Pressure monitor incorporating saw device
    61.
    发明申请
    Pressure monitor incorporating saw device 有权
    压力监视器包括锯装置

    公开(公告)号:US20050225214A1

    公开(公告)日:2005-10-13

    申请号:US10508468

    申请日:2003-03-17

    CPC classification number: G01L19/0092 G01L1/165 G01L9/0025

    Abstract: A pressure monitor has a base and a lid secured to the base to define a substantially fluid tight chamber. At least part of the lid is flexible and forms a diaphragm which deflects responsive to changes in fluid pressure surrounding the monitor. A projection provided on the diaphragm transmits movement thereof to a distortable substrate located within the chamber. A first SAW device is mounted on the distortable substrate, and at least a second and third SAW device are mounted within the chamber. The second SAW device carried on a reference substrate section has its direction of propagation inclined at an angle to the direction of propagation of at least one of the first and third SAW devices. This way movement of the diaphragm induced by a change in pressure in the zone surrounding the monitor results in distortion of the distortable substrate, which is measurable by the SAW device mounted thereon, without distorting said reference substrate section.

    Abstract translation: 压力监视器具有固定到基座的底座和盖子,以限定基本上流体密封的腔室。 盖的至少一部分是柔性的,并且形成响应于监视器周围的流体压力变化而偏转的隔膜。 设置在隔膜上的突起将其运动传递到位于室内的可变形基板。 第一SAW器件安装在可变形衬底上,并且至少第二和第三SAW器件安装在腔室内。 携带在参考基板部分上的第二SAW器件具有与第一和第三SAW器件中的至少一个的传播方向成一角度的传播方向。 以这种方式由围绕监视器的区域中的压力变化引起的隔膜的移动导致可变形的衬底的变形,其可由安装在其上的SAW器件测量,而不会使所述参考衬底部分变形。

    Rolling bearing with sensing unit which can be remotely interrogated
    63.
    发明申请
    Rolling bearing with sensing unit which can be remotely interrogated 有权
    滚动轴承带有可以远程询问的感应单元

    公开(公告)号:US20020062694A1

    公开(公告)日:2002-05-30

    申请号:US09829808

    申请日:2001-04-10

    Abstract: A rolling bearing which has as rolling bearing components one bearing race with a first running surface, a second bearing race with a second running surface opposed to the first surface, and rolling elements arranged between the running surfaces. At least one sensing unit is integrated into the rolling bearing components. The sensing unit can be interrogated by radio via antennas or can be connected to an interrogator by a cable. The sensing unit uses at least one component operating on the SAW or BAW principle to sense changes in length and/or changes in temperature in the material of the rolling bearing component and sends the result of the measurement after the arrival of a radio signal via the antenna or via a cable.

    Abstract translation: 一种滚动轴承,其具有一个具有第一行进表面的轴承座圈,具有与第一表面相对的第二行进表面的第二轴承座圈和布置在运行表面之间的滚动元件。 至少一个感测单元集成到滚动轴承部件中。 感测单元可以通过天线通过无线电询问,或者可以通过电缆连接到询问器。 感测单元使用至少一个在SAW或BAW原理上操作的部件来感测滚动轴承部件的材料的长度和/或温度变化,并且在通过无线电信号到达无线电信号之后发送测量结果 天线或电缆。

    Pneumatic automobile tire with integrated sensors and traction control system
    64.
    发明授权
    Pneumatic automobile tire with integrated sensors and traction control system 失效
    具有集成传感器和牵引力控制系统的气动汽车轮胎

    公开(公告)号:US06339956B1

    公开(公告)日:2002-01-22

    申请号:US09307505

    申请日:1999-05-07

    Abstract: A pneumatic vehicle tire includes a carcass, a bead with a bead core arranged in the bead, and a first sensor located within the bead. The first sensor delivers signals which are correlated to frictional forces transmitted by the pneumatic vehicle tire during operation. This sensor has a first end and a second end, wherein the first end includes a heel attached to the bead core and the second end extends radially outward from the bead core within the tire. A plurality of such sensors can be included in each tire, some for measuring longitudinal forces in a circumferential direction of the tire and others for measuring lateral forces in an axial direction of the tire.

    Abstract translation: 气动车辆轮胎包括胎体,具有布置在胎圈中的胎圈芯的胎圈和位于胎圈内的第一传感器。 第一传感器传送与气动车辆轮胎在操作期间传递的摩擦力相关的信号。 该传感器具有第一端和第二端,其中第一端包括附接到胎圈芯的脚跟,并且第二端从轮胎内的胎圈芯径向向外延伸。 每个轮胎中可以包括多个这样的传感器,一些用于测量轮胎的圆周方向上的纵向力等,用于测量轮胎的轴向方向上的横向力。

    Digital output force sensor using surface acoustic waves
    65.
    发明授权
    Digital output force sensor using surface acoustic waves 失效
    数字输出力传感器采用表面声波

    公开(公告)号:US4107626A

    公开(公告)日:1978-08-15

    申请号:US752291

    申请日:1976-12-20

    Inventor: David A. Kiewit

    CPC classification number: G10K11/36 G01L1/165 G01N3/06 G01N2203/0623 Y10S73/04

    Abstract: A sensor developing a digital output in response to force induced deflection in which the deflection is of a beam formed to have, under stress, a surface undulate in both compression and tension. The signal is developed from piezoelectric transducers connected in a pair of oscillator circuits utilizing surface acoustic wave paths through, respectively, the tension and the compression portions of the beam surface. The frequencies of the oscillators are compared and the frequency difference resulting from beam deflection is sent as a signal to a counter to give a digital read out of the force causing the deflection. The beam is formed of steel and the piezoelectric surface for the surface waves and the interdigitated conductors forming the transducers are deposited by thin film techniques on the beam.

    Abstract translation: 响应于力诱导的偏转而发展数字输出的传感器,其中偏转是形成为在应力下使表面在压缩和张力两者中波动的波束。 该信号由连接在一对振荡器电路中的压电传感器开发,该振荡器电路利用表面声波通路分别通过光束表面的张力和压缩部分。 将振荡器的频率进行比较,将由光束偏转产生的频差作为信号发送到计数器,以使数字读出导致偏转的力。 梁由钢制成,用于表面波的压电表面和形成换能器的交叉导体通过薄膜技术沉积在梁上。

    FORCE DETECTION SENSOR, FORCE SENSOR, TORQUE SENSOR, AND ROBOT

    公开(公告)号:EP3327416A1

    公开(公告)日:2018-05-30

    申请号:EP17203041.3

    申请日:2017-11-22

    Abstract: A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and electrode fingers placed on the second surface, wherein an arrangement direction of the electrode fingers is different from the normal direction of the first surface in a plan view of the second surface. Further, the second surface includes a surface of a piezoelectric material. A constituent material of the piezoelectric material is quartz crystal. The first surface crosses an electrical axis of the quartz crystal.

    SYSTEMS AND METHODS FOR QUARTZ WAFER BONDING
    69.
    发明公开
    SYSTEMS AND METHODS FOR QUARTZ WAFER BONDING 审中-公开
    SYSTEME UND VERFAHREN ZUM QUARZ-WAFER-BONDING

    公开(公告)号:EP3136597A1

    公开(公告)日:2017-03-01

    申请号:EP16185199.3

    申请日:2016-08-22

    Abstract: The invention refers to a bonded quartz wafer package (10), comprising: a first quartz wafer (14) comprising at least one quartz-based device (204); a second quartz wafer (16) disposed above the first quartz wafer (14); and a liquid crystal polymer (LCP) bonding layer (20) disposed in between the first and second quartz wafers (14, 16) that bonds the first and second quartz wafers (14, 16) together. It further refers to a method comprising: arranging a stack of materials (11) by: disposing a first quartz wafer (14) above a first silicon (Si) handle wafer (12); disposing a second quartz wafer (16) above the first quartz wafer (14); disposing a liquid crystal polymer (LCP) sheet material (20) between the first and second quartz wafer (14, 16); disposing a second Si handle wafer (18) above the second quartz wafer (16); and bonding the stack of materials (11) to form a bonded quartz wafer package (10), wherein the first quartz wafer (14) is bonded to the second quartz wafer (16) via the LCP sheet material (20).

    Abstract translation: 本发明涉及一种键合石英晶片封装(10),包括:包括至少一个基于石英的器件(204)的第一石英晶片(14) 设置在第一石英晶片(14)上方的第二石英晶片(16); 以及设置在将第一和第二石英晶片(14,16)结合在一起的第一和第二石英晶片(14,16)之间的液晶聚合物(LCP)接合层(20)。 它还涉及一种方法,包括:通过以下步骤来布置材料堆叠(11):在第一硅(Si)处理晶片(12)上方设置第一石英晶片(14); 在第一石英晶片(14)上方设置第二石英晶片(16); 在第一和第二石英晶片(14,16)之间设置液晶聚合物(LCP)片材(20); 在第二石英晶片(16)上方设置第二硅处理晶片(18); 以及将堆叠的材料(11)结合以形成键合的石英晶片封装(10),其中所述第一石英晶片(14)经由所述LCP片材(20)结合到所述第二石英晶片(16)。

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