Abstract:
According to one aspect of the invention, a method and apparatus for polarizing electromagnetic radiation is provided. The electromagnetic radiation may be divided into first and second portions, substantially all of the first portion may be linearly polarized in a first direction and substantially all of the second portion may be linearly polarized in a second direction, the first direction being substantially orthogonal to the second direction. The linear polarization of at least one of the first and second portions may be changed such that substantially all of both of the first and second portions are linearly polarized in a third direction. At least one of the first and second portions may be redirected such that substantially all of both the first and second portions are propagating in a fourth direction.
Abstract:
A corner-fitting escape-proof repeating animal trap having a housing and two inclined plane trap assemblies arranged generally at right angles to one another within the housing. The housing includes a cover and a base defining an enclosure having five upstanding peripheral walls and a floor. Two ledged mounting wells are provided in the floor for securing the two trap assemblies in the enclosure, with two rectangular openings being formed in two of the walls to provide access to the trap assemblies. Formed in the inner surface of the molded cover is a pair of protrusions positioned so as to respectively engage with the tops of the trap assemblies when the cover is closed. The outer surface of the floor includes raised portions which, in conjunction with a ridge on the outer edge of the floor, define adjacent recesses that cooperate with protuberances on the outer top surface of the cover of another housing for non-sliding engagement therewith when two trap units are placed in a stacked relationship.
Abstract:
An illumination system for an extreme ultraviolet (EUV) lithography system may include multiple sources of EUV light. The system may combine the light from the multiple sources when illuminating a mask.
Abstract:
An electronic form routing system that includes a front-end server accessible to the users over a network via an encrypted link and a secure back-end database for storing the electronic forms and the data input by users into the form.
Abstract:
A dose transfer standard detector measures radiation intensity and dose in a lithography tool. The lithography tool may be an Extreme Ultraviolet lithography (EUVL) tool. The dose transfer standard detector may transmit intensity and dose data to a computer, which analyzes the data. Based on the analyzed data, the lithography tool may be calibrated.
Abstract:
A system for compensating for heating effects in a mirror. Different areas of the mirror are associated with buried temperature sensors. Each temperature sensor is monitored, and used to create a map of current temperatures. The map of current temperatures may be corrected according to baseline values, and then is used to compensate for temperature differences.
Abstract:
In one embodiment of the invention, a grating structure etched on a mirror substrate has a grating period causing diffracting, out of an optical path, a first incident radiation within a first band around a first wavelength. A multi-layer coating deposited on the grating structure reflects the first incident radiation, in the optical path, within the first band and a second incident radiation within a second band around a second wavelength. In another embodiment, a first multi-layer coating deposited on a mirror substrate reflects a first incident radiation within a first band around a first wavelength and a second incident radiation, in an optical path, within a second band around a second wavelength. A grating structure is deposited on the first multi-layer coating. The grating structure is etched to have a grating period causing diffracting, out of the optical path, the second incident radiation within the second band.
Abstract:
The present invention describes an apparatus comprising an optical array generating a distribution of partial coherence of light energy and an aperture to select a subset of said distribution of partial coherence.
Abstract:
A target for sputtering is subjected to a surface treatment process and special packaging after target manufacture for improved sputtering performance and process and yield by reducing particulates. The sputtering target is first surface treated to remove oxides, impurities and contaminants. The surface treated target is then covered with a metallic enclosure and, optionally, a passivating barrier layer. The metallic enclosure protects the target surface from direct contact with subsequently employed packaging material such as plastic bags, thereby eliminating sources of organic materials during sputtering operations. The surface treatment of the target removes deformed material, smearing, twins, or burrs and the like from the target surface, reducing "burn-in" or sputter conditioning time prior to production sputtering of thin films.
Abstract:
A safety razor comprising a razor blade support member connected to a handle through a linkage assembly is disclosed. The linkage assembly maintains the angle of the razor blade support member in relation to the handle at substantially a constant angle to prevent the razor blade from moving in a circular path. The razor blade support member is spring biased and retracts responsive to pressure being applied to it by the force during shaving, and maintains the pressure applied by the safety razor upon the face constant. The spring biasing means associated with the linkage assembly may be adjusted to vary the applied pressure.