Abstract:
PROBLEM TO BE SOLVED: To provide a treatment unit, treatment apparatus and a treatment method by which fine treatment can be executed with high precision even if the range of treatment is extended and also to provide equipment and a method for manufacturing display devices by which display devices can be formed with high precision even in the case where display size is increased. SOLUTION: The treatment unit 10 (11 to 14) is constituted using a mask 18 of relatively small size corresponding to the processing-area block obtained by dividing a substrate-processing area. Because the forming precision of the mask 18 (treatment pore 19) becomes greater than that in the case where the mask 18 of relatively large size corresponding to the substrate-processing area is used, fine film-deposition treatment can be applied to a large-size substrate by using the treatment unit 10 with high precision.
Abstract:
PROBLEM TO BE SOLVED: To provide a display device and its manufacturing method wherein a large-sized screen can be realized while preventing generation of the deterioration of a display element of an image plane part during the manufacturing process by facilitating the electrical connection between the image plane part and a driving circuit part. SOLUTION: The image plane part 12 is installed at the surface side of a substrate 11, and the driving circuit part 13 is respectively installed at the rear face side. Embedded plugs 11A, 11B to electrically connect an organic EL element 14 of the image plane part 12 and the driving circuit part 13 are formed in electrode drawing out holes 11C, 11D installed at the substrate 11. A driving current from the driving circuit part 13 is supplied to a cathode electrode 16 and an anode electrode 18 of the organic EL element 14 via the embedded plugs 11A, 11B, thereby an organic EL layer emits light.
Abstract:
PROBLEM TO BE SOLVED: To keep a bonded film free from distortion by executing film bonding and adhesive curing with reference to an object with an adhesive applied on the surface, and furnishing an antistatic member to be in close contact with the curing period of an adhesive. SOLUTION: When a film 21 is bonded, at least, a support stage is moved to a position A; then placed and fixed thereon is a glass plate 20 with a UV ray curable type adhesive 22 applied on the surface. Subsequently, the film 21 is supplied on the glass plate 20, and a bonding roller 13 is moved downward to be in contact with the lateral peripheries of the film 21. As such, by permitting the bonding roller 13 to be moved in a horizontal direction, the film 21 is pressed to the glass plate 20. After that, the support stage and movement glass state 12 are moved to a position B so that the close contacting surface of a charge plate 14 is put in close contact with the surface of the film by an air cylinder. By keeping this state, adhesive 22 is irradiated with UV rays emitted from a UV ray lamp 16 in order to cure adhesive 22.
Abstract:
PROBLEM TO BE SOLVED: To upgrade attachment accuracy of a film and simplify a structure of a device by providing a second cylindrical part which is rotatable with a first cylindrical part with plural holes formed on the peripheral face and is rotatable, in the first cylindrical part, and causing a suction force to be generated in the holes opposite to an opening part on the peripheral face of the second cylindrical part to retain the film on the peripheral face of the first cylindrical part. SOLUTION: A film retaining part comprises the sleeve 51 of a first cylindrical part and the bushing 52 or the like of a second cylindrical part, and the sleeve 51 is set in a freely rotatable manner with a shaft CL can has plural holes 51a formed on the circumferential face. In addition, the bushing 52 is arranged on the inner peripheral face of the sleeve 51, and is set to be rotatable on the sleeve 51 through a bearing. Further, a film FM is wound around a region on the outer peripheral face of the sleeve 51 and an atmospheric air present in the hollow part 52a of the bushing 52 is discharged from a vacuum supply source 53 through an opening part 54 and the holes 51a formed in the bushing 52. Consequently, no air is entrapped as the film FM is retained by the film retaining part all along, so that the film FM is not deviated out of position due to creasing or the like.
Abstract:
PROBLEM TO BE SOLVED: To provide a film-forming device where the reliability for evaluating thin-film characteristics is high, a damage to a thin film is small, and at the same time a working efficiency for evaluation is excellent, and productivity is superb. SOLUTION: A device has a thin-film evaluation means 200 for evaluating the characteristics of a thin film being formed at a film 106 inside a vacuum room 101. The thin-film evaluation means 200 include a pair of electrodes 207a and 207a being arranged in the vacuum room 101 and evaluates the characteristics (for example, resistance) of the thin film by bringing the electrodes 207a and 207a into contact with a thin film that is formed at the film 106. When an operation knob is rotated left and right, an arm 204 is rotated, thus selecting either a state where the electrodes 207a and 207a are electrically in contact with the film 106 and a state where they are separated from it. A substrate 210 for evaluating thin-film characteristics is retained at the other edge part of the arm 204 detachably and moves from the arm 204 to the side of the film 106 by rotating the above control knob.
Abstract:
PROBLEM TO BE SOLVED: To uniformize the blowing-off of a gas to a target by providing this device with a primary gas passage producing a gas into the device, a pool part connected to the primary passage and a plurality of secondary gas passages connected to the pool part. SOLUTION: The back face of a backing plate 2 attached to a cooling board is provided with a pool 17, and passages 18 connected to this pool 17 and digged into a torunament shape are formed. Therefore, in the case a gas introduced into the pool 17 through a gas introducing port and the passage is introduced into the passages 18, the gas can uniformly be introduced into a gaseous blow- off port 23 on the outer circumference of the backing plate 2. Thus, since the gas can uniformly be blown-off from the circumference of a target, stable coating can be formed on a substrate, and the uniformity of the distribution of the film thickness can also be improved. Furthermore, a gas ring for introducing a gas is not needed, so that the adhesion of sputtered film to a gas ring can be solved as well.
Abstract:
PROBLEM TO BE SOLVED: To provide a device and a method for shifting a work by which a position of the work can be surely shifted in a vacuum vessel and shifting time can be reduced. SOLUTION: A work shifting device 200 for shifting the position of the work 1 in the vacuum vessel 6 is provided with a work holding means 2 for holding the work 1 attachably and detachably in the vacuum vessel 6, an operating means 400 for shifting the work holding means 2 in the vacuum vessel 6 and an attracting means 500 for attracting and fixing the work holding means 2 to the operating means 400 by a magnetic attractive force at the time of shifting the work holding means 2 in the vacuum vessel 6.
Abstract:
PURPOSE: To easily and uniformly coat an object with a liq. such as adhesive by providing a coating means having a pressing face matching the shape of such an object as the panel face of a CRT held by a holding means and pressing the pressing face of the coating means on the coating face of the object by a working means. CONSTITUTION: A CRT 5 is held at a specified position on a holding means 12 to confront the panel face 10 of the CRT 5 with a constant-quantity discharger 30. A fixed amt. of an adhesive 20 is then discharged on the panel face 10 from the discharger 30, the discharger 30 is retreated from the CRT 5, and a pressing jig 14 is lowered instead. A pressing means 16 is operated to press the pressing face 22 of the jig 14 on the panel face 10, hence the adhesive 20 is uniformly extended over the panel face 10, and the layer of the adhesive is formed. In this case, the thickness of the adhesive 20 layer is made uniform by accurately controlling the descent and pressing pressure of the jig 14.
Abstract:
PURPOSE: To provide a uniform coating device of liquid capable of uniformly coating a liquid such as an adhesive on an object such as a panel surface of a CRT. CONSTITUTION: This device for coating a liquid 14 on a CRT5 is provided with a holding means 12 for holding the CRT5, and a liquid coating means 30 provided with a coating roller 36 for coating the liquid 14 so as to keep the film thickness constant.
Abstract:
PROBLEM TO BE SOLVED: To provide an optical packing body capable of improving insufficient rigidity of an optical element while restraining increase in thickness of a liquid crystal display device and restraining deterioration of display characteristics of the liquid crystal display device. SOLUTION: The optical packing body has a light guide plate, and a packing member packing the light guide plate and having a film-shape and a sheet-shape. The packing member has contractibility or retractility at least at a part of the packing member, and also has an optical function. The packing member and the light guide plate are firmly stuck. COPYRIGHT: (C)2010,JPO&INPIT