公开(公告)号：WO2003098668A3

公开(公告)日：2003-11-27

申请号：PCT/US2003/015588

申请日：2003-05-15

Applicant: ASYST TECHNOLOGIES, INC. ,  MAYO, Michaël, J.

Inventor： MAYO, Michaël, J.

IPC: H01L21/00

Abstract: The present invention is a pre-aligner capable of determining the center of a wafer by casting light onto a wafer that is positioned above a charge-coupled device (CCD). The pre-aligner perfoi ns this operation by directing light emitted from a single LED simultaneously onto the wafer and the CCD. The light emitted from the LED is directed through a light guide in order to direct the light onto the wafer and CCD. A lens collimates the light exiting the light guide such that the light, as it passes the wafer's edge, is substantially perpendicular to the wafer's edge. The light guide may be removably secured to the pre-aligner housing for easy installation removal. The pre­aligner is capable of self-calibrate the LED.

公开(公告)号：WO2003019630A3

公开(公告)日：2003-03-06

申请号：PCT/US2002/030297

申请日：2002-08-30

Applicant: ASYST TECHNOLOGIES, INC.

Inventor： BONORA, Anthony, C. ,  GOULD, Richard, H. ,  HINE, Roger, G. ,  KROLAK, Michael ,  SPEASL, Jerry

IPC: H01L21/00

Abstract: The present invention is a unified spine structure that EFEM components, such as a wafer handling robot and a SMIF pod advance assembly, may mount to. The frame includes multiple vertical struts that are mounted to an upper support member and a lower support member. Structurally tying the vertical struts to the support members creates a rigid body to support the EFEM components. The vertical struts also provide a common reference that the EFEM components may align with. This eliminates the need for each EFEM component to align with respect to each other. Thus, if one EFEM component is removed it will not affect the alignment and calibration of the remaining secured EFEM components. The unified frame also creates an isolated storage area for the SMIF pod door and the port door within the environment that is isolated from the outside ambient conditions.

公开(公告)号：WO2003009347A3

公开(公告)日：2003-01-30

申请号：PCT/US2002/022097

申请日：2002-07-11

Applicant: ASYST TECHNOLOGIES, INC.

Inventor： HINE, Roger ,  DANNA, Mark ,  FILIPPUZZI, Richard, A.

IPC: H01L21/00

Abstract: An intedgrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The front end components, including the load port assemblies, prealigners and workpiece handling robot, are mounted to the plate to provide precise and repeatable positioning of the front end components with respect to each other.

公开(公告)号：WO1998002352A1

公开(公告)日：1998-01-22

申请号：PCT/US1997011897

申请日：1997-07-12

Applicant: ASYST TECHNOLOGIES, INC.

Inventor： ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C. ,  WARTENBERGH, Robert, P. ,  GOMES, Christopher

IPC: B65B01/04

CPC classification number: H01L21/67393

Abstract: A valve (40) mounted in a pod door of a SMIF pod (20) for allowing gas flow to and from the sealed pod (20) while the pod (20) is seated on a SMIF port. The valve (40) is provided to allow fluid flow to or from the pod (20) upon the valve (40) being actuated by either a standard registration pin or a specially adapted fluid flow pin (68) intended for use with the present invention.

Abstract translation: 安装在SMIF舱（20）的舱门中的阀（40），用于当舱（20）就座于SMIF端口时允许气体从密封舱（20）流出。 阀（40）被设置成在阀（40）由用于本发明的标准对准销或特别适合的流体流销（68）致动时允许流体流入或流出舱（20） 。

公开(公告)号：WO2009105724A2

公开(公告)日：2009-08-27

申请号：PCT/US2009/034791

申请日：2009-02-20

Applicant: ASYST TECHNOLOGIES INC . ,  SHIEH, Karl ,  COOKSON, Michael, A . ,  RILEY, Norma, B . ,  WRIGHT, Donald, Rex ,  FATULA, Joseph, John

Inventor： SHIEH, Karl ,  COOKSON, Michael, A . ,  RILEY, Norma, B . ,  WRIGHT, Donald, Rex ,  FATULA, Joseph, John

IPC: G06Q50/00 ,  G06F17/50 ,  G06F19/00 ,  G06F17/00

CPC classification number: G05B19/41885 ,  G05B2219/31334 ,  G05B2219/31466 ,  G05B2219/45031 ,  H01L21/67276 ,  Y02P90/16 ,  Y02P90/185 ,  Y02P90/26 ,  Y02P90/86

Abstract: A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.

Abstract translation: 半导体制造设备（fab）配置模块被定义为虚拟模拟晶圆厂的物理系统和属性。 数据采集​​模块被定义为与物理系统的物理系统进行接口，并从物理系统收集操作数据。 定义了可视化模块，用于收集和汇总从物理系统收集的操作数据。 视觉化模块被进一步定义为将操作数据处理成适合于视觉呈现的格式。 经处理的操作数据显示在由可视化模块控制的图形用户界面中的晶圆厂的视觉上下文中。 分析器模块被定义为分析可视化模块收集的数据，并解析有关工厂性能的查询。 定义优化器模块以响应由可视化器模块收集的数据，由分析器模块生成的数据或其组合来控制晶圆厂内的系统。

公开(公告)号：WO2009089122A2

公开(公告)日：2009-07-16

申请号：PCT/US2009/030060

申请日：2009-01-03

Applicant: ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C.

Inventor： BONORA, Anthony, C.

IPC: H01L21/673 ,  H01L21/68

CPC classification number: H01L21/67383 ,  H01L21/67386

Abstract: A substrate container for storing at least one substrate is provided. The substrate container includes a housing assembly encompassing the at least one substrate, the housing assembly having a container door for access into an inner region of the housing assembly. The housing assembly includes a support structure defined along sidewalls of the housing assembly. The support structure has a plurality of edge support constraints protruding into the inner region of the housing assembly. The plurality of edge support constraints support opposing edge regions of the at least one substrate so as to cause the at least one substrate to deflect around an axis.

Abstract translation: 提供了用于存储至少一个衬底的衬底容器。 基板容器包括包围至少一个基板的壳体组件，壳体组件具有用于进入壳体组件的内部区域的容器门。 壳体组件包括沿壳体组件的侧壁限定的支撑结构。 支撑结构具有突出到壳体组件的内部区域中的多个边缘支撑约束。 所述多个边缘支撑约束支撑所述至少一个基板的相对边缘区域，以致使所述至少一个基板围绕轴线偏转。

公开(公告)号：WO2008070876A2

公开(公告)日：2008-06-12

申请号：PCT/US2007/087034

申请日：2007-12-10

Applicant: ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C. ,  PHARAND, Michel ,  GOULD, Robert

Inventor： BONORA, Anthony, C. ,  PHARAND, Michel ,  GOULD, Robert

IPC: B65D85/48 ,  G02F1/13

CPC classification number: B65D81/2076 ,  B65D85/30 ,  B65D2585/6837 ,  H01L21/67017 ,  H01L21/6734 ,  H01L21/67363 ,  H01L21/67379 ,  H01L21/67383 ,  H01L21/67393 ,  H01L21/67772 ,  H01L21/67775

Abstract: The present invention generally comprises a system for FPD material storage and transport. The FPD system may contain environmental protection, material tracking and/or workstation loading capabilities. One of the components of the system includes a transportable, sealable container. Another component of the system includes a sealable load port against which a container is docked so that the substrates may be processed.

Abstract translation: 本发明通常包括用于FPD材料储存和运输的系统。 FPD系统可能包含环境保护，材料跟踪和/或工作站加载功能。 该系统的一个部件包括一个可运输，可密封的容器。 该系统的另一个部件包括可密封的负载端口，容器对准该负载端口，使得可以处理衬底。

公开(公告)号：WO2008008738A2

公开(公告)日：2008-01-17

申请号：PCT/US2007/073086

申请日：2007-07-09

Applicant: ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C. ,  KROLAK, Michael ,  HINE, Roger, G. ,  ROGERS, Theodore, W.

Inventor： BONORA, Anthony, C. ,  KROLAK, Michael ,  HINE, Roger, G. ,  ROGERS, Theodore, W.

IPC: H01L21/677

CPC classification number: H01L21/67772

Abstract: A variable lot size load port assembly includes a tool interface, a port door, an advance plate, and first and second latch keys. The tool interface extends generally in a vertical dimension and has an aperture. The port door has a closed position wherein the port door at least partially occludes the aperture. The advance plate is configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position. The first latch key is disposed on the port door at a first elevation configured to selectively engage a corresponding latch key receptacle of a FOUP having a first selected FOUP capacity and the second latch key is disposed on the port door at a second elevation configured to selectively engage a corresponding latch key receptacle of another FOUP having a second selected FOUP capacity.

Abstract translation: 可变批量装载端口组件包括工具接口，端口门，前进板以及第一和第二闩锁键。 工具界面通常在垂直方向上延伸并具有孔径。 端口门具有关闭位置，其中端口门至少部分地封闭孔。 前进板被构造成支撑前开口统一舱（FOUP）并且在缩回位置和前进位置之间平移。 第一闩锁键以第一高度设置在端口门上，第一高度被构造成选择性地接合具有第一选择的FOUP容量的FOUP的对应的闩锁钥匙插座，并且第二闩锁键以第二高度设置在端口门上，第二高度被配置为选择性地 接合具有第二选择的FOUP容量的另一FOUP的对应的闩锁键插座。

公开(公告)号：WO2007008944A1

公开(公告)日：2007-01-18

申请号：PCT/US2006/026978

申请日：2006-07-10

Applicant: ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C. ,  HINE, Roger, G. ,  KROLAK, Michael

Inventor： BONORA, Anthony, C. ,  HINE, Roger, G. ,  KROLAK, Michael

IPC: B65G15/12 ,  B65G47/26 ,  B65G43/10 ,  H01L21/677

CPC classification number: H01L21/67763 ,  B65G15/12 ,  B65G43/10 ,  B65G47/268 ,  B65G2201/0297 ,  H01L21/67706 ,  H01L21/6773

Abstract: The present invention comprises a conveyor (100) for moving a semiconductor containers (2) throughout a fabrication facility. In one embodiment, the conveyor comprises a plurality of individually controlled conveyor zones (Z). Each conveyor zone includes a first belt (110), a second belt (112), a drive assembly (138) for rotating the first belt and the second belt at substantially the same speed. The first belt and the second belt are driven at substantially the same speed and movably support the container's bottom plate as the container moves along the conveyor. In another embodiment, the conveyor includes sensors (200) to determine, among other things, the position of the container.

Abstract translation: 本发明包括用于在整个制造设施中移动半导体容器（2）的输送机（100）。 在一个实施例中，输送机包括多个单独控制的传送带（Z）。 每个传送带包括第一带（110），第二带（112），用于以基本上相同的速度旋转第一带和第二带的驱动组件（138）。 第一带和第二带以大致相同的速度驱动，并且随着容器沿着输送机移动，可移动地支撑容器的底板。 在另一个实施例中，输送机包括用于确定容器位置的传感器（200）。

公开(公告)号：WO2007008555A2

公开(公告)日：2007-01-18

申请号：PCT/US2006/026281

申请日：2006-07-07

Applicant: ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C.

Inventor： BONORA, Anthony, C.

IPC: H01L21/673

CPC classification number: B25J15/0028 ,  B65G65/00 ,  H01L21/67383 ,  H01L21/68707

Abstract: The present invention comprises a workpiece container for storing at least one workpiece having a bottom surface and a peripheral edge. In one embodiment, a workpiece support structure is located within the container enclosure, which forms multiple vertically stacked storage shelves within the enclosure. Each storage shelf includes, in one embodiment, a first tine and a second tine for supporting the workpiece in a substantially horizontal orientation. The bottom surface and peripheral edge of a workpiece seated on a storage shelf extends beyond the outer edge of both the first tine and the second tine. An end effector according to the present invention may engage these extended portions or "grip zones" of the workpiece.

Abstract translation: 本发明包括用于存储至少一个具有底面和周缘的工件的工件容器。 在一个实施例中，工件支撑结构位于容器外壳内，其在外壳内形成多个垂直堆叠的存放货架。 在一个实施例中，每个储物架包括用于以基本上水平的方向支撑工件的第一齿和第二齿。 坐在储物架上的工件的底面和周缘延伸超出第一齿和第二齿的外边缘。 根据本发明的末端执行器可以接合工件的这些延伸部分或“抓握区域”。