Automatic optical measurement method
    62.
    发明授权
    Automatic optical measurement method 失效
    自动光学测量方法

    公开(公告)号:US06922247B2

    公开(公告)日:2005-07-26

    申请号:US10333990

    申请日:2001-07-26

    Abstract: In an automatic optical measurement method according to the invention, with a movable reflection plate 6 moved to place under an optical axis, light projected from a light projecting portion 3a is received by a light receiving portion 3b via the movable reflection plate 6, a stationary reflection plate 11 and the movable reflection plate 6, whereas with the movable reflection plate 6 moved away from the optical axis and a reference 8 set on a sample stage 10, light projected from the light projecting portion 3a is received by the light receiving portion 3b via the reference 8 whereby a ratio between the intensities of the received lights is determined. During a sample measurement, light projected from the light projecting portion 3a with the movable reflection plate 6 moved to place under the optical axis is received by the light receiving portion 3b via the movable reflection plate 6, stationary reflection plate 11 and movable reflection plate 6 so that the intensity of light thus received and the above ratio are used for estimating an intensity of light to be measured with the reference, the estimated intensity of light being used for correcting an intensity of light received via a sample.

    Abstract translation: 在根据本发明的自动光学测量方法中,通过可移动的反射板6移动到光轴的下方,从光投射部分3a突出的光经由可动反射板6被光接收部分3b接收, 固定反射板11和可动反射板6,而当可移动反射板6远离光轴移动并且设置在样品台10上的基准8时,由光投射部分3a投射的光被光接收 接收部分3b经由参考8,由此确定接收到的光的强度之间的比率。 在采样测量期间,由可移动反射板6移动到光轴下方的从投光部分3a射出的光由光接收部分3b通过可移动反射板6,固定反射板11和可移动反射镜 板6,使得如此接收的光的强度和上述比率用于估计用于参考的待测光的强度,估计的光强度用于校正经由样品接收的光的强度。

    Process and device for measuring isotope ratios
    66.
    发明授权
    Process and device for measuring isotope ratios 失效
    用于测量同位素比率的方法和装置

    公开(公告)号:US5146294A

    公开(公告)日:1992-09-08

    申请号:US678118

    申请日:1991-04-01

    CPC classification number: G01N33/0026 G01N21/39 G01N2201/128

    Abstract: A process and device for measuring the isotope ratio, specifically of stable isotopes, of chemical substances in a gas to be examined, the process including alternately charging a sample cell with a reference gas and a measuring gas containing the gas to be examined; adding a metrologically neutral gas to the gas to be examined; varying the mixing ratio of this measuring gas by changing the share of neutral gas being added; and calculation of the isotope ratio V.sub.p of the substance according to the equation: ##EQU1## The device includes a White cell having mirrors on each end of the longitudinal length of the cell, a pair of first beam openings located on a longitudinal end, a pair of second beam openings in spaced parallelism on the longitudinal sides of the White cell and a gas inlet and gas outlet located near each mirror.

    Abstract translation: 一种用于测量待检气体中化学物质的同位素比率,特别是稳定同位素的方法和装置,所述方法包括:将参考气体和包含待检气体的测量气体交替地装入样品池; 向被检气体添加计量中性气体; 通过改变添加的中性气体的份数来改变该测量气体的混合比; 以及根据以下等式计算物质的同位素比值Vp:该装置包括在电池的纵向长度的每一端具有反射镜的白色电池,位于纵向端部的一对第一光束开口, 一对在白色电池的纵向侧面上间隔开的平行的第二光束开口和位于每个反射镜附近的气体入口和气体出口。

    Infrared fluid analyzer
    69.
    发明授权
    Infrared fluid analyzer 失效
    红外流体分析仪

    公开(公告)号:US4902896A

    公开(公告)日:1990-02-20

    申请号:US47650

    申请日:1987-05-08

    Abstract: An infrared fluid analyzer for the detection of end tidal CO.sub.2. The analyzer is comprised of an IR source that irradiates a chamber filled with gas. CO.sub.2 present in the chamber absorbs the IR radiation at a certain wavelength. An IR detector determines the amount of IR radiation passing through the chamber unabsorbed and produces a signal corresponding to the CO.sub.2 in the chamber. At predetermined intervals a zero gas is reintroduced into the chamber for the system to be recalibrated. A span gas is only needed initially for calibration purposes.

    Abstract translation: 用于检测尾气CO2的红外流体分析仪。 分析仪由辐射充满气体的室的IR源组成。 存在于腔室中的CO 2以一定波长吸收IR辐射。 IR检测器确定通过腔室的IR辐射量未被吸收并产生对应于腔室中的CO 2的信号。 以预定间隔,将零气体重新引入室中,以使系统被重新校准。 最初仅需要量程气体用于校准目的。

    Process and device for measuring the optical properties of thin layers
    70.
    发明授权
    Process and device for measuring the optical properties of thin layers 失效
    用于测量薄层光学性能的方法和装置

    公开(公告)号:US4878755A

    公开(公告)日:1989-11-07

    申请号:US881708

    申请日:1986-07-03

    Abstract: Process for measuring the optical properties of thin layers while they are being built up in vacuum coating installations. For this purpose, at least one test object is passed through a stationary measuring light beam and the transmission behavior of the test object is evaluated by measurement. A reference point for the measurements is fixed in each case by reference measurements at intervals of time. In addition, at least one opaque measurement zone and at least one measuring zone, which does not attenuate the measuring light beam, are disposed in path of motion of the test object. The ratio of the measured value of the test object, decreased by the measured value of the opaque measuring zone, to the measured value of the nonattenuating measuring zone, decreased by the measured value of the opaque measuring zone, is formed by an arithmetic logic unit.

    Abstract translation: 在真空涂层装置中建立薄层的光学性能的测量方法。 为此,至少一个测试对象通过静止的测量光束,并通过测量来评估测试对象的传输行为。 在每种情况下,通过参考测量在时间间隔固定测量的参考点。 此外,至少一个不透明测量区域和至少一个不衰减测量光束的测量区域被设置在测试对象的运动路径中。 通过算术逻辑单元形成测试对象的测量值与不透明测量区域的测量值相比减小到不透明测量区域的测量值的比例, 。

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