公开(公告)号：JP4330851B2

公开(公告)日：2009-09-16

申请号：JP2002208904

申请日：2002-07-17

Applicant: 隆 杉野 ,  株式会社渡辺商行

Inventor： 隆 杉野 ,  優 梅田 ,  昌樹 楠原

IPC: H01L21/318 ,  H01L21/331 ,  H01L21/338 ,  H01L29/201 ,  H01L29/737 ,  H01L29/778 ,  H01L29/812

公开(公告)号：JP2009081179A

公开(公告)日：2009-04-16

申请号：JP2007247585

申请日：2007-09-25

Applicant: Takashi Sugino ,  Watanabe Shoko:Kk ,  隆 杉野 ,  株式会社渡辺商行

Inventor： SUGINO TAKASHI ,  AOKI HIDEMITSU ,  KIMURA CHIHARU

IPC: H01L21/318 ,  H01L21/312 ,  H01L21/768 ,  H01L23/522

Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method of a semiconductor device, which can form a BCN film having a stable low dielectric constant and a high hardness (Young's modulus).
SOLUTION: The BCN film is formed by using organic amino boron gas without corrosivity, which is replaced as conventional BCl
3 gas. An insulator material film of the low dielectric constant of a BCN system whose specific inductive capacity is 2.5 or below and whose elastic modulus (Young's modulus) is 8 GPa or above is obtained by forming the film with plasma CVD by using tris(dimethylamino)boron, as an example.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供一种可以形成具有稳定的低介电常数和高硬度（杨氏模量）的BCN膜的半导体器件的制造方法。 解决方案：通过使用无腐蚀性的有机氨基硼气形成BCN膜，其被替代为常规的BCl 3 SB 3气体。 通过使用三（二甲基氨基）硼形成等离子CVD法，得到比电感率为2.5以下且弹性模量（杨氏模量）为8GPa以上的BCN系的低介电常数的绝缘体材料膜 ， 举个例子。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP4205106B2

公开(公告)日：2009-01-07

申请号：JP2006005677

申请日：2006-01-13

Applicant: オルガノ株式会社 ,  株式会社ルネサステクノロジ ,  株式会社渡辺商行

Inventor： 信行 吉岡 ,  弘次 山中 ,  美一 永村 ,  穂積 碓井

IPC: G03F1/32 ,  G03F1/82 ,  H01L21/304

公开(公告)号：JP2008263212A

公开(公告)日：2008-10-30

申请号：JP2008131238

申请日：2008-05-19

Applicant: Takashi Sugino ,  Watanabe Shoko:Kk ,  隆 杉野 ,  株式会社渡辺商行

Inventor： SUGINO TAKASHI ,  KUSUHARA MASAKI ,  UMEDA MASARU

IPC: H01L21/318 ,  H01L21/331 ,  H01L21/335 ,  H01L21/337 ,  H01L21/338 ,  H01L29/20 ,  H01L29/737 ,  H01L29/778 ,  H01L29/812

CPC classification number: H01L29/66924 ,  H01L29/2003 ,  H01L29/66318 ,  H01L29/66462 ,  H01L29/7371 ,  H01L29/7787

Abstract: PROBLEM TO BE SOLVED: To provide a high-performance semiconductor device manufactured by using a semiconductor surface treatment that can achieve a surface protection and a surface passivation using a baron nitride film, a deposition process, its surface protection technology, and surface passivation technology and an electronic device for communication system containing the semiconductor device.
SOLUTION: The semiconductor device has a film containing at least boron and nitrogen atoms.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供一种使用半导体表面处理制造的高性能半导体器件，其可以使用氮化硼膜，沉积工艺，其表面保护技术和表面来实现表面保护和表面钝化 钝化技术和用于包含半导体器件的通信系统的电子设备。 解决方案：半导体器件具有至少含有硼和氮原子的膜。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2008241473A

公开(公告)日：2008-10-09

申请号：JP2007082735

申请日：2007-03-27

Applicant: Takashi Sugino ,  Watanabe Shoko:Kk ,  隆 杉野 ,  株式会社渡辺商行

Inventor： SUGINO TAKASHI ,  AOKI HIDEMITSU ,  KIMURA CHIHARU ,  FUJIWARA NOBUAKI ,  MASUI AKIHIKO

IPC: G01N27/02 ,  G01N27/447

Abstract: PROBLEM TO BE SOLVED: To provide a biosensor for quickly, sensitively and simply measuring the total number of bacteria and a particular food poisoning bacterium.
SOLUTION: The simplified biosensor obtains a concentration property, a cell wall solution property and a selectivity by combining different types of ion exchange fiber films. A structure for improving the separation accuracy by use of an electrophoresis method is also proposed so as to improve the selectivity. The sensor sized to be portable can be provided without needing a culture time and an expensive analyzer in comparison with a conventional sensor.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供用于快速，灵敏和简单地测量细菌和特定食物中毒细菌总数的生物传感器。 解决方案：简化的生物传感器通过组合不同类型的离子交换纤维膜获得浓度特性，细胞壁溶液性质和选择性。 还提出了通过使用电泳方法提高分离精度的结构，以提高选择性。 与常规传感器相比，可以提供尺寸为便携式的传感器，而不需要培养时间和昂贵的分析仪。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2008196054A

公开(公告)日：2008-08-28

申请号：JP2008051289

申请日：2008-02-29

Applicant: Masayuki Tsuda ,  Watanabe Shoko:Kk ,  株式会社渡辺商行 ,  昌之 都田

Inventor： TSUDA MASAYUKI ,  KUSUHARA MASAKI ,  UMEDA MASARU ,  FUKAGAWA MITSURU

IPC: C23C16/448 ,  B01B1/00 ,  B01D3/34 ,  B01F3/04 ,  B01F5/06 ,  C23C16/40 ,  H01L21/02 ,  H01L21/31 ,  H01L21/316 ,  H01L21/8246 ,  H01L27/115

CPC classification number: H01L27/11502 ,  B01B1/005 ,  B01D3/346 ,  B01F3/04021 ,  B01F5/0646 ,  B01F5/0653 ,  B01F5/0656 ,  B01F5/0671 ,  B01F5/0676 ,  C23C16/40 ,  C23C16/409 ,  C23C16/4486 ,  H01L21/31691 ,  H01L27/11507 ,  H01L28/55 ,  Y10S261/65

Abstract: PROBLEM TO BE SOLVED: To provide a vaporizer which can be used for a long period of time without generating clogging or the like and can stably supply a raw material to a reaction part. SOLUTION: The vaporizer has a dispersion part 8, which includes a gas passage 2 formed inside a dispersion part main body 1, a gas inlet opening 4 to introduce a pressurized carrier gas 3 into the gas passage 2, a means 6 to supply raw material solution to the carrier gas passing the gas passage 2, a gas outlet 7 to send the carrier gas containing dispersed raw material solution to a vaporization part 22, and a cooling means 18 to cool the carrier gas flowing in the gas passage 2; and a vaporizing part 22 which includes a vaporization pipe 20 connected to the gas outlet 7 of the reaction part and the dispersion part 8 of the apparatus and a heater 21 to heat the vaporization pipe 20, and heats and vaporizes the carrier gas containing dispersed raw material solution; and also is provided with a radiation preventing part 102 having a small hole 101 on the outside of the gas outlet 7. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供长时间使用的蒸发器，而不产生堵塞等，并且可以稳定地将原料供应到反应部分。 解决方案：蒸发器具有分散部分8，该分散部分8包括形成在分散部分主体1内部的气体通道2，将加压载气3引入气体通道2中的气体入口4， 向通过气体通道2的载气提供原料溶液，将含有分散原料溶液的载气送至气化部22的气体出口7以及冷却装置18，以冷却在气体通路2中流动的载气 ; 以及蒸发部22，其包括连接到反应部分的气体出口7和装置的分散部分8的蒸发管20和用于加热汽化管20的加热器21，并且加热并蒸发含有分散原料的载气 物质解决方案; 并且还设置有在气体出口7的外侧具有小孔101的防辐射部分102。版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2008195541A

公开(公告)日：2008-08-28

申请号：JP2008092262

申请日：2008-03-31

Applicant: Watanabe Shoko:Kk ,  株式会社渡辺商行

Inventor： TSUJIMURA MASAYUKI ,  TANIKAI MICHIO ,  TSUDA MASAYUKI ,  KUSUHARA MASAKI

IPC: B65G51/03 ,  B65G49/06 ,  B65G49/07 ,  H01L21/677

Abstract: PROBLEM TO BE SOLVED: To provide a floatation transport device and a floatation transport system which moves even a heavy plate-like base substance and changes direction of the base substance at high speed, and surely stops the base substance, when the plate-like base substance is floated by blowing gas to the base substance and then the base substance is moved, stopped, or kept still, or the direction thereof is changed, while floating the base substance.
SOLUTION: The floatation transport system is constituted by combining: a transfer part 1 having a plurality of blowing holes 11B formed on a carrying surface, and moving the plate-like substance by the gas blown from the blowing holes 11B, while floating the plate-like substance; and a control unit having a plurality of blowing holes formed on a carrying surface, and performing at least any one of the controls of moving the plate-like substance, stopping it, keeping it still, or changing its direction, while floating it by the gas blown from the blowing holes. In the floatation transport system, a moving means (a moving device 13) pushing and moving the floating plate-like substance is disposed to the transfer part 1.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供一种漂浮运输装置和漂浮运输系统，其甚至移动重的板状基体，并且高速地改变基体物质的方向，并且当板材确定地停止时 通过向基体吹入气体漂浮基材，然后在浮动基体物质的同时使基体移动，停止或保持静止，或其方向改变。 解决方案：浮选传送系统通过组合在一起而构成，转印部分1具有形成在承载表面上的多个吹扫孔11B，并且通过从吹风孔11B吹出的气体移动板状物质，同时浮起 板状物质; 以及控制单元，其具有形成在承载表面上的多个吹风孔，并且执行至少任何一个移动板状物质的控制，停止，保持静止或改变其方向，同时将其浮动 从吹风孔吹出的气体。 在浮选输送系统中，移动浮动板状物质的移动装置（移动装置13）被设置在转印部分1上。（C）2008，JPO＆INPIT

公开(公告)号：JP2005072196A

公开(公告)日：2005-03-17

申请号：JP2003298830

申请日：2003-08-22

Applicant: Masayuki Tsuda ,  Watanabe Shoko:Kk ,  株式会社渡辺商行 ,  昌之 都田

Inventor： KUSUHARA MASAKI ,  TSUDA MASAYUKI

IPC: C23C16/44 ,  C23C16/455 ,  H01L21/31 ,  H01L21/316

CPC classification number: C23C16/45565 ,  C23C16/4481 ,  C23C16/45512 ,  C23C16/4557 ,  H01L21/31691

Abstract: PROBLEM TO BE SOLVED: To provide a thin film forming device that equalizes the film pressure of a substrate to be formed.
SOLUTION: To the thin film forming device, a feed gas vaporized by means of a vaporizer 11 is supplied through a pipeline 14. At the same time, a shower nozzle 15 which jets the feed gas toward the substrate to be formed P disposed to face the surface 15b of the nozzle 15 is provided with a peripheral wall 15c rising from the expanding end section of the external wall 15a of the nozzle 15.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种能够使待形成的基板的膜压力相等的薄膜形成装置。 解决方案：在薄膜形成装置中，通过蒸发器11蒸发的进料气体通过管道14供给。同时，喷射喷嘴15将进料气体喷射到待形成的基板P 设置成与喷嘴15的表面15b相对配置有从喷嘴15的外壁15a的扩展端部上升的周壁15c。（C）2005，JPO＆NCIPI

公开(公告)号：JP2005072194A

公开(公告)日：2005-03-17

申请号：JP2003298828

申请日：2003-08-22

Applicant: Masayuki Tsuda ,  Watanabe Shoko:Kk ,  株式会社渡辺商行 ,  昌之 都田

Inventor： KUSUHARA MASAKI ,  TSUDA MASAYUKI

IPC: C23C16/448 ,  H01L21/31

CPC classification number: C23C16/4481

Abstract: PROBLEM TO BE SOLVED: To provide a dispersing device for a vaporizer that prevents the projection of a rod regardless of the pressure of a carrier gas without using any special fixing component and, in addition, joins a plurality of thin film forming materials at a joining section in a state where the materials are distributed in suitable amounts.
SOLUTION: In the dispersing device for the vaporizer, the rod 37 which forms a gas passage 35 in cooperation with the internal wall of a hole formed along the transporting route of the carrier gas is inserted into the hole and a dispersing section which disperses a plurality of thin film forming raw materials in the carrier gas introduced into the gas passage 35 is disposed in the middle section of the passage 35. At least the front end section of the rod 37 on the downstream side of the transporting direction of the carrier gas is tapered down and, at the same time, the inner wall of the hole is formed in accordance with the shape of the front end section of the rod 37. The carrier gas in which the plurality of thin film forming materials are dispersed by means of the dispersing section is joined to the downstream-side end section of the gas passage 35 by the joining section.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种用于蒸发器的分散装置，无需使用任何特殊的固定部件即可防止棒的突出而不考虑载气的压力，另外，连接多个薄膜形成材料 在材料以适当的量分布的状态下的接合部分。 解决方案：在用于蒸发器的分散装置中，与沿着载气的输送路径形成的孔的内壁协同地形成气体通道35的杆37插入孔中，分散部分 在引导到气体通道35中的载气中分散多个薄膜形成原料设置在通道35的中间部分中。至少在杆37的输送方向的下游侧的前端部分 载气逐渐向下倾斜，同时孔的内壁根据杆37的前端部分的形状形成。多个薄膜形成材料分散在其中的载气 分散部的装置通过接合部与气体通路35的下游侧端部接合。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2005012134A

公开(公告)日：2005-01-13

申请号：JP2003177378

申请日：2003-06-20

Applicant: Masayuki Tsuda ,  Watanabe Shoko:Kk ,  株式会社渡辺商行 ,  昌之 都田

Inventor： KUSUHARA MASAKI ,  TSUDA MASAYUKI

IPC: C23C16/448 ,  H01L21/31

CPC classification number: C23C16/4481

Abstract: PROBLEM TO BE SOLVED: To provide a vaporization method and a vaporizer by which the number of particles scattered in a film after film formation is significantly reduced.
SOLUTION: A raw material solution is brought into contact with a heated carrier gas, and then transported to a next process. The vaporizer comprises a vaporizing chamber, a carrier gas channel connected to the vaporizing chamber, a raw material solution introducing port for introducing the raw material solution to the channel, and a means for heating the carrier gas.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种蒸发方法和蒸发器，通过该蒸发器和蒸发器，成膜后在膜中散射的颗粒的数量显着降低。 解决方案：使原料溶液与加热的载气接触，然后运送到下一个过程。 蒸发器包括蒸发室，连接到蒸发室的载气通道，用于将原料溶液引入通道的原料溶液引入口和用于加热载气的装置。 版权所有（C）2005，JPO＆NCIPI