-01-09
Applicant: smolsys AG
Inventor： BURKHALTER, Patrick, P. , SCHNEIDER, Sandro, M., O., L.
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