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公开(公告)号:US20030206444A1
公开(公告)日:2003-11-06
申请号:US10424943
申请日:2003-04-29
Applicant: Hitachi, Ltd. , Hitachi ULSI Systems Co., Ltd.
Inventor: Yuki Matsuda , Kenya Otani , Minoru Kato , Takeo Kon
IPC: G11C016/10
Abstract: The invention facilitates to meet both of the mode of use that finds precedence in frequent rewrite to the nonvolatile memory and data retention during the power supply being cut off, and the mode of use that finds precedence in the data retention characteristic. The controller enables an information storage operation to the nonvolatile memory cells, by means of erase and write processing through boosting of the voltage applied to the nonvolatile memory cells and clamping of the boosted voltage, and performs a selection control that selects the application interval of the boosted voltage applied during the information storage operation and so forth. This selection control enables utilizing the nonvolatile memory cells as temporary rewrite areas, and facilitates to meet both of the mode of use that finds precedence in data retention during the power supply being cut off, and the mode of use that finds precedence in the data retention characteristic.
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公开(公告)号:US20020182847A1
公开(公告)日:2002-12-05
申请号:US10197411
申请日:2002-07-18
Inventor: Natsuki Yokoyama , Masakazu Kawano
IPC: H01L021/4763
CPC classification number: H01L21/28518 , H01L21/28556 , H01L21/76877
Abstract: A layer comprising a second metal silicide as a major constituent element or a layer comprising a second metal as a major constituent element is formed simultaneously by one single chemical vapor deposition process to the bottom surface of two out of there groups of openings etched in a dielectric film on a substrate. A surface comprising silicon as a major constituent element is exposed at each bottom (nullthrough holes or local interconnection holesnull) of the first group of openings, a surface comprising a first metal silicide as a major constituent element is exposed at each bottom of the second group of openings, and a surface comprising a first metal as a major constituent element is exposed at each bottom of the third group of openings. The manufacturing method provides low contact resistance and sufficiently small junction leakage current from a diffusion layer in connection with plugs or local interconnections, even if the etched area of the openings are of different depths, shapes, or sizes.
Abstract translation: 包含第二金属硅化物作为主要构成元素的层或包含第二金属作为主要构成元素的层通过一个单一化学气相沉积工艺同时形成到蚀刻在电介质中的两组开口的底表面 薄膜在基材上。 包含硅作为主要构成元件的表面在第一组开口的每个底部(“通孔或局部互连孔”)处露出,包括作为主要构成元件的第一金属硅化物的表面在 第二组开口,并且包括第一金属作为主要构成元件的表面暴露在第三组开口的每个底部。 该制造方法即使蚀刻的开口区域具有不同的深度,形状或尺寸,也提供了与插头或局部互连相关联的来自扩散层的低接触电阻和足够小的结漏电流。
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公开(公告)号:US09275863B2
公开(公告)日:2016-03-01
申请号:US14492382
申请日:2014-09-22
Inventor: Sumito Numazawa , Yoshito Nakazawa , Masayoshi Kobayashi , Satoshi Kudo , Yasuo Imai , Sakae Kubo , Takashi Shigematsu , Akihiro Ohnishi , Kozo Uesawa , Kentaro Oishi
IPC: H01L21/336 , H01L21/28 , H01L29/66 , H01L29/78 , H01L29/06 , H01L29/08 , H01L29/423 , H01L29/51
CPC classification number: H01L21/28114 , H01L21/28185 , H01L21/28194 , H01L21/28202 , H01L21/28211 , H01L29/0696 , H01L29/0869 , H01L29/4236 , H01L29/42376 , H01L29/4238 , H01L29/511 , H01L29/513 , H01L29/518 , H01L29/66666 , H01L29/66734 , H01L29/7813 , H01L29/7827
Abstract: In a method of fabricating a semiconductor device having a MISFET of trench gate structure, a trench is formed from a major surface of a semiconductor layer of first conductivity type which serves as a drain region, in a depth direction of the direction of the semiconductor layer, a gate insulating film including a thermal oxide film and a deposited film is formed over the internal surface of the trench, and after a gate electrode has been formed in the trench, impurities are introduced into the semiconductor substrate of first conductivity type to form a semiconductor region of second conductivity type which serves as a channel forming region, and impurities are introduced into the semiconductor region of second conductivity type to form the semiconductor region of first conductivity type which serves as a source region.
Abstract translation: 在制造具有沟槽栅极结构的MISFET的半导体器件的方法中,从半导体层的方向的深度方向上的第一导电类型的半导体层的主表面形成沟槽, 在沟槽的内表面上形成包括热氧化膜和沉积膜的栅极绝缘膜,并且在沟槽中形成栅电极之后,将杂质引入到第一导电类型的半导体衬底中以形成 用作沟道形成区域的第二导电类型的半导体区域,并且将杂质引入到第二导电类型的半导体区域中,以形成用作源极区域的第一导电类型的半导体区域。
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公开(公告)号:US20140145259A1
公开(公告)日:2014-05-29
申请号:US14169627
申请日:2014-01-31
Inventor: Hiroshi INAGAWA , Nobuo MACHIDA , Kentaro OOISHI
IPC: H01L29/78 , H01L27/088
CPC classification number: H01L29/66734 , H01L21/02532 , H01L21/266 , H01L21/76897 , H01L27/0255 , H01L27/0629 , H01L27/088 , H01L29/0611 , H01L29/0619 , H01L29/0696 , H01L29/4232 , H01L29/4236 , H01L29/4238 , H01L29/66727 , H01L29/7804 , H01L29/7808 , H01L29/7811 , H01L29/7813 , H01L29/7827
Abstract: A semiconductor device has an FET of a trench-gate structure obtained by disposing a conductive layer, which will be a gate, in a trench extended in the main surface of a semiconductor substrate, wherein the upper surface of the trench-gate conductive layer is formed equal to or higher than the main surface of the semiconductor substrate. The conductive layer of the trench gate is formed to have a substantially flat or concave upper surface and the upper surface is formed equal to or higher than the main surface of the semiconductor substrate. After etching of the semiconductor substrate to form the upper surface of the conductive layer of the trench gate, a channel region and a source region are formed by ion implantation so that the semiconductor device is free from occurrence of a source offset.
Abstract translation: 半导体器件具有沟槽栅极结构的FET,其通过在半导体衬底的主表面中延伸的沟槽中设置作为栅极的导电层而获得,其中沟槽栅极导电层的上表面是 形成为等于或高于半导体衬底的主表面。 沟槽栅极的导电层形成为具有基本平坦或凹入的上表面,并且上表面形成为等于或高于半导体衬底的主表面。 在蚀刻半导体衬底以形成沟槽栅极的导电层的上表面之后,通过离子注入形成沟道区域和源极区域,使得半导体器件不发生源极偏移。
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公开(公告)号:US20130145084A1
公开(公告)日:2013-06-06
申请号:US13692506
申请日:2012-12-03
Applicant: Hitachi ULSI Systems Co., Ltd.
Inventor: Ayumi HIROMATSU , Masahiro KATAYAMA , Takanaga YAMAZAKI
CPC classification number: G06F12/0246 , H04L7/033 , H04L7/0331 , H04L25/0262 , H04L25/38
Abstract: An electronic apparatus provided with a serial communication circuit achieving a baud rate adjustment with high precision is provided. For example, a bit width of each of a plurality of bits in received serial data is measured by a clock counter, and an average value of the bit width is calculated detecting its maximum value and minimum value. Moreover, for example, a maximum tolerance and a minimum tolerance are calculated as a value substantially 1.5 times the average value and a value substantially 0.5 times the average value, and determination is made as to whether or not the maximum value and the minimum value are within a range between the maximum tolerance and the minimum tolerance. If they are within the range, the corresponding average value is set in a baud rate setting register.
Abstract translation: 提供了具有实现高精度的波特率调整的串行通信电路的电子设备。 例如,通过时钟计数器测量接收到的串行数据中的多个比特的比特宽度,并且计算其宽度的平均值来检测其最大值和最小值。 此外,例如,最大公差和最小公差被计算为基本上为平均值的1.5倍的值和基本上为平均值的0.5倍的值,并且确定最大值和最小值是否为 在最大公差和最小公差之间的范围内。 如果它们在范围内,则在波特率设置寄存器中设置相应的平均值。
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公开(公告)号:US20040259300A1
公开(公告)日:2004-12-23
申请号:US10795249
申请日:2004-03-09
Applicant: Renesas Technology Corp. , Hitachi ULSI Systems Co., Ltd.
Inventor: Takuya Futase , Tomonori Saeki , Mieko Kashi
IPC: C01B007/00
CPC classification number: C23F1/30 , H01L21/32134 , H01L27/10814 , H01L28/55 , H01L28/60 , Y10S134/902
Abstract: In order to prevent the contamination of wafers made of a transition metal in a semiconductor mass production process, the mass production method of a semiconductor integrated circuit device of the invention comprises the steps of depositing an Ru film on individual wafers passing through a wafer process, removing the Ru film from outer edge portions of a device side and a back side of individual wafers, on which said Ru film has been deposited, by means of an aqueous solution containing orthoperiodic acid and nitric acid, and subjecting said individual wafers, from which said Ru film has been removed, to a lithographic step, an inspection step or a thermal treating step that is in common use relation with a plurality of wafers belonging to lower layer steps (an initial element formation step and a wiring step prior to the formation of a gate insulating film).
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公开(公告)号:US20040170044A1
公开(公告)日:2004-09-02
申请号:US10792094
申请日:2004-03-04
Inventor: Takao Saotome , Takeshi Suzuki , Hiroyuki Tanaka , Shigeru Nakahara , Keiichi Higeta
IPC: G11C005/06
CPC classification number: G11C5/063 , G11C5/025 , G11C2029/3202
Abstract: There is provided a semiconductor integrated circuit device which has realized high speed operation, high integration density and highly efficient layout of the RAM macro, in which a memory array which is divided into four sections in the X and Y coordinates directions is disposed, a first input circuit for receiving a signal which requires optimization for a signal delay is disposed to the center of such four memory arrays, a second input circuit for receiving a data input and control signals thereof is disposed to the center of Y coordinate corresponding to the extending direction of the word line and a signal line for transferring an input signal from the external circuit of the RAM macro to the first and second input circuits is formed using an upper layer wiring for the wiring to form the memory array.
Abstract translation: 提供了一种半导体集成电路器件,其实现了RAM宏的高速操作,高集成密度和高效布局,其中布置了在X和Y坐标方向上被划分为四个部分的存储器阵列,第一 用于接收需要信号延迟优化的信号的输入电路设置在这样的四个存储器阵列的中心,用于接收数据输入的第二输入电路及其控制信号被设置在对应于延伸方向的Y坐标的中心 并且使用用于布线的上层布线形成用于将来自RAM宏的外部电路的输入信号传送到第一和第二输入电路的信号线,以形成存储器阵列。
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公开(公告)号:US20040151033A1
公开(公告)日:2004-08-05
申请号:US10748137
申请日:2003-12-31
Applicant: Renesas Technology Corp , Hitachi ULSI Systems Co., Ltd.
Inventor: Yoshio Takazawa , Toshio Yamada , Shinichi Ozawa , Takeo Kanai , Minoru Katoh , Koudou Yamauchi , Toshihiro Araki
IPC: G11C005/00
CPC classification number: G11C5/14 , G11C7/12 , G11C7/22 , G11C17/12 , G11C2207/2227
Abstract: Power wastefully consumed in a memory in standby state is reduced without lowering the speed of operation of reading data out of the memory. A semiconductor integrated circuit has a memory which can enter active state or standby state, and the memory has voltage generation circuits for bit lines and source lines with which memory cells are connected. The voltage generation circuits make the potential of the bit lines and the potential of the source lines equal to each other in response to an instruction to transition from active state to standby state. The voltage generation circuits produce a potential difference between the bit lines and the source lines in response to an instruction to transition from standby state to active state. In standby state, the potential of the bit lines and that of the source lines are equal to each other. Therefore, sub-threshold leakage does not occur between the source and drain of each memory cell. In active state, the source line potential is not varied. Therefore, the speed of data readout operation is not lowered.
Abstract translation: 在待机状态的存储器中浪费地消耗的电力降低,而不降低从存储器读出数据的操作速度。 半导体集成电路具有可以进入活动状态或待机状态的存储器,并且存储器具有用于存储单元连接的位线和源极线的电压产生电路。 响应于从活动状态转换到待机状态的指令,电压产生电路使位线的电位和源极线的电位彼此相等。 响应于从待机状态转换到活动状态的指令,电压产生电路产生位线和源极线之间的电位差。 在待机状态下,位线的电位和源极线的电位彼此相等。 因此,每个存储单元的源极和漏极之间不会发生次阈值泄漏。 在活动状态下,源极线电位不变。 因此,数据读出操作的速度不降低。
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公开(公告)号:US20040136530A1
公开(公告)日:2004-07-15
申请号:US10745540
申请日:2003-12-29
Applicant: Hitachi, Ltd. , Hitachi ULSI Systems Co., LTD.
Inventor: Takashi Endo , Masahiro Kaminaga , Takashi Watanabe , Kunihiko Nakada , Takashi Tsukamoto
IPC: H04L009/00
CPC classification number: G06F7/501 , G06F7/48 , G06F21/72 , G06F21/755 , G06F2207/7219 , H04L9/002 , H04L9/0861 , H04L9/0894
Abstract: An object of the present invention is to prevent secret information that is being internally processed from being inferred through operational information of a secured device, including the current consumption information. One solution is provided by an information processing device having at least a key generation apparatus that generates key data automatically, an encryption unit that encrypts data with the corresponding key data, a register that stores a plurality of encrypted data items with the corresponding encryption key data items, and an arithmetic unit that performs operations using data expressed with the corresponding encryption key data and new key data as the input, encrypts the operation result with new input key data, and outputs the result, thereby being capable of performing internal processing on an encrypted data expression. Accordingly, only encrypted data is transferred on the internal or external data bus line.
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公开(公告)号:US20040125676A1
公开(公告)日:2004-07-01
申请号:US10728965
申请日:2003-12-08
Applicant: Renesas Technology Corp. , Hitachi ULSI Systems Co., Ltd.
Inventor: Kenichi Osada , Takayuki Kawahara , Ken Yamaguchi , Yoshikazu Saito , Naoki Kitai
IPC: G11C007/00 , G11C029/00
CPC classification number: G06F11/1008 , G06F11/108 , G11C5/025 , G11C7/22 , G11C7/24 , G11C8/20 , G11C11/412 , G11C2207/2218 , G11C2207/229 , H01L27/0207 , H01L27/1104
Abstract: According to one aspect of the present invention, there is provided a semiconductor device comprising a plurality of memory cells, and an error-correction circuit, wherein write operation is performed by a late-write method, and ECC processing is executed in parallel with writing, and thereby cycle time is shortened. Moreover, it is better that when a memory cell is power supplied through a well tap, the same address is not assigned while the memory cell is power supplied through the well tap.
Abstract translation: 根据本发明的一个方面,提供了一种包括多个存储单元的半导体器件和一个纠错电路,其中写操作是通过后期写入方式执行的,ECC处理与写入并行执行 ,从而缩短周期时间。 此外,当存储单元通过阱抽头供电时,更好的是,当存储单元通过井口供电时,不分配相同的地址。
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