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    Vaporizer, mocvd vaporizer using this vaporizer, center rod used in these vaporizers, carrier gas dispersion method and carrier gas vaporization method
    4.
    发明专利
    Vaporizer, mocvd vaporizer using this vaporizer, center rod used in these vaporizers, carrier gas dispersion method and carrier gas vaporization method 审中-公开
    蒸发器，使用该蒸发器的MOCVD蒸发器，在这些蒸发器中使用的中心棒，载体气体分散方法和载体气体蒸发方法

    公开(公告)号：JP2014159644A

    公开(公告)日：2014-09-04

    申请号：JP2014108382

    申请日：2014-05-26

    Applicant: M Watanabe & Co Ltd ,  株式会社渡辺商行 ,  Masayuki Toda ,  昌之 都田

    Inventor： UMEDA MASARU ,  TODA MASAYUKI

    IPC: C23C16/448 ,  H01L21/31

    Abstract: PROBLEM TO BE SOLVED: To provide a vaporizer which can cool a carrier gas efficiently, improve the clogging preventive effect in the vicinity of the outlet of a gass passage 5, contribute to extension of the maintenance period and improvement of running efficiency and achieves a more uniform dispersion effect.SOLUTION: A vaporizer includes a center rod 35 which is inserted into a carrier gas introduction hole formed in a distributor 2 and forms a gas passage 5, in cooperation with the inner wall of the carrier gas introduction hole, a cooling part which is arranged on the outer peripheral side of the gas carrier introduction hole of the distributor 2 to cool the inside of the gass passage 5, a cooling member insertion hole which is formed along the axial line direction of the center rod and nearly throughout the whole length of the center rod and a cooling member which is arranged in the cooling member insertion hole to cool the center rod.

    Abstract translation: 要解决的问题：为了提供能够有效地冷却载气的蒸发器，提高气体通路5的出口附近的堵塞防止效果，有助于延长维护期间和提高运行效率，并且实现更多 均匀分散效果。解决方案：蒸发器包括中心杆35，其插入形成在分配器2中的载气引入孔中，并与载气引入孔的内壁协作形成气体通道5，冷却部分 其布置在分配器2的气体承载器引入孔的外周侧，以冷却气体通道5的内部;冷却构件插入孔，其沿着中心杆的轴线方向形成，并且几乎整个 中心杆的长度和布置在冷却构件插入孔中以冷却中心杆的冷却构件。

    Levitation conveying device
    7.
    发明专利
    Levitation conveying device 有权

    公开(公告)号：JP5336707B2

    公开(公告)日：2013-11-06

    申请号：JP2007135978

    申请日：2007-05-22

    Applicant: 株式会社渡辺商行

    Inventor： 晃 植原 ,  昌之 都田 ,  優 梅田

    IPC: B65G51/03

    CPC classification number: H01L21/67784 ,  B65G51/03

    Abstract: A levitation transportation device that do not damage a workpiece and that can easily cope with a large-sized workpiece or a thin workpiece. A workpiece processing stage (300) is placed below a transportation surface of a transportation route along which a workpiece is levitated and transported by pressurized gas jetted in a predetermined direction. Above the workpiece processing stage (300) is placed a slide jet table (403) forming a part of the transportation route in an advanceable and retreatable manner. Further, the stage (300) has a jet section for jetting the pressurized gas upward from a gap in the jet table (403). When a workpiece is levitated and transported to above the stage (300), the jet table (403) located above the stage (300) receives the workpiece while causing it to levitate, retreats from above the stage (300), and delivers the workpiece to the stage (300) by operation of the jet section. When processing by the stage (300) is completed, the workpiece is levitated to a position above the transportation surface by operation of the jet section. After that, the jet table (403) receives the workpiece while causing it to levitate and then delivers it to the transportation route.

    Vaporizer
    10.
    发明专利
    Vaporizer 审中-公开
    喷雾器

    公开(公告)号：JP2012094907A

    公开(公告)日：2012-05-17

    申请号：JP2012019238

    申请日：2012-01-31

    Applicant: Masayuki Toda ,  Watanabe Shoko:Kk ,  株式会社渡辺商行 ,  昌之 都田

    Inventor： TODA MASAYUKI ,  KUSUHARA MASAKI ,  DOI MIKIO ,  UMEDA MASARU ,  FUKAGAWA MITSURU ,  KANNO YOICHI ,  UCHIZAWA OSAMU ,  YAMAMOTO KOHEI ,  MEGURO TOSHIKATSU

    IPC: H01L21/31 ,  C23C16/448

    Abstract: PROBLEM TO BE SOLVED: To provide a vaporizer for MOCVD, which can obtain a vaporized gas in which a raw material solution is uniformly dispersed, and to provide a method for vaporizing the raw material solution.SOLUTION: The vaporizer comprises: (1) a distribution part 8 which includes a gas introducing port 4 for introducing a pressurized carrier gas 3 to a gas passage, means for supplying the raw material solution 5a to the gas passage, and a gas outlet 7 for sending the carrier gas containing the raw material solution to a vaporization part 22; and (2) the vaporization part 22 which includes a vaporization tube 20 having one end connected to a reaction tube of an MOCVD device and the other end connected to the gas outlet 7 and heating means for heating the vaporization tube 20, and is used for heating and vaporizing the carrier gas containing the raw material solution sent from the distribution part 8. (3) The distribution part 8 has a main body 1 of the distribution part having a cylindrical hollow part, a rod 10 having an outer diameter smaller than an inner diameter of the cylindrical hollow part, and a spiral groove 60 in the side of the vaporizer 22 in the periphery of the rod 10. The rod 10 is inserted in the cylindrical hollow part.

    Abstract translation: 要解决的问题：提供一种用于MOCVD的蒸发器，其可以获得原料溶液均匀分散的汽化气体，并提供蒸发原料溶液的方法。 蒸发器包括：（1）分配部分8，其包括用于将加压载气3引入气体通道的气体引入口4，用于将原料溶液5a供应到气体通道的装置，以及 气体出口7，用于将含有原料溶液的载气送至气化部22; （2）蒸发部22，其包括蒸发管20，其一端连接到MOCVD装置的反应管，另一端连接到气体出口7，加热装置用于加热蒸发管20，并用于 加热并蒸发从分配部8送出的含有原料溶液的载气。（3）分配部8具有分配部的主体1，该主体1具有圆筒状的中空部，外径小于 圆筒状中空部的内径，以及位于棒10周边的蒸发器22一侧的螺旋槽60.杆10插入圆筒状中空部。 版权所有（C）2012，JPO＆INPIT

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