公开(公告)号：JP2001043971A

公开(公告)日：2001-02-16

申请号：JP21805099

申请日：1999-07-30

Applicant: SEIKO EPSON CORP

Inventor： KIMURA MUTSUMI ,  MAEDA HIROSHI ,  MATSUEDA YOJIRO ,  KITAWADA KIYOBUMI

IPC: G09F9/30 ,  H01L51/50 ,  H05B33/04 ,  H05B33/12 ,  H05B33/26

Abstract: PROBLEM TO BE SOLVED: To provide an organic electroluminescent element preventing the intrusion of impurities into a negative electrode, restraining the occurrence of a dark spot and having excellent visibility over a long time. SOLUTION: The negative electrode of this organic electroluminescent element has a two-layer structure comprising a negative electrode lower layer 13-1 and a negative electrode upper layer 13-2, and the negative electrode upper layer 13-2 is so formed as to cover the entire negative electrode lower layer 13-1 including its upper surface and peripheral surface so as not to be exposed to the front surface of the device. Thereby, the intrusion of impurities such as oxygen and moisture into the negative electrode of the organic electroluminescent element can effectively be prevented, and the occurrence and growth of a dark spot can be restrained. As a result, this display panel having excellent visibility over a long time can be provided.

公开(公告)号：JP2000286181A

公开(公告)日：2000-10-13

申请号：JP8944499

申请日：1999-03-30

Applicant: SEIKO EPSON CORP

Inventor： INOUE SATOSHI ,  MIYASAKA MITSUTOSHI ,  YUDASAKA KAZUO ,  UTSUNOMIYA SUMIO ,  HIRAIWA TAKU ,  KITAWADA KIYOBUMI ,  MATSUEDA YOJIRO

IPC: H01L21/027 ,  G03F7/20

Abstract: PROBLEM TO BE SOLVED: To improve throughput as much as possible, even if high-resolution and low-resolution patterns coexist. SOLUTION: This aligner comprises a first exposure optical system 2 arranged at a first location, a second exposure optical system 4 arranged at a second location and having a resolution higher than that of the system 2, first and second stages 5 and 7 for mounting thereon a board 80 onto which a pattern will be transferred, the board 80 having a pattern transferred thereonto, a stage drive section 20 for driving the stages 5 and 7, a drive control section 22 for controlling the section 20, such that the stages 5 and 7 are stopped at reference positions 2a and 4a of the systems 2 and 4, a board position detecting section 10 mounted on one of the systems 2 and 4 for detecting the position of the board 80 mounted on one of such systems, an exposure data storage section 14 for storing the outputs from the section 10 and exposure data of the board 80, and an exposure control section 12 for transferring a pattern onto the board 80, by controlling the systems 2 and 4 based on the data stored in the section 14.

公开(公告)号：JP2000284494A

公开(公告)日：2000-10-13

申请号：JP9386499

申请日：1999-03-31

Applicant: SEIKO EPSON CORP

Inventor： HIRAIWA TAKU ,  KITAWADA KIYOBUMI ,  INOUE SATOSHI ,  UTSUNOMIYA SUMIO ,  YUDASAKA KAZUO ,  MIYASAKA MITSUTOSHI ,  MATSUEDA YOJIRO

IPC: H01L21/027 ,  G03F7/20

Abstract: PROBLEM TO BE SOLVED: To provide an exposure device constituted so that an optical pattern can be transferred on a substrate with a high throughput even when the patterns whose resolution to be required are mutually different coexist. SOLUTION: This exposure device is provided with a substrate stage for placing the substrate on which the pattern is formed according to different design rules, a 1st exposure optical system 2A, a 2nd exposure device 4A and an exposure control part. Then, the optical systems 2A and 4A having the different resolution are constituted by providing the optical system 2A with a 1st light source ML1 emitting a light beam having 1st wavelength and providing the optical system 4A with a 2nd light source ML2 emitting a light beam having 2nd wavelength being different from the 1st wavelength. By the exposure control part, the optical systems 2A and 4A are selectively switched so that the optical patterns formed based on the different design rules can be projected on the substrate with the different resolution corresponding to the respective design rules from the optical systems 2A and 4A.

公开(公告)号：JP2000214483A

公开(公告)日：2000-08-04

申请号：JP1469499

申请日：1999-01-22

Applicant: SEIKO EPSON CORP

Inventor： MATSUEDA YOJIRO

IPC: G02F1/136 ,  G02F1/1368

Abstract: PROBLEM TO BE SOLVED: To provide an electro-optic device which is capable of increasing the aperture ratio of the electro-optic device having plural pixel parts. SOLUTION: Drain regions D of TFTs 30 for driving liquid crystals are connected via contact holes 11 to metal electrodes 15. These metal electrodes 15 are connected via contact holes 8 to pixel electrodes 9. At this time, the metal electrodes 15 are extended and formed to the peripheral side of the pixel parts with respect to the positions where the contact holes 11 are formed. The contact holes 8 are formed in the portions of the extended metal electrodes 15. Since the contact holes 8 which affect the alignment characteristic of liquid crystals are formed in the positions distant from the centers of the pixels, the disclination at which the alignment indicates continuous regions can be formed on the more outside and the aperture ratio as the pixel parts is improved.

公开(公告)号：JP2000147464A

公开(公告)日：2000-05-26

申请号：JP37118199

申请日：1999-12-27

Applicant: SEIKO EPSON CORP

Inventor： MATSUEDA YOJIRO

IPC: G09G3/36 ,  G02F1/133 ,  G09G3/20

Abstract: PROBLEM TO BE SOLVED: To obtain a uniform and highly fine picture quality in which deviations of dots and color slippages are not generated on a screen by making time constants of clock lines and those of video lines roughly equal and making a direction along which clock pulses are supplied to the clock lines and a direction along which signals are supplied to the video lines roughly equal to prevent deviations from being generated in timings when video signals are written on signal lines. SOLUTION: Clock lines 12 to 15 and power lines 16, 17 are arranged so that a direction along which clock pulses CL1, the inverse of CL1, CL2 and the inverse of CL2 are inputted to a shift register 11 is the same direction as that of video signals V1 to V3. Consequently, deviations are not generated in timings when the video signals V1 to V3 are written on signal lines X1, X2, X3, X4,.... Especially, when respective time constants of the clock lines 12 to 15 and the video lines 18 to 20 are the same order, it is possible to make timings coincide completely. Moreover, noise countermeasures are executed in this device by performing special wirings.

公开(公告)号：JPH11326951A

公开(公告)日：1999-11-26

申请号：JP13890698

申请日：1998-05-20

Applicant: SEIKO EPSON CORP

Inventor： MATSUEDA YOJIRO

IPC: G02F1/1345 ,  G02F1/136 ,  G02F1/1362 ,  G02F1/1368

Abstract: PROBLEM TO BE SOLVED: To produce an electrooptical device incorporated with a driving circuit by using a stepper by performing projection exposure so that plural picture element parts may have a prescribed pitch in a first direction and plural first- direction driving circuit cells may have a second pitch smaller than the first pitch with respect to each block area. SOLUTION: At the time of reduction projection exposure for each block area, exposure is so performed that plural driver circuit cells provided for respective signal lines through a glass mask 330 may have a prescribed pitch smaller than the picture element pitch in the X direction with respect to a signal line driving circuit. With respect to a scanning line driving circuit, exposure is so performed that plural driver circuit cells provided for respective signal lines through the glass mask 330 may have a prescribed pitch smaller than the picture element pitch in the Y direction. At each time of completion of exposure in one block area, step movement is performed by a stepper 300, and a mother substrate 100' is moved relatively to a light source 310 for exposure to repeatedly expose another block area to light.

公开(公告)号：JPH10214065A

公开(公告)日：1998-08-11

申请号：JP2956897

申请日：1997-01-29

Applicant: SEIKO EPSON CORP

Inventor： MATSUEDA YOJIRO

IPC: G02F1/13 ,  G02F1/133 ,  G02F1/1339 ,  G02F1/1362 ,  G09F9/30 ,  G09G3/00 ,  G09G3/20 ,  G09G3/36 ,  H03M1/76 ,  H03M1/80 ,  H03M1/82

Abstract: PROBLEM TO BE SOLVED: To obtain inspection technology for an active matrix substrate on which a digital driver is mounted. SOLUTION: The digital driver 330 which has a function for placing an output terminal in a high-impedance state and drives data lines and an inspecting circuit 340 which is provided at ends of the data lines on the opposite side from the digital driver 330 are provided. The inspection circuit 340 has two-way switches provided by the data lines and a control means which controls the opening and closure of the switches. The inspection circuit 340 is used to make it possible to decide whether or not there is a spot defect in addition to the inspection of the breaking of a data line and digital driver output. This circuit is dedicated to the inspection and then extremely small-sized, and the circuit can be arranged in a dead space.

公开(公告)号：JPH1096943A

公开(公告)日：1998-04-14

申请号：JP19734797

申请日：1997-07-23

Applicant: SEIKO EPSON CORP

Inventor： MATSUEDA YOJIRO

IPC: G02F1/1343 ,  G02F1/136 ,  G02F1/1368 ,  G09G3/36

Abstract: PROBLEM TO BE SOLVED: To make possible a high definition and bright image display by simultaneously selecting two pieces each of scanning lines making adjacent two pieces a pair and constituting so that the combination of the scanning lines becoming a pair is chanted at every field. SOLUTION: A TFT is arranged on an intersected point between a signal line 61 and the scanning line 62. The source 65 and the drain 66 of the TFT are formed by a thin film different from a channel 64. Hold capacity 68 of two pixels placing on both sides of this electrode are arranged on a common electrode 67. Both of the drain 66 of the TFT and the hold capacity 68 are connected to a pixel electrode 69. Then, two pieces each of the scanning line 62 are selected simultaneously making adjacent two pieces a pair, and the combination of the scanning lines 62 becoming a pair is changed at every field. In the case of a transmission type display device, a part shown in an opening part 70 becomes an area effective for the image display. Since the area excepting the opening part 70 deteriorates picture quality, it is covered by a light shield layer usually to be made so that light doesn't transmit through.

公开(公告)号：JPH1068973A

公开(公告)日：1998-03-10

申请号：JP19734697

申请日：1997-07-23

Applicant: SEIKO EPSON CORP

Inventor： MATSUEDA YOJIRO

IPC: G02F1/136 ,  G02F1/133 ,  G02F1/1343 ,  G02F1/1365 ,  G02F1/1368 ,  G09G3/36

Abstract: PROBLEM TO BE SOLVED: To maintain high numerical aperture even when a picture element pitch is reduced and to realize bright high-definition picture display by arranging a common electrode electrically connecting a retaining capacitor between two scanning lines being an odd numbered line and a next even numbered line or an even numbered line and a next odd numbered line. SOLUTION: The common electrode 10 electrically connecting the retaining capacitor is arranged by one per two scanning lines. Namely, the electrode 10 is arranged between two scanning lines Y1 and Y2 being the odd numbered line and the next even numbered line. It is possible to shift the electrode 10 by one line and arrange it between two scanning line Y2 and Y3 being the even numbered line and the next odd numbered line. The retaining capacitor 4 and 5 are formed on the same electrode wiring so as to reduce occupied area. By such constitution, while generating the sufficient retaining capacitor for the picture element, the number of the common electrodes is reduced to half the number in the conventional device, and the number of the source electrode connection parts of signal conductors X1 and X2 and TFTs 1 to 3 is also reduced to half, and the high numerical aperture is maintained even when the picture element pitch is reduced.

公开(公告)号：JPH1039340A

公开(公告)日：1998-02-13

申请号：JP11146597

申请日：1997-04-28

Applicant: SEIKO EPSON CORP

Inventor： MATSUEDA YOJIRO

IPC: G02F1/1345 ,  G02F1/136 ,  G02F1/1368

Abstract: PROBLEM TO BE SOLVED: To make it possible to easily check the outputs of drivers in a substrate state by outputting the check outputs of the respective outputs meeting the respective outputs from driver circuits via data lines and switching elements to output terminals for checking. SOLUTION: X driver output check circuits 4 consist of the switching elements 12 to 14 and their control inputs and outputs 26. The signals for one line of image data may be fetched from the outputs 25 when X drivers 2 are operated in the state of putting such input signals that close all of the switching elements 12 to 14 into the inputs 25. The abnormal defects, if any, existing at the discontinuous points and voltage levels of these signals are indicative of the fact that the operation of the row meeting the timing is defective. The Y drivers also successively select scanning lines 9 to 11 but since the driver outputs are binary values of HL, the Y driver check circuits 5 may be composed of the switching elements 15 to 17 to be controlled by these signals and their inputs and outputs 27, 28.