公开(公告)号：GB8821643D0

公开(公告)日：1988-10-12

申请号：GB8821643

申请日：1988-09-13

Applicant: HOLTRONIC TECHNOLOGIES LTD

公开(公告)号：EP0593124A2

公开(公告)日：1994-04-20

申请号：EP93202866.5

申请日：1993-10-08

Applicant: HOLTRONIC TECHNOLOGIES LTD.

Inventor： Clube, Francis Stace Murray

IPC: G03H1/00 ,  G03F7/00

CPC classification number: G03H1/00 ,  G03F7/001 ,  G03F7/70075

Abstract: A method for the manufacture of TIR holograms includes the division of an input laser beam into an object beam (15) and a reference beam (16), the direction of the beams to a holographic recording layer so that the object beam is incident on a surface of the holographic recording layer (8) following transmission through an object mask (11), so that the reference beam is incident on the other surface of the holographic recording layer at an angle such that following passage through the holographic recording layer it is totally internally reflected back into the holographic recording layer and so that the two beams are superposed at the holographic recording layer, and the displacement of the input laser beam causing the object and reference beams to traverse together the holographic recording layer. The method is especially useful for obtaining a high uniformity of exposure of the holographic recording layer.

Abstract translation: 一种用于制造TIR全息图的方法包括将输入激光束分成物体光束和参考光束，将光束的方向分解成全息记录层，使得物体光束入射到全息记录层的表面上 在通过物体掩模的透射之后，使得参考光束以一定的角度入射到全息记录层的另一个表面上，使得在通过全息记录层之后，其全部内部反射回到全息记录层中， 两个光束叠加在全息记录层上，并使输入激光束的位移使物体和参考光束一起遍历全息记录层。 该方法对于获得全息记录层的高均匀度的曝光特别有用。

公开(公告)号：EP0627666A1

公开(公告)日：1994-12-07

申请号：EP94107890.9

申请日：1994-05-21

Applicant: HOLTRONIC TECHNOLOGIES LTD.

Inventor： Clube, Francis Stace Murray

IPC: G03F7/20 ,  G03H1/00

CPC classification number: G03F7/70075 ,  G03F7/70358 ,  G03F7/70791 ,  G03H1/00 ,  G03H1/20

Abstract: A method is disclosed for changing the scale of a pattern printed from a total internal reflection hologram (9) into a photosensitive layer (13) that includes reconstructing an image from the total internal reflection hologram by illuminating said total internal reflection hologram with a scanning beam (17) and moving at least one of the hologram and photosensitive layer such that the magnitude of movement of the hologram relative to the photosensitive layer is equal to that of the scanning beam multiplied by the change of the scale required and also such that if the change of scale is a magnification the direction of the movement of the hologram relative to the photosensitive layer is the same as that of the scanning beam whereas if the change of scale is a compression then the direction of the movement of the hologram relative to the photosensitive layer is opposite to that of the scanning beam, and optionally comprising also introducing convergence or divergence into the scanning beam so that the image locally reconstructed from the TIR hologram possesses the change in the scale.

Abstract translation: 一种方法是圆盘游离缺失用于改变从一个全内反射全息图（9）的印刷图案的规模成的感光层（13）做了包括通过重建从全内反射全息图的图像照射所述全内反射全息图的扫描光束 （17）和移动检测的全息图和感光层中的至少一个并相对于感光层的全息图的运动的大小等于做了扫描由比例的变化波束乘以所需，因此搜索如果DID的 规模的变化是一个放大率相对于感光层的全息图的移动方向是相同的所做的扫描光束的，而如果规模的变化是一个压缩然后相对于全息图的向感光的运动的方向 层是相对扫描光束做的，并且任选地包含这样引入会聚或发散到扫描是 在这样做从TIR全息当地重建的图像具有的规模变化。

公开(公告)号：EP0560310A3

公开(公告)日：1994-07-27

申请号：EP93103807.9

申请日：1993-03-10

Applicant: HOLTRONIC TECHNOLOGIES LTD.

Inventor： Clube, Francis Stace Murray

IPC: G03H1/26 ,  G03F7/20 ,  G03H1/00

CPC classification number: G03F7/70425 ,  G03F7/201 ,  G03F7/70475 ,  G03H1/00 ,  G03H1/26

Abstract: In the manufacture of an array total internal reflection hologram for printing a pattern of high-quality microfeatures over a large area, a mask (13) defining just a part of the pattern is used to record an array of sub-holograms, the holographic recording medium (10) or the mask being moved with respect to each other subsequent to the recordal of each sub-hologram, thereby building up a hologram of the complete pattern to be printed.

公开(公告)号：EP0561302A1

公开(公告)日：1993-09-22

申请号：EP93104078.6

申请日：1993-03-12

Applicant: HOLTRONIC TECHNOLOGIES LTD.

Inventor： Omar, Basil Arthur, c/o Holtronic Technologies Ltd

IPC: G03F9/00

CPC classification number: G03F9/70 ,  G03H1/0408

Abstract: A method for forming alignment marks and a total internal reflection hologram in a holographic recording layer (14) for a lithographic process such that the alignment marks are readily detectable by an alignment system, including defining alignment marks (10) in a mask (11), said mask also defining the pattern (12) to be reconstructed from said TIR hologram, locating said holographic recording layer and said mask in a TIR hologram recording system, forming a TIR hologram of the mask pattern in the holographic recording layer and transferring the alignment marks in the mask into the holographic recording layer by illuminating the mask with an object beam (18); wherein the features of the alignment marks in the mask are of sufficient size that the alignment marks recorded in the holographic recording layer are well-defined regions of different refractive index and/or layer thickness.

Abstract translation: 一种在用于光刻工艺的全息记录层（14）中形成对准标记和全内反射全息图的方法，使得对准标记易于通过对准系统检测，包括在掩模（11）中限定对准标记（10） 所述掩模还限定从所述TIR全息图重建的图案（12），将所述全息记录层和所述掩模定位在TIR全息图记录系统中，在全息记录层中形成掩模图案的TIR全息图并传输对准 通过用物体光束（18）照射掩模将掩模中的标记记录到全息记录层中; 其中掩模中的对准标记的特征具有足够的尺寸，使得记录在全息记录层中的对准标记是不同折射率和/或层厚度的明确区域。

公开(公告)号：EP0560310A2

公开(公告)日：1993-09-15

申请号：EP93103807.9

申请日：1993-03-10

Applicant: HOLTRONIC TECHNOLOGIES LTD.

Inventor： Clube, Francis Stace Murray

IPC: G03H1/26 ,  G03F7/20 ,  G03H1/00

CPC classification number: G03F7/70425 ,  G03F7/201 ,  G03F7/70475 ,  G03H1/00 ,  G03H1/26

Abstract: In the manufacture of an array total internal reflection hologram for printing a pattern of high-quality microfeatures over a large area, a mask (13) defining just a part of the pattern is used to record an array of sub-holograms, the holographic recording medium (10) or the mask being moved with respect to each other subsequent to the recordal of each sub-hologram, thereby building up a hologram of the complete pattern to be printed.

Abstract translation: 在制造用于在大面积上印刷高质量微特征图案的阵列全内反射全息图时，仅使用该图案的一部分的掩模用于记录子全息图阵列，全息记录介质或 掩模在每个子全息图的记录之后相对于彼此移动，从而构成要印刷的完整图案的全息图。

公开(公告)号：EP0561302B1

公开(公告)日：1998-11-18

申请号：EP93104078.6

申请日：1993-03-12

Applicant: HOLTRONIC TECHNOLOGIES LTD.

Inventor： Omar, Basil Arthur, c/o Holtronic Technologies Ltd

IPC: G03F9/00

CPC classification number: G03F9/70 ,  G03H1/0408

公开(公告)号：EP0560310B1

公开(公告)日：1998-06-10

申请号：EP93103807.9

申请日：1993-03-10

Applicant: HOLTRONIC TECHNOLOGIES LTD.

Inventor： Clube, Francis Stace Murray

IPC: G03H1/26 ,  G03F7/20 ,  G03H1/00

CPC classification number: G03F7/70425 ,  G03F7/201 ,  G03F7/70475 ,  G03H1/00 ,  G03H1/26

公开(公告)号：EP0593124A3

公开(公告)日：1994-08-17

申请号：EP93202866.5

申请日：1993-10-08

Applicant: HOLTRONIC TECHNOLOGIES LTD.

Inventor： Clube, Francis Stace Murray

IPC: G03H1/00 ,  G03F7/00

CPC classification number: G03H1/00 ,  G03F7/001 ,  G03F7/70075

Abstract: A method for the manufacture of TIR holograms includes the division of an input laser beam into an object beam (15) and a reference beam (16), the direction of the beams to a holographic recording layer so that the object beam is incident on a surface of the holographic recording layer (8) following transmission through an object mask (11), so that the reference beam is incident on the other surface of the holographic recording layer at an angle such that following passage through the holographic recording layer it is totally internally reflected back into the holographic recording layer and so that the two beams are superposed at the holographic recording layer, and the displacement of the input laser beam causing the object and reference beams to traverse together the holographic recording layer. The method is especially useful for obtaining a high uniformity of exposure of the holographic recording layer.