Abstract:
PROBLEM TO BE SOLVED: To provide an electromechanical device which prevents a fluctuation in a resonance frequency and improves a yield by eliminating positional deviation of supports resulting from a deviation in adapting a mask, its manufacturing method and a resonator by the electromechanical device. SOLUTION: The electromechanical device 25 having a moving member 10 arranged on a substrate 5 through space 27 is provided with a protective film 15 for sealing the electromechanical device 25 through space 26, wherein the protective film 15 and the moving member 10 are supported by supports 16A and 16B that penetrate the moving member 10. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a technology capable of reducing transparent capacitance, without increasing a drive voltage applied to a vibrator by independently selecting the distance between the vibrator and each electrode. SOLUTION: The static capacitance resonator 1 provided with a vibrator 21, both ends of which are supported above a substrate 10 via a space 31 on the substrate 10 includes a first electrode 41 formed on the substrate 10 via a part of the space 31 under the vibrator 21, and a second electrode 51 juxtaposed with the first electrode 41 and formed on the substrate 10 via part of the space 31 under the vibrator 21, the electrode, serving as a signal line is separated from the electrode, serving as a DC line, and the distance d1 between the first electrode 41 and the vibrator 21 differs from the distance d2 between the second electrode 51 and the vibrator 21. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To suppress signal leakage through a parasitic capacity in a micro-resonator constituted of an electrostatically driven beam type resonator, to widen the band of a band pass filter by using the micro-resonator, and to increase the reliability of a semiconductor device and communication equipment equipped with the micro-resonator. SOLUTION: This micro-resonator is constituted of a beam type resonator 311, and a beam 36 formed as the vibrating part of the resonator 311 is provided with a high resistance part or an insulating part 361a. The beam 36 is constituted of at least two or more layers, and a portion of an upper layer and the lowermost layer continued to this is formed of a high resistance or an insulator. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a micro capacitor capable of changing capacity by simple constitution, and securing and stabilizing the capacity. SOLUTION: The micro capacitor is provided with capacitors 11, 12 constituting a plurality of capacitors C, a dielectric film, a driving electrode 14, and a single power supply and constituted so that the lengths L1 of the displacing positions of respective electrode 11P in the capacity 11 is coincident with each other, and the lengths L2 of respective driving electrodes 14A in the driving electrode 14 are mutually different. When voltage to be applied from the single power supply to the driving electrode 14 is gradually changed in each of the driving electrodes 14A, the micro capacitor is successively switched based on differences of pull-In voltages among respective capacitors, thus changing the capacity. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a micro resonator which secures frequency characteristics, by controlling the fluctuations in the center frequencies among each resonator element. SOLUTION: A micro resonator structural body 10 is constituted so as to be simultaneously provided with a resonator element structural body 11, having a plurality of resonator elements F and contributing to a resonance operation and with a non-resonator element structural body 12, arranged at a periphery of the resonator element structural body 11 having a plurality of non-resonator elements N and giving no contribution to the resonance operation. Even though the micro resonator structural body 10 is influenced by a reflective light at processing a photolithography in its manufacturing process, a forming accuracy of the resonator elements F is secured; while the forming accuracy of the non-resonator elements N is reduced since the influence of the reflected light is easily brought to the forming accuracy of the eternal non-resonator elements N, while it is less likely to affect the forming accuracy of the central resonator elements F. Since the formed dimension of each resonator element F will thereby not easily fluctuate, the center frequency among each resonator element F will not easily fluctuate. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To realize a filter having a wide specific bandwidth using a plurality of microresonators. SOLUTION: A plurality of microresonators 15, 16, 17 and 18 having a beam structure are electrically connected in lattice between two input terminals 11 and 12 for balanced input and two output terminals 13 and 14 for balanced output. Each of the plurality of microresonators 15, 16, 17 and 18 comprises a resonator group including a plurality of resonators, having different resonance frequencies. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a semiconductor device with a structure of including a space between an electrode pattern and an electrode film on a substrate that prevents storage of static electricity to the space so as to avoid a defect due to sticking of the electrode film. SOLUTION: The semiconductor device 1 is provided with: an electrode pattern 10 formed on the substrate; the electrode film 20 located on the electrode pattern 10 via the space; and fitting patterns 11, 21 respectively provided to the electrode pattern 10 and the electrode film 20 and fitting a fuse 30 to bring the same potential to the electrode pattern 10 and the electrode film 20. A manufacturing method of the semiconductor device includes the steps of: forming the electrode pattern 10 onto the substrate; forming the fuse 30 for bringing the same potential to the electrode pattern 10 and the electrode film 20; forming the space between the electrode pattern 10 and the electrode film 20 by removing a sacrifice film; and blowing out the fuse 30. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a remote commander that is used without replacement of a battery. SOLUTION: Wheels 302A, B are provided to both sides of the commander main body 300, and rotation of the wheels 302A, B is delivered to a rotor of a generator 100 via a step-up gear. Furthermore, the wheel 302A is rotated by an operation lever 320 and the output power of the generator 100 is stored on a charging section 108 through a rectifier circuit 102, a capacitor 104, and a DC-DC converter 106. A remote control signal transmission LED is lighted by the power of the charging section 108, and a remote control signal is transmitted. A charging display LED 110 displays a charging state and a full charging display LED 112 displays a full charging. An operation display LED is used to display an operating state. A high luminance LED is provided, which is used for an emergency lighting device.