公开(公告)号：TW200506548A

公开(公告)日：2005-02-16

申请号：TW093117998

申请日：2004-06-21

Applicant: 雷弗萊提維提公司 REFLECTIVITY, INC.

Inventor： 理查茲彼得 RICHARDS, PETER

IPC: G03F

CPC classification number: G09G3/346 ,  G09G2320/04

Abstract: 一種用以防止微電機系統上電荷堆積之方法與設備，尤其是在具有複數個微鏡之微鏡陣列裝置中。電壓係施加於該微鏡上以致動該等微鏡。介於鏡面與電極間之電壓差的極性會反轉以防止電荷堆積。

Abstract in simplified Chinese: 一种用以防止微电机系统上电荷堆积之方法与设备，尤其是在具有复数个微镜之微镜数组设备中。电压系施加于该微镜上以致动该等微镜。介于镜面与电极间之电压差的极性会反转以防止电荷堆积。

公开(公告)号：WO2006017009A2

公开(公告)日：2006-02-16

申请号：PCT/US2005/022865

申请日：2005-06-24

Applicant: REFLECTIVITY, INC. ,  SIMONIAN, Dmitri ,  PORTER, John

Inventor： SIMONIAN, Dmitri ,  PORTER, John

IPC: G02F1/03

CPC classification number: G02B26/0833 ,  B81B3/0005 ,  B81B2201/042 ,  B81C1/0096 ,  B81C2201/112 ,  B82Y30/00 ,  C03C17/28 ,  C10M105/00 ,  C10M2207/0406 ,  C10M2211/0425 ,  C10M2211/063 ,  C10M2215/041 ,  C10M2215/2225 ,  C10M2219/081 ,  C10M2223/0603 ,  C10M2227/003 ,  C10M2227/045 ,  C10N2240/06 ,  C23C26/00 ,  C23C30/00 ,  H01L21/02046 ,  H01L21/3121

Abstract: Lubricants for surfaces of microelectromechanical devices are disclosed. Specifically, the lubricants can be applied to the contacting surfaces of the microelectromechanical devices so as to remove stiction of the contacting surfaces.

Abstract translation: 公开了用于微机电装置表面的润滑剂。 具体地说，可以将润滑剂施加到微机电装置的接触表面，以便消除接触表面的粘性。

公开(公告)号：WO2006001922A2

公开(公告)日：2006-01-05

申请号：PCT/US2005016733

申请日：2005-05-12

Applicant: REFLECTIVITY INC ,  RICHARDS PETER

Inventor： RICHARDS PETER

IPC: G09G3/34 ,  G09G3/20

CPC classification number: G09G3/346 ,  G09G3/2014 ,  G09G3/2044 ,  G09G2320/0285

Abstract: A method and apparatus of the present invention is particularly for use in display systems having spatial light modulators in which the pixels present asymmetrical switching delays. For a desired illumination intensity of a pixel, a series of pulse-width-modulation bit values for the pixel is determined based at least in part upon a parameter that characterizes the asymmetrical transition behavior of the pixel between states.

Abstract translation: 本发明的方法和装置特别适用于具有空间光调制器的显示系统，其中像素呈现不对称的切换延迟。 对于像素的期望的照明强度，至少部分地基于表征状态之间的像素的不对称过渡行为的参数来确定像素的一系列脉冲宽度调制比特值。

公开(公告)号：WO2005086877A2

公开(公告)日：2005-09-22

申请号：PCT/US2005/007835

申请日：2005-03-10

Applicant: REFLECTIVITY, INC. ,  HUIBERS, Andrew

Inventor： HUIBERS, Andrew

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  H04N9/312 ,  H04N9/3182

Abstract: A method and apparatus are disclosed for increasing contrast in micromirror-based image display devices. As a result the displayed image is a more faithful reproduction of the original and is more pleasing to human perception than is possible with a low contrast display, The method and apparatus comprise a micromirror design and a modulation scheme for driving micromirrors with a combination of analog and digital techniques to achieve partial and full micromirror deflection. The analog techniques permit the mirrors to be deflected to positions intermediate between the resting position and the position of maximum deflection, These intermediate deflections appear as intermediate light levels in an image. Compared to digital modulation, the analog techniques provide an increase in the number of light levels that can be displayed by a system that is limited by its incoming data rate and maximum micromirror speed.

Abstract translation: 公开了一种用于增加基于微镜的图像显示装置中的对比度的方法和装置。 结果，显示的图像是对原始图像的更忠实的再现，并且比对比度低的显示可能更令人满意。该方法和装置包括微镜设计和用于驱动具有模拟的组合的微镜的调制方案 和数字技术来实现部分和全部微镜偏转。 模拟技术允许反射镜偏转到静止位置和最大偏转位置之间的位置。这些中间偏转在图像中显示为中间光级。 与数字调制技术相比，模拟技术可以增加由输入数据速率和最大微镜速度所限制的系统可显示的光级数。

公开(公告)号：WO2005045889A2

公开(公告)日：2005-05-19

申请号：PCT/US2004/033773

申请日：2004-10-12

Applicant: REFLECTIVITY, INC. ,  HUIBERS, Andrew ,  PATEL, Satyadev

Inventor： HUIBERS, Andrew ,  PATEL, Satyadev

IPC: H01L

CPC classification number: G02B26/0841

Abstract: A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.

Abstract translation: 在显示系统中使用的空间光调制器的微镜阵列的微反射镜包括附接到由在基板上形成的两个支柱支撑的铰链的镜板。 此外，当从顶部观察时，镜板可操作以沿着平行于但偏离镜板的对角线的旋转轴线旋转。 连接两个柱的假想线不平行于镜板的任一对角线。

公开(公告)号：WO2004087561A3

公开(公告)日：2004-12-29

申请号：PCT/US2004009222

申请日：2004-03-24

Applicant: REFLECTIVITY INC ,  PATEL SATYADEV R ,  DOAN JONATHAN

Inventor： PATEL SATYADEV R ,  DOAN JONATHAN

IPC: B81B20060101 ,  B81B3/00 ,  H01L21/00

CPC classification number: B81C1/00476 ,  B81B2201/042 ,  B81C2201/0107

Abstract: A sacrificial layer and a method for applying said sacrificial layer in fabricating microelectromechanical devices are disclosed herein. The sacrificial layer comprises an early transition metal. Specifically, the sacrificial layer comprises an early transition metal element, an early transition metal alloy or an early transition metal silicide.

公开(公告)号：WO2004093083A2

公开(公告)日：2004-10-28

申请号：PCT/US2004009221

申请日：2004-03-24

Applicant: REFLECTIVITY INC ,  RICHARDS PETER

Inventor： RICHARDS PETER

IPC: B81B3/00 ,  G02B26/08 ,  G03B21/28 ,  G09G3/20 ,  G09G3/34 ,  G11C11/408 ,  G11C

CPC classification number: G09G3/34 ,  G02B26/0841 ,  G03B21/28 ,  G09G3/2022 ,  G09G3/346 ,  G09G2300/08 ,  G09G2310/02 ,  G09G2320/0261 ,  G09G2320/0266 ,  G11C11/408 ,  Y10S359/904

Abstract: Methods and apparatus for selectively updating memory cells of a memory cell array are provided. The memory cells of each row of the memory cell array are provided with a plurality of wordlines. Memory cells of the row are activated and updated by separated wordlines. In an application of display systems using memory cell arrays for controlling the pixels of the display system and pulse-width-modulation (PWM) technique for displaying grayscales, the pixels can be modulated by different PWM waveforms. The perceived dynamic-false-contouring artifacts are reduced thereby. In another application, the provision of multiple wordlines enables precise measurements of voltages maintained by memory cells of the memory cell array.

Abstract translation: 提供了选择性地更新存储单元阵列的存储单元的方法和装置。 存储单元阵列的每一行的存储单元被提供有多个字线。 该行的存储单元被分离的字线激活和更新。 在使用用于控制显示系统的像素的存储单元阵列和用于显示灰度级的脉宽调制（PWM））技术的显示系统的应用中，可以通过不同的PWM波形来调制像素。 感知到的动态假轮廓伪像由此减弱。 在另一个应用中，提供多个字线可以精确测量由存储单元阵列的存储单元维持的电压。

公开(公告)号：WO2004087563A2

公开(公告)日：2004-10-14

申请号：PCT/US2004/009231

申请日：2004-03-24

Applicant: REFLECTIVITY, INC. ,  PATEL, Satyadev, R. ,  DOAN, Jonathan

Inventor： PATEL, Satyadev, R. ,  DOAN, Jonathan

IPC: B81C

CPC classification number: B81C1/00793 ,  B81B2201/042 ,  B81C2201/053

Abstract: A method for processing microelectromechanical devices is disclosed herein. The method prevents the diffusion and interaction between sacrificial layers and structure layers of the microelectromechanical devices by providing selected barrier layers between consecutive sacrificial and structure layers.

Abstract translation: 本文公开了一种用于处理微机电装置的方法。 该方法通过在连续的牺牲层和结构层之间提供选定的阻挡层来防止牺牲层与微机电器件的结构层之间的扩散和相互作用。

公开(公告)号：WO2004072696A2

公开(公告)日：2004-08-26

申请号：PCT/US2004004441

申请日：2004-02-11

Applicant: REFLECTIVITY INC ,  PATEL SATYADEV R ,  HUIBERS ANDREW G

Inventor： PATEL SATYADEV R ,  HUIBERS ANDREW G

IPC: G02B26/08 ,  G03B21/28 ,  G02B

CPC classification number: G03B21/28 ,  G02B26/0841

Abstract: A spatial light modulator is disclosed, along with methods for making such a modulator, that comprises an array of micromirrors each having a hinge and a micromirror plate held via the hinge on a substrate, the micromirror plate being disposed in a plane separate from the hinge and having a diagonal extending across the micromirror plate, the micromirror plate being attached to the hinge such that the micromirror plate can rotate along a rotation axis that is parallel to, but off-set from the diagonal of the micromirror plate. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

Abstract translation: 公开了一种空间光调制器，以及用于制造这种调制器的方法，其包括每个具有铰链的微镜阵列和通过铰链固定在基板上的微镜板，微镜板设置在与铰链相分离的平面中 并且具有延伸穿过微镜板的对角线，微镜板附接到铰链，使得微镜板可以沿着与微镜板的对角线平行但偏离的旋转轴线旋转。 还公开了一种投影系统，其包括这样的空间光调制器以及光源，聚光光学器件，其中来自光源的光聚焦到微镜阵列上，用于投射从微镜阵列反射的光的投影光学器件 以及用于选择性地致动阵列中的微镜的控制器。

公开(公告)号：WO2003105198A1

公开(公告)日：2003-12-18

申请号：PCT/US2003/018741

申请日：2003-06-11

Applicant: REFLECTIVITY, INC. ,  PATEL, Satyadev ,  HUIBERS, Andrew ,  RICHARDS, Peter ,  SHI, Hongqin ,  CHIANG, Steve ,  DUBOC, Robert, Jr. ,  GROBELNY, Thomas ,  DEHLINGER, Dietrich ,  SUN, Anthony ,  CHEN, Hung, Nan

Inventor： PATEL, Satyadev ,  HUIBERS, Andrew ,  RICHARDS, Peter ,  SHI, Hongqin ,  CHIANG, Steve ,  DUBOC, Robert, Jr. ,  GROBELNY, Thomas ,  DEHLINGER, Dietrich ,  SUN, Anthony ,  CHEN, Hung, Nan

IPC: H01L21/00

CPC classification number: B81B7/0077 ,  B81B2201/042 ,  B81C1/00269 ,  B81C1/00904 ,  B81C2203/0118 ,  B82Y30/00 ,  G02B26/0833 ,  G02B26/0841 ,  H01L24/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01049 ,  H01L2924/01054 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01076 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/04953 ,  H01L2924/10329 ,  H01L2924/12036 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/1461 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/3025 ,  H01L2924/00

Abstract: A projection system, a spatial light modulator, and a method for forming a MEMS device are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.

Abstract translation: 公开了投影系统，空间光调制器和用于形成MEMS器件的方法。 空间光调制器可以具有与包括微镜阵列的基板中的一个结合在一起的两个基板。 在一个或两个晶片上沉积吸气剂材料和/或固体或液体润滑剂之后，两个基底可以在晶片级粘结。 如果需要，晶片可以密封在一起，并且两个基板之间的压力可以低于大气。