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公开(公告)号：JPH07110961A
公开(公告)日：1995-04-25
申请号：JP28060493
申请日：1993-10-14
Applicant: SONY CORP
Inventor： SATO SHUZO
Abstract: PURPOSE:To obtain a bonded prism in which the surface of the prism can be coated with a reflecting film, a BS film, a PBS film or the like even at a high temperature after prism have been bonded. CONSTITUTION:When a plurality of prisms 1, 2 are bonded at their optical faces, a fusing glass is used as a bonding agent. Thereby, the surface of the bonded prisms 1, 2 can be coated with various kinds of optical films at a high temperature after the prisms have been bonded, and the function of the bonded prisms 1, 2 can be increased. In addition, the fusing glass is filled into a groove on the bonding face of at least one out of the prisms 1, 2 and the prism is made to function as an optical element after the fusing glass has been solidified. Thereby, the function of the bonded prisms 1, 2 can be increased.
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公开(公告)号：JPH06143073A
公开(公告)日：1994-05-24
申请号：JP31150192
申请日：1992-10-27
Applicant: SONY CORP
Inventor： SATO SHUZO
IPC: B23Q3/08
Abstract: PURPOSE:To provide a vacuum chuck plate which does not require any mask at the time of change in tooling for a work, can surely chuck the work, and thereby allows the work to be stably machined with high accuracy. CONSTITUTION:A porous ceramic layer 3 is formed over the chuck surface 6 of a plate 1, a sealing section 5 is provided with the ceramic layer 3 impregnated with resin in an epoxy series at a specified position in order to cut off intake air, and intake air ports 8a through 8c which connect adsorbing sections 4a through 4c at a gap between the sealing sections to an external vacuum sources, are formed in the inside of the base section 2 of the plate 1.
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公开(公告)号：JPH04111771A
公开(公告)日：1992-04-13
申请号：JP22808490
申请日：1990-08-31
Applicant: SONY CORP
Inventor： SATO SHUZO
Abstract: PURPOSE:To continuously and stably perform high accurate mirror surface grinding work by setting deflection of a conductive grindstone, drive-rotated by a spindle, to 1/3 times or less the mean size of abrasive grains. CONSTITUTION:Deflection of a conductive grindstone 5, drive rotated by an air spindle 1, is set to 1/3 times or less the mean size of abrasive grains. Consequently, a scratch and plucking or the like, caused by a metal bond coming into contact with a workpiece 6, are eliminated to cause a cutting edge of the fine abrasive grain to effectively act on a fragile material. Accordingly, stable and high accurate mirror surface work is continuously performed by a synergetic effect with removal of blinding by electrolytic dressing of an electrolytic electrode 11.
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64.发明专利Photoelectric converter, its manufacturing method, and optical information processor 有权光电转换器及其制造方法和光信息处理器
公开(公告)号：JP2007017653A
公开(公告)日：2007-01-25
申请号：JP2005198403
申请日：2005-07-07
Inventor： HORIKOSHI HIROSHI , SATO SHUZO , OTORII SUGURU , OTANI EIJI , UENO SHUNEI
IPC: G02B6/42 , G02B6/12 , G02B6/122 , H01L31/0232 , H01S5/183
Abstract: PROBLEM TO BE SOLVED: To provide a photoelectric converter effectively preventing dispersion of light, and also to provide its manufacturing method and also an optical information processor. SOLUTION: The photoelectric converter 1 includes a photoelectric conversion element 2, and an element body 3 where the conversion element 2 is positioned, wherein a photonic crystal structure 4 is formed in the element body 3 on the face side opposite to the conversion element 2, and at least the light beam component of the light emitted from the conversion element 2 is subjected to change in the optical path through the photonic crystal structure 4. The manufacturing method of the photoelectric converter has: a process where the conversion element 2 is positioned in the element body 3; and a process where the photonic crystal structure 4 is formed in the element body 3 on the face side opposite to the conversion element 2. The optical information processor 13 is composed of the photoelectric converter 1, an optical waveguide section 14, and a driver element 15 for driving the photoelectric conversion element 2. COPYRIGHT: (C)2007,JPO&INPIT
Abstract translation: 要解决的问题：提供一种有效防止光分散的光电转换器，还提供其制造方法以及光信息处理器。 解决方案：光电转换器1包括光电转换元件2和位于转换元件2的元件体3，其中光子晶体结构4形成在与转换元件相反的正面上的元件体3中 元件2，并且至少从转换元件2发射的光的光束分量经过光子晶体结构4的光路的变化。光电转换器的制造方法具有：转换元件2 定位在元件主体3中; 以及在与转换元件2相对的面侧的元件体3中形成有光子晶体结构体4的处理。光信息处理部13由光电转换器1，光波导路14，驱动元件 15，用于驱动光电转换元件2.版权所有（C）2007，JPO＆INPIT
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65.发明专利Photoelectric converter, its manufacturing method and optical information processor 审中-公开光电转换器及其制造方法和光信息处理器
公开(公告)号：JP2006310417A
公开(公告)日：2006-11-09
申请号：JP2005128841
申请日：2005-04-27
Inventor： OTORII SUGURU , HINO TOMOKIMI , WATABE YOSHIAKI , YAMAUCHI YOSHINORI , KODA RINTARO , SATO SHUZO , HORIKOSHI HIROSHI , OTANI EIJI , UENO SHUNEI
Abstract: PROBLEM TO BE SOLVED: To provide a photoelectric converter, its manufacturing method, and an optical information processor which improves the yield and has a high reliability and high characteristics. SOLUTION: The photoelectric converter 6 has: a photoelectric conversion element 2; an element base 1 which has the element 2 and is permeable to a light of emission or a light of incidence; a lens 4 provided at the corresponding position of the base 1 itself to the element 2 on the opposite surface of the element base 1 to the element 2; and a protection layer 5 which is provided on the surface of the base 1 where the lens 4 is formed and is permeable to a light of emission or a light of incidence. The lens 4 is buried in the protection layer 5. The opposite surface of the protection layer 5 to the lens 4 is flat. The optical information processor is composed of the photoelectric converter, a light guide, and a drive element for driving the photoelectric conversion element. COPYRIGHT: (C)2007,JPO&INPIT
Abstract translation: 要解决的问题：提供一种光电转换器，其制造方法和提高产量并具有高可靠性和高特性的光信息处理器。 光电转换器6具有光电转换元件2， 元件基座1，其具有元件2并且可透射发射光或入射光; 设置在基体1本身的相应位置处的元件4与元件基体1的与元件2相反的表面上的元件2; 以及保护层5，其设置在形成有透镜4的基部1的表面上，并且透射发光或发光。 透镜4被埋在保护层5中。保护层5相对于透镜4的相对表面是平坦的。 光信息处理器由光电转换器，光导和用于驱动光电转换元件的驱动元件组成。 版权所有（C）2007，JPO＆INPIT
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Patent Agency Ranking66.发明专利Optical waveguide device, optical waveguide module, and optoelectric composite device 审中-公开光波器件，光波导模块和光电复合器件
公开(公告)号：JP2006171157A
公开(公告)日：2006-06-29
申请号：JP2004360955
申请日：2004-12-14
Inventor： HORIKOSHI HIROSHI , SATO SHUZO , OTORII SUGURU , OTANI EIJI , UENO SHUNEI
IPC: G02B6/122 , G02B6/42 , H01L31/0232
Abstract: PROBLEM TO BE SOLVED: To provide an optical waveguide device which can be easily manufactured and at a low cost, and which can perform stable optical transmission, and also which can improve the speed of the optical transmission, and to provide an optical waveguide module and an optoelectric composite device. SOLUTION: In the optical waveguide device 1, optical waveguide layers 5 each of which is constituted of cores 3 and clads 4a, 4b which are formed by silicon oxidized films whose refractive indexes are different from each other are provided to a silicon substrate 2 and the refractive index of the silicon oxidized film as the clads is smaller than that of the silicon oxidized film as the core 3. In the optical waveguide module 8, the optical waveguide layers 5 and a light-receiving element constituting layer 9 deposited in a recessed part 10 which is provided by removing a part of the optical waveguide layer 5 are provided to the silicon substrate 2. As regards the optoelectric composite device 14, a semiconductor layer 17 is jointed to the silicon substrate 2 including the optical waveguide layers 5 and the light-receiving element 9 in the optical waveguide module 8. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种可以容易地制造并且成本低且可以执行稳定的光传输的光波导装置，并且还可以提高光传输的速度，并且提供光学 波导模块和光电复合器件。 解决方案：在光波导装置1中，将由芯3构成的光波导层5和由折射率彼此不同的硅氧化膜形成的包层4a，4b设置在硅基板 2，作为包层的硅氧化膜的折射率小于作为芯3的硅氧化膜的折射率。在光波导模块8中，光波导层5和构成层9的光接收元件沉积在 通过去除光波导层5的一部分而设置的凹部10设置在硅基板2上。关于光电复合元件14，将半导体层17接合到包括光波导层5的硅基板2 和光波导模块8中的光接收元件9.版权所有（C）2006，JPO＆NCIPI
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公开(公告)号：JP2006053472A
公开(公告)日：2006-02-23
申请号：JP2004236535
申请日：2004-08-16
Inventor： OTANI EIJI , SATO SHUZO , HORIKOSHI HIROSHI , OTORII SUGURU , UENO SHUNEI
Abstract: PROBLEM TO BE SOLVED: To provide an optical waveguide module capable of reducing optical coupling loss, and an optical information processing apparatus. SOLUTION: The optical waveguide module 2 comprises an optical waveguide device 8 in which a first semiconductor layer 5, an insulation layer 6 and a second semiconductor layer 7 are laminated in order and an optical waveguide layer 3 is formed on the first waveguide layer 5, and a light incident means (for example, light emission element such as a laser) 9 in which the light is made incident to the optical waveguide layer 3 of the optical waveguide device 8. Therein, a recessed part 10 which at least attains to the optical waveguide layer 3 from the second semiconductor layer 7 is formed and the light incident means 9 is arranged in the recessed part 10 in the state of being positioned on a light incident edge surface 11 of the optical waveguide layer 3 facing the recessed part 10. The optical information processing apparatus 1 comprises the optical waveguide module 2 and a light receiving means 4 which receives emission light from the optical waveguide layer 3. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种能够减少光耦合损耗的光波导模块，以及光信息处理装置。 解决方案：光波导模块2包括光波导器件8，其中依次层叠第一半导体层5，绝缘层6和第二半导体层7，并且在第一波导上形成光波导层3 层5，以及入射到光波导器件8的光波导层3的光入射的装置（例如激光器等的发光元件）9。其中，凹部10至少 形成从第二半导体层7到达光波导层3的光入射装置9，并且光入射装置9被布置在位于光波导层3的光入射边缘表面11上的状态下， 光信息处理装置1包括光波导模块2和接收来自光波导层3的发射光的光接收装置4.版权所有（C）200 6，JPO＆NCIPI
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公开(公告)号：JP2004223665A
公开(公告)日：2004-08-12
申请号：JP2003015928
申请日：2003-01-24
Inventor： KOMAI HISANORI , YASUDA YOSHIYA , SATO SHUZO
CPC classification number: B24B37/046 , B23H5/06 , B24B37/042 , B24B57/02
Abstract: PROBLEM TO BE SOLVED: To provide an electrolytic polishing device capable of simplifying a device constitution, lengthening the service life of a polishing pad and keeping a polishing characteristic constant in a continuous processing.
SOLUTION: This device is provided with a polishing surface plate 11 including a rotatably provided cathode electrode 13, the polishing pad 16 installed on the polishing surface plate 11, impregnating electrolytic polishing liquid and electrically conducting from a front surface side to a rear surface side in a state of impregnated electrolytic polishing liquid, a substrate holding part 21 rotatably installed at a position opposite to the polishing pad 16 to hold a surface 51S to be polished of a substrate 51 to be polished to be faced to a polishing surface 16S of the polishing pad 16, an anode electrode 41 in contact with the surface 51S to be polished of the substrate 51 to be polished held by the substrate holding part 21, a chemicals supplying part 31 for supplying chemicals to be used for polishing to the polishing pad 16, and a power source 42 for supplying power to the cathode electrode 13 and the anode electrode 41.
COPYRIGHT: (C)2004,JPO&NCIPI-
公开(公告)号：JP2004133300A
公开(公告)日：2004-04-30
申请号：JP2002299292
申请日：2002-10-11
Inventor： OTORII SUGURU , NOGAMI TAKESHI , TAI KAORI , HORIKOSHI HIROSHI , TAKAHASHI SHINGO , SATO SHUZO , KOMAI HISANORI
Abstract: PROBLEM TO BE SOLVED: To provide a metallic mold for a waveguide by which manufacturing cost is reduced, and also to provide a method of manufacturing the waveguide. SOLUTION: A photosensitive resin layer 11 is formed on a substrate, the photosensitive resin layer 11 is exposed to a synchrotron radiation SR using a mask M having a prescribed pattern and then developed. Metal is made to be deposited on a part where the photosensitive resin layer 11 is removed and a part where the photosensitive resin layer 11 is not exposed is removed to form the metal mold for the waveguide. The step for exposing the photosensitive resin layer 11 comprises a step wherein the synchrotron radiation SR is made incident at about 45° angle to the surface of the photosensitive resin layer 11 to expose the photosensitive resin layer 11 using the mask M. A mother stamper is formed by transferring the projecting and recessed shape of the the metal mold for the waveguide as a master stamper to the mother stamper and the projecting and recessed shape of the mother stamper is transferred to form the waveguide. COPYRIGHT: (C)2004,JPO
Abstract translation: 要解决的问题：提供一种用于制造成本降低的波导管的金属模具，并且还提供制造波导的方法。 解决方案：在基板上形成感光性树脂层11，使用具有规定图案的掩模M将感光性树脂层11暴露于同步加速器辐射SR，然后显影。 将金属沉积在去除感光性树脂层11的部分上，并且除去感光性树脂层11未露出的部分，形成波导管的金属模具。 用于曝光感光性树脂层11的步骤包括以同步加速器辐射SR与感光性树脂层11的表面大约成45度的角度入射的步骤，以使用掩模M曝光感光性树脂层11.母印模 通过将用于波导的金属模的突出和凹陷形状作为主压模传送到母模，并且母压模的突出和凹陷形状被转印以形成波导。 版权所有（C）2004，JPO
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公开(公告)号：JP2004001183A
公开(公告)日：2004-01-08
申请号：JP2003046360
申请日：2003-02-24
Inventor： SATO SHUZO , OTORII SUGURU , KOMURO YOSHIAKI , HAYAKAWA HIDEAKI
Abstract: PROBLEM TO BE SOLVED: To provide a polishing device and a polishing process capable of simultaneously satisfying flatness of a surface of a polishing object such as a wafer and uniformity of polishing quantity within a polishing objective surface. SOLUTION: This polishing device to polish the surface of the wafer 2 by making a polishing pad 8 fixed on a surface plate 34 slide on the surface of the wafer 2, stopping or rotating the wafer 2 and rotating the polishing pad 8 rotates the polishing pad 8 at high speeds so that a frequency component of relative excitation by a small step of the surface of the wafer 2 becomes larger than a resonance point and stops or rotates the wafer 2 at low speeds so that the frequency component of relative excitation by large waviness of the surface of the wafer 2 becomes smaller than the resonance point. COPYRIGHT: (C)2004,JPO
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