公开(公告)号：JPH03139651A

公开(公告)日：1991-06-13

申请号：JP26824290

申请日：1990-10-04

Applicant: HOLTRONIC TECHNOLOGIES LTD

Inventor： RENE DANDORIKEE ,  MASUU AMIDEI ,  JIYON EDOWAADO BURUUKU

IPC: G01B9/021 ,  G01N21/88 ,  G01N21/956 ,  G02B7/28 ,  G03F7/20 ,  G03F9/00 ,  G03H1/00 ,  H01L21/027

Abstract: PURPOSE: To optically detect a relative position between hologram and a recording medium by making a light beam advance straight so as to be made incident practically at the right angle on a prism and the surface of the hologram recorded beforehand on a first recording medium. CONSTITUTION: The light beam led to the prism 22 and made incident practically at the right angle on the surface of a first substrate 16 provided with the hologram recorded beforehand on the first recording medium is partially reflected on the boundary surface of the hologram and air and a part passed through reaches a second recording medium and a second substrate 30 and is reflected. The two reflected beams interfere with each other and return along an incident path. Then, the interfering beams are resolved by an interference technique or a diffraction technique so as to obtain signals corresponding to a distance between reflection surfaces. Thus, the distance between a hologram surface and the recording medium is optically detected.

公开(公告)号：JPH09119812A

公开(公告)日：1997-05-06

申请号：JP14411296

申请日：1996-06-06

Applicant: HOLTRONIC TECHNOLOGIES LTD

Inventor： RUNE DANRIKEERU ,  YURUBA SHIYUNERU ,  SAIMON GUREI

IPC: G01B11/06 ,  G01B11/14 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To determine the refractive index and thickness of a layer accurately and simultaneously while avoiding measurement error of distance by providing a collimate means, a beam converging means, means for introducing the reflected beam toward a diffraction grating, an array for detecting the reflected and scattered beam, etc. SOLUTION: Light beam from a white light source 11 is collimated through a collimate lens 13 and condensed through a lens 14. The light beam passes through a prism 23 and introduced to the test surface 25 of a substrate 27. A beam splitter 19 introduces the reflected light beam to a diffraction grating 17 where the reflected light beam is scattered. The scattered light beam is focused through a lens onto a light detection array 21 comprising a large number of pixels. The light detection array 21 delivers a signal through an electronic control unit 31 to a computer 33 where the distance, refractive index, thickness of layer, contribution in phase from multilayer structure are calculated from the intensity distribution of light.

公开(公告)号：JPS63215902A

公开(公告)日：1988-09-08

申请号：JP3168088

申请日：1988-02-10

Applicant: HOLTRONIC TECHNOLOGIES LTD

Inventor： NIKORASU JIYOON FUIRITSUPUSU

IPC: G01B9/021 ,  G01B11/00 ,  G03H1/00 ,  G03H1/04

公开(公告)号：JPH06308872A

公开(公告)日：1994-11-04

申请号：JP25701893

申请日：1993-10-14

Applicant: HOLTRONIC TECHNOLOGIES LTD

Inventor： FURANSHISU SUTEISU MAARII KURA

IPC: G03H1/04 ,  G03F7/00 ,  G03F7/20 ,  G03H1/00 ,  G06K7/12

Abstract: PURPOSE: To provide a method capable of recording a total internal reflection hologram with high exposure uniformity over a wide range. CONSTITUTION: An input laser beam 24 is divided into an object beam 15 and a reference beam 16 (a). These beams 15, 16 are advanced to a holographic recoding layer 8, so that the beam 15 is made incident upon one surface of the layer 8 after passing an object mask 11, the beam 16 is totally inter-reflected after passing the layer 8 and made incident upon the other surface of the layer 8 at an incident angle upon the layer 8 and both the beams 15, 16 are superposed to each other in the layer 8 (b). The width of at least one of the beams 15, 16 is expanded or reduced so that the superposed state is held when these beams 15, 16 cross the layer 8 (c). Then the beam 24 is moved so that the beams 15, 16 cross the layer 8 (d).

公开(公告)号：JPH056853A

公开(公告)日：1993-01-14

申请号：JP26381591

申请日：1991-10-11

Applicant: HOLTRONIC TECHNOLOGIES LTD

Inventor： FURANSHISU SUTEISU MAARII KURA

IPC: G03F1/08 ,  G03F9/00 ,  G03H1/00 ,  H01L21/027

Abstract: PURPOSE: To provide an optimum signal which is exactly corresponding to the lateral position of mask on a recording plane by practically moving in parallel a silicon wafer, according to the measured values of two detectors processed by a microprocessor for preparing an arrange signal corresponding to a piezoelectric device. CONSTITUTION: A wafer is quantitatively moved little by little by a piezoelectric device 26 or a stepping motor in a direction practically parallel to a hologram lattice direction within the range smaller than a lattice interval and for achieving resist adjustment in that direction. After the end of a movement, it is read by detectors 22 and 24 and stored in the memory of a microprocessor 28. When two lattices are properly put in order, because of symmetricity, the strength of two dimensions of two detectors becomes equal. Therefore, two read values stored in the microprocessor 28 are substracted, and an arranging position is determined. Thus, the lateral position of mask on the recording plane can be provided exactly.

公开(公告)号：JPS63301986A

公开(公告)日：1988-12-08

申请号：JP12481588

申请日：1988-05-20

Applicant: HOLTRONIC TECHNOLOGIES LTD

Inventor： DONARUDO UIRIAMU TOMUKINSU ,  ROORENSU HOODEN

IPC: G03H1/22 ,  G02B5/32 ,  G03H1/32

公开(公告)号：WO1997045861A1

公开(公告)日：1997-12-04

申请号：PCT/EP1997002778

申请日：1997-05-28

Applicant: HOLTRONIC TECHNOLOGIES LTD. ,  MAYER, Herbert

Inventor： HOLTRONIC TECHNOLOGIES LTD.

IPC: H01L21/00

CPC classification number: H01L21/68707

Abstract: A device for gripping and holding a substrate comprises at least two clamping parts (15, 17). The first clamping part (15) is arranged a distance apart from the second clamping part (17). First and second clamping parts (15, 17) are movable relative to each other along a longitudinal axis (20) so that they can grip and clamp a substrate (13) at opposite edges. In a preferred embodiment the clamping parts (15, 17) are formed by rollers. At least the rollers (17) are rotatable about an axis perpendicular to the plane of the substrate (13) to be gripped in order to allow a rotation of the substrate (13) when it is gripped. The device has the advantage that the substrate, when it is gripped, takes always a centered and well defined position.

Abstract translation: 夹持和保持基底的装置包括至少两个夹紧部分（15,17）。 第一夹紧部件（15）布置成与第二夹紧部件（17）隔开一段距离。 第一和第二夹持部分（15,17）可以沿着纵向轴线（20）相对于彼此移动，使得它们可以在相对的边缘处夹持和夹紧基底（13）。 在优选实施例中，夹紧部件（15,17）由辊形成。 至少辊（17）可以围绕垂直于衬底（13）的平面的轴线旋转以被夹持，以便当被抓握时允许衬底（13）的旋转。 该装置的优点在于，当夹持基板时，基板始终处于中心和明确定位的位置。

公开(公告)号：WO1997044816A1

公开(公告)日：1997-11-27

申请号：PCT/EP1997002561

申请日：1997-05-20

Applicant: HOLTRONIC TECHNOLOGIES LTD.

Inventor： HOLTRONIC TECHNOLOGIES LTD. ,  MAYER, Herbert

IPC: H01L21/00

CPC classification number: G03F9/00 ,  B23Q1/34 ,  B25B11/005 ,  B65G49/061 ,  B65G49/065 ,  B65G2249/04 ,  B65G2249/045 ,  C03B35/24 ,  C03B2225/02 ,  H01L21/6838

Abstract: The present invention relates to a method and apparatus for positioning a substrate, e.g. of a glass plate, on a support (11). For the formation of an air cushion the surface of the support is pressurized from below with a gas. The surface has grooves (27) and openings (15) which lie in the grooves (27). At the edge of the support (11) abutments (33), elastic means (39) and sensors (37) are provided. The latter are used for measuring the position of th substrate indirectly by determining the distance between the sensor head and the elastic means (39) which are formed by a leaf spring. The leaf spring (39) in its normal position projects the abutting means by a certain distance so that in the course of the alignment process the substrate pushes the leaf spring backwards.

Abstract translation: 本发明涉及一种用于定位衬底的方法和装置，例如， 的玻璃板上，在支撑件（11）上。 为了形成气垫，支撑体的表面用气体从下方加压。 表面具有凹槽（27）和位于凹槽（27）中的开口（15）。 在支撑件（11）的边缘（33）的边缘设有弹性装置（39）和传感器（37）。 后者用于通过确定由板簧形成的传感器头和弹性装置（39）之间的距离间接地测量第衬底的位置。 在其正常位置的板簧（39）将抵接装置突出一定距离，使得在对准过程中，基板向后推动板簧。

公开(公告)号：US20020135833A1

公开(公告)日：2002-09-26

申请号：US10066728

申请日：2002-02-06

Applicant: Holtronic Technologies Ltd

Inventor： Francis Stace Murray Clube

IPC: G03H001/22

CPC classification number: G03F7/70408 ,  G03H1/00 ,  G03H1/0408 ,  G03H1/22 ,  G03H2001/0094 ,  Y10S359/90

Abstract: A method is disclosed for reconstructing an image from a total internal reflection hologram that includes the steps of arranging the hologram in relation to the first face of a coupling body, generating a substantially collimated illumination beam, directing the beam through a second face of the coupling body so that it reconstructs the image recorded in the hologram, recycling at least once the light in the illumination beam that is reflected from the hologram by redirecting it through the second face of the coupling body so that it also reconstructs the image recorded in the hologram, and scanning the illumination and recycled beams across the hologram, for the purpose of increasing the effective reconstruction efficiency of the total internal reflection hologram.

Abstract translation: 公开了一种用于从全内反射全息图重建图像的方法，该方法包括以下步骤：相对于耦合体的第一面布置全息图，产生基本上准直的照明光束，引导光束通过耦合器的第二面 使得其重建记录在全息图中的图像，通过将其从连接体的第二面重新定向至少将从全息图反射的照明光束中的光再循环一次，使得其还重建记录在全息图中的图像 并且扫描照射和再循环的光束穿过全息图，目的是增加全内反射全息图的有效重建效率。

公开(公告)号：JPH07140885A

公开(公告)日：1995-06-02

申请号：JP10942994

申请日：1994-05-24

Applicant: HOLTRONIC TECHNOLOGIES LTD

Inventor： FURANSHISU SUTEISU MAARII KURA

IPC: G03B27/72 ,  G03F7/20 ,  G03H1/00 ,  G03H1/20 ,  H01L21/027

Abstract: PURPOSE: To provide a method and a device for changing the scale of a pattern printed from total internal reflection hologram. CONSTITUTION: In this method for changing the scale of the pattern printed from the total internal reflection hologram 9 to a photosensitive layer 13, images are reproduced from the total internal reflection hologram 9 by irradiating the total internal reflection hologram 9 with a scanning beam 17 and at least either of the hologram 9 and the photosensitive layer 13 is moved so as to make the moving amount to the photosensitive layer 13 of the hologram 9 be equal to a value for which the change portion of the scale is multiplied to the moving amount of the scanning beam 17, to make the direction of the movement of the hologram 9 to the photosensitive layer 13 be the same as the one of the scanning beam 17 when the change of the scale is magnification and to make the direction of the movement of the hologram 9 to the photosensitive layer 13 be opposite to the one of the scanning beam 17 when the change of the scale is reduction.