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71.
公开(公告)号:WO2007037931A3
公开(公告)日:2007-11-22
申请号:PCT/US2006034781
申请日:2006-09-08
Applicant: REVERA INC , SCHUELER BRUNO W , REED DAVID A
Inventor: SCHUELER BRUNO W , REED DAVID A
CPC classification number: G01N23/2273 , G01N2223/085 , G01N2223/6116 , H01J2235/08
Abstract: According to one aspect of the present invention, a substrate processing system is provided. The system may include a chamber wall enclosing a chamber, a substrate support positioned within the chamber to support a substrate, an electromagnetic radiation source to emit electromagnetic radiation onto the substrate on the substrate support, the electromagnetic radiation causing photoelectrons to be emitted from a material on the substrate, an analyzer to capture the photoelectrons emitted from the substrate, and a magnetic field generator to generate a magnetic field within the chamber and guide the photoelectrons from the substrate to the analyzer.
Abstract translation: 根据本发明的一个方面,提供了一种基板处理系统。 该系统可以包括封闭室的室壁,位于腔室内以支撑衬底的衬底支撑件,用于向衬底支撑件上的衬底上发射电磁辐射的电磁辐射源,引起光电子从材料发射的电磁辐射 在基板上,分析器捕获从基板发射的光电子,以及磁场发生器,以在室内产生磁场,并将光电子从基板引导到分析器。
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公开(公告)号:WO2004097888A3
公开(公告)日:2005-05-12
申请号:PCT/GB2004001732
申请日:2004-04-23
Applicant: CXR LTD , MORTON EDWARD JAMES , LUGGAR RUSSELL DAVID , DE ANTONIS PAUL
Inventor: MORTON EDWARD JAMES , LUGGAR RUSSELL DAVID , DE ANTONIS PAUL
IPC: H01J35/08
CPC classification number: H01J35/08 , H01J2235/068 , H01J2235/08
Abstract: An anode for an X-ray source is formed in two parts, a main part (18) and a collimating part (22). The main part (18) has the target region (20) formed on it. The two parts between them define an electron aperture (36) through which electrons pass to reach the target region (20), and an X-ray aperture through which the X-rays produced at the target leave the anode. The anode produces at least the first stage of collimation of the X-ray beam produced.
Abstract translation: 用于X射线源的阳极形成为主要部分(18)和准直部分(22)两部分。 主要部分(18)具有形成在其上的目标区域(20)。 它们之间的两个部分限定了电子通过的电子孔径(36),电子通过该孔径到达目标区域(20),并且在靶标处产生的X射线通过X射线孔离开阳极。 阳极至少产生所产生的X射线束的准直的第一阶段。
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公开(公告)号:JP5771213B2
公开(公告)日:2015-08-26
申请号:JP2012535976
申请日:2010-10-18
Applicant: コーニンクレッカ フィリップス エヌ ヴェ
Inventor: ピーティック,ライナー
CPC classification number: H01J35/105 , H01J35/12 , H01J2235/08 , H01J2235/1204 , H01J2235/1291
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公开(公告)号:JP4995825B2
公开(公告)日:2012-08-08
申请号:JP2008533379
申请日:2006-09-08
Applicant: リヴェラ インコーポレイテッド
Inventor: ブルーノ ダブリュー シューラー , ディヴィッド エイ リード
IPC: G01N23/227 , G01N1/28 , H01L21/66
CPC classification number: G01N23/2273 , G01N2223/085 , G01N2223/6116 , H01J2235/08
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75.
公开(公告)号:JP2006318745A
公开(公告)日:2006-11-24
申请号:JP2005139720
申请日:2005-05-12
Applicant: Ishikawajima Harima Heavy Ind Co Ltd , Natl Inst Of Radiological Sciences , Univ Of Tokyo , 国立大学法人 東京大学 , 独立行政法人放射線医学総合研究所 , 石川島播磨重工業株式会社
Inventor: NOSE HIROYUKI , ISHIDA ONORI , KANEKO NAMIO , SAKAE HISAHARU , KAMISAKA MITSURU , FUKAZAWA ATSUSHI , DOBASHI KATSUHIRO
CPC classification number: A61N5/10 , A61B6/00 , A61B6/4092 , H01J35/14 , H01J35/16 , H01J35/28 , H01J2235/08 , H01J2235/086 , H01J2235/10 , H01J2235/163 , H05G2/00 , H05H6/00
Abstract: PROBLEM TO BE SOLVED: To provide an X-ray switching generator for medical diagnosis/therapy capable of generating by switching single-color hard X rays as diagnostic X rays and characteristic X rays as therapeutic X rays.
SOLUTION: The device includes an electron beam generating device 10 for accelerating pulsed electron beams 1 to pass a given linear track 2, a laser generating device 20 for generating pulsed laser light 3, a laser light guiding device 30 for guiding in the pulsed laser light 3 on the linear track 2 in opposition to the pulsed electron beams 1, and a target movement device 40 capable of moving a metal target 42 for generating characteristic X rays 5 by collision of the pulsed electron beams 1 between a collision position 2a on the linear track and a shelter position outside the track. A collision face of the metal target 42 is spatially located at the same position as a collision point 2a. The single-color hard X rays 4 are generated by collision of the pulsed electron beams 1 and the pulsed laser light 3 at the shelter position of the metal target, and the characteristic X rays 5 are generated from the same light source position 2a by collision of the pulsed electron beams 1 and the metal target 42 at the collision position of the metal target.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题:提供一种用于医疗诊断/治疗的X射线切换发生器,其能够通过将单色硬X射线切换为诊断X射线和特征X射线作为治疗X射线来产生。 解决方案:该装置包括用于加速脉冲电子束1以通过给定的线性轨道2的电子束产生装置10,用于产生脉冲激光3的激光产生装置20,用于引导 与脉冲电子束1相对的线性轨道2上的脉冲激光3和能够通过冲击位置2a之间的脉冲电子束1的碰撞而移动用于产生特征X射线5的金属靶42的目标移动装置40 在线性轨道和轨道外的避难所位置。 金属靶42的碰撞面在空间上位于与碰撞点2a相同的位置。 单色硬X射线4通过脉冲电子束1和脉冲激光3在金属靶的遮蔽位置的碰撞而产生,并且特征X射线5通过碰撞从同一光源位置2a产生 在金属靶的碰撞位置处的脉冲电子束1和金属靶42。 版权所有(C)2007,JPO&INPIT
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公开(公告)号:EP2084715B1
公开(公告)日:2015-05-27
申请号:EP07854356.8
申请日:2007-10-23
Inventor: GRODZINS, Lee , GRODZINS, Hal
IPC: G21K1/06
CPC classification number: G21K1/06 , G01N2223/316 , G21K2201/062 , H01J2235/08
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公开(公告)号:EP2229805B1
公开(公告)日:2011-10-12
申请号:EP07857056.1
申请日:2007-12-21
Applicant: Elekta AB (PUBL) , The Institute of Cancer Research
Inventor: BROWN, Kevin, John , THOMPSON, Maria, Giulia , ROBERTS, David, Anthony , EVANS, Philip, Mark , HANSEN, Vibeke, Nordmark
IPC: H05H9/04
CPC classification number: H05H7/12 , H01J35/00 , H01J2235/08 , H05H6/00 , H05H9/04
Abstract: X-ray apparatus comprises a linear accelerator adapted to produce a beam of electrons at one of at least two selectable energies and being controlled to change the selected energy on a periodic basis, and a target to which the beam is directed thereby to produce a beam of x-radiation, the target being non- homogenous and being driven to move periodically in synchrony with the change of the selected energy. In this way, the target can move so that a different part is exposed to the electron beam when different pulses arrive. This enables the appropriate target material to be employed depending on the selected energy. The easiest form of periodic movement for the target is likely to be a rotational movement. The target can be immersed in a coolant fluid such as water. The linear accelerator can be of the type disclosed in WO2006/097697A1. The target preferably contains at least one exposed area of tungsten and/or at least one exposed area of carbon. These can be present as inhomogeneities in the material of which the target is composed, such as Carbon inserts in a Tungsten substrate (or vice versa), alternating segments of Carbon and Tungsten, Carbon and Tungsten inserts in a substrate of a third material, or arrangements involving other materials in addition to or instead of Carbon and/or Tungsten. Alternatively, the target can be of a homogenous material but have inhomogeneities in its thickness to cater for the different electron energies. The same concept can be applied to the filter. A detector can be provided, operating in synchrony with the energy variation. Such an x-ray apparatus can form a part of a radiotherapy apparatus, in which case the first selected energy can be a diagnostic energy and a second selected energy a therapeutic energy.
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公开(公告)号:EP2229805A1
公开(公告)日:2010-09-22
申请号:EP07857056.1
申请日:2007-12-21
Applicant: Elekta AB (PUBL) , The Institute of Cancer Research
Inventor: BROWN, Kevin, John , THOMPSON, Maria, Giulia , ROBERTS, David, Anthony , EVANS, Philip, Mark , HANSEN, Vibeke, Nordmark
IPC: H05H9/04
CPC classification number: H05H7/12 , H01J35/00 , H01J2235/08 , H05H6/00 , H05H9/04
Abstract: X-ray apparatus comprises a linear accelerator adapted to produce a beam of electrons at one of at least two selectable energies and being controlled to change the selected energy on a periodic basis, and a target to which the beam is directed thereby to produce a beam of x-radiation, the target being non- homogenous and being driven to move periodically in synchrony with the change of the selected energy. In this way, the target can move so that a different part is exposed to the electron beam when different pulses arrive. This enables the appropriate target material to be employed depending on the selected energy. The easiest form of periodic movement for the target is likely to be a rotational movement. The target can be immersed in a coolant fluid such as water. The linear accelerator can be of the type disclosed in WO2006/097697A1. The target preferably contains at least one exposed area of tungsten and/or at least one exposed area of carbon. These can be present as inhomogeneities in the material of which the target is composed, such as Carbon inserts in a Tungsten substrate (or vice versa), alternating segments of Carbon and Tungsten, Carbon and Tungsten inserts in a substrate of a third material, or arrangements involving other materials in addition to or instead of Carbon and/or Tungsten. Alternatively, the target can be of a homogenous material but have inhomogeneities in its thickness to cater for the different electron energies. The same concept can be applied to the filter. A detector can be provided, operating in synchrony with the energy variation. Such an x-ray apparatus can form a part of a radiotherapy apparatus, in which case the first selected energy can be a diagnostic energy and a second selected energy a therapeutic energy.
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公开(公告)号:EP1618585B8
公开(公告)日:2009-08-19
申请号:EP04729152.1
申请日:2004-04-23
Applicant: CXR Limited
Inventor: MORTON, Edward, James , LUGGAR, Russell, David , DE ANTONIS, Paul
IPC: H01J35/08
CPC classification number: H01J35/08 , H01J2235/068 , H01J2235/08
Abstract: An anode for an X-ray source is formed in two parts, a main part (18) and a collimating part (22). The main part (18) has the target region (20) formed on it. The two parts between them define an electron aperture (36) through which electrons pass to reach the target region (20), and an X-ray aperture through which the X-rays produced at the target leave the anode. The anode produces at least the first stage of collimation of the X-ray beam produced.
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公开(公告)号:EP1618585B1
公开(公告)日:2009-06-03
申请号:EP04729152.1
申请日:2004-04-23
Applicant: CXR Limited
Inventor: MORTON, Edward, James , LUGGAR, Russell, David , DE ANTONIS, Paul
IPC: H01J35/08
CPC classification number: H01J35/08 , H01J2235/068 , H01J2235/08
Abstract: An anode for an X-ray source is formed in two parts, a main part (18) and a collimating part (22). The main part (18) has the target region (20) formed on it. The two parts between them define an electron aperture (36) through which electrons pass to reach the target region (20), and an X-ray aperture through which the X-rays produced at the target leave the anode. The anode produces at least the first stage of collimation of the X-ray beam produced.
Abstract translation: 用于X射线源的阳极由两部分组成,即主要部分(18)和准直部分(22)。 主要部分(18)具有形成在其上的目标区域(20)。 它们之间的两个部分限定电子通过其到达目标区域(20)的电子孔径(36),以及在目标处产生的X射线通过其从该阳极离开的X射线孔径。 阳极至少产生所产生的X射线束的准直的第一阶段。
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