Electromechanical device, manufacturing method thereof and resonator
    83.
    发明专利
    Electromechanical device, manufacturing method thereof and resonator 审中-公开
    电动装置及其制造方法及谐振器

    公开(公告)号:JP2008236386A

    公开(公告)日:2008-10-02

    申请号:JP2007073234

    申请日:2007-03-20

    Abstract: PROBLEM TO BE SOLVED: To provide an electromechanical device which prevents a fluctuation in a resonance frequency and improves a yield by eliminating positional deviation of supports resulting from a deviation in adapting a mask, its manufacturing method and a resonator by the electromechanical device.
    SOLUTION: The electromechanical device 25 having a moving member 10 arranged on a substrate 5 through space 27 is provided with a protective film 15 for sealing the electromechanical device 25 through space 26, wherein the protective film 15 and the moving member 10 are supported by supports 16A and 16B that penetrate the moving member 10.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种机电装置,其通过消除由于机电装置适应掩模,其制造方法和谐振器的偏差而导致的支撑体的位置偏移,从而防止谐振频率的波动并提高产量 。 解决方案:具有通过空间27布置在基板5上的移动部件10的机电装置25设置有用于通过空间26密封机电装置25的保护膜15,其中保护膜15和移动部件10是 由穿过移动构件10的支撑件16A和16B支撑。版权所有(C)2009,JPO&INPIT

    Static capacitance resonator, manufacturing method of the static capacitance resonator, and communication apparatus
    84.
    发明专利
    Static capacitance resonator, manufacturing method of the static capacitance resonator, and communication apparatus 审中-公开
    静态电容谐振器,静态电容谐振器的制造方法和通信装置

    公开(公告)号:JP2007142533A

    公开(公告)日:2007-06-07

    申请号:JP2005329900

    申请日:2005-11-15

    Inventor: TADA MASAHIRO

    Abstract: PROBLEM TO BE SOLVED: To provide a technology capable of reducing transparent capacitance, without increasing a drive voltage applied to a vibrator by independently selecting the distance between the vibrator and each electrode. SOLUTION: The static capacitance resonator 1 provided with a vibrator 21, both ends of which are supported above a substrate 10 via a space 31 on the substrate 10 includes a first electrode 41 formed on the substrate 10 via a part of the space 31 under the vibrator 21, and a second electrode 51 juxtaposed with the first electrode 41 and formed on the substrate 10 via part of the space 31 under the vibrator 21, the electrode, serving as a signal line is separated from the electrode, serving as a DC line, and the distance d1 between the first electrode 41 and the vibrator 21 differs from the distance d2 between the second electrode 51 and the vibrator 21. COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种能够通过独立地选择振动器和每个电极之间的距离而不增加施加到振动器的驱动电压来降低透明电容的技术。 解决方案:设置有振动器21的静电容量谐振器1,其两端经由基板10上的空间31被支撑在基板10上方,包括:第一电极41,其经由空间的一部分形成在基板10上 31,以及与第一电极41并列并且经由振子21下方的空间31的一部分形成在基板10上的第二电极51,作为信号线的电极与电极分离,作为 DC线,第一电极41和振动器21之间的距离d1与第二电极51和振动器21之间的距离d2不同。(C)2007,JPO&INPIT

    Micro-resonator, band pass filter, semiconductor device and communication equipment
    85.
    发明专利
    Micro-resonator, band pass filter, semiconductor device and communication equipment 有权
    微型谐振器,带通滤波器,半导体器件和通信设备

    公开(公告)号:JP2007013447A

    公开(公告)日:2007-01-18

    申请号:JP2005190269

    申请日:2005-06-29

    Abstract: PROBLEM TO BE SOLVED: To suppress signal leakage through a parasitic capacity in a micro-resonator constituted of an electrostatically driven beam type resonator, to widen the band of a band pass filter by using the micro-resonator, and to increase the reliability of a semiconductor device and communication equipment equipped with the micro-resonator. SOLUTION: This micro-resonator is constituted of a beam type resonator 311, and a beam 36 formed as the vibrating part of the resonator 311 is provided with a high resistance part or an insulating part 361a. The beam 36 is constituted of at least two or more layers, and a portion of an upper layer and the lowermost layer continued to this is formed of a high resistance or an insulator. COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题:为了通过由静电驱动光束型谐振器构成的微谐振器中的寄生电容来抑制信号泄漏,通过使用微谐振器来扩大带通滤波器的频带,并且增加 具有微型谐振器的半导体器件和通信设备的可靠性。 解决方案:该微型谐振器由光束型谐振器311构成,并且形成为谐振器311的振动部分的光束36设置有高电阻部分或绝缘部分361a。 光束36由至少两层或更多层构成,上层的一部分和与其连续的最下层由高电阻或绝缘体形成。 版权所有(C)2007,JPO&INPIT

    Micro capacitor, its manufacturing method and electronic apparatus
    86.
    发明专利
    Micro capacitor, its manufacturing method and electronic apparatus 审中-公开
    微电容器,其制造方法和电子设备

    公开(公告)号:JP2006108502A

    公开(公告)日:2006-04-20

    申请号:JP2004295180

    申请日:2004-10-07

    Abstract: PROBLEM TO BE SOLVED: To provide a micro capacitor capable of changing capacity by simple constitution, and securing and stabilizing the capacity. SOLUTION: The micro capacitor is provided with capacitors 11, 12 constituting a plurality of capacitors C, a dielectric film, a driving electrode 14, and a single power supply and constituted so that the lengths L1 of the displacing positions of respective electrode 11P in the capacity 11 is coincident with each other, and the lengths L2 of respective driving electrodes 14A in the driving electrode 14 are mutually different. When voltage to be applied from the single power supply to the driving electrode 14 is gradually changed in each of the driving electrodes 14A, the micro capacitor is successively switched based on differences of pull-In voltages among respective capacitors, thus changing the capacity. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种能够通过简单的结构改变容量并且确保和稳定容量的微型电容器。 < P>解决方案:微电容器设置有构成多个电容器C的电容器11,12,电介质膜,驱动电极14和单个电源,并且构成为使各电极的位移位置的长度L1 11P的电容11彼此一致,并且驱动电极14中的各个驱动电极14A的长度L2相互不同。 当在每个驱动电极14A中逐渐改变从单个电源施加到驱动电极14的电压时,基于各个电容器之间的拉入电压的差别,依次切换微电容器,从而改变容量。 版权所有(C)2006,JPO&NCIPI

    Micro resonator, its manufacturing method, and electronic apparatus
    87.
    发明专利
    Micro resonator, its manufacturing method, and electronic apparatus 有权
    微型谐振器,其制造方法和电子设备

    公开(公告)号:JP2006033740A

    公开(公告)日:2006-02-02

    申请号:JP2004213305

    申请日:2004-07-21

    Abstract: PROBLEM TO BE SOLVED: To provide a micro resonator which secures frequency characteristics, by controlling the fluctuations in the center frequencies among each resonator element. SOLUTION: A micro resonator structural body 10 is constituted so as to be simultaneously provided with a resonator element structural body 11, having a plurality of resonator elements F and contributing to a resonance operation and with a non-resonator element structural body 12, arranged at a periphery of the resonator element structural body 11 having a plurality of non-resonator elements N and giving no contribution to the resonance operation. Even though the micro resonator structural body 10 is influenced by a reflective light at processing a photolithography in its manufacturing process, a forming accuracy of the resonator elements F is secured; while the forming accuracy of the non-resonator elements N is reduced since the influence of the reflected light is easily brought to the forming accuracy of the eternal non-resonator elements N, while it is less likely to affect the forming accuracy of the central resonator elements F. Since the formed dimension of each resonator element F will thereby not easily fluctuate, the center frequency among each resonator element F will not easily fluctuate. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:通过控制每个谐振器元件中的中心频率的波动来提供确保频率特性的微谐振器。 解决方案:微谐振器结构体10被构造成同时设置有谐振元件结构体11,谐振元件结构体11具有多个谐振元件F并且有助于谐振操作,并且具有非谐振元件结构体12 布置在具有多个非谐振元件N的谐振元件结构体11的周边,并且对共振操作没有贡献。 即使微波谐振器结构体10在其制造工艺中处理光刻时受到反射光的影响,确保了谐振元件F的成形精度; 同时由于反射光的影响容易达到永久非谐振元件N的成形精度,所以非谐振元件N的成形精度降低,同时不太可能影响中心谐振器的形成精度 由于每个谐振元件F的形状尺寸因此不容易波动,所以每个谐振器元件F之间的中心频率将不容易波动。 版权所有(C)2006,JPO&NCIPI

    Filter and transceiver
    88.
    发明专利
    Filter and transceiver 有权
    过滤器和收发器

    公开(公告)号:JP2005318217A

    公开(公告)日:2005-11-10

    申请号:JP2004133035

    申请日:2004-04-28

    CPC classification number: H03H9/525 H03H9/2463

    Abstract: PROBLEM TO BE SOLVED: To realize a filter having a wide specific bandwidth using a plurality of microresonators.
    SOLUTION: A plurality of microresonators 15, 16, 17 and 18 having a beam structure are electrically connected in lattice between two input terminals 11 and 12 for balanced input and two output terminals 13 and 14 for balanced output. Each of the plurality of microresonators 15, 16, 17 and 18 comprises a resonator group including a plurality of resonators, having different resonance frequencies.
    COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:使用多个微谐振器来实现具有宽的特定带宽的滤波器。 解决方案:具有光束结构的多个微谐振器15,16,17和18在两个用于平衡输入的输入端子11和12之间格格地电连接,并且两个输出端子13和14用于平衡输出。 多个微谐振器15,16,17和18中的每一个包括具有不同共振频率的包括多个谐振器的谐振器组。 版权所有(C)2006,JPO&NCIPI

    Semiconductor device and manufacturing method of semiconductor device
    89.
    发明专利
    Semiconductor device and manufacturing method of semiconductor device 审中-公开
    半导体器件的半导体器件和制造方法

    公开(公告)号:JP2005260398A

    公开(公告)日:2005-09-22

    申请号:JP2004066721

    申请日:2004-03-10

    Abstract: PROBLEM TO BE SOLVED: To provide a semiconductor device with a structure of including a space between an electrode pattern and an electrode film on a substrate that prevents storage of static electricity to the space so as to avoid a defect due to sticking of the electrode film.
    SOLUTION: The semiconductor device 1 is provided with: an electrode pattern 10 formed on the substrate; the electrode film 20 located on the electrode pattern 10 via the space; and fitting patterns 11, 21 respectively provided to the electrode pattern 10 and the electrode film 20 and fitting a fuse 30 to bring the same potential to the electrode pattern 10 and the electrode film 20. A manufacturing method of the semiconductor device includes the steps of: forming the electrode pattern 10 onto the substrate; forming the fuse 30 for bringing the same potential to the electrode pattern 10 and the electrode film 20; forming the space between the electrode pattern 10 and the electrode film 20 by removing a sacrifice film; and blowing out the fuse 30.
    COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题:为了提供一种半导体器件,其具有在电极图案和基板上的电极膜之间具有空间的结构,其防止静电对空间的存储,以避免由于粘附而导致的缺陷 电极膜。 解决方案:半导体器件1设置有:形成在基板上的电极图案10; 经由空间位于电极图案10上的电极膜20; 以及分别设置到电极图案10和电极膜20并且配合熔丝30以使电极图案10和电极膜20具有相同电位的配合图案11,21。半导体器件的制造方法包括以下步骤: :将电极图案10形成在基板上; 形成用于使电极图案10和电极膜20具有相同电位的熔丝30; 通过除去牺牲膜形成电极图案10和电极膜20之间的空间; 并吹出保险丝30.版权所有(C)2005,JPO&NCIPI

    REMOTE COMMANDER
    90.
    发明专利

    公开(公告)号:JPH1118162A

    公开(公告)日:1999-01-22

    申请号:JP17033997

    申请日:1997-06-26

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To provide a remote commander that is used without replacement of a battery. SOLUTION: Wheels 302A, B are provided to both sides of the commander main body 300, and rotation of the wheels 302A, B is delivered to a rotor of a generator 100 via a step-up gear. Furthermore, the wheel 302A is rotated by an operation lever 320 and the output power of the generator 100 is stored on a charging section 108 through a rectifier circuit 102, a capacitor 104, and a DC-DC converter 106. A remote control signal transmission LED is lighted by the power of the charging section 108, and a remote control signal is transmitted. A charging display LED 110 displays a charging state and a full charging display LED 112 displays a full charging. An operation display LED is used to display an operating state. A high luminance LED is provided, which is used for an emergency lighting device.

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