公开(公告)号：WO2005015655A1

公开(公告)日：2005-02-17

申请号：PCT/NL2004/000563

申请日：2004-08-11

Applicant: OTB GROUP B.V. ,  MISCHKE, Wlodek, Stanislaw ,  VAN ASSCHE, Ferdinandus, Josephus, Honoré ,  DINGS, Franciscus, Cornelius ,  VANGHELUWE, Rik, Theodoor ,  KESSELS, Wilhelmus, Mathijs, Marie ,  VAN DE SANDEN, Mauritius, Cornelis, Maria

Inventor： MISCHKE, Wlodek, Stanislaw ,  VAN ASSCHE, Ferdinandus, Josephus, Honoré ,  DINGS, Franciscus, Cornelius ,  VANGHELUWE, Rik, Theodoor ,  KESSELS, Wilhelmus, Mathijs, Marie ,  VAN DE SANDEN, Mauritius, Cornelis, Maria

IPC: H01L51/20

CPC classification number: H01L51/5256

Abstract: A method for applying a thin film barrier stack to a device with microstructures, such as, for instance, an OLED, wherein the thin film barrier stack forms a barrier to at least moisture and oxygen, wherein the stack is built up from a combination of organic and inorganic layers, characterized in that a first organic intermediate layer is applied, wherein the organic intermediate layer is applied in liquid form, wherein the viscosity of the organic intermediate layer liquid is so low that grooves, hollows and like narrow cavities are at least partly filled up with the organic liquid under the influence of capillary forces while other parts of the device are only covered with a thin layer of the organic liquid, such that a layer of variable thickness is formed.

Abstract translation: 一种将薄膜阻挡叠层施加到具有例如OLED的微结构的器件的方法，其中所述薄膜阻挡层至少形成至少水分和氧的屏障，其中所述叠层由 有机和无机层，其特征在于，施加第一有机中间层，其中有机中间层以液体形式施加，其中有机中间层液体的粘度如此低，使得凹槽，中空部分和类似的空腔至少为 在毛细管力的影响下部分地填充有机液体，而装置的其它部分仅被有机液体的薄层覆盖，从而形成可变厚度的层。

公开(公告)号：WO2004070840A1

公开(公告)日：2004-08-19

申请号：PCT/NL2003/000937

申请日：2003-12-24

Applicant: OTB GROUP B.V. ,  BRIËR, Peter ,  EVERS, Marinus, Franciscus, Johanus

Inventor： BRIËR, Peter ,  EVERS, Marinus, Franciscus, Johanus

IPC: H01L27/00

CPC classification number: F21V21/00 ,  F21V5/045 ,  H01L27/3283 ,  H01L51/0004 ,  H01L51/52 ,  H01L51/5253 ,  H01L51/5275 ,  H01L51/56

Abstract: A method for manufacturing an organic electroluminescent display device, wherein an arrangement of layers is applied to a substrate such, that in a first direction, first conductors extend as well as in a second direction, while between the intersections of the conductors an organic electroluminescent connection has been provided which, under the influence of an electric tension, emits light, the substrate being manufactured from plastic and being provided with a surface structure which forms a boundary for at least a number of the layers to be applied. The invention also provides a substrate intended for use in a method according to the invention for manufacturing an organic electroluminescent display device, wherein the substrate has been manufactured from plastic and is provided with a surface structure which forms a boundary for at least a number of the layers to be applied. The invention further provides an organic electroluminescent display device obtained with the method.

Abstract translation: 一种制造有机电致发光显示装置的方法，其中层的布置被施加到基板，即在第一方向上，第一导体以及第二方向延伸，而在导体的交叉点之间，有机电致发光连接 已经提供了在电张力的影响下发光的衬底，其由塑料制成并且具有形成用于至少多个待施加层的边界的表面结构。 本发明还提供了一种用于根据本发明的用于制造有机电致发光显示装置的方法的衬底，其中衬底已经由塑料制成并且设置有表面结构，该表面结构形成至少多个 要应用的层。 本发明还提供了一种通过该方法获得的有机电致发光显示装置。

公开(公告)号：WO2004015757A1

公开(公告)日：2004-02-19

申请号：PCT/NL2003/000577

申请日：2003-08-12

Applicant: OTB GROUP B.V. ,  BOSCHMAN TECHNOLOGIES B.V. ,  EVERS, Marinus, Franciscus, Johanus ,  VAN WEELDE, Antonie

Inventor： EVERS, Marinus, Franciscus, Johanus ,  VAN WEELDE, Antonie

IPC: H01L21/56

CPC classification number: H01L21/565 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method and apparatus for at least partly covering at least one electronic component with compound, the apparatus being provided with a first mold half and a second mold half, the first mold half being moveable relative to the second mold half, while means are provided for placing an electronic component on a mold half for inclusion of this component in a mold cavity defined by the two mold halves, the first mold half being provided with a number of actuators with the aid of which the position of the first mold half relative to the second mold half is continuously and accurately regulable, while the distance between the two mold halves is continuously regulated and, if desired, adjusted during the two mold halves being moved towards each other and during their being held in a position when moved towards each other.

Abstract translation: 一种用于至少部分地用化合物覆盖至少一个电子部件的方法和装置，所述装置设置有第一半模和第二半模，所述第一半模可相对于所述第二半模移动，而所述装置被设置用于 将电子部件放置在半模上以将该部件包含在由两个半模限定的模具腔中，第一半模设置有多个致动器，借助于此，第一半模的位置相对于 第二半模可持续且准确地调节，而两个半模之间的距离是连续调节的，并且如果需要的话，在两个半模之间被相互移动并且当它们被保持在朝向彼此移动的位置时被调节。

公开(公告)号：WO2003098716A1

公开(公告)日：2003-11-27

申请号：PCT/NL2003/000371

申请日：2003-05-20

Applicant: OTB GROUP B.V. ,  DINGS, Franciscus, Cornelius ,  BIJKER, Martin, Dinant ,  EVERS, Marinus, Franciscus, Johanus

Inventor： DINGS, Franciscus, Cornelius ,  BIJKER, Martin, Dinant ,  EVERS, Marinus, Franciscus, Johanus

IPC: H01L51/20

CPC classification number: H01L51/0002 ,  H01L51/5253 ,  H01L51/5259

Abstract: A method for manufacturing a polymer OLED, wherein after the application of a number of active layers onto a substrate to form the OLED, these active layers are encapsulated with at least one sealing, wherein prior to the application of the sealing, the OLED is heated for some time, as a result of which volatile substances present in the active layers evaporate from the OLED, and subsequently the respective sealing is applied. Optionally independently of the heating of the OLED prior to the application of the sealing, the sealing can be formed by at least a UV-setting resist layer which is applied with one of the following techniques: printing, such as inkjet printing, screen printing, tampon printing, offset printing and the like, or a mechanical coating technique, such as spray coating, curtain coating, spin coating and the like.

Abstract translation: 一种制造聚合物OLED的方法，其中在将多个活性层施加到基底上以形成OLED之后，这些活性层用至少一个密封剂包封，其中在施加密封之前，将OLED加热 存在一段时间后，活性层中存在的挥发性物质从OLED中蒸发，随后施加相应的密封。 任选地，与施加密封之前的OLED的加热无关，可以通过至少一个UV成型抗蚀剂层形成密封，该抗UV层被施加以下技术之一：诸如喷墨印刷，丝网印刷， 棉塞印刷，胶版印刷等，或喷涂，幕涂，旋涂等机械涂布技术。

公开(公告)号：WO2002041356A3

公开(公告)日：2002-05-23

申请号：PCT/NL2001/000821

申请日：2001-11-13

Applicant: OTB GROUP B.V. ,  LANDSBERGEN, Jeroen, Franciscus, Maria ,  VYSKOCIL, Jiri

Inventor： LANDSBERGEN, Jeroen, Franciscus, Maria ,  VYSKOCIL, Jiri

IPC: H01J37/34

Abstract: Sputter cathode (1) with a target (8) around an axis and a number of permanent magnets provided around the axis. The permanent magnets produce a tunnel shaped radially oriented magnetic field in the vicinity of the surface of the target to be sputtered. Further an electromagnet (24) with a yoke and first and second poles produces an axially oriented magnetic field along the axis. The first pole is located nearer to the axis than the electromagnet and the second pole is located further of the axis than the electromagnet. A magnetic shunt (25) is provided in the axial direction between the electromagnet and the target and in the radial direction between the axis and the second pole.

公开(公告)号：EP1964941A3

公开(公告)日：2008-11-19

申请号：EP08158671.1

申请日：2004-08-26

Applicant: OTB Group B.V.

Inventor： Lindelauf, Paul August Marie ,  Evers, Marinus Franciscus Johannes

IPC: C23C14/04

CPC classification number: C23C14/042 ,  C23C14/568

Abstract: A system for treating substrates, provided with at least one processing chamber (1) to treat at least one substrate (5) with a vacuum process, wherein said processing chamber (1) is provided with a substrate access (13) closable by a closing body (15), wherein the system is provided with a conveying device (8) which is at least arranged to move said closing body (15), wherein said conveying device (8) is arranged to convey a mask (4), intended to at least partly cover said substrate (5) during said vacuum process, at least between a position outside the processing chamber (1) and a position inside the processing chamber (1).
It is advantageous when at least said substrate holder (2) is provided with positioning means (50) to position the substrate holder (2) and the mask (4) relative to each other. The invention further provides a use of such a system.

Abstract translation: 一种用于处理基板的系统，设置有至少一个处理室（1），以用真空处理来处理至少一个基板（5），其中所述处理室（1）设置有可通过闭合关闭的基板通路（13） 主体（15），其中所述系统设置有至少布置成移动所述关闭体（15）的输送装置（8），其中所述输送装置（8）布置成输送面罩（4），所述面罩 至少在所述真空处理期间至少部分地覆盖所述基板（5），至少在所述处理室（1）外部的位置与所述处理室（1）内的位置之间。 当至少所述衬底保持器（2）设置有相对于彼此定位衬底保持器（2）和掩模（4）的定位装置（50）时，这是有利的。 本发明进一步提供了这种系统的用途。

公开(公告)号：EP1946192A2

公开(公告)日：2008-07-23

申请号：EP06799476.4

申请日：2006-09-29

Applicant: OTB Group B.V.

Inventor： DU PAU, Cornelis Petrus ,  BRIER, Peter ,  DINGS, Franciscus Cornelius

IPC: G05B19/401 ,  B41J11/46 ,  H01L51/40

CPC classification number: B41J3/28 ,  B41J11/46 ,  G05B19/401 ,  G05B2219/45026 ,  G05B2219/45028 ,  G05B2219/45187 ,  H01L51/0005

Abstract: A method and apparatus wherein a substrate is provided with a Preformatted structure, with structural elements arranged in a matrix, wherein the matrix extends in an X-direction and Y-direction, wherein a processing head is provided, wherein a camera is provided which is connected with the processing head and which comprises at least one series of sensors arranged along a main line, wherein the camera scans the substrate and thereby provides at least one one-dimensional camera signal, wherein, for real-time determining at least the X-position and the Y-position of the structure with respect to the camera, the said main line includes an angle with the X-direction and with the Y-direction, wherein the angle is chosen such that the camera signal contains spatially separated X-position information and Y-position information and that the X-position information and the Y-position information can be separated from the sensor signal with the aid of signal processing.

公开(公告)号：EP1664377A1

公开(公告)日：2006-06-07

申请号：EP04774873.6

申请日：2004-08-12

Applicant: OTB Group B.V.

Inventor： BIJKER, Martin, Dinant ,  BOSCH, Roland, Cornelis, Maria ,  DINGS, Franciscus, Cornelius

IPC: C23C16/513 ,  C23C16/52

CPC classification number: C23C16/52 ,  C23C4/12 ,  C23C4/134 ,  C23C16/513

Abstract: A method and apparatus for applying a coating on a substrate, wherein, opposite the substrate, at least two expanding thermal plasma (ETP) sources are arranged which provide the substrate with a coating, wherein the substrate is located in a process room in which the pressure is lower than the pressure, prevailing in the ETP sources, of a carrier gas which is introduced into the process room via the sources and which forms the expanding plasma, wherein the coating provided by each source has a layer thickness according to a certain deposition profile, for instance a Gaussian deposition profile, and wherein different process parameters are chosen such that, after the coating process, the addition of the deposition profiles results in a substantially uniform layer thickness of the coating on a relevant part of the substrate. Preferably, the distance between sources producing plasma at the same time is chosen and/or settable such that the expanding plasmas substantially do not influence each other.

公开(公告)号：EP1604049A1

公开(公告)日：2005-12-14

申请号：EP03782978.5

申请日：2003-12-12

Applicant: OTB Group B.V.

Inventor： DINGS, Franciscus, Cornelius ,  EVERS, Marinus, Franciscus, Johanus ,  HOMPUS, Michael, Adrianus, Theodorus ,  BIJKER, Martin, Dinant

IPC: C23C16/50 ,  C23C16/513 ,  H01J37/32 ,  C23C16/04

CPC classification number: H01J37/32376 ,  C23C16/04 ,  C23C16/50 ,  C23C16/513

Abstract: A method for treating a surface of at least one substrate, wherein the at least one substrate is placed in a process chamber, wherein the pressure in the process chamber is relatively low, wherein a plasma is generated by at least one plasma source, wherein, during the treatment, at least one plasma source (3) and/or at least one optionally provided treatment fluid supply source is moved relative to the substrate surface. The invention further provides an apparatus for treating a surface of at least one substrate, wherein the apparatus is provided with a process chamber and at least one plasma source, wherein the at least one plasma source (3) and/or at least one optionally provided treatment fluid supply source is movably arranged.

公开(公告)号：EP1532673A1

公开(公告)日：2005-05-25

申请号：EP03784699.5

申请日：2003-08-12

Applicant: OTB Group B.V. ,  Boschman Technologies B.V.

Inventor： EVERS, Marinus, Franciscus, Johanus ,  VAN WEELDE, Antonie

IPC: H01L21/56

CPC classification number: H01L21/565 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method and apparatus for at least partly covering at least one electronic component with compound, the apparatus being provided with a first mold half and a second mold half, the first mold half being moveable relative to the second mold half, while means are provided for placing an electronic component on a mold half for inclusion of this component in a mold cavity defined by the two mold halves, the first mold half being provided with a number of actuators with the aid of which the position of the first mold half relative to the second mold half is continuously and accurately regulable, while the distance between the two mold halves is continuously regulated and, if desired, adjusted during the two mold halves being moved towards each other and during their being held in a position when moved towards each other.