合成石英ガラスの製造方法
    74.
    发明专利

    公开(公告)号:JP2018184312A

    公开(公告)日:2018-11-22

    申请号:JP2017085708

    申请日:2017-04-24

    Inventor: 内海 学

    Abstract: 【課題】 徐冷を行う合成石英ガラスの大きさに応じて、適切な徐冷速度を選択することができ、該適切な徐冷速度で徐冷を行うことができる合成石英ガラスの製造方法を提供する。 【解決手段】 母材である合成石英ガラスを熱処理炉に投入する工程と、前記熱処理炉内の温度を、徐冷点以上である所定の保持温度まで昇温させる工程と、前記保持温度で保持する工程と、前記合成石英ガラスを徐冷する工程と、合成石英ガラスを前記熱処理炉から搬出する工程とを含むアニール処理を含み、前記母材である合成石英ガラスの表面積をS[mm 2 ]とし、体積をV[mm 3 ]としたときのS/V[mm 2 /mm 3 ]の値、及び、前記徐冷を行った後の合成石英ガラスにおいて目標とする複屈折値Re[nm/cm]に基づいて、前記徐冷工程の徐冷速度v[℃/時間]を決定する工程を有し、該決定した徐冷速度vで前記徐冷工程を行う合成石英ガラスの製造方法。 【選択図】 図1

    Preparation of quartz glass
    78.
    发明专利
    Preparation of quartz glass 失效
    石墨玻璃的制备

    公开(公告)号:JPS6140825A

    公开(公告)日:1986-02-27

    申请号:JP16072184

    申请日:1984-07-31

    Abstract: PURPOSE:To obtain transparent and uniform quartz glass in the process for prepg. quartz glass by the sol-gel process using alkyl silicate, and fine pulverous silica as main raw materials by removing foreign matters by centrifuging the sol in the stage or after prepn. of the sol. CONSTITUTION:White sol is prepd. by mixing alkyl silicate (e.g. ethyl silicate), water, hydrochloric acid, and fine silica powder, etc. and prepg. white sol by stirring or dispersing with supersonic wave, etc. Then, the sol is centrifuged to remove foreign matters in the sol, adjusting the pH of the sol to 3-5 by dropping aq. NH3, and foreign matters are removed further by centrifuging again. Then, the sol is gelled in a specified vessel; the gel is dried in a dryer when the gel begins to shrink. Obtd. dry gel is heated and sintered in a sintering furnace. By this method, quartz glass contg. only trace amt. of foam and foreign matters and suitable as a parent material of optical fiber is prepd.

    Abstract translation: 目的:在制备过程中获得透明均匀的石英玻璃。 通过使用烷基硅酸盐的溶胶 - 凝胶法制备石英玻璃,以及作为主要原料的细粉状二氧化硅通过在该阶段或制备后离心溶胶除去异物。 的溶胶 规定:白色溶胶是prepd。 通过混合硅酸烷基酯(例如硅酸乙酯),水,盐酸和二氧化硅微粉等粉末, 通过用超声波搅拌或分散白色溶胶等。然后将溶胶离心以除去溶胶中的异物,通过滴加水溶液将溶胶的pH调节至3-5。 NH 3,再次通过离心再除去异物。 然后,该溶胶凝胶化在指定的容器中; 当凝胶开始收缩时,将凝胶在干燥器中干燥。 有限公司 将干燥的凝胶在烧结炉中加热和烧结。 通过这种方法,石英玻璃 只有痕迹。 的泡沫和异物,并适合作为光纤的母体材料。

    엑시머 자외선등 장치용 대형 합성석영유리판
    80.
    发明公开
    엑시머 자외선등 장치용 대형 합성석영유리판 无效
    用于EXCIMER紫外线灯装置的大规模合成石英玻璃板

    公开(公告)号:KR1020050093664A

    公开(公告)日:2005-09-23

    申请号:KR1020040061480

    申请日:2004-08-04

    CPC classification number: C03C3/06 C03B20/00 C03C4/0092 C03C2201/02 G02B1/00

    Abstract: This invention is to provide a synthetic quartz glass plate for an excimer UV lamp device, which is good and uniform in light extraction efficiency over the whole surface when it is used as a window material for the excimer UV lamp device. The synthetic quartz glass plate for the excimer UV lamp device is formed from synthetic quartz glass synthesized by a flame hydrolysis method using a high purity silicon compound as a raw material. The synthetic quartz glass plate for the excimer UV lamp device emitting vacuum ultra-violet rays having wavelengths of 150-250 nm is characterized in that it is obtained by joining at least two synthetic quartz glass sheets by confronting mutual edge faces of the sheets, the total length of the outer peripheries of the plate after joining is ≥ 2,700 mm, the thickness is 3-10 mm, the fluctuation width in thickness is ≤ 1 mm, the bending of the plate by joining is ≤ 3 mm, the birefringence at the joined part is ≤ 80 nm/cm, the number of independent bubbles each having a major diameter of

    Abstract translation: 本发明提供一种用于准分子UV灯装置的合成石英玻璃板,当用作准分子UV灯装置的窗口材料时,其在整个表面上的光提取效率均匀。 用于准分子UV灯装置的合成石英玻璃板由使用高纯度硅化合物作为原料的火焰水解法合成的合成石英玻璃形成。 用于发射具有150-250nm波长的真空紫外线的准分子UV灯装置的合成石英玻璃板的特征在于,通过面对片材的相互边缘面接合至少两个合成石英玻璃片而获得, 接合后板外周长度≥2,700mm,厚度3-10mm,厚度波动宽度≤1mm,接合板弯曲≤3mm,双折射 接合部分为≤80nm/ cm,在包括接合部分的整个板上,各自具有大直径<1mm并且发现在100mm见方的独立气泡的数量≤10个,并且没有通过 总共包含长度≥10mm的多个气泡。

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