DOUBLE ETALON OPTICAL WAVELENGTH REFERENCE DEVICE
    61.
    发明公开
    DOUBLE ETALON OPTICAL WAVELENGTH REFERENCE DEVICE 审中-公开
    用双标准具光学参考波长设备

    公开(公告)号:EP1218978A4

    公开(公告)日:2006-06-14

    申请号:EP00957375

    申请日:2000-08-10

    Applicant: CORETEK INC

    Abstract: A compact wavelength monitoring and control assembly (110) for a narrow band (i.e., laser) source is provided, comprising two narrow bandpass, wavelength selective transmission filter elements (130, 160) of Fabry-Perot structure through which two separate collimated beams from a laser source are directed onto two photodetectors (145, 175). A control circuit processes the simultaneously acquired signals from the two detectors (145, 175) as the laser wavelength is varied. The device functions as an optical wavelength discriminator in which the detectors (145, 175) convert optical energy to current (or voltage) for a feedback loop for controlling the laser source. Any one of a large number of discrete, predetermined wavelengths may be chosen for locking using the same device.

    DEVICE AND METHOD FOR MEASURING WAVELENGTH FOR LASER DEVICE

    公开(公告)号:US20230144290A1

    公开(公告)日:2023-05-11

    申请号:US17915434

    申请日:2020-12-11

    CPC classification number: G01J9/0246 G01J2009/0234 G01J2009/0257

    Abstract: According to the present disclosure, there is provided a device (2) and a method for measuring a wavelength for a laser device. The device (2) for measuring a wavelength for a laser device includes: a first optical path assembly and a second optical path assembly. The first optical path assembly and the second optical path assembly constitute a laser wavelength measurement optical path. The second optical path assembly includes: an FP etalon assembly (11) and an optical classifier (13). The homogenized laser beam passes through the FP etalon assembly (11) to generate an interference fringe. The optical classifier (13) is arranged after the FP etalon assembly (11) in the laser wavelength measurement optical path, and configured to deflect the laser beam passing through the FP etalon assembly (11). The FP etalon assembly (11) allows two FP etalons (FP1, FP2) to share the same optical path for an interference imaging, and therefore a compact structure having a small volume, a simple design, and a high stability are achieved. In cooperation with the optical classifier (13), a precise measurement for a laser wavelength may be achieved, and at the same time a wavelength measurement range is large. It is suitable for an online measurement for a laser wavelength and a corresponding closed-loop control feedback.

    OBSERVATION APPARATUS, DEVICE, DEVICE PRODUCTION METHOD, PARTICLE SIZE MEASUREMENT METHOD, RESISTANCE OBSERVATION METHOD, CHEMICAL REACTION METHOD, PARTICLE PRESERVATION METHOD, AND AUTOMATIC OBSERVATION APPARATUS
    65.
    发明申请
    OBSERVATION APPARATUS, DEVICE, DEVICE PRODUCTION METHOD, PARTICLE SIZE MEASUREMENT METHOD, RESISTANCE OBSERVATION METHOD, CHEMICAL REACTION METHOD, PARTICLE PRESERVATION METHOD, AND AUTOMATIC OBSERVATION APPARATUS 审中-公开
    观察装置,装置,装置生产方法,颗粒尺寸测量方法,电阻观察方法,化学反应方法,颗粒保存方法和自动观测装置

    公开(公告)号:US20160349165A1

    公开(公告)日:2016-12-01

    申请号:US15114667

    申请日:2015-01-28

    Abstract: An observation apparatus (100) includes an observing optical system (101) capable of obtaining an image of a measurement target present in a gap included in a device (1). One end of the gap included in the device (1) is wider than the other end thereof, and upon light beam irradiation to the device (1), an interference fringe appears in the gap. The observing optical system (101) irradiates the gap included in the device (1) with a plurality of light beams having different wavelengths to cause a plurality of interference fringes to appear in the gap. Then the observing optical system (101) obtains an image of the plurality of interference fringes.

    Abstract translation: 观察装置(100)包括能够获得包含在装置(1)中的间隙中存在的测量对象的图像的观察光学系统(101)。 包括在装置(1)中的间隙的一端比其另一端宽,并且在对装置(1)进行光束照射时,间隙中出现干涉条纹。 观察光学系统(101)利用具有不同波长的多个光束照射装置(1)中包括的间隙,从而在间隙中出现多个干涉条纹。 然后观察光学系统(101)获得多个干涉条纹的图像。

    CYLINDRICAL PACKAGE
    66.
    发明申请
    CYLINDRICAL PACKAGE 审中-公开
    圆筒包装

    公开(公告)号:US20160223393A1

    公开(公告)日:2016-08-04

    申请号:US14794882

    申请日:2015-07-09

    Abstract: A cylindrical package includes a cylindrical housing; a pedestal at a bottom of a cylindrical space surrounded by the cylindrical housing; an optical splitter in the cylindrical space and over the pedestal; a first photodetector in the cylindrical space and over the pedestal, wherein the first photodetector is configured to be optically coupled to the optical splitter; and a second photodetector in the cylindrical space and over the pedestal, wherein the second photodetector is configured to be optically coupled to the optical splitter.

    Abstract translation: 圆柱形包装包括圆柱形外壳; 由圆柱形壳体围绕的圆柱形空间的底部的基座; 在圆柱形空间中并在基座上方的分光器; 在所述圆柱形空间中并在所述基座上方的第一光电检测器,其中所述第一光电检测器被配置为光耦合到所述光分路器; 以及在所述圆柱形空间中并在所述基座上方的第二光电检测器,其中所述第二光电检测器被配置为光耦合到所述光分路器。

    Method and apparatus for gas discharge laser output light coherency reduction

    公开(公告)号:US20050286599A1

    公开(公告)日:2005-12-29

    申请号:US10881533

    申请日:2004-06-29

    Abstract: A method and apparatus for producing with a gas discharge laser an output laser beam comprising output laser light pulses, for delivery as a light source to a utilizing tool is disclosed which may comprise a beam path and a beam homogenizer in the beam path. The beam homogenizer may comprise at least one beam image inverter or spatial rotator, which may comprise a spatial coherency cell position shifter. The homogenizer may comprise a delay path which is longer than, but approximately the same delay as the temporal coherence length of the source beam. The homogenizer may comprise a pair of conjoined dove prisms having a partially reflective coating at the conjoined surfaces of each, a right triangle prism comprising a hypotenuse face facing the source beam and fully reflective adjoining side faces or an isosceles triangle prism having a face facing the source beam and fully reflective adjoining side faces or combinations of these, which may serve as a source beam multiple alternating inverted image creating mechanism. The beam path may be part of a bandwidth measuring the bandwidths of an output laser beam comprising output laser light in the range of below 500 femtometers at accuracies within tens of femtometers. The homogenizer may comprise a rotating diffuser which may be a ground glass diffuser which may also be etched. The wavemeter may also comprise a collimator in the beam path collimating the diffused light; a confocal etalon creating an output based upon the collimated light entering the confocal etalon; and a detector detecting the output of the confocal etalon and may also comprise a scanning mechanism scanning the angle of incidence of the collimated light entering the confocal etalon which may scan the collimated light across the confocal etalon or scan the etalon across the collimated light, and may comprise an acousto-optical scanner. The confocal etalon may have a free spectral range approximately equal to the E95 width of the beam being measured. The detector may comprise a photomultiplier detecting an intensity pattern of the output of the confocal etalon.

    Optical component and compact wavelength locking arrangement including such a component
    68.
    发明授权
    Optical component and compact wavelength locking arrangement including such a component 失效
    光学部件和紧凑的波长锁定装置,包括这种部件

    公开(公告)号:US06934086B2

    公开(公告)日:2005-08-23

    申请号:US10844130

    申请日:2004-05-12

    CPC classification number: G01J9/0246 G01J2009/0257 G02B5/04

    Abstract: An optical component in the form of a right angled triangular prism having a first side, a second side orthogonal to the first side, and a third side generally inclined to the first and second sides to reflect optical radiation incoming from the first side towards the second side. The first and second sides have semi-reflecting surfaces acting as etalon surfaces providing an interferometric pattern. The optical transmittance between the first and the second sides is wavelength dependent and the radiation exiting the second side of the component is rotated 90 degrees to the radiation entering the first side.

    Abstract translation: 直角三角形棱镜形式的光学部件具有第一侧面,与第一侧面正交的第二侧面,以及第三侧面,该第三侧面大体上倾斜于第一和第二侧面以反射从第一侧进入第二侧面的光辐射 侧。 第一和第二侧面具有作为标准具表面的半反射表面,提供干涉图案。 第一和第二侧之间的光学透射率是波长相关的,并且离开部件的第二侧的辐射与进入第一侧的辐射旋转90度。

    Wavelength stabilizing apparatus and control method

    公开(公告)号:US20050018995A1

    公开(公告)日:2005-01-27

    申请号:US10712368

    申请日:2003-11-12

    Abstract: A wavelength stabilizing apparatus utilized in an optical communication system for controlling a light wave output from a tunable optical component is disclosed. The wavelength stabilizing apparatus includes a coarse-tuning element, a fine-tuning element, and a servo element. When the wavelength stabilizing apparatus is used, the light wave output from the tunable optical component is directed into the coarse-tuning element and the fine-tuning element, respectively, and then transformed into electric signals to be received by the servo element. Particularly, the electric signals from the coarse-tuning element are served as basis for coarse-tuning and channel recognition of the light wave output from the tunable optical component while the electric signals from the fine-tuning element are served for fine-tuning and servo control of the light wave output from the tunable optical component. These electric signals are also processed with a logical operation to obtain a control signal for controlling the tunable optical component.

    Optical component and compact wavelength locking arrangement including such a component
    70.
    发明申请
    Optical component and compact wavelength locking arrangement including such a component 失效
    光学部件和紧凑的波长锁定装置,包括这种部件

    公开(公告)号:US20040257657A1

    公开(公告)日:2004-12-23

    申请号:US10844130

    申请日:2004-05-12

    CPC classification number: G01J9/0246 G01J2009/0257 G02B5/04

    Abstract: An optical component in the form of a right angled triangular prism having a first side, a second side orthogonal to the first side, and a third side generally inclined to the first and second sides to reflect optical radiation incoming from the first sided towards the second side. The first and second sides have semi-reflecting surfaces acting as etalon surfaces providing an interferometric pattern. The optical transmittance between the first and the second sides is wavelength dependent and the radiation exiting the second side of the component is rotated 90 degrees to the radiation entering the first side.

    Abstract translation: 直角三角形棱镜形式的光学部件具有第一侧,与第一侧正交的第二侧,以及大体上倾斜到第一和第二侧的第三侧,以反射从第一侧进入第二侧的光辐射 侧。 第一和第二侧面具有作为标准具表面的半反射表面,提供干涉图案。 第一和第二侧之间的光学透射率是波长相关的,并且离开部件的第二侧的辐射与进入第一侧的辐射旋转90度。

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