公开(公告)号：JPS5924223A

公开(公告)日：1984-02-07

申请号：JP13426582

申请日：1982-07-30

Applicant: Shimadzu Corp

Inventor： AKIYAMA OSAMU

IPC: G01J3/02 ,  G01J3/10

CPC classification number: G01J3/10 ,  G01J3/02 ,  G01J3/0235 ,  G01J3/0254

Abstract: PURPOSE:To enable the use both for measuring general samples and light source characteristic with a simple switch operation by retaining a light diffuser on a holder the same in the construction as a light source holder to form an exchange unit for measuring a spectroscopic radiation characteristic of any light source so as to be exchangeable for the light source holder unit. CONSTITUTION:A light diffuser holder unit is mounted in place of a light holder unit in such a manner that the emission port Eo of an integrating sphere I is positioned as the luminous section of a tungsten lamp W when the light source holder unit is place there. Therefore, an emitted light emitted from the integrating sphere I enters a spectroscope when the mirror M is at the position as illustrated. A light source Q to be measured is set above the integrating sphere I and light of the light source to be measured is focused at the incident port Ei at the apex to enter the integrating sphere I. Under such a condition, as the mirror M is retreated in the direction of the arrow, light of a heavy hydrogen lamp D2 enters the spectroscope. Thus, switching is done over to the ultraviolet range measuring mode for the general sample whether or not the light diffuser holder unit is mounted.

Abstract translation: 目的：为了通过简单的开关操作来测量一般样品和光源特性，通过将光扩散器保持在与光源保持器的结构相同的保持器上，形成用于测量光谱辐射特性的交换单元 任何光源，以便可更换光源保持器单元。 构成：光源保持器单元安装在灯座单元上，使得当光源保持器单元放置在那里时，积分球I的发射端口Eo被定位为钨灯W的发光部分 。 因此，当反射镜M处于如图所示的位置时，从积分球I射出的发射光进入分光镜。 要测量的光源Q设置在积分球I的上方，并且待测光源的光聚焦在顶点处的入射端Ei处以进入积分球I.在这样的条件下，由于镜M是 沿箭头方向退回，重氢灯D2的光线进入分光镜。 因此，无论光扩散器支架单元是否被安装，都进行一般样品的紫外线测量模式的切换。

公开(公告)号：JPS5924222A

公开(公告)日：1984-02-07

申请号：JP13430282

申请日：1982-07-31

Applicant: Shimadzu Corp

Inventor： AKIYAMA OSAMU ,  GOTOU SEIJI

IPC: G01J3/02 ,  G01N21/55

CPC classification number: G01N21/55

Abstract: PURPOSE:To enable accurate measurement of both mirror reflection and transmission light without restriction of the sample by completely averaging and eliminating effect of uneven sensitivity in the photo detecting surface of a photo detecting element employing a photometry through a integrating sphere. CONSTITUTION:The measurement of a mirror reflectance is done as follows: A mirror sample is set at the position B while a standard white plate at the position D. Mirrors M1 and M2 are positioned as illustrated, a monocolor light emitted from spectroscope 1 enters an integrating sphere I via the optical path of the solid line in the drawing passing through mirrors M1, M2, M3 and M4 and measured with a photo detector 2. The measured value thus obtained corresponds to 100% of the reflectance. Then, the mirrors M1 and M2 are moved to the dotted lines M1' and M2' respectively. At this point, the incident light of the spectroscope 1 enters the integrating sphere I via M1', M2', M3 and M4 and the optical path indicated by the dotted line and measured with a light detection circuit 2. This also enables the measurement of parallel transmission light, all transmission light combining parallel light and diffusion transmission light, diffusion reflection excluding mirror reflection and relative reflection by replacing the mirror 2 with a reference reflection sample and a measurement sample.

Abstract translation: 目的：通过完全平均化和消除通过积分球采用光度测量的光检测元件的光检测表面的不均匀灵敏度的影响，能够精确地测量镜面反射和透射光两者而不限制样品。 构成：镜面反射率的测量如下进行：将镜子样品设置在位置B处，而位置D处的标准白板。如图所示定位镜M1和M2，从分光镜1发射的单色光进入 通过经过反射镜M1，M2，M3和M4的图中的实线的光路积分球体I，并用光电检测器2测量。由此获得的测量值对应于反射率的100％。 然后，反射镜M1和M2分别移动到虚线M1'和M2'。 此时，分光镜1的入射光通过M1'，M2'，M3和M4进入积分球I，虚线所示的光路通过光检测电路2进行测量。 平行透射光，所有透射光组合平行光和扩散透射光，通过用参考反射样品和测量样品替换反射镜2，排除镜反射和相对反射之外的扩散反射。

公开(公告)号：JP2010190824A

公开(公告)日：2010-09-02

申请号：JP2009037549

申请日：2009-02-20

Applicant: Shimadzu Corp ,  Tokyo Electron Ltd ,  東京エレクトロン株式会社 ,  株式会社島津製作所

Inventor： AKIYAMA OSAMU ,  AKIMOTO MASASHI ,  MORIYA TAKESHI ,  YAMAWAKI JUN

IPC: G01N21/39 ,  G01N1/00 ,  G01N1/22 ,  G01N15/06 ,  G01N21/3554

CPC classification number: G01N21/3554 ,  G01N21/031 ,  G01N21/05 ,  G01N21/3504 ,  G01N21/9501 ,  H01L21/67253

Abstract: PROBLEM TO BE SOLVED: To prevent decline of a reflectance or a transmittance in an optical system, and to prevent decline of analysis sensitivity, caused by adhesion of various substances in exhaust gas in a semiconductor manufacturing process onto a reflecting mirror or a window in a cell of a moisture meter. SOLUTION: This absorption spectrometric apparatus for the semiconductor manufacturing process includes: a channel switching mechanism 50 connected to an exhaust channel of a processing chamber 39 in the semiconductor manufacturing process; and an absorption spectrometric apparatus 51 for multiple reflection type moisture concentration measurement for detecting an absorbance change caused by gas by multiple reflection in the cell of laser light from a laser light source, and measuring the moisture concentration in process gas. The channel switching mechanism 50 switches an exhausting channel after passing the analyzer 51 to/from an exhausting bypass channel without passing the analyzer 51. In this case, a particle measurement result acquired by measuring particles in the process gas can be used as a determination reference for switching the channel. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：为了防止光学系统中的反射率或透射率的下降，并且防止由半导体制造工艺中的废气中的各种物质粘附到反射镜或者反射镜上而引起的分析灵敏度的下降 窗口在水分计的一个单元格。 解决方案：用于半导体制造工艺的该吸收光谱仪包括：在半导体制造过程中连接到处理室39的排气通道的通道切换机构50; 以及用于多次反射型水分浓度测量的吸收光谱测定装置51，用于检测由来自激光源的激光单元中的多次反射引起的气体的吸光度变化，以及测量处理气体中的水分浓度。 通道切换机构50在通过分析器51之后切换排气通道而不通过分析器51。在这种情况下，可以使用通过测量处理气体中的颗粒获得的颗粒测量结果作为确定参考 用于切换通道。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2006058009A

公开(公告)日：2006-03-02

申请号：JP2004236921

申请日：2004-08-17

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： FUJISAWA SEIICHI ,  AKIYAMA OSAMU ,  YAMAZAKI HIROSHI ,  SASAI HIROYUKI

IPC: G01N21/61 ,  G01N21/03

Abstract: PROBLEM TO BE SOLVED: To simply correct the distance between mirrors so as to adjust the error of the radius of curvature of the mirror.
SOLUTION: The mirror is preliminarily subjected to machining so as to become slightly large in its radius of curvature and, after the surface of the mirror is subjected to polishing processing, three-dimensional surface measurement is performed to calculate real mirror curvature. Next, two kinds of gaskets, that is, a gasket 16 for vacuum sealing and a gasket 17 for adjusting the distance between the mirrors are used between a selfbody 13 and flange mirrors 1 and 3 corresponding to the real mirror curvature to adjust the distance between the mirrors 1a and 3a. A non-deformable hard SUS plate is used as the gasket 17. The gasket 16 is formed using a soft material into which a knife edge 18 bites.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：简单地校正反射镜之间的距离，以便调整反射镜的曲率半径的误差。 解决方案：反射镜预先进行加工以使其曲率半径略大，并且在反射镜的表面进行抛光处理之后，进行三维表面测量以计算实际镜面曲率。 接下来，在自身13和法兰镜1和3之间使用两种垫片，即用于真空密封的垫圈16和用于调节反射镜之间的距离的垫片17，以调整实镜镜面曲率之间的距离 镜子1a和3a。 使用不可变形的硬SUS板作为垫圈17.密封垫16使用刀刃18咬入的软质材料形成。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005172636A

公开(公告)日：2005-06-30

申请号：JP2003413826

申请日：2003-12-11

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： AKIYAMA OSAMU

IPC: G01N15/06 ,  G01N1/02 ,  G01N21/15 ,  G01N21/59

Abstract: PROBLEM TO BE SOLVED: To reduce the influence on a measurement result due to waterdrops formed from a condensed water vapor and attached to a surface of an optical element facing a gas duct, after driving over a long time.
SOLUTION: A photocatalyst TiO
2 layer 23 is applied to a surface, exposed to a space which is connected to the gas duct of a collimating lens 8, a reflection plate 14 and a reflecting mirror 10. Light sources 24a, 24b, 26, 28a, 28b are provided in the vicinity of the collimating lens 8, the reflecting plate 14 and the reflecting mirror 10 and turned to the surfaces of these, so as to irradiate an ultraviolet light. Water vapor, attached to the surfaces on the gas duct side of the collimating lens 8, the reflecting plate 14 and the reflecting mirror 10, will not turn into waterdrops, but will turn into a thin film by the action of the photocatalyst layer 23.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：减少由冷凝水蒸气形成的水滴产生的测量结果的影响，并且在长时间驱动之后附着到面向气体管道的光学元件的表面。 解决方案：将光催化剂TiO 2 SB 2层23施加到表面，暴露于与准直透镜8，反射板14和反射镜10的气体导管连接的空间 光源24a，24b，26,28a，28b设置在准直透镜8，反射板14和反射镜10附近并转向其表面，以照射紫外光。 在准直透镜8，反射板14和反射镜10的气体导管侧的表面上附着的水蒸汽不会变成水滴，而是通过光催化剂层23的作用变成薄膜。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2003080257A

公开(公告)日：2003-03-18

申请号：JP2001275047

申请日：2001-09-11

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： AKIYAMA OSAMU

IPC: G01N33/18 ,  C02F1/46 ,  G01N21/05 ,  G01N21/27 ,  G01N21/33

Abstract: PROBLEM TO BE SOLVED: To provide an apparatus for producing electrolytic water which generates an alarm signal to a user and prohibits the use of the electrolytic water when effective chlorine concentration falls than a predetermined value.
SOLUTION: When the effective chlorine concentration measured by a data processing unit 38 of a measuring part 30a becomes under a fixed level, a control part 40 shuts off the switches 14a and 14b of a DC voltage supply 14 for an electrolysis vessel 11, closes the valves 23 and 24 of the intakes of an acidic water tank 86a and an alkaline water tank 86b provided outside, and then the user cannot use the electrolytic water. A blinking on the effective chlorine concentration at that time is displayed on the concentration display 39a of an output part 39 so that the user realizes the state, and a buzzer 39b sounds.
COPYRIGHT: (C)2003,JPO

Abstract translation: 要解决的问题：提供一种用于生产电解水的装置，其向用户产生报警信号，并且当有效氯浓度低于预定值时禁止使用电解水。 解决方案：当由测量部分30a的数据处理单元38测量的有效氯浓度变得处于固定水平时，控制部分40关闭用于电解容器11的直流电压源14的开关14a和14b， 在外部设置的酸性水箱86a和碱性水箱86b的进气口的阀23和24，然后使用者不能使用电解水。 此时的有效氯浓度闪烁显示在输出部39的浓度显示部39a上，使得用户实现状态，蜂鸣器39b发声。

公开(公告)号：JP2003075338A

公开(公告)日：2003-03-12

申请号：JP2001271788

申请日：2001-09-07

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： AKIYAMA OSAMU

IPC: G01N21/05 ,  C02F1/46 ,  G01N21/27 ,  G01N21/33

Abstract: PROBLEM TO BE SOLVED: To provide an absorbance measuring device capable of proper data processing even if there is no operator capable of determining abnormal data attributable to a bubble or the like produced by accident.
SOLUTION: Data a1, a2,..., a15 for the past one minute is obtained by measuring absorbance of a sample liquid at an interval of 15 seconds. Abnormal data in this one minute are a5 due to an air bubble or the like and a10 due to a foreign substance or the like. In the case of a large air bubble, light is easily transmitted and in the case of a small air bubble, light is inflected, so that it may be decreased by sensitivity irregularity or the like of a light receiving surface of a detector. When there is a foreign substance, light is hard to transmit, so that the absorbance is lowered. This is a very rare phenomenon, and in date processing, the output is displayed by including the measurement data a15 up to the present time, by removing the maximum value a5 and the minimum value a10 up to a past certain time and by calculating the average value of the residual data.
COPYRIGHT: (C)2003,JPO

Abstract translation: 要解决的问题：即使没有能够确定归因于意外产生的气泡等的异常数据的操作者，也能够提供适当的数据处理的吸光度测量装置。 解决方案：通过以15秒的间隔测量样品液体的吸光度，获得过去一分钟的数据a1，a2，...，a15。 这一分钟的异常数据由于气泡等而为a5，而由于异物等而导致a10。 在气泡较大的情况下，光容易透过，在气泡较小的情况下，光线被弯曲，因此可以通过检测器的受光面的灵敏度不均匀等而降低。 当有异物时，光难以透射，因此吸光度降低。 这是非常罕见的现象，在日期处理中，通过将测量数据a15直至当前时间，通过将最大值a5和最小值a10除去到过去一定时间并通过计算平均值来显示输出 剩余数据的值。

公开(公告)号：JP2000343080A

公开(公告)日：2000-12-12

申请号：JP34759299

申请日：1999-12-07

Applicant: SHIMADZU CORP ,  KINOSUI KENKYUSHO KK

Inventor： AKIYAMA OSAMU

IPC: A61L2/02 ,  A61L2/18 ,  C02F1/46 ,  G01N21/33

Abstract: PROBLEM TO BE SOLVED: To monitor a hypochlorous acid concn. in the produced strongly acidic water without using a color reagent and also to increase its measuring accuracy. SOLUTION: The strongly acidic water and the strongly alkaline water produced at an electrolytic cell 11 are conducted respectively to each individual liq. tank 62 and 63 of an air open type first liq. tank 61, then each liq. is sent to an air open type second liq. tank 67 by suction tubes 64 and 65 and shear pumps 73 and 74, and the liq. is forcively agitated by a stirrer 71 to sufficiently mix both liquids, and the mixture is sent to a flow cell 31 by a suction tube 68 and a shear pump 75. The flow cell 31 is irradiated with a light from a light source 32, and transmitted light is bisected by a beam slitter 33, and one side is conducted to a photocell 36 via an optical filter 34 transmitting near 292 nm wave length and the other side is conducted to a photocell 37 via an optical filter 35 transmitting >=400 nm wave length respectively, and the hypochlorous acid concn. is obtained from their detected output.

公开(公告)号：JP2000042556A

公开(公告)日：2000-02-15

申请号：JP10340599

申请日：1999-04-09

Applicant: SHIMADZU CORP ,  KINOSUI KENKYUSHO KK

Inventor： AKIYAMA OSAMU

IPC: A61L2/02 ,  A61L2/03 ,  A61L2/18 ,  C02F1/46 ,  C02F1/461 ,  C02F1/467 ,  C25B15/00

Abstract: PROBLEM TO BE SOLVED: To produce a strong acidic water always containing a specified concentration of hypochlorous acid in spite of switching polarity in order to protect the electrode. SOLUTION: The concentration of hypochlorous acid in a strong acidic water is measured with a concentration sensor 24, and the pattern of deviations of concentration changing in a saw teeth state in accordance with switching to the polarities of anode 22 and cathode 23 in an electrolytic bath 21, is inputted in a control device 31, and the control device 31 calculates a control pattern inversely corresponding to it, and the electrolytic current flowing to the electrodes 22, 23 and the voltage are controlled with the control pattern, or the feed quantity of raw water or a chloride solution 16 is controlled with a flow rate control valve 13 and a metering pump 17.

公开(公告)号：JPH11342183A

公开(公告)日：1999-12-14

申请号：JP15425198

申请日：1998-06-03

Applicant: SHIMADZU CORP

Inventor： AKIYAMA OSAMU

IPC: A61L2/02 ,  A61L2/18

Abstract: PROBLEM TO BE SOLVED: To improve usability in actual usage. SOLUTION: Strong acid water preliminarily stored in a separate container 51 is lifted by a pump 52 to be forcedly supplied into a supply port reaching a pressure reducing valve 11 instead of raw water. At this time, a maintenance switch 32 is pushed, so a control device 31 sets a solenoid switching valve 12 in an open condition, an electrolytic voltage supply power source to an electrolysis vessel 21 in an off condition, and a quantitative pump 16 in an off condition. Cleaning liquid flowing from the electrolysis vessel 21 through guide tubes 25, 26 is returned to the separate container 51 to form a circulation loop. A sort of agitation action is provided by force of forcedly supplied strong acid water, thereby a flow passage line including the electrolysis vessel 21 can be efficiently cleaned.