公开(公告)号：EP1529301B1

公开(公告)日：2010-04-28

申请号：EP03759192.2

申请日：2003-08-13

Applicant: Intel Corporation

Inventor： MA, Qing

IPC: H01H61/00

CPC classification number: H01H1/0036 ,  H01H37/5409 ,  H01H2001/0042 ,  H01H2037/008

公开(公告)号：EP1751858B1

公开(公告)日：2009-01-14

申请号：EP05737419.1

申请日：2005-04-13

Applicant: Intel Corporation

Inventor： MA, Qing ,  WANG, Li-Peng ,  SHIM, Dong ,  RAO, Valluri

IPC: H03H3/04 ,  H03H9/205 ,  H01L41/08

CPC classification number: H03H3/04 ,  H03H2003/0471 ,  H03H2003/0478

Abstract: Plural band film bulk acoustic resonators may be formed on the same integrated circuit using lithographic techniques. As a result, high volume production of reproducible components can be achieved, wherein the resonators, as manufactured, are designed to have different frequencies.

公开(公告)号：EP1346382B1

公开(公告)日：2006-10-04

申请号：EP01272461.3

申请日：2001-11-26

Applicant: INTEL CORPORATION

Inventor： MA, Qing ,  RAO, Valluri, R. ,  CHENG, Peng

IPC: H01G5/16 ,  H01L21/20

CPC classification number: H01G5/16 ,  H01G5/40 ,  Y10T307/724 ,  Y10T307/729

Abstract: The present invention relates to a stepped micro electromechanical structure (MEMS) capacitor that is actuated by a plurality of MEMS switches may be within the stepped capacitor circuit, or they may be actuated by an independent circuit. The stepped capacitor may also be varied with intermediate steps of capacitance by providing at least one variable capacitor in the stepped MEMS capacitor structure.

公开(公告)号：EP1573853A1

公开(公告)日：2005-09-14

申请号：EP03814641.1

申请日：2003-12-03

Applicant: INTEL CORPORATION

Inventor： MA, Qing ,  HAYDEN III, Joseph ,  CHOU, Tsung-Kuan, Allen ,  TRAN, Quan

IPC: H01P3/00

CPC classification number: H01P11/003 ,  H01P3/003 ,  H05K1/0219 ,  H05K1/0237 ,  H05K3/243 ,  H05K2201/09236 ,  H05K2201/09736 ,  H05K2201/098

Abstract: Coplanar waveguides have a center signal line and a pair of ground lines on either side formed of a sputtered material such as gold (Au). Such waveguides are subject to what is known as the edge effect at high frequency operation causing currents to concentrate and flow along adjacent edges of the lines. Providing a thicker plated layer only on adjacent edges of the lines provide substantial performance improvements over sputtered lines alone while saving significant amount of Au, thus reducing costs.

公开(公告)号：EP1346382A2

公开(公告)日：2003-09-24

申请号：EP01272461.3

申请日：2001-11-26

Applicant: INTEL CORPORATION

Inventor： MA, Qing ,  RAO, Valluri, R. ,  CHENG, Peng

IPC: H01G5/16

CPC classification number: H01G5/16 ,  H01G5/40 ,  Y10T307/724 ,  Y10T307/729

Abstract: The present invention relates to a stepped micro electromechanical structure (MEMS) capacitor that is actuated by a plurality of MEMS switches may be within the stepped capacitor circuit, or they may be actuated by an independent circuit. The stepped capacitor may also be varied with intermediate steps of capacitance by providing at least one variable capacitor in the stepped MEMS capacitor structure.

公开(公告)号：EP1260019A1

公开(公告)日：2002-11-27

申请号：EP01908666.9

申请日：2001-01-22

Applicant: INTEL CORPORATION

Inventor： MA, Qing ,  CHENG, Peng

IPC: H03H3/00 ,  H03H3/007 ,  G11B21/16 ,  G11B21/21

CPC classification number: H03H3/0077 ,  B81B3/007 ,  G11B5/484 ,  G11B21/16 ,  H03H9/24 ,  H03H9/2463 ,  H03H2009/0233

Abstract: The invention relates to a hollow microbeam that is fabricated upon a base or pedestal. Processing of the hollow microbeam includes forming at least one hollow channel in the microbeam by removing temporary fillers after formation of the microbeam. The inventive microbeam may provide at least an order of magnitude increase in oscillational frequency over a solid microbeam.

公开(公告)号：EP1356519B1

公开(公告)日：2014-04-30

申请号：EP01968251.7

申请日：2001-08-29

Applicant: Intel Corporation

Inventor： HENAO, Maria ,  MU, Xiao-Chun ,  MA, Qing ,  VU, Quat ,  LI, Jian

IPC: H01L23/532 ,  H01L21/56 ,  H01L23/00

CPC classification number: H01L24/19 ,  H01L21/568 ,  H01L23/532 ,  H01L24/96 ,  H01L24/97 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/12105 ,  H01L2224/16225 ,  H01L2224/20 ,  H01L2224/92 ,  H01L2224/97 ,  H01L2924/01005 ,  H01L2924/01013 ,  H01L2924/01027 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/10253 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/15311 ,  H01L2924/18162 ,  H01L2924/19041 ,  Y10T29/4935 ,  H01L2224/96 ,  H01L2224/82 ,  H01L2924/00

公开(公告)号：EP1831957B1

公开(公告)日：2009-01-28

申请号：EP05853644.2

申请日：2005-12-09

Applicant: Intel Corporation

Inventor： MA, Qing ,  LIN, Xintian ,  BETTNER, Allen

IPC: H01Q13/10

CPC classification number: H01Q13/103

Abstract: Briefly, in accordance with one embodiment of the invention, a slot antenna may include a primary slot (210) and one or more secondary slots (212). The size of the antenna may be reduced by adding one or more of the secondary slots which may add additional inductance to the antenna. Furthermore, the size of the antenna may be reduced by increasing the inductance of the secondary slots via increasing the length of the slots or by changing the shape of the slots. The antenna may include one or more MEMS varactors (216) coupled to one or more of the secondary slots. The resonant frequency of the slot antenna may be tuned to a desired frequency by changing the capacitance value of one or more of the MEMS varactors to a desired capacitance value.

公开(公告)号：EP1529300B1

公开(公告)日：2007-11-21

申请号：EP03751854.5

申请日：2003-08-13

Applicant: Intel Corporation

Inventor： MA, Qing

IPC: H01H59/00

CPC classification number: H01H59/0009

Abstract: A microelectromechanical system (MEMS) switch that includes a signal contact (78), an actuation electrode (76) and a beam (80) that engages the signal contact when a voltage is applied to the actuation electrode. The signal contact includes a first portion and a second portion. The actuation electrode is positioned between the first and second portions of the signal contact.

公开(公告)号：EP1700125A1

公开(公告)日：2006-09-13

申请号：EP04815440.5

申请日：2004-12-24

Applicant: INTEL CORPORATION

Inventor： RAO, Valluri ,  MA, Qing ,  YAMAKAWA, Mineo ,  BERLIN, Andrew ,  WANG, Li-Peng ,  ZHANG, Yuegang

IPC: G01N33/543 ,  G01N29/02

CPC classification number: G01N33/54373 ,  B82Y15/00 ,  B82Y30/00 ,  G01N27/126 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2437 ,  G01N29/348 ,  G01N33/0031 ,  G01N2291/02466 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426 ,  Y10T436/11 ,  Y10T436/143333 ,  Y10T436/144444 ,  Y10T436/25375

Abstract: Systems and methods for detecting the presence of biomolecules in a sample using biosensors that incorporate resonators which have functionalized surfaces for reacting with target biomolecules. In one embodiment, a device includes a piezoelectric resonator having a functionalized surface configured to react with target molecules, thereby changing the mass and/or charge of the resonator which consequently changes the frequency response of the resonator. The resonator’s frequency response after exposure to a sample is compared to a reference, such as the frequency response before exposure to the sample, a stored baseline frequency response or a control resonator’s frequency response.