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公开(公告)号：JPH08161726A
公开(公告)日：1996-06-21
申请号：JP29692194
申请日：1994-11-30
Applicant: KAO CORP
Inventor： KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , SASAKI KATSUMI , MATSUO YUZO , WAKABAYASHI SHIGEMI , SHIGA AKIRA
Abstract: PURPOSE: To obtain a metal evaporation type magnetic recording medium which enables delivering of better characteristics even in a high frequency recording by producing a recording medium for higher frequency recording with a thickness of 1,000-1,400Å of a magnetic layer. CONSTITUTION: A magnetic layer 2 with a thickness of 1,000-1,400Å A comprising at least one layer of a metal thin film is formed on one surface of a support body 1 by a method such as evaporation and a diamond-like carbon layer 3 on the magnetic layer 2 and moreover, a lubrication layer 4 thereon. In addition, a back coated layer 5 is formed on an opposite surface. This enables the obtaining of a metal evaporation type magnetic recording medium which delivers better output characteristics even in a high frequency recording.
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公开(公告)号：JPH08158056A
公开(公告)日：1996-06-18
申请号：JP30458294
申请日：1994-12-08
Applicant: KAO CORP
Inventor： SHIGA AKIRA , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , SASAKI KATSUMI , MATSUO YUZO , WAKABAYASHI SHIGEMI
IPC: C23C16/44 , C23C16/27 , C23C16/455 , C23C16/50 , C23C16/511
Abstract: PURPOSE: To produce uniform plasma and to obtain a thin film uniform in thickness by arranging an agitating means close to the raw gas inlet of a plasma reaction chamber, agitating the raw gas and uniformly distributing the raw gas. CONSTITUTION: A raw gas is introduced into a plasma reaction chamber 1 from a gas inlet pipe 3. A microwave is introduced into the chamber 1 through a quartz-glass window 9, and a magnetic field is generated by an ECR electromagnet 2 to convert the raw gas to plasma. The plasma is introduced into a vacuum chamber 4, the ion in the plasma is accelerated and allowed to irradiate a vapor-deposition tape 8 on a cooling roll 6, and a thin film is formed thereon. In this plasma CVD system, a means 11 to agitate the raw gas is arranged closely to the raw gas inlet 10 of the reaction chamber 1. A hollow helical gear, to which an impeller is fixed, is rotated by a motor through a pinion meshed with the gear.
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公开(公告)号：JPH08102067A
公开(公告)日：1996-04-16
申请号：JP23784394
申请日：1994-09-30
Applicant: KAO CORP
Inventor： MIZUNOYA HIROHIDE , KITAORI NORIYUKI , YOSHIDA OSAMU , WAKABAYASHI SHIGEMI , SHIGA AKIRA
Abstract: PURPOSE: To improve the operating efficiency of the manufacturing equipment using a vapor deposition method by providing in the equipment a platelike member consisting of a magnetic material, one end of which is immersed in a molten magnetic material charged into a crucible and the other end of which is disposed in the vicinity of a cooling can. CONSTITUTION: In this equipment, a tape 5 is allowed to travel inside the vacuum vessel 1 by using a traveling device 2 composed of a delivery roll 6, a wind-up roll 7 and a cooling can 8. A magnetic metal 10 in a crucible 3 is irradiated with the electron beam emitted from an electron gun of an electron beam generating device 4 to melt and evaporate the metal 10. The lower end of a platelike member 15 consisting of the same material as the magnetic metal 10 in the crucible 3 has a shape almost conforming to that of the inner peripheral surface of the crucible 3 and the upper end of the platelike member 15 is clamped with a deposition-proof plate 16 made of a ceramic material in the vicinity of the cooling can 8 and supported with an extension spring 18. The angle of incidence of the vapor of the magnetic metal 10 incident on the tape 5 is controlled by using the platelike member 15 together with another deposition-proof plate 12. At this time, the deposited particles of the magnetic metal 10 on the platelike member 15 are remelted in the crucible 3 together with the platelike member 15 itself.
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公开(公告)号：JPH08102057A
公开(公告)日：1996-04-16
申请号：JP23533394
申请日：1994-09-29
Applicant: KAO CORP
Inventor： KITAORI NORIYUKI , YOSHIDA OSAMU , WAKABAYASHI SHIGEMI , MIZUNOYA HIROHIDE , SHIGA AKIRA
Abstract: PURPOSE: To significantly increase the film forming rate and to easily control the film quality by forming a diamond-like carbon film with plasma using only the carbon source gas and then etching the surface of the film. CONSTITUTION: The hydrocarbon gas such as methane, ethane and propane introduced from a reaction gas inlet 25 to a plasma exciting room 22 is excited by the plasma generated by a microwave oscillator and electromagnets 21, 21'. Then the excited gas is scattered in a chamber 1 and deposited on a magnetic film on a supporting body 6 which travels on a cooling can 3 to form a carbon thin film. Then the carbon thin film is irradiated and etched with hydrogen ion and argon ion from an ion gun 15 to obtain the desired film quality of the graphite part. Thus, a protective layer is formed.
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公开(公告)号：JPH08102056A
公开(公告)日：1996-04-16
申请号：JP23502294
申请日：1994-09-29
Applicant: KAO CORP
Inventor： MIZUNOYA HIROHIDE , KITAORI NORIYUKI , YOSHIDA OSAMU , WAKABAYASHI SHIGEMI , SHIGA AKIRA
Abstract: PURPOSE: To improve electromagnetic conversion characteristics and to obtain a high-performance magnetic recording medium by supplying non-oxidative gas so as to prevent an oxidative gas from flowing on the upstream side of a travelling support. CONSTITUTION: O2 gas is allweed to flow in the direction of an arrow shown in the figure from the nozzle tip 9a of an oxygen supply nozzle 9, while N2 gas is allowed to frow in the direction of an arrow shown in the figure from the nozzle tip 10a of a nonxidative gas supply nozzle 10 to prevent the O2 gas from flowing to the upstream side of the traveling substrate 1. In this device, after the vacuum chamber 8 is evacuated to 10 to 10 Torr vacuum degree, for example, 2x10 Torr vacuum degree, a magnetic metal 6 in a crucible 5 is heated and vaporized by electron beams from an electron gun (16KW) 7. Thus, the magnetic metal (Co) 6 is vapor deposited by 0.04 to 2μm thickness, for example, 1600Å thickness, on the substrate 1 such as a PET film traveling at a speed of 5m/min to produce a metal thin film type magnetic recording medium.
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Patent Agency Ranking
公开(公告)号：JPH08102044A
公开(公告)日：1996-04-16
申请号：JP23533494
申请日：1994-09-29
Applicant: KAO CORP
Inventor： KITAORI NORIYUKI , YOSHIDA OSAMU , WAKABAYASHI SHIGEMI , MIZUNOYA HIROHIDE , SHIGA AKIRA
Abstract: PURPOSE: To easily control the film properties such as surface roughness and hardness by forming a back coating layer comprising a carbon thin film by vapor depositing of carbon on the opposite side of a supporting body to the surface where a magnetic layer is vapor deposited. CONSTITUTION: A PTE film with a magnetic layer formed is set in the device shown in the figure and a diamond-like carbon thin film is formed by ECR plasma CVD method on the back surface of the PET film to form a back coating layer. By this method, the film forming rate of the back coating layer is improved, and even when a magnetic layer of a metal material having high rigidity such as cobalt is formed, a back coating layer having enough hardness corresponding to the magnetic layer can be easily formed.
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公开(公告)号：JPH08100268A
公开(公告)日：1996-04-16
申请号：JP23783994
申请日：1994-09-30
Applicant: KAO CORP
Inventor： WAKABAYASHI SHIGEMI , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , SHIGA AKIRA
IPC: H05H1/46 , C23C16/27 , C23C16/50 , C23C16/511
Abstract: PURPOSE: To sufficiently dissociate a raw gas and to efficiently form a thin film of desired quality by providing the ECR point of ECR plasma CVD at plural spots. CONSTITUTION: A microwave A of about 2.45GHz generated in a microwave power source 26 is introduced into a plasma excitation chamber 28 from a quartz window 27 through a rectangular waveguide 25. A raw gas B supplied to the chamber is converted by the microwave A to high-density and high- activity plasma at an ECR point E formed with a coil 24 with the energy of the microwave A. The plasma is introduced into a vacuum vessel 21 to irradiate a film 23 traveling along a cooling can 22 to form a thin film thereon. In the formation of the thin film by ECR plasma CVD, the ECR point E is provided at >=2 spots to sufficiently dissociate the raw gas. Further, the shape of an opening to inject the plasma is preferably changed in accordance with the dissociation state of the raw gas.
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公开(公告)号：JPH08100267A
公开(公告)日：1996-04-16
申请号：JP23783894
申请日：1994-09-30
Applicant: KAO CORP
Inventor： WAKABAYASHI SHIGEMI , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , SHIGA AKIRA
IPC: C23C16/50 , C23C16/27 , C23C16/511 , G11B5/84
Abstract: PURPOSE: To provide a sufficient activation energy and to form a thin film excellent in characteristic by further accelerating the ion converted to plasma by a microwave with a cyclotron accelerator to irradiate a material to be vapor-deposited with the accelerated ion. CONSTITUTION: In a plasma producing system 1, a microwave from a microwave power source 4 is introduced into a plasma excitation chamber 13 provided with an ECR electromagnet 11 through a waveguide 12 to convert the raw gas supplied from inlet tubes 9 and 10 to plasma. The ion in the plasma thus produced is accelerated with an accelerating system consisting of a cyclotron accelerator 23 such as a dee 25 provided with an electromagnet 24 and a microwave source 26, furnished with a sufficient activation energy and supplied to a traveling system 3. A tape 22 as the vapor-deposition material traveling along a cooling can roll 15 in a vacuum vessel 17 is irradiated with the accelerated ion. Consequently, a protective film excellent in durability, slidability, environmental resistance, etc., is formed on the tape 22.
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公开(公告)号：JPH08100252A
公开(公告)日：1996-04-16
申请号：JP23665994
申请日：1994-09-30
Applicant: KAO CORP
Inventor： SHIGA AKIRA , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI
Abstract: PURPOSE: To stabilize the evaporation of a metallic material and to obtain a magnetic recording medium having high performance with good production efficiency by transporting this metallic material from the lower position to the upper position of a vessel, supplying the metallic material into the vessel and evaporating the material. CONSTITUTION: The magnetic recording medium is obtd. by heating and evaporating a magnetic alloy 5 housed in a crucible 8 in the vacuum vessel 7 and is deposited on the base 2 traveling on a cooling can 1, by which the metallic film is formed. Pellets 9 of the magnetic alloy material are supplied from the housing container 10 of the film forming device via rails 11. The pellets 9 are received in the lower position of the crucible 9 and are transported to the upper position via a rod 12 vertically moving by a pinion 13. The pellets 9 are smoothly charged from this position into the crucible 8 by guiding of a guide 14, by which the replenishing of the magnetic alloy 5 is executed. As a result, the evaporation of the magnetic material is stabilized and the defectless film is formed on the base 2.
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公开(公告)号：JPH08100205A
公开(公告)日：1996-04-16
申请号：JP23666494
申请日：1994-09-30
Applicant: KAO CORP
Inventor： WAKABAYASHI SHIGEMI , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , SHIGA AKIRA
IPC: B22F9/08
Abstract: PURPOSE: To obtain particulates having a narrow grain size distribution by melting a solid material supplied by a supplying means by a melting means, then atomizing the melt by an ultrasonic atomizing means. CONSTITUTION: Al powder is packed into, for example, a vessel 5. This Al powder is supplied into a vessel 6 in a vacuum chamber 1 and is melted by induction heating by a coil 7 connected to a high-frequency power source 8. The molten Al is introduced to a hole of an ultrasonic horn 2 and ultrasonic vibration is acted on the Al melt by an ultrasonic oscillator 3 connected to a power source 4, by which the molten Al is ultrasonically atomized into the vacuum chamber 1 which is evacuated to a prescribed vacuum degree. The melt is cooled by a cooling plate 10 to which cooling water is supplied and gaseous oxygen is passed from a gas nozzle 12, by which the Al particulates are obtd.
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