WAVENUMBER LINEAR GRATING SPECTROMETER
    71.
    发明申请
    WAVENUMBER LINEAR GRATING SPECTROMETER 审中-公开
    波纹线性光谱仪

    公开(公告)号:WO2012129466A1

    公开(公告)日:2012-09-27

    申请号:PCT/US2012/030251

    申请日:2012-03-23

    Abstract: Wavenumber linear spectrometers ( 310 ) are provided including an input ( 312 ) configured to receive electromagnetic radiation from an external source; collimating optics ( 314 ) configured to collimate the received electromagnetic radiation; a dispersive assembly ( 330 ) including first and second diffractive gratings ( 320, 322 ), wherein the first diffraction grating is configured in a first dispersive stage to receive the collimated electromagnetic radiation and wherein the dispersive assembly includes at least two dispersive stages configured to disperse the collimated input; and an imaging lens assembly ( 318 ) configured to image the electromagnetic radiation dispersed by the at least two dispersive stages onto a linear detection array ( 320 ) such that the variation in frequency spacing along the linear detection array is no greater than about 10%.

    Abstract translation: 提供了波数线性光谱仪(310),包括被配置为从外部源接收电磁辐射的输入(312) 准直光学器件(314),其配置成准直所接收的电磁辐射; 包括第一和第二衍射光栅(320,322)的分散组件(330),其中所述第一衍射光栅被配置在第一色散级中以接收所述准直电磁辐射,并且其中所述色散组件包括至少两个分散级, 准直输入; 以及成像透镜组件(318),被配置为将由所述至少两个色散级分散的电磁辐射成像到线性检测阵列(320)上,使得沿线性检测阵列的频率间隔的变化不大于约10%。

    BROAD BAND CZERNY-TURNER SPECTROMETER, METHODS, AND APPLICATIONS
    72.
    发明申请
    BROAD BAND CZERNY-TURNER SPECTROMETER, METHODS, AND APPLICATIONS 审中-公开
    宽带碳酸钙光谱仪,方法和应用

    公开(公告)号:WO2011137316A2

    公开(公告)日:2011-11-03

    申请号:PCT/US2011/034506

    申请日:2011-04-29

    CPC classification number: G01J3/1804 G01J3/02 G01J3/0208 G01J3/0218 G01J3/10

    Abstract: A low-cost optics, broadband, astigmatism-corrected practical spectrometer. An off-the-shelf cylindrical lens is used to remove astigmatism over the full bandwidth, providing better than 0.1 nm spectral resolution and more than 50% throughput over a bandwidth of 400 nm centered at 800 nm. The spectrometer includes a first spherical mirror disposed along an optical path in an off-axis (tilted) orientation; a diffraction grating disposed along the optical axis in a location optically downstream from the first mirror; a second spherical mirror disposed along the optical path in an off-axis orientation in a location optically downstream from the diffraction grating; a cylindrical optic disposed in the optical path; and a detector disposed in the optical path in a location optically downstream from the second spherical mirror.

    Abstract translation: 低成本的光学,宽带,散光校正实用光谱仪。 一个现成的柱面透镜用于去除全带宽上的散光,提供超过0.1nm的光谱分辨率,并且以800nm为中心的400nm的带宽提供超过50%的吞吐量。 光谱仪包括沿着离轴(倾斜)取向的光路布置的第一球面镜; 衍射光栅,沿着光轴布置在第一反射镜光学下游的位置; 在离开衍射光栅的光学下游的位置处以离轴取向沿光路布置的第二球面镜; 设置在光路中的圆柱形光学器件; 以及检测器,设置在所述光路中,在所述第二球面镜的光学下游的位置。

    SPECTROGRAPHE A MIROIR ELLIPTIQUE
    74.
    发明申请
    SPECTROGRAPHE A MIROIR ELLIPTIQUE 审中-公开
    具有ELLIPICAL MIRROR的光谱

    公开(公告)号:WO2010086324A1

    公开(公告)日:2010-08-05

    申请号:PCT/EP2010/050919

    申请日:2010-01-27

    CPC classification number: G01J3/1804 G01J3/0216

    Abstract: L' invention est relative à un spectrographe comportant des moyens de focalisation (3) d'un rayonnement émis par un échantillon éclairé par une source de rayonnement, et des moyens de diffraction (4) du rayonnement focalisé, dans lequel, selon l'invention, les moyens de diffraction comprennent un réseau de diffraction plan à pas variable, et les moyens de focalisation comprennent un miroir elliptique, l'échantillon étant placé à l'un des foyers (F1) d'une surface ellipsoïde définissant le miroir elliptique.

    Abstract translation: 本发明涉及一种光谱仪,其包括用于聚焦由辐射源照射的样品发射的辐射的装置(3)和用于衍射聚焦辐射的装置(4),其中根据本发明,衍射装置包括 具有可变节距的平面衍射网络,并且聚焦装置包括椭圆镜,样品被放置在限定椭圆镜的椭圆面的焦点(F1)中的一个中。

    METHOD AND APPARATUS FOR HIGH RESOLUTION SPECTROSCOPY AND SPECTRAL IMAGING
    75.
    发明申请
    METHOD AND APPARATUS FOR HIGH RESOLUTION SPECTROSCOPY AND SPECTRAL IMAGING 审中-公开
    高分辨光谱和光谱成像的方法和装置

    公开(公告)号:WO2009087617A1

    公开(公告)日:2009-07-16

    申请号:PCT/IL2009/000015

    申请日:2009-01-04

    Inventor: AHARON, Oren

    CPC classification number: G01J3/2823 G01J3/02 G01J3/0235 G01J3/1804 G01J3/32

    Abstract: A spectrum analyzing device, for spectral analysis of a region of interest, comprises a light dispersion element for spectrally analyzing a light beam to produce a spectral image thereof, a reflection element for reflection the light beam without analysis to produce a non-analyzed reflection of the beam, and an alternating unit for alternately presenting the light dispersion element and the reflection element to a light path, thereby to provide a dual mode spectrum analyzing device able to alternate between a plain image and a spectral image of a region of interest.

    Abstract translation: 用于感兴趣区域的光谱分析的光谱分析装置包括用于光谱分析光束以产生其光谱图像的光色散元件,用于反射光束而不进行分析的反射元件,以产生未分析的反射 光束和用于将光色散元件和反射元件交替地呈现到光路的交替单元,从而提供能够在平面图像和感兴趣区域的光谱图像之间交替的双模式谱分析装置。

    CARBON NANOTUBE NANOMETROLOGY, PURIFICATION, AND SEPARATION
    76.
    发明申请
    CARBON NANOTUBE NANOMETROLOGY, PURIFICATION, AND SEPARATION 审中-公开
    碳纳米管纳米生物学,纯化和分离

    公开(公告)号:WO2008054871A2

    公开(公告)日:2008-05-08

    申请号:PCT/US2007/068547

    申请日:2007-05-09

    Abstract: The present invention provides systems and methods for quantifying, purifying and separating fullerenes, such as single wall carbon nanotubes (SWNTs). The purification/separation combination provides nearly 100% carbonaceous impurity-free SWNT content from a given impure sample and provides a desired chirality and diameter from a given non-separated sample. Nanometrological validation of the success of purification and separation uses a pyroelectric detector and Raman spectroscopy in a single system, thus providing a critical aspect for the nanomanufacturing environment. The purification/separation and nanometrological validations may be performed in a feedback loop to provide a satisfactorily refined sample and optimized purification/separation settings.

    Abstract translation: 本发明提供了定量,纯化和分离富勒烯如单壁碳纳米管(SWNT)的系统和方法。 纯化/分离组合从给定的不纯样品提供近100%含碳杂质的SWNT含量,并从给定的非分离样品提供所需的手性和直径。 纯化和分离成功的纳米学证实在单一系统中使用热释电检测器和拉曼光谱,从而为纳米制造环境提供了关键方面。 纯化/分离和纳米体系验证可以在反馈回路中进行,以提供令人满意的精制样品和优化的纯化/分离设置。

    COMPACT CATADIOPTRIC SPECTROMETER
    78.
    发明申请
    COMPACT CATADIOPTRIC SPECTROMETER 审中-公开
    紧凑型超临界光谱仪

    公开(公告)号:WO2008009074A3

    公开(公告)日:2008-03-06

    申请号:PCT/BE2007000083

    申请日:2007-07-20

    Abstract: An optical characterisation system is described for characterising optical material. The system typically comprises a diffractive element (104), a detector (106) and an optical element (102). The optical element (102) thereby typically is adapted for receiving an illumination beam, which may be an illumination response of the material. The optical element (102) typically has a refractive surface for refractively collimating the illumination beam on the diffractive element (104) and a reflective surface for reflecting the diffracted illumination beam on the detector (106). The optical element (102) furthermore is adapted for cooperating with the diffractive element (104) and the detector (106) being positioned at a same side of the optical element (102) opposite to the receiving side for receiving the illumination beam.

    Abstract translation: 描述了用于表征光学材料的光学表征系统。 该系统通常包括衍射元件(104),检测器(106)和光学元件(102)。 光学元件(102)通常适于接收照明光束,该照明光束可以是该材料的照明响应。 光学元件(102)通常具有用于使衍射元件(104)上的照射束折射地准直的折射表面和用于将衍射的照射束反射到检测器(106)上的反射表面。 此外,光学元件(102)适于与衍射元件(104)协作并且检测器(106)位于光学元件(102)的与用于接收照明光束的接收侧相反的一侧。

    HIGH RESOLUTION SPECTRAL MEASUREMENT DEVICE
    79.
    发明申请
    HIGH RESOLUTION SPECTRAL MEASUREMENT DEVICE 审中-公开
    高分辨率光谱测量装置

    公开(公告)号:WO2003078940A2

    公开(公告)日:2003-09-25

    申请号:PCT/US2003/002052

    申请日:2003-01-15

    IPC: G01J

    Abstract: A high resolution spectral measurement device. A preferred embodiment presents an extremely narrow slit function in the ultraviolet range and is very useful for measuring bandwidth of narrow-band excimer lasers used for integrated circuit lithography. Light from the laser is focused into a diffuser and the diffused light exiting the diffuser illuminates an etalon. A portion of its light exiting the etalon is collected and directed into a slit positioned at a fringe pattern of the etalon. Light passing through the slit is collimated and the collimated light illuminates a grating positioned in an approximately Littrow configuration which disburses the light according to wavelength. A portion of the dispursed light representing the wavelength corresponding to the selected etalon fringe is passed through a second slit and monitored by a light detector. When the etalon and the grating are tuned to the same precise wavelength a slit function is defined which is extremely narrow such as about 0.034pm (FWHM) and about 0.091pm (95 percent integral). The bandwidth of a laser beam can be measured very accurately by a directing portion of the laser beam into the insulator and scanning the laser wavelength over a range which includes the monochromator slit wavelength. In a second embodiment the second slit and the light detector is replaced by a photodiode array and the bandwidth of a laser beam is determined by analyzing a set of scan data from the photodiode array. Alternately, the laser wavelength can be fixed near the middle of the spectrum range of the grating spectrometer, and the etalon can be scanned.

    Abstract translation: 高分辨率光谱测量装置。 优选的实施例在紫外线范围内呈现非常窄的狭缝功能,并且对于测量用于集成电路光刻的窄带准分子激光器的带宽是非常有用的。 来自激光器的光聚焦成漫射器,离散扩散器的散射光照射标准具。 将其从标准具出射的光的一部分收集并引导到位于标准具的边缘图案处的狭缝中。 通过狭缝的光线被准直,并且准直光照射位于大约Littrow配置中的光栅,其根据波长散发光。 表示对应于所选择的标准具条纹的波长的调度光​​的一部分通过第二狭缝并由光检测器监视。 当标准具和光栅调谐到相同的精确波长时,定义了狭缝功能,其极窄,例如约0.034pm(FWHM)和约0.091μm(95%积分)。 通过激光束的引导部分进入绝缘体并且在包括单色器狭缝波长的范围内扫描激光波长,可以非常精确地测量激光束的带宽。 在第二实施例中,第二狭缝和光检测器被光电二极管阵列代替,并且通过分析来自光电二极管阵列的一组扫描数据来确定激光束的带宽。 或者,激光波长可以固定在光栅光谱仪的光谱范围附近,可以扫描标准具。

    MONOCHROMATOR
    80.
    发明申请
    MONOCHROMATOR 审中-公开
    单色

    公开(公告)号:WO1985002254A1

    公开(公告)日:1985-05-23

    申请号:PCT/JP1984000545

    申请日:1984-11-14

    Inventor: HITACHI, LTD.

    CPC classification number: G01J3/1804

    Abstract: A monochromator disperses multi-wavelength light emitted from a light source, isolating only a desired wavelength component. According to the present invention, in place of a concave grating which has heretofore been requisite for a monochromator for a wavelength range from the soft X-ray region to the vacuum ultraviolet ray region, a plane grating (C) is employed which is highly accurate and is easily manufactured. An extremely simple wavelength scanning mechanism is employed in which the distance between an input slit (A) and the grating (C) and the distance between an output slit (B) and the grating (C) are constant. Thus, it becomes possible to realize a monochromator which is able to isolate light of a single-wavelength with extremely high precision.

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