Abstract:
A method of providing and developing a resist on a substrate (12) for constructing integrated circuits IC chips includes the steps depositing a thin film of amorphous silicon or hydrogenated amorphous silicon (13) on the substrate (12) and exposing portions of the amorphous silicon to low energy oxygen ion beams (14) to oxidize the amorphous silicon at those selected portions. The non-oxidized portions are then removed by etching with RF-excited hydrogen plasma. Components of the IC chip (16) can then be constructed through the removed portions of the resist (17). The entire process can be performed in an in-line vacuum production system having several vacuum chambers. Nitrogen or carbon ion beams can also be used.
Abstract:
An insulation panel that is bendable, light in weight, thinner, more durable and a more effective insulator for use on space vehicles, low temperature cryogenic vessels and common household appliances. The ultra-thin compact vacuum insulation panel has two hard, but bendable metal wall sheets (12, 14) closely spaced apart from each other and welded around the edges to enclose a vacuum chamber (15). Glass or ceramic spacers (16) hold the wall sheets apart. The spacers can be discrete spherical beads (16) or monolithic sheets of glass (62) or ceramic webs with nodules (57) which form essentially "point" or "line" contacts with the metal sheets. In the case of monolithic spacers that form "line" contacts, two such spacers (74, 75) with the line contacts running perpendicular to each other form effectively "point" contacts at the intersections. Corrugations accommodate bending and expansion, tubular insulated pipes and conduits, and preferred applications are also included.
Abstract:
A process is disclosed for separating low molecular weight components from complex aqueous organic mixtures. The process includes preparing a separation solution of supercritical carbon dioxide with an effective amount of an entrainer to modify the solvation power of the supercritical carbon dioxide and extract preselected low molecular weight components. The separation solution is maintained at a temperature of at least about 70 DEG C and a pressure of at least about 1500 psi. The separation solution is then contacted with the organic mixtures while maintaining the temperature and pressure as above until the mixtures and solution reach equilibrium to extract the preselected low molecular weight components from the organic mixtures. Finally, the entrainer/extracted components portion of the equilibrium mixture is isolated from the separation solution.
Abstract:
alpha -Substituted acrylic acid esters, their polymers and adhesives therefrom, and methods of synthesizing these compounds. The compounds of the invention are useful as intermediates in the synthesis of isocyanato esters and can be polymerized to form an effective, non-toxic adhesive. The method of the invention encompasses utilizing the adhesive composition in biomedical applications such as joining live animal tissue. Other adhesive applications are contemplated for living tissue and inanimate objects. The compounds are also used as monomers which can be polymerized, used in conjunction with other monomers as adhesive compositions, cross-linking agents, dye acceptor additives to vinylic polymers and useful chemical intermediates. The method of the invention encompasses synthesizing the aforementioned monomers and intermediates. Methyl alpha -(ethoxycarbonamido)-acrylate is synthesized from either DL-serine or methyl pyruvate. For use as an intermediate, silyl substitution of the compound is accomplished by reacting the ester with trimethylchlorosilane. This alpha -substituted silated ester is used as an intermediate in the preparation of methyl alpha -isocyanatoacrylate, which can be polymerized with N-vinyl-2-pyrrolidone to produce a desirable adhesive. Analagous procedures, starting with L-ethyl serine and L-benzyl serine, respectively, are followed to arrive at the corresponding ethyl and benzyl esters.