公开(公告)号：JP2004314289A

公开(公告)日：2004-11-11

申请号：JP2004068325

申请日：2004-03-11

Applicant: Sony Corp ,  ソニー株式会社

Inventor： TADA MASAHIRO ,  KINOSHITA TAKASHI ,  TANAKA NAOHIRO ,  YAMAGUCHI SEIYA ,  MITARAI TAKASHI ,  NANBADA KOJI

IPC: B81C1/00 ,  B81B3/00 ,  B81B7/00 ,  H03H3/007 ,  H03H9/24

CPC classification number: H03H3/0072 ,  B81B7/0012

Abstract: PROBLEM TO BE SOLVED: To seal a part of an oscillator of a micro machine by carrying out sacrifice layer etching, and to remove and seal a sacrifice layer without requiring a special packaging technology even in that case.
SOLUTION: In the manufacturing method of the micro machine 1 equipped with the oscillator 4 comprises steps of: forming the sacrifice layer around a moving portion of the oscillator 4; covering the sacrifice layer with an over coat film 8 and forming a penetrating port 10 leading to the sacrifice layer on the over coat film 8; carrying out the sacrifice layer etching for removing the sacrifice layer by using the penetrating port 10 so as to form a space around the moving portion; and sealing the penetrating port 1 by conducting deposition processing under a reduced pressure after sacrifice layer etching.
COPYRIGHT: (C)2005,JPO&NCIPI

公开(公告)号：JP2004243462A

公开(公告)日：2004-09-02

申请号：JP2003035471

申请日：2003-02-13

Applicant: Sony Corp ,  ソニー株式会社

Inventor： TADA MASAHIRO ,  KINOSHITA TAKASHI

IPC: B81B3/00 ,  H01L41/08 ,  H01L41/09 ,  H03H9/24

Abstract: PROBLEM TO BE SOLVED: To adjust the natural frequency (resonance frequency) of the vibrator in a MEMS element having a beam type vibrator.
SOLUTION: The MEMS element is provided with the beam type vibrator 15 having integrated rising portions or falling portions 15a, 15b so as to be opposed to a fixed side electrode 13. The natural frequency of the beam 15 is adjusted by controlling the vibration of the rising portions or falling portions 15a, 15b of the beam 15 by electrostatic force (electrostatic force caused by control electrodes 17A, 17B) or mechanical fixing force.
COPYRIGHT: (C)2004,JPO&NCIPI

公开(公告)号：JP2004181567A

公开(公告)日：2004-07-02

申请号：JP2002350639

申请日：2002-12-03

Applicant: Sony Corp ,  ソニー株式会社

Inventor： TADA MASAHIRO ,  KINOSHITA TAKASHI ,  MITARAI TAKASHI ,  ITO YASUYUKI

IPC: B81B3/00 ,  B81C1/00 ,  H03H3/007 ,  H03H9/24

CPC classification number: H03H3/0072 ,  H03H9/2405 ,  H03H2009/02511

Abstract: PROBLEM TO BE SOLVED: To provide a micromachine for a high frequency filter having a high Q value, and a higher frequency band.
SOLUTION: This micromachine 1 has an output electrode 7 arranged on a base board 5, an interlayer insulating film 9 arranged in a state of covering the base board 5 and having a hole pattern 9a with the output electrode 7 as a bottom part and a belt-like vibrator electrode 11 arranged on the interlayer insulating film 9 so as to cross an upper part with the inside of the hole pattern 9a as a space part A. The vibrator electrode 11 is characterized by being arranged in a recessed shape on the hole pattern 9a side along a side wall of the hole pattern 9a.
COPYRIGHT: (C)2004,JPO&NCIPI

公开(公告)号：JP2004125706A

公开(公告)日：2004-04-22

申请号：JP2002292861

申请日：2002-10-04

Applicant: Sony Corp ,  ソニー株式会社

Inventor： MAMINE TAKAYOSHI ,  KINOSHITA TAKASHI

IPC: C12M1/00 ,  C12N15/09 ,  C12Q1/68 ,  G01N27/00 ,  G01N33/53 ,  G01N37/00 ,  G01Q10/00 ,  G01Q60/24 ,  G01Q80/00 ,  G01N13/16

CPC classification number: G01N29/036 ,  B82Y5/00 ,  C12Q1/6816 ,  G01N2291/0257 ,  C12Q2565/60

Abstract: PROBLEM TO BE SOLVED: To detect the hybridization and the intereaction between objects with a fixed amount.
SOLUTION: In a cell detector 2, surface processing is applied to an end surface 13a of a cantilever 13, and nucleotide tether D for detection can be fixed thereto. A positive electrode 11 and a negative electrode 12 generate an electric field in a reactive region 10. A target nucleotide tether T deposited from a nozzle 3 moves to the end surface 13a while being extended. Hybridization of the detected nucleotide tether D and the target nucleotide tether T causes the mass of the cantilever 13 to increase, and the number of fixed vibrations decreases. The change in the fixed vibrations is measured by applying an AC voltage to the cantilever 13. In this way, the hybridization can be detected and the number of the target nucleotide tether T being hybridized is detected.
COPYRIGHT: (C)2004,JPO

公开(公告)号：JP2004058228A

公开(公告)日：2004-02-26

申请号：JP2002221433

申请日：2002-07-30

Applicant: Sony Corp ,  ソニー株式会社

Inventor： TADA MASAHIRO ,  KINOSHITA TAKASHI ,  TANIGUCHI TAKESHI ,  IKEDA KOICHI

IPC: B81B3/00 ,  B81C1/00 ,  H03H3/007 ,  H03H9/02 ,  H03H9/24 ,  H03H9/46

CPC classification number: H03H9/2463 ,  H03H3/0072

Abstract: PROBLEM TO BE SOLVED: To provide a micromachine for a high frequency filter having a high Q value and a higher frequency band.
SOLUTION: This micromachine 20 is provided with an input electrode 7b, an output electrode 7a and a support electrode 7c mounted on a substrate 4, and a belt-shaped vibrator electrode 15 formed by laying a beam (vibration part) 15a whose both side ends are supported on the input electrode 7b and the substrate 4 via the support electrode 7c with a space part A formed in the upper part of the output electrode 7a. Both side end parts of the vibrator electrode 15 are completely fixed to the input electrode 7b and the support electrode 7c in the whole surface from the tip to the beam 15a.
COPYRIGHT: (C)2004,JPO

公开(公告)号：JPS57208608A

公开(公告)日：1982-12-21

申请号：JP9195681

申请日：1981-06-15

Applicant: SONY CORP

Inventor： KINOSHITA TAKASHI ,  SHIROCHI YOSHIKI ,  MOTOYOSHI NOBORU

IPC: G11B5/027 ,  G11B20/00 ,  G11B20/02 ,  H04N5/60 ,  H04N5/92 ,  H04N9/802

Abstract: PURPOSE:To ensure the automatic switching of circuits with a simple constitution when the voice multiplex TV signal is reproduced, by superposing the pilot signals on different voice tracks along with the voice signal in accordance with each voice multiplex mode for recording. CONSTITUTION:The voice multiplex TV signal receives the wave detection through a wave detecting circuit 3, and the video signal is recorded on a tape T by a rotary magnetic head 6 via a recording circuit 4. While, the signal received the wave detection through an FM wave detecting circuit 12 is applied to a matrix circuit 18 after the subchannel voice signal SS is extracted via a BPF14, an FM wave detecting circuit 15, etc. as soon as the main channel voice signal SM is extracted via an LPF13. At the same time, the control signal that passes the BPF19, 21, 22, etc. and in accordance with the stereo mode, the voice multiplex mode, etc. is applied to the circuit 18. Then the pilot signal in accordance with the voice multiplex mode is superposed on the voice signal to be recorded on two sets of different voice tracks via the circuit 18. As a result, the switching of circuits is automatically carried out in accordance with the multiplex mode based on the pilot signal in the reproduction mode.