公开(公告)号：KR1020030010980A

公开(公告)日：2003-02-06

申请号：KR1020010045688

申请日：2001-07-28

Applicant: 삼성전자주식회사

Inventor： 박호준 ,  임근배

IPC: B81C1/00

CPC classification number: B81B7/0083 ,  B81B2201/02 ,  B81B2201/031 ,  B81B2201/05 ,  B81C1/00047 ,  B81C1/00063 ,  B81C1/00071

Abstract: PURPOSE: A structure having a micro channel, and a sensor and heaters directly contacting with fluid inside the micro channel, and a method for manufacturing the same are provided to reliably measure physical characteristics of the fluid flowing in the micro channel in real time. CONSTITUTION: A structure having a micro channel(50) includes a semiconductor substrate(48) having a predetermined length of groove for forming a micro channel, and a glass substrate(40) of which one side is joined with the groove-formed surface of the semiconductor substrate, a sensor(44) directly measuring physical characteristics of fluid flowing in the micro channel, a plurality of local heaters(46) directly heating the fluid at a random position in the micro channel, and a main heater(42) installed at a circumference of the micro channel.

Abstract translation: 目的：提供具有微通道的结构，以及与微通道内的流体直接接触的传感器和加热器及其制造方法，以可靠地测量在微通道中流动的流体的物理特性。 构成：具有微通道（50）的结构包括具有用于形成微通道的预定长度的槽的半导体衬底（48），以及玻璃衬底（40），其一侧与沟槽形成表面 所述半导体衬底，直接测量在所述微通道中流动的流体的物理特性的传感器（44），在所述微通道中的随机位置直接加热所述流体的多个局部加热器（46）以及安装在所述微通道中的主加热器 在微通道的圆周处。