公开(公告)号：JPH0476554A

公开(公告)日：1992-03-11

申请号：JP18935990

申请日：1990-07-19

Applicant: CANON KK

Inventor： KUBO TADAYUKI ,  OSANAI EIJI

IPC: G03F9/00 ,  G03F7/20 ,  H01L21/027

Abstract: PURPOSE:To eliminate resistance of friction, etc., to prevent a table from slanting when driven, and to enable highly accurate feeding by restraining the degree of freedom of the direction of rotation to a base plate by a static pressure bearing. CONSTITUTION:When pressurized air is supplied to air feed hoses 15 and 15' and valves 16 and 16' are opened, the pressurized air is supplied to porous bodies 8 and 8' through air feed holes 9 and 9'. Consequently, liquid lubricating films are formed in fine gaps 13 and 13' and the porous bodies 8 and 8' support both sides of a guide member 5 in opposite directions without contacting. Consequently, the motion of the table 1 in the rotating direction is restrained. In this state, the table 1 is moved to the base plate 2 in the normal direction and when one valve 16 is closed at an optional position to stop supplying the pressurized air to the air feed hole 9, the guide 5 is pressed against the porous body 8 with the pressure of the liquid lubricating film formed in the fine gap 3' on the opposite side to fix and hold the table 1. Therefore, the table is fed with high accuracy and held with high rigidity in the moving direction at the stop.

公开(公告)号：JPH0474993A

公开(公告)日：1992-03-10

申请号：JP18729790

申请日：1990-07-17

Applicant: CANON KK

Inventor： KUBO TADAYUKI ,  OSANAI EIJI

IPC: G12B9/00

Abstract: PURPOSE:To hold a mirror suppressing distortion of reflecting surface without causing disposition due to an acceleration or an external vibration by to an acceleration or an external vibration by sucking up the mirror with a vacuum sucking up method. CONSTITUTION:A mirror 1 is put on a base plate 2 being pushed on the reference surface 2a set on the base plate 2, and is held by sucking up inside of a pocket in negative pressure with an external vacuum pump through a suck up hole 4. The pocket 3 is provided near a vessel point to the direction of the long axis of the mirror. That is, the mirror 1 is held by a vacuum sucking up method. By this, the distortion of the reflection surface 1a is suppressed, and the mirror can be held without disposition even with an acceleration during the positioning one the positioning device to hole the mirror 1, or with an external vibration.

公开(公告)号：JPS6276059A

公开(公告)日：1987-04-08

申请号：JP21693485

申请日：1985-09-30

Applicant: CANON KK

Inventor： OSANAI EIJI

IPC: G11B17/32 ,  G11B17/34

Abstract: PURPOSE:To stabilize the sliding state with a recording medium during turning by providing a slope generating a positive pressure whose tilt angle is changed in the head moving direction to a stabilizing member. CONSTITUTION:A recessed slot 5c for head escape is formed to the opposite face with a disc 1 is formed to the stabilizing member 5, which is separated into an upperstream side opposed face 5a and a lowerstream side opposite face 5b in the turning direction A of the disc 1 with the boundary of the recessed slot 5c. A slope 5d generating a positive pressure is provided in the vicinity of the recessed slot 5c in the face 5b. The height h1 from the lower stream side opposed face 5b of a ridge line 5f is constant and the height h2 of the ridge line 5e from the recessed slot 5c is increased gradually continuously or stepwise toward the arrow C (direction of center core). That is, the tilt angle theta of the slope 5d is formed to be small gradually toward the arrow C and the entire device is twistedly.