公开(公告)号：WO1991010202A1

公开(公告)日：1991-07-11

申请号：PCT/US1990005315

申请日：1990-09-18

Applicant: ASYST TECHNOLOGIES, INC.

Inventor： ASYST TECHNOLOGIES, INC. ,  MANEY, George, A. ,  BONORA, Anthony, C. ,  PARIKH, Mihir ,  BRAIN, Michael, D.

IPC: G06F15/46

CPC classification number: H01L21/67294 ,  G03F7/70525 ,  G03F7/70541 ,  G03F7/7075 ,  G03F7/70991 ,  G05B19/4183 ,  G05B2219/31002 ,  G05B2219/31286 ,  G05B2219/31323 ,  G05B2219/31432 ,  H01L21/67276 ,  Y02P90/08 ,  Y02P90/10 ,  Y02P90/24 ,  Y02P90/28 ,  Y02P90/285

Abstract: A system for storing, transporting and processing articles includes a plurality of transportable containers (10), each transportable container having an interior region adapted to receive a plurality of articles and data processing device (40) provided on the transportable container for receiving, storing, transmitting and displaying information related to the articles received by the corresponding transportable container. A plurality of workstations (702) are adapted to receive one of the transportable containers and to process selected ones of the articles. The workstations alos verify that at lest one of the articles in the transportable container has arrived at the appropriate workstation and communicate with a central processing unit (720) to receive and transmit status information and processing information, and to transmit information stored by the data processing device provided on the transportable container. The system may also include a storage station (740) for receiving said transportable container, for providing communication between the data processing devices (40) provided on the transportable container and the central processing unit, and for making a backup copy of the information stored by said data processing device.

Abstract translation: 用于存储，运输和处理物品的系统包括多个可运输容器（10），每个可运输容器具有适于容纳多个物品的内部区域和设置在可运输容器上的数据处理装置（40），用于接收， 发送和显示与相应的可运输容器接收的物品有关的信息。 多个工作站（702）适于接收可移动容器中的一个并处理所选物品中的一个。 工作站确认，运输容器中的至少一个物品已经到达适当的工作站并与中央处理单元（720）通信以接收和发送状态信息和处理信息，并且传送由数据处理存储的信息 设备提供在可运输的集装箱上。 该系统还可以包括用于接收所述可移动容器的存储站（740），用于提供在可移动容器上提供的数据处理设备（40）与中央处理单元之间的通信，并且用于制作由 所述数据处理装置。

公开(公告)号：WO2009135066A2

公开(公告)日：2009-11-05

申请号：PCT/US2009/042415

申请日：2009-04-30

Applicant: ASYST TECHNOLOGIES, INC. ,  MARTIN, Raymond, S. ,  BONORA, Anthony, C. ,  KROLAK, Michael

Inventor： MARTIN, Raymond, S. ,  BONORA, Anthony, C. ,  KROLAK, Michael

IPC: H01L21/677 ,  H01L21/673 ,  H01L21/68

CPC classification number: H01L21/67772 ,  H01L21/67265 ,  H01L21/68707

Abstract: A port door providing an interface into a processing tool is provided. The port door includes first and second arms pivotably mounted on a top edge of the port door. The first and second arms are configured to extend from a plane of the port door towards a carrier containing substrates for the processing tool. The first arm has an emitter transmitting a beam that is split into a plurality of sub-beams within the first arm. The second arm has a plurality of sensors receiving corresponding sub-beams, wherein one of sub-beams provides information as to a position of an end effector relative to a gap between the substrates in the carrier.

Abstract translation: 提供了一种提供加工工具的接口的端口门。 端口门包括可枢转地安装在端口门的顶部边缘上的第一和第二臂。 第一和第二臂构造成从端口门的平面延伸到包含用于处理工具的基底的载体。 第一臂具有发射器的发射器，该射束分裂成第一臂内的多个子光束。 第二臂具有多个传感器，其接收对应的子光束，其中一个子光束提供关于端部执行器相对于载体中的基板之间的间隙的位置的信息。

公开(公告)号：WO2009002888A3

公开(公告)日：2008-12-31

申请号：PCT/US2008/067810

申请日：2008-06-21

Applicant: ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C. ,  MARTIN, Raymond, S. ,  KROLAK, Michael

Inventor： BONORA, Anthony, C. ,  MARTIN, Raymond, S. ,  KROLAK, Michael

IPC: H01L21/68 ,  H01L21/67 ,  H01L21/02

Abstract: A semiconductor substrate is provided. The substrate includes a first surface and an opposing second surface, wherein the first surface includes a marking in a centroid region of the first surface. The marking indicates a location of a center point on the first surface of the semiconductor substrate or identification data unique to the substrate. A system, methods of transporting and marking, and a device for reading the substrate markings are also provided.

Abstract translation: 提供半导体衬底。 衬底包括第一表面和相对的第二表面，其中第一表面在第一表面的质心区域中包括标记。 该标记指示半导体衬底的第一表面上的中心点的位置或衬底特有的标识数据。 还提供了一种系统，运输和标记方法以及用于读取基材标记的装置。

公开(公告)号：WO2008085233A1

公开(公告)日：2008-07-17

申请号：PCT/US2007/024201

申请日：2007-11-19

Applicant: ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C. ,  HINE, Roger, G. ,  ROGERS, Theodore, W.

Inventor： BONORA, Anthony, C. ,  HINE, Roger, G. ,  ROGERS, Theodore, W.

IPC: H01L21/677

CPC classification number: B65G1/0407 ,  B65G37/02 ,  B65G2201/0297

Abstract: A system comprising a load port and a transfer module. In one embodiment, the load port includes a plate having a first opening and a second opening, a first workpiece access port, a second workpiece access port and at least one storage location. The storage location(s) may be located either beneath the second workpiece access port or above the first workpiece access port. The transfer mosule, which is located adjacent the load port, includes a load arm for moving the workpiece containers between the first workpiece access port, the second workpiece access port, any of the storage shelves and a material transport system.

Abstract translation: 一种包括负载端口和转移模块的系统。 在一个实施例中，负载端口包括具有第一开口和第二开口的板，第一工件接入端口，第二工件接入端口和至少一个存储位置。 存储位置可以位于第二工件访问端口下方或第一工件访问端口的上方。 位于负载端口附近的转移清除器包括用于在第一工件接入端口，第二工件接入端口，任何存储搁板和材料输送系统之间移动工件容器的负载臂。

公开(公告)号：WO2008064121A2

公开(公告)日：2008-05-29

申请号：PCT/US2007/084976

申请日：2007-11-16

Applicant: ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C.

Inventor： BONORA, Anthony, C.

IPC: B65H1/00

CPC classification number: B65G1/02

Abstract: The present invention generally comprises a container storage system for efficiently storing large capacity and small capacity containers or FOUPs. In one embodiment, each storage shelf within the stocker comprises a pair of spaced apart supports. A large capacity container or a small capacity container may be seated on any of these supports. The storage locations are arranged within the stocker to minimize the amount of empty space between the locations and seated containers. In one embodiment, the vertical pitch between supports of adjacent storage locations is less than the height of a large capacity FOUP container shell. Thus, when a FOUP is seated in a storage location, its container shell extends between the supports of the storage location located directly above.

Abstract translation: 本发明通常包括用于有效地存储大容量和小容量容器或FOUP的容器储存系统。 在一个实施例中，储盘架内的每个储物架包括一对间隔开的支撑件。 大容量容器或小容量容器可以安装在任何这些支撑件上。 存储位置被布置在储料器内以最小化位置和安置的容器之间的空闲空间的量。 在一个实施例中，相邻存储位置的支撑件之间的垂直间距小于大容量FOUP容器壳体的高度。 因此，当FOUP位于存储位置时，其容器壳体在位于直接位于上方的存储位置的支撑件之间延伸。

公开(公告)号：WO2008008834A2

公开(公告)日：2008-01-17

申请号：PCT/US2007/073256

申请日：2007-07-11

Applicant: ASYST TECHNOLOGIES, INC. ,  KROLAK, Michael ,  HINE, Roger, G. ,  BONORA, Anthony, C.

Inventor： KROLAK, Michael ,  HINE, Roger, G. ,  BONORA, Anthony, C.

IPC: B65G1/00 ,  B65G65/02 ,  B65G65/32 ,  B65G65/38

CPC classification number: H01L21/67379 ,  H01L21/67017 ,  H01L21/67386 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/68707

Abstract: A substrate support and transport system for substrates to be processed is provided. The system includes a container supporting a plurality of substrates in a substantially vertical orientation, where the container has an access door surrounded by a flange defined on a top surface. The system includes a conveying system supporting a bottom surface of the container opposing the top surface. The conveying system is configured to enable removal of the container from the conveying system to a processing tool while the plurality of substrates is in the substantially vertical orientation. The system further includes a receiving module for a processing tool configured to accept the container from the conveying system. The receiving module is configured to move the container in a two dimensional plane defined within the receiving module. A container holding the substrates in a substantially vertical orientation and a method for transporting and storing substrates is provided.

Abstract translation: 提供了一种用于待处理衬底的衬底支撑和输送系统。 该系统包括支撑基本垂直取向的多个基板的容器，其中容器具有由限定在顶表面上的凸缘包围的通道门。 该系统包括支撑与顶表面相对的容器的底表面的输送系统。 输送系统被构造成使得容器从输送系统移除到处理工具，同时多个基板处于基本垂直的方向。 该系统还包括用于处理工具的接收模块，该接收模块被配置为从输送系统接收容器。 接收模块被配置为在容纳模块内定义的二维平面内移动容器。 提供了将基板保持为大致垂直取向的容器以及用于输送和存储基板的方法。

公开(公告)号：WO2008008741A3

公开(公告)日：2008-01-17

申请号：PCT/US2007/073091

申请日：2007-07-09

Applicant: ASYST TECHNOLOGIES, INC. ,  ROGERS, Theodore, W. ,  DEYANOV, Roumen, I.

Inventor： ROGERS, Theodore, W. ,  DEYANOV, Roumen, I.

IPC: H01L21/306

Abstract: a bridge loadport (100) is described comprising a tool interface, an advance plate assembly (152), a port plate (140), and a port door (132). The tool interface extends vertically and is configured to substantially cover one end of a process tool. The advance plate assembly is supported on the front side of the tool interface and is configured to support a front-opening unified pod (70). The port plate extends vertically, covering an upper portion of the tool interface. An aperature having a size and shape that substantially matches a size and shape of a door (74) of a pod is formed in the port plate. The port door has a port door actuator (145) and a port door face attached to the port door actuator. In one embodiment, the port door face is movable with respect to the port door actuator along a line perpendicular to the aperature.

公开(公告)号：WO2007142645A1

公开(公告)日：2007-12-13

申请号：PCT/US2006/022263

申请日：2006-06-08

Applicant: ASYST TECHNOLOGIES, INC. ,  SHARMA, Arun ,  FRITSCHEN, Dan ,  LIU, Daniel ,  RILEY, Norma

Inventor： SHARMA, Arun ,  FRITSCHEN, Dan ,  LIU, Daniel ,  RILEY, Norma

IPC: G06K7/08

CPC classification number: G06K7/10178 ,  G06K7/10336

Abstract: The present invention generally comprises an apparatus that allows an RPID antenna to obtain information from an RFID tag mounted on a container. The apparatus reproduces the RF field generated by the antenna to a location proximate to the RFID tag. In one embodiment, the apparatus comprises a pickup device and a reproduction device electrically coupled with the pickup device. In another embodiment, the apparatus comprises at least one magnetic rod, which creates a magnetic path for the RF field to travel between the antenna and the RFID tag. In another embodiment, the apparatus comprises a pickup antenna and a reproduction antenna for transmitting the RF signal from the antenna proximate to the RFID tag.

Abstract translation: 本发明通常包括允许RPID天线从安装在容器上的RFID标签获取信息的装置。 该装置将由天线产生的RF场再现到靠近RFID标签的位置。 在一个实施例中，该装置包括拾取装置和与拾取装置电耦合的再现装置。 在另一个实施例中，该装置包括至少一个磁棒，其产生用于RF场在天线和RFID标签之间行进的磁路。 在另一个实施例中，该装置包括拾取天线和用于从靠近RFID标签的天线发送RF信号的再现天线。

公开(公告)号：WO2007038096A3

公开(公告)日：2007-04-05

申请号：PCT/US2006/036521

申请日：2006-09-19

Applicant: ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C. ,  ROGERS, Ted

Inventor： BONORA, Anthony, C. ,  ROGERS, Ted

IPC: H01L21/677

Abstract: The present invention generally comprises a transport system for transporting containers throughout a fabrication facility, and more specifically through a tool bay in the fabrication facility. The present invention generally includes a first container transport system for transporting a container from an interbay conveyor towards the first tool bay, a second container transport system for moving a container away from the first tool bay and a tool loading device to move containers between the first and second container transport systems and a load port. A merged return conveyor for transporting a container between the second container transport system and the interbay conveyor may also be included.

公开(公告)号：WO2006091593A2

公开(公告)日：2006-08-31

申请号：PCT/US2006/006103

申请日：2006-02-17

Applicant: ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C. ,  KROLAK, Michael ,  HINE, Roger, G.

Inventor： BONORA, Anthony, C. ,  KROLAK, Michael ,  HINE, Roger, G.

IPC: H01L21/00

CPC classification number: H01L21/67775 ,  H01L21/67736 ,  Y10S414/14

Abstract: The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.

Abstract translation: 本发明包括一个集装箱运输和装载系统。 该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。 在一个实施例中，负载端口包括可垂直移动的FOUP提前板组件，其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。 在另一个实施例中，负载端口包括可垂直移动的支撑结构，其适于从穿过负载端口的梭子加载和卸载容器。 负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。 本发明还包括用于同时运送多个容器的梭子，负载口可装载或卸载容器。