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公开(公告)号：JPH03245932A
公开(公告)日：1991-11-01
申请号：JP3841090
申请日：1990-02-21
Applicant: CANON KK
Inventor： SAKINO SHIGEO , OSANAI EIJI
Abstract: PURPOSE:To obtain a traveling guide device which carriers out positioning with high accuracy by constituting a primary traveling unit which can slide in the first direction and a secondary traveling unit which can slide in the second direction at right angles to the first direction on reference plane of a surface plate so as to support both the weights of the primary traveling unit and the secondary traveling unit on the surface plate. CONSTITUTION:A surface plate 1 has a smooth reference plane on its top, and is provided with a Y stage 4 as a traveling unit, an X stage 5 as a traveling unit, a fixing guide 2 in a horizontal direction of the Y stage 4 and static pressure air bearings 3a-3d. 3a guides in the horizontal direction of the X stage 5, 3b guides in the vertical direction of the X stage 5, 3c, which is not illustrated, guides in the horizontal direction of the Y stage 4 and 3d, which is not illustrated, guides in the vertical direction of the Y stage 4. With this constitution, both guiding the X stage 5 and the Y stage 4 in the vertical direction are performed on the surface plate 1, it is thus possible to keep a static posture properly to prevent traveling load from being generated in the mated stage even if the X, Y stages 5, 4 travel.
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公开(公告)号：JPH01259405A
公开(公告)日：1989-10-17
申请号：JP8724088
申请日：1988-04-11
Applicant: CANON KK
Inventor： SAKINO SHIGEO , OSANAI EIJI , NEGISHI MASATO , HORIKOSHI YASUO
Abstract: PURPOSE:To control positioning and the attitude with a high precision and to move an X-Y stage at a high speed by using a linear motor as the actuator of the X-Y stage guided with static pressure and constituting all of mobile parts so that they are moved without contacting and adding a controllable brake means to the stage. CONSTITUTION:A Y stage 2 is set to Y-direction guides 2a and 2b through a static pressure pneumatic bearing, and Y driving linear motors 4 and 5 are attached to respective Y stages 2 and they are slid along Y-direction guides 2a and 2b without contacting. An X-direction guide 3a couples both Y stages 2 and is fixed to Y stages 2, and an X stage 3 is set onto the X-direction guide 3a through a static pressure pneumatic bearing, and an X driving linear motor 6 is attached to the X stage 3 and it is moved along the X-direction guide 3a without contacting. Brake units 24 are directly attached to the X stage 3 and Y stages 2 or are attached to linear motor mobile parts. Thus, positioning and the attitude are controlled with a high precision.
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公开(公告)号：JPS6340112A
公开(公告)日：1988-02-20
申请号：JP18408586
申请日：1986-08-05
Applicant: CANON KK
Inventor： NISHIMOTO YOSHIBUMI , OTSUKA MASARU , OSANAI EIJI , TANIGUCHI YASUSHI , TAKEUCHI YASUSHI , TOMONO HARUO
Abstract: PURPOSE:To automatically execute focusing with high accuracy by detecting a refracting power state of a photographer's eyeball, and adjusting an image formation state of an image of an object, based on said detection. CONSTITUTION:When an image formation position of an image of an object, by a photographic lens 1 is shifted from an image formation surface 31, and for instance, it is on an image formation surface 32 of the photographic lens 1 side, a photographer operates the device so that the image of the object on the image formation surface 32 is formed on an eyeground 73 by varying a focal distance of a crystal lens 72, namely, a refracting power by an adjusting operation of an eyeball. As a result, a conjugate relation of the eyeground 73 and a photodetecting means 8 collapses, and an infrared luminous flux which has passed through an opening part 101 of a diaphragm 10 is shifted in the direction as indicated with an arrow 83 from the center part of the photodetecting means 8. Accordingly, output signals from two photodetecting parts 81, 82 are different, and an output difference is generated in both the output signals. By calculating a code and magnitude of the output difference in this case by an arithmetic circuit 90, a shift quantity from the image formation surface 31, of the image formation surface 32 is derived, and in accordance with its value, the photographic lens 1 is moved electrically until the output difference becomes zero by a lens driving part 15, and focusing to a desired object is executed automatically.
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公开(公告)号：JPS62267963A
公开(公告)日：1987-11-20
申请号：JP11205886
申请日：1986-05-16
Applicant: CANON KK
Inventor： OSANAI EIJI
Abstract: PURPOSE:To stabilize the flexible disk of the rotation time under non-contact state to a stabilizing member, to eliminate the rotation unevenness of a sheet and to stabilize the contact of a head and sheet by providing the slope for positive pressure generation in continuation varying the inclined width in the moving direction of a head at the downstream side in the disk rotating direction of a stabilizing member. CONSTITUTION:Owing to a positive pressure being caused by an inclined part 51d when a magnetic head 4 is projected at the time of rotation of a disk 1, the disk 1 is pressed to the direction apart from the lower part in the figure, namely the opposing face 51b at the downstream side at this part. This positive pressure is decided by the gap shape of the disk 1 and inclined part 51d, namely the width (l) of the inclined part and angle. The angle made by this disk 1 and inclined part 51d becomes the angle that the generated positive pressure becomes smaller at the part of the inner peripheral side due to the difference in the deformation shapes between the outer peripheral side of the disk 1 and the inner peripheral side. On the other hand, the bigger the width (l) of the inclined part is the larger the force pressing the disk 1 becomes, therefore the inclined part 51d of which width becomes larger as going to the inner peripheral side, compared to the outer peripheral side of the disk 1 presses the disk 1 equally to the outer peripheral side even at the inner peripheral side.
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公开(公告)号：JPS62267962A
公开(公告)日：1987-11-20
申请号：JP11205786
申请日：1986-05-16
Applicant: CANON KK
Inventor： OSANAI EIJI
Abstract: PURPOSE:To stabilize the flexible disk of the rotation time under non-contact state to anstabilizing member, to eliminate the rotation unevenness of a sheet and to stabilize the contact of a head and sheet by providing the slope for positive pressure generation that the head is inclining toward the relief bottom part in the vicinity of the head relief groove parts of the upper and down stream sides in the disk rotating direction of the stabilizing member. CONSTITUTION:At the time of rotation of a disk 1, a proper positive pressure is caused by a slope 51f at the upper stream side and at the downstream side, a positive pressure is caused by the slope 51d, so the disk is pressed to the direction apart from a stabilizing member 51, namely to the lower part in the figure, and the fear of the contact becomes eliminating at both the upper stream and downstream sides. And in this case, the positive pressure acts on the disk 1 at the part of the upper and lower stream both ends of the recessed groove part 51c of the disk 1, namely the vital part approximately of the deformation due to the projection of the head 4. In this way the prevention of the contact of the disk 1 and stabilizing member 51 can more effectively be achieved.
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Patent Agency Ranking
公开(公告)号：JPS626460A
公开(公告)日：1987-01-13
申请号：JP14599285
申请日：1985-07-02
Applicant: CANON KK
Inventor： OSANAI EIJI , MAEDA MASAYA
Abstract: PURPOSE:To improve the working accuracy of a stabilizing member and to make the work easy by forming the stabilizing member by a conductive resin. CONSTITUTION:A stabilizing plate 10 opposed to at least a head 4 is formed by a molding form consisting of the conductive resin, which is obtained by containing carbon fibers in e.g. a polyphenylene sulfide. Since the stabilizing plate 10 is formed by the molding work of the conductive resin, the working accuracy can be maintained at a high level, the working cost can be also suppressed at a low cost and extremely high mass-productivity can be obtained even if the mold is a complex and accurate shape. Since the stabilizing plate 10 is made of a conductive material, the plate 10 can be prevented from electro static charging by electrically earthing the plate 10 by a proper means. Although the contact of the plate 10 with the disk 1 is inevitable at the start or stop of the disk 1, damage on the disk-opposed surface of the plate 10 can be suppressed because the plate 10 has high abrasion resistance.
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公开(公告)号：JPS61214274A
公开(公告)日：1986-09-24
申请号：JP5618885
申请日：1985-03-20
Applicant: CANON KK
Inventor： OSANAI EIJI
Abstract: PURPOSE:To obtain a stable head sliding state by keeping a recessed part provided in the about center part of a stabilizing plate and a recessed part, which is provided below said recessed part, at air pressure approximately and generating a position pressure between surfaces facing each other of a projecting part demarcated with these recessed parts and a recording carrier. CONSTITUTION:While a disc 1 is rotated, a head 4 is slided on the disc 1, and the gap between a stabilizing plate 10 and the disc 1 is narrowed downstream in an upstream projecting part 18 and is minimum in an edge part 18e. The air current flowed in this wedge-shaped gap generates a positive pressure to push up the disc 1 toward a control plate 6. The gap between the plate 10 and the disc 1 is wide in a recessed part 11, and a negative pressure is not generated in the recessed part 11 by the shape. Said gap is minimum in an edge part 12e of a downstream projecting part 12 of the stabilizing plate 10 by the shape of the slope of the recording carrier facing the projecting part 12, and the air current flowed in this wedge-shaped gap generates a positive pressure. The gap is kept at air pressure approximately in a recessed part 13 to avoid generation of a negative pressure. The disc 1 is pushed down toward the control plate 6 in downward projecting parts 14 and 16 by a generated positive pressure.
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公开(公告)号：JPS61211874A
公开(公告)日：1986-09-19
申请号：JP5302885
申请日：1985-03-16
Applicant: CANON KK
Inventor： OSANAI EIJI
IPC: G11B17/32
Abstract: PURPOSE:To realize a stable sliding and connecting condition of a head by maintaining an atmospheric pressure in a recessed section disposed at a substantially center section of a stable plate and a recessed section disposed downstream thereof in a rotating condition of a flexible recording carrier and generating a positive pressure on an opposing surface of a protruded section and the recording carrier separated by the recessed section. CONSTITUTION:A head 4 contacts slidably with a disk 3 and a space between a protruded section 18 upperstream of a stable plate and the disk 3 becomes gradually narrower toward the downstream and minimum at an edge section 18e. An air flow flowing this wedge-like space generates a positive pressure and the disk 3 is pressed down toward an adjusting plate 2. Since for an escape of the head, in a recessed section 11, the space with the disk 3 is fully large, an atomospheric pressure is substantially maintained and the disk 3 scarcely receives an external force by the air flow. In a protruded section 12 downstream of the staple plate, by a form of inclined surfaces opposing to the disk 3, a space between both the sections is minimum at an edge section 12e and a wedge- like space similarly to the protruded section 18 upperstream of the stable plate is formed and teh air flow flowing therein generates the positive pressure.
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公开(公告)号：JPH11243132A
公开(公告)日：1999-09-07
申请号：JP11589098
申请日：1998-04-13
Applicant: CANON KK
Inventor： TSUI KOTARO , ITO HIROHITO , OSANAI EIJI
Abstract: PROBLEM TO BE SOLVED: To provide a positioning device which is capable of carrying out a positioning operation of high accuracy preventing transmission of vibrations attendant on an enhancement in a stage vibrating force, by a method wherein a mass, a guide which supports and guides the mass, a linear motor which moves the mass, and a control means which controls the linear motor are provided to an inertial force applying means. SOLUTION: Four inertial force applying mechanisms are arranged on a stage base 8 or a platen 9, adjacent to the working surface of an inertia force corresponding to the accelerating/decelerating speed of a stage and driven as controlled so as to cancel the inertial force of the stage. The inertial force applying mechanisms are composed of masses 13a to 13d (13), guides 14a to 14d (14), linear motors 52 and 53 which move the masses 13, and a control 14 which controls the linear motors 52 and 53. The guides 14 include static pressure air bearings 51. A large reaction force transmitted to the stage base 8 accompanying an inertial force generated at the acceleration/deceleration of an XY stage is canceled by driving the mass 13 mounted on the platen 9, so as to cancel the reaction force.
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公开(公告)号：JPH1094925A
公开(公告)日：1998-04-14
申请号：JP27389797
申请日：1997-09-19
Applicant: CANON KK
Inventor： SAKINO SHIGEO , OSANAI EIJI , NEGISHI MASATO , HORIKOSHI YASUO , INOUE MITSURU , ONO KAZUYA
Abstract: PROBLEM TO BE SOLVED: To remarkably reduce the unnecessary tilt of a movable body, by symmetrically installing a hydrostatic bearing and plural pre-load mechanisms, on a face opposite to a reference plane of the second movable body which is two-dimensionally moved. SOLUTION: A Y stage 4 is floated from a level block 1 by supplying the air to a hydrostatic air bearing, and is moved in the Y direction along a fixed guide 2 by two driving actuators 4c. Further a X stage 5 is floated from the level block 1 as is the case with the Y stage 4, by supplying the air to the hydrostatic air bearing, and is moved in the X direction by a driving actuator 5c while guided by a side face of the Y stage 4 in the transverse direction. On this occasion, the X stage and the Y stage are respectively adjusted to keep the constant positions by plural magnetic units for pre-load installed on the rear faces thereof, and four hydrostatic bearings installed on four corners of each stage.
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