公开(公告)号：US2352072A

公开(公告)日：1944-06-20

申请号：US46952042

申请日：1942-12-19

Applicant: BELL TELEPHONE LABOR INC

Inventor： BOND WALTER L

IPC: G01J4/02

CPC classification number: G01J4/02

公开(公告)号：JP5914455B2

公开(公告)日：2016-05-11

申请号：JP2013500657

申请日：2011-03-24

Applicant: イエダ・リサーチ・アンド・デベロツプメント・カンパニー・リミテツド

Inventor： ニール・ダヴィッドソン ,  アッシャー・フリーゼム ,  モティ・フリドマン

IPC: G01N21/21 ,  G01J4/04

CPC classification number: G01J4/04 ,  G01J4/02

公开(公告)号：JP2015169599A

公开(公告)日：2015-09-28

申请号：JP2014046131

申请日：2014-03-10

Applicant: キヤノン株式会社

Inventor： 佐野 大介

IPC: G02B5/30 ,  G02B27/28 ,  G01J4/04

CPC classification number: G01J4/04 ,  G01J4/02 ,  G02B5/3083 ,  G01J2004/002

Abstract: 【課題】直線偏光と円偏光を含む偏光情報を短時間で静的に高精度に取得すること 【解決手段】センサー100は、位相調整部110と、検光部120と、光電変換部130と、を有する。位相調整部は、3つ以上の領域111〜114を有し、これらの領域は位相調整量が互いに異なる少なくとも2つの領域を含む。また、これらの領域は、互いの位相調整量が同一で遅相軸の方向の成す角度が20度以上160度以下だけ異なる少なくとも2つの領域を含む。 【選択図】図1

Abstract translation: 要解决的问题：在短时间内以高精度静态获取包括线性极化和圆偏振的偏振信息。传感器100具有：相位调整单元110; 光检测单元120; 以及光电转换单元130.相位调整单元具有三个或更多个区域111至114，并且这些区域包括相位调整量相互不同的至少两个区域。 此外，这些区域包括相互相互调整量相同的至少两个区域，并且由慢轴的方向形成的角度仅相差20度以上且160度以下。

公开(公告)号：JP2011141288A

公开(公告)日：2011-07-21

申请号：JP2011055357

申请日：2011-03-14

Applicant: Kla-Tencor Corp ,  ケーエルエー−テンカー コーポレイション

Inventor： LEE SHING ,  WANG HAIMING ,  NORTON ADAM ,  NIKOONAHAD MEHRDAD

IPC: G01B11/06 ,  G01N21/21 ,  G01J3/447 ,  G01J4/02 ,  G01J4/04 ,  G01N21/27 ,  G01N21/41

CPC classification number: G01J4/02 ,  G01J3/447 ,  G01N21/21

Abstract: PROBLEM TO BE SOLVED: To provide a system which relates to a non-destructive technology for measuring a surface parameter of a sample for measuring the birefringence of a surface, a film thickness, etc. using a polarimetric spectrum. SOLUTION: A polarized sample beam 46 of broadband radiation is focused to the surface of a sample 3 and the radiation polarized by the sample is collected by a mirror system in different planes of incidence. The modulated radiation is analyzed with respect to a polarization plane to provide a polarimetric spectrum. Thickness and refractive information may then be derived from the spectrum. The polarization of the sample beam is altered by the focusing and the sample, and the collection of the modulated radiation is repeated employing two different apertures 28 to detect the presence or absence of a birefringence axis in the sample. In the other preferred embodiment, the technology may be combined with ellipsometry for determining the thicknesses and refractive indices of thin films. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供一种涉及用于测量样品的表面参数的非破坏性技术的系统，用于使用偏振光谱测量表面的双折射，膜厚等。 解决方案：将宽带辐射的极化样品束46聚焦到样品3的表面，并且由样品偏振的辐射由不同入射平面中的反射镜系统收集。 相对于偏振平面分析调制的辐射以提供偏振光谱。 然后可以从光谱导出厚度和折射信息。 通过聚焦和样品改变样品光束的偏振，并且重复使用两个不同的孔28来检测调制的辐射的收集，以检测样品中双折射轴的存在或不存在。 在另一个优选实施例中，该技术可以与用于确定薄膜的厚度和折射率的椭偏仪相结合。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：US11946809B2

公开(公告)日：2024-04-02

申请号：US17740529

申请日：2022-05-10

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ingi Kim ,  Minhwan Seo ,  Sangwoo Bae ,  Akinori Okubo ,  Jungchul Lee ,  Eunhee Jeang

IPC: G01J4/02 ,  G01J4/04

CPC classification number: G01J4/02 ,  G01J4/04

Abstract: Provided is a polarization measuring device including a stage on which a measurement target is provided, a light source assembly configured to emit incident light, a first polarimeter configured to polarize the incident light, a second polarimeter configured to polarize reflected light reflected from the measurement target that is irradiated by the incident light, a filter assembly configured to remove noise from the reflected light, and a detector configured to receive the reflected light and measure an intensity of the reflected light and a phase of the reflected light.

公开(公告)号：US20190056273A1

公开(公告)日：2019-02-21

申请号：US16024415

申请日：2018-06-29

Applicant: Polaris Sensor Technologies, Inc.

Inventor： J. Larry Pezzaniti

IPC: G01J4/02 ,  G01J3/02 ,  G02B5/30 ,  G01J4/04

CPC classification number: G01J4/02 ,  G01J3/0208 ,  G01J3/0229 ,  G01J4/04 ,  G01J5/58 ,  G01J2005/586 ,  G02B3/0006 ,  G02B5/30 ,  G02B5/3025 ,  G02B5/3058

Abstract: A short wave infrared polarimeter comprising a pixelated polarizer array and an Indium-Gallium-Arsenide (“InGaAs”) focal plane array. The short wave infrared polarimeter optionally includes a micro-lens array and/or an aperture layer

公开(公告)号：US20180241480A1

公开(公告)日：2018-08-23

申请号：US15895545

申请日：2018-02-13

Applicant: GOVERNMENT OF THE UNITED STATES AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE

Inventor： David H. Hughes ,  Reinhard K. Erdmann

IPC: H04B10/85 ,  H04L9/06 ,  G06N99/00 ,  H04B10/70 ,  G01J4/02

CPC classification number: H04B10/85 ,  G01J4/02 ,  G02B27/141 ,  G02B27/283 ,  G02B27/288 ,  G06N10/00 ,  G09C1/00 ,  H04B10/70 ,  H04L9/0618 ,  H04L9/0855

Abstract: A hyper-entanglement photon server (i.e., hub) employs non-degenerate frequencies input as entangled photon pairs into a beam splitter. The beam splitter splits probability amplitudes into two sets of bunched superposition states plus two sets of anti-bunched superposition states. The amplitudes pass through identical Lyot filters and then either enter a polarization beam splitter, where the bunched and anti-bunched states switch identities, or merely advance unchanged to awaiting users at two distinct and spatially-displaced positions (i.e., spokes). The Lyot filters change the output amplitudes from rotationally invariant superpositions of generalized Bell States to rotationally non-invariant superpositions of generalized Bell states. All hubs and spokes pre-share operating key material (a security method called KCQ) that may be continually updated by shared stream ciphers seeded by fresh key material engendered by hub-to-spoke quantum communication.

公开(公告)号：US20180066991A1

公开(公告)日：2018-03-08

申请号：US15556995

申请日：2016-03-10

Applicant: PRESIDENT AND FELLOWS OF HARVARD COLLEGE

Inventor： Jan Philipp Balthasar MUELLER ,  Kristjan LEOSSON ,  Federico CAPASSO

IPC: G01J4/02 ,  G01N21/47 ,  H01Q21/24 ,  G01R29/08 ,  G01J4/04

CPC classification number: G01J4/02 ,  G01J4/04 ,  G01J2004/002 ,  G01N21/47 ,  G01N2021/4792 ,  G01R29/0814 ,  G01R29/0892 ,  H01Q21/24

Abstract: A polarimeter includes an integrated device with an array of antennas including multiple column pairs. Each column pair has two columns, and each column in each column pair includes multiple antennas. A first column of each column pair in the array scatters a first polarization component of an incident radiation, and a second column of each column pair in the array scatters a second polarization component of the incident radiation. The scattered fields of the column pairs interfere constructively in a direction depending on the polarization of the incident radiation, resulting in maximal intensity at a certain point in space for a specific polarization state. Multiple column pairs in parallel and oriented at angles with respect to each other can be used to scatter different polarization components of the incident radiation directionally to different points in space. Detectors are positioned with respect to the integrated device to detect polarization components.

公开(公告)号：US20170082494A1

公开(公告)日：2017-03-23

申请号：US14824390

申请日：2015-08-12

Applicant: GOVERNMENT OF THE UNITED STATES AS REPRESETNED BY THE SECRETARY OF THE AIR FORCE

Inventor： DAVID H. HUGHES ,  REINHARD ERDMANN

IPC: G01J4/04 ,  G02B5/30 ,  G02B27/28

CPC classification number: G01J4/02 ,  G01J4/04 ,  G02B5/3083 ,  G02B27/283 ,  G02B27/286 ,  G02B27/288 ,  G02B2207/114

Abstract: A photon entanglement router comprises a modified birefringent spectral filter followed by a polarization beam splitter (PBS). Frequency degenerate or non-degenerate entangled photons, generated by a collinear laser source and incident on one input port of the photon entanglement router, are comprised of congruent photons and/or incongruent photons. The invention adds a plurality of additional filter stacks at each output port such that they invert the action of the first birefringent stack at the input port. Intermediate output photons from the invention is input to two ports of an additional PBS where they are spatially projected according to their frequencies and polarizations. Two congruent photons of an entangled photon pair exit as an entangled pair in one direction, while two incongruent photons exit as an entangled pair in the orthogonal direction. If one photon is congruent and the other photon incongruent, the photons remain entangled but are spectrally divided into orthogonal directions. The invention's birefringent spectral filter accepts specific input frequencies from the ITU optical C-band grid for proper operation.

公开(公告)号：US20150204724A1

公开(公告)日：2015-07-23

申请号：US14417618

申请日：2013-07-25

Applicant: HORIBA JOBIN YVON SAS

Inventor： Olivier Acher ,  Simon Richard ,  Thanh-Liem Nguyen

IPC: G01J4/02

CPC classification number: G01J4/02 ,  G01J4/04

Abstract: An accurate and robust wavefront-division polarimetric analysis method and device, allows the quasi-instantaneous measurement of the polarization states of a luminous object. The device can be used to produce a plurality of light beams, all polarized according to different polarization states, from a single upstream light beam. The polarized light beams, which do not overlap and which carry information items that are complementary in terms of polarization, are analyzed simultaneously by a plurality of detectors that measure the luminous intensity of each beam. Processing elements digitally process the luminous intensity values obtained in order to determine the polarization state of the upstream light beam. The operations performed by the processing elements prevent luminous intensity variations in the split light beams during the division of the wavefront of the upstream light beam. Therefore, the wavefront-division polarimetric analysis device is robust and its accuracy is not hindered by the experimental conditions.

Abstract translation: 准确可靠的波前分割偏振分析方法和装置允许准瞬时测量发光物体的偏振状态。 该装置可用于从单个上游光束产生根据不同极化状态全部偏振的多个光束。 通过测量每个光束的发光强度的多个检测器同时分析不重叠并且携带在极化方面互补的信息项的偏振光束。 处理元件对获得的发光强度值进行数字处理，以确定上游光束的偏振状态。 由处理元件执行的操作防止在上游光束的波前划分期间分束光束的发光强度变化。 因此，波前分割极化分析装置是鲁棒的，其精度不受实验条件的影响。