Method and apparatus for polarizing electromagnetic radiation

    公开(公告)号:US20060072207A1

    公开(公告)日:2006-04-06

    申请号:US10956197

    申请日:2004-09-30

    Abstract: According to one aspect of the invention, a method and apparatus for polarizing electromagnetic radiation is provided. The electromagnetic radiation may be divided into first and second portions, substantially all of the first portion may be linearly polarized in a first direction and substantially all of the second portion may be linearly polarized in a second direction, the first direction being substantially orthogonal to the second direction. The linear polarization of at least one of the first and second portions may be changed such that substantially all of both of the first and second portions are linearly polarized in a third direction. At least one of the first and second portions may be redirected such that substantially all of both the first and second portions are propagating in a fourth direction.

    Corner-fitting escape-proof repeating animal trap
    62.
    发明申请
    Corner-fitting escape-proof repeating animal trap 审中-公开
    角落防漏重复动物圈套

    公开(公告)号:US20060053682A1

    公开(公告)日:2006-03-16

    申请号:US11224305

    申请日:2005-09-13

    Abstract: A corner-fitting escape-proof repeating animal trap having a housing and two inclined plane trap assemblies arranged generally at right angles to one another within the housing. The housing includes a cover and a base defining an enclosure having five upstanding peripheral walls and a floor. Two ledged mounting wells are provided in the floor for securing the two trap assemblies in the enclosure, with two rectangular openings being formed in two of the walls to provide access to the trap assemblies. Formed in the inner surface of the molded cover is a pair of protrusions positioned so as to respectively engage with the tops of the trap assemblies when the cover is closed. The outer surface of the floor includes raised portions which, in conjunction with a ridge on the outer edge of the floor, define adjacent recesses that cooperate with protuberances on the outer top surface of the cover of another housing for non-sliding engagement therewith when two trap units are placed in a stacked relationship.

    Abstract translation: 具有外壳和两个倾斜平面捕集器组件的角落安装防漏重复动物捕集器,其大致在壳体内彼此成直角地排列。 壳体包括盖和基部,其限定具有五个直立的周壁和地板的外壳。 在地板上设有两个安装在井下的两个安装孔,用于将两个疏水组件固定在外壳中,两个矩形开口形成在两个壁中,以提供对陷阱组件的通路。 在模制盖的内表面上形成有一对突起,当盖封闭时,这些突起分别与捕集器组件的顶部接合。 地板的外表面包括凸起部分,其与地板的外边缘上的脊结合,限定与另一壳体的盖的外顶表面上的突起配合的相邻凹部,用于与两个壳体的两个 陷阱单元被放置在堆叠关系中。

    Dose transfer standard detector for a lithography tool
    65.
    发明申请
    Dose transfer standard detector for a lithography tool 有权
    用于光刻工具的剂量转移标准检测器

    公开(公告)号:US20050057739A1

    公开(公告)日:2005-03-17

    申请号:US10661971

    申请日:2003-09-11

    CPC classification number: G03F7/70558

    Abstract: A dose transfer standard detector measures radiation intensity and dose in a lithography tool. The lithography tool may be an Extreme Ultraviolet lithography (EUVL) tool. The dose transfer standard detector may transmit intensity and dose data to a computer, which analyzes the data. Based on the analyzed data, the lithography tool may be calibrated.

    Abstract translation: 剂量转移标准检测器测量光刻工具中的辐射强度和剂量。 光刻工具可以是极紫外光刻(EUVL)工具。 剂量转移标准检测器可将强度和剂量数据传输给计算机,该计算机分析数据。 基于分析的数据,可以校准光刻工具。

    Mirror assembly with thermal contour control
    66.
    发明授权
    Mirror assembly with thermal contour control 失效
    具有热轮廓控制的镜面组件

    公开(公告)号:US06846086B2

    公开(公告)日:2005-01-25

    申请号:US10095621

    申请日:2002-03-11

    CPC classification number: G03F7/70891 G02B7/1815 G02B26/06

    Abstract: A system for compensating for heating effects in a mirror. Different areas of the mirror are associated with buried temperature sensors. Each temperature sensor is monitored, and used to create a map of current temperatures. The map of current temperatures may be corrected according to baseline values, and then is used to compensate for temperature differences.

    Abstract translation: 用于补偿镜子中的加热效应的系统。 镜子的不同区域与掩埋温度传感器相关联。 监控每个温度传感器,并用于创建当前温度的映射。 当前温度的映射可以根据基线值进行校正,然后用于补偿温度差异。

    Reflective spectral filtering of high power extreme ultra-violet radiation

    公开(公告)号:US06707602B2

    公开(公告)日:2004-03-16

    申请号:US10408075

    申请日:2003-04-03

    CPC classification number: G03F7/70575 G03F7/70158 G03F7/70191 G03F7/702

    Abstract: In one embodiment of the invention, a grating structure etched on a mirror substrate has a grating period causing diffracting, out of an optical path, a first incident radiation within a first band around a first wavelength. A multi-layer coating deposited on the grating structure reflects the first incident radiation, in the optical path, within the first band and a second incident radiation within a second band around a second wavelength. In another embodiment, a first multi-layer coating deposited on a mirror substrate reflects a first incident radiation within a first band around a first wavelength and a second incident radiation, in an optical path, within a second band around a second wavelength. A grating structure is deposited on the first multi-layer coating. The grating structure is etched to have a grating period causing diffracting, out of the optical path, the second incident radiation within the second band.

    Method of reducing sputtering burn-in time, minimizing sputtered
particulate, and target assembly therefor
    69.
    发明授权
    Method of reducing sputtering burn-in time, minimizing sputtered particulate, and target assembly therefor 失效
    降低溅射老化时间,最小化溅射颗粒的方法,以及靶组装

    公开(公告)号:US6030514A

    公开(公告)日:2000-02-29

    申请号:US850707

    申请日:1997-05-02

    CPC classification number: C23C14/3414

    Abstract: A target for sputtering is subjected to a surface treatment process and special packaging after target manufacture for improved sputtering performance and process and yield by reducing particulates. The sputtering target is first surface treated to remove oxides, impurities and contaminants. The surface treated target is then covered with a metallic enclosure and, optionally, a passivating barrier layer. The metallic enclosure protects the target surface from direct contact with subsequently employed packaging material such as plastic bags, thereby eliminating sources of organic materials during sputtering operations. The surface treatment of the target removes deformed material, smearing, twins, or burrs and the like from the target surface, reducing "burn-in" or sputter conditioning time prior to production sputtering of thin films.

    Abstract translation: 在目标制造之后对溅射靶进行表面处理和特殊包装,以改善溅射性能和工艺,并通过减少微粒产生收率。 首先对溅射靶进行表面处理以除去氧化物,杂质和污染物。 然后用金属外壳和任选的钝化阻挡层覆盖表面处理的靶。 金属外壳保护目标表面免受与随后使用的包装材料如塑料袋的直接接触,从而在溅射操作期间消除有机材料的来源。 靶的表面处理从目标表面去除变形的材料,涂抹,双胞胎或毛刺等,在薄膜的生产溅射之前减少“老化”或溅射调理时间。

    Safety razor
    70.
    发明授权
    Safety razor 失效
    安全剃须刀

    公开(公告)号:US3950848A

    公开(公告)日:1976-04-20

    申请号:US441007

    申请日:1974-03-18

    CPC classification number: B26B21/225

    Abstract: A safety razor comprising a razor blade support member connected to a handle through a linkage assembly is disclosed. The linkage assembly maintains the angle of the razor blade support member in relation to the handle at substantially a constant angle to prevent the razor blade from moving in a circular path. The razor blade support member is spring biased and retracts responsive to pressure being applied to it by the force during shaving, and maintains the pressure applied by the safety razor upon the face constant. The spring biasing means associated with the linkage assembly may be adjusted to vary the applied pressure.

    Abstract translation: 公开了一种安全剃刀,其包括通过连杆组件连接到手柄的剃刀刀片支撑构件。 连杆组件以大致恒定的角度保持剃刀刀片支撑构件相对于把手的角度,以防止剃刀刀片在圆形路径中移动。 剃刀刀片支撑构件被弹簧偏置并且响应于在剃刮期间的力施加到其上的压力而回缩,并且将由安全剃刀施加的压力保持在面部常数上。 可以调节与连杆组件相关联的弹簧偏压装置以改变施加的压力。

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