Abstract:
A plasma generator 1 includes a first electrode 12 provided in a gas storage section 5, and a second electrode 13 provided in such a manner that at least a portion coupled with the first electrode 12 comes into contact with a liquid 17 in a liquid storage section 4. Electrical discharge is caused between the first electrode 12 and the second electrode 13 so that plasma is produced in a gas region in the liquid 17 in the liquid storage section 4, and hydroxyl radical is produced from water contained in the liquid 17 and oxygen contained in the gas.
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
An ozone generator for generating ozone by applying a specified process to oxygen by discharge includes a first raw material gas supply unit for supplying the oxygen as a first raw material gas, and a second raw material gas supply unit for supplying an oxide compound gas as a second raw material gas, in which, by excited light, excited and generated by a discharge in the oxygen and the oxide compound gas, the oxide compound gas is dissociated, or the oxide compound gas is excited accelerating dissociation of the oxygen, and ozone is generated. In this way, ozone generation efficiency is raised.
Abstract:
An ozone generator for generating ozone by applying a specified process to oxygen by discharge includes a first raw material gas supply unit for supplying the oxygen as a first raw material gas, and a second raw material gas supply unit for supplying an oxide compound gas as a second raw material gas, in which, by excited light, excited and generated by a discharge in the oxygen and the oxide compound gas, the oxide compound gas is dissociated, or the oxide compound gas is excited accelerating dissociation of the oxygen, and ozone is generated. In this way, ozone generation efficiency is raised.
Abstract:
The Diffusive Plasma is for effective treatment of contaminated air and material processing. Air is purified and disinfected by passing through the diffusive plasma device which includes a reactor or a plurality of reactors arranged in parallel or series and is energized by a high voltage alternating current power supply. The diffuser, being electrically isolated, provides extra nucleation sites to initiate discharges. It serves to improve the generation of uniform and consistent plasma and to reduce the variation of discharge properties among the reactors. The addition of a diffuser, thereby, enhances the overall effectiveness of decomposing chemicals and destroying microbes to achieve high air treatment and material processing performance. The diffuser can be made of suitable filtering materials to additionally serve as a filter. By incorporating suitable catalytic materials with the diffuser, the reactor becomes a catalytic plasma reactor wherein the plasma environment provides enhanced catalytic functions. Effective plasma power deposition may be obtained by controlling the amplitude, waveform period and shape of the voltage applied to the electrodes of the reactor and hence the operation of the reactors with plasma discharged of selected conditions for optimizing the treatment and processing efficiency while minimizing the generation of unwanted bi-product gases. The present invention also relates to a method for effective air treatment and material processing.
Abstract:
An ozone generator is proposed which comprises a plurality of plate-like ozone generating elements, stacked one on top of the other, which are in at least partial contact with a process water stream, each of the ozone generating elements having at least one plate-like, electrically insulated inner electrode and at least one likewise plate-like counterelectrode, between which a space is provided for a gas discharge. According to the invention, the ozone generating elements are situated at a distance from one another, perpendicular to their plate-like extension, in such a way that process water is able to flow between the ozone generating elements over substantial surface regions of the plate-like ozone generating elements.
Abstract:
A method for generating ozone from gases containing oxygen. The ozone is generated by silent electric discharge in an installation comprising at least two gaps, which are traversed by the gas, each of said gaps being formed between an electrode and a dielectric that separates each gap from an additional electrode. According to the invention, the restriction of the volumetric flow of the gas of at least one gap is controlled.
Abstract:
The present invention discloses an ozone generator with reduced NOx comprising an air stream generating device; a drying device; an electrical field generating unit; a high-voltage generating device; and a cooling device. The flow velocity of the air stream in the ozone generating area can be increased by the air stream generating device up to 700 s.c.c.m. The temperature in the ozone generating area can be lowered by the cooling system to lower than 10° C. The amount of NOx produced by the disclosed ozone generator can be reduced substantially.