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公开(公告)号：EP0381309A3
公开(公告)日：1991-07-10
申请号：EP90300101.4
申请日：1990-01-04
Applicant: LUCAS INDUSTRIES PUBLIC LIMITED COMPANY
Inventor： Cook, Alan James
IPC: G01D5/26
Abstract: A resonant beam sensor (1, 10, 34) is excited into resonance by directing onto it a drive signal comprising light which has been amplitude modulated at the resonant frequency. A portion of the drive signal reflected by the sensor (1, 10, 34) is demodulated by a photodetector (15, 32) to provide a measurement signal.
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公开(公告)号：EP0090167A3
公开(公告)日：1984-08-29
申请号：EP83101517
申请日：1983-02-17
Applicant: The Foxboro Company
Inventor： Gilby, Anthony C. , Lewis, Edward L. , Olsen, Everett O.
Abstract: An instrumentation system for use in measuring and processing industrial process variables, such as flow, pressure, or temperature, includes a resonant element sensor whose resonant frequency varies in accordance with changes in the desired process variable communicating through an optical fiber link to a distant control room. The sensor is activated into resonant physical motion by light energy from a source in the control room, while the motion of the wire is sensed optically and retransmitted to the control room to produce an output signal whose frequency is equal to that of the resonating element. A feedback network maintains the sensor in resonance by synchronizing the delivery of light energy to the motion of the resonant element. The powering and sensing aspect may be performed by individual fiber optic cables or alternatively this function may be combined by utilizing a single fiber optic strand.
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公开(公告)号：EP3244169A1
公开(公告)日：2017-11-15
申请号：EP17167899.8
申请日：2017-04-25
Inventor： LEONCINO, Luca , HENTZ, Sébastien , JOURDAN, Guillaume , SANSA PERNA, Marc
IPC: G01D5/26 , G01L9/00 , G01D5/34 , G01N29/036
CPC classification number: G01D5/353 , G01D5/26 , G01D5/34 , G01L1/103 , G01L9/0023 , G01M11/3172 , G01N29/036 , G01N29/2418 , G01N2291/015 , G01N2291/0256 , G01N2291/0427 , G01P15/093 , G01P15/097
Abstract: Système de mesure résonant de type MEMS et/ou NEMS, comportant :
Un dispositif optomécanique (4) comprenant au moins un élément résonant (14) à au moins une fréquence de résonance fr, un guide d'onde (10) couplé à un anneau optique (12) dont l'indice optique est sensible au déplacement de l'élément résonant (14),
Des moyens d'excitation (6) de l'élément résonant (14) à au moins sa fréquence de résonance fr,
Des moyens (2) aptes à injecter un faisceau lumineux à une fréquence f1 = fr + Δf dans le dispositif optomécanique, comportant une diode laser et des moyens de modulation disposés entre la diode laser (18) et le guide d'onde (10) à la fréquence f1.
Un dispositif de photodétection (8) apte à mesurer l'intensité d'un faisceau lumineux de mesure sortant du guide d'onde (10), l'intensité du faisceau de mesure ayant au moins une composante à une fréquence 2Δf.Abstract translation: 谐振测量系统MEMS和/或NEMS，包括：耦合到一个环上的光 - 机械装置（4）包括至少一个谐振元件（14）连接到至少一个谐振频率fr，波导（10） 光学系数（12），其光学指数对谐振元件（14）的位移敏感;用于将谐振元件（14）激励（6）至少其谐振频率fr的装置; 2），其能够以频率f1 = fr +Δf将光束注入到光机械装置中，该光机械装置包括激光二极管和以该频率布置在激光二极管（18）和波导（10）之间的调制装置 F1。 一种能够测量从波导（10）出射的测量光束的强度的光电检测装置（8），该测量光束的强度具有至少一个频率为2Δf的分量。
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公开(公告)号：EP2932219A1
公开(公告)日：2015-10-21
申请号：EP13814388.8
申请日：2013-12-13
Applicant: General Electric Company
Inventor： CRADDOCK, Russell , JONES, Roger , ZHAO, Li , IRSHAD, Muhammad
IPC: G01L9/00
CPC classification number: H03H9/02244 , G01K7/32 , G01L1/103 , G01L9/002 , G01L9/0077 , G01L19/0092 , G01L19/04 , G01P15/02 , H03H3/0072 , H03H3/02
Abstract: A resonator device 10 is disclosed. The resonator device may be used in a transducer or a sensor such as a pressure, force or acceleration sensor. The resonator device comprises a resonator 20 provided on a diaphragm 30. A cap 40 is provided which may be fusion bonded to the diaphragm 30 to enclose the resonator 20 and form a hermetically sealed package 10. The resonator device is excited by applying electromagnetic stimulation, such as infra-red or optical stimulation, which may be from a laser via a fibre 50. The resonator device may be interrogated by applying an electromagnetic signal into the optical cavity formed between the resonator 20 and the inside surface of the cap 40 to derive a frequency change of the resonator. As the resonator device incorporates a hermetically sealed package and is stimulated by electromagnetic radiation, it is robust and able to operate in harsh environments.
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公开(公告)号：EP1376087B1
公开(公告)日：2006-02-15
申请号：EP03077111.7
申请日：1998-12-07
Applicant: HONEYWELL INC.
Inventor： Youngner, Daniel W.
CPC classification number: G01P15/097 , G01L1/103 , G01L1/186 , G01L9/0011 , G01L9/002
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Patent Agency Ranking
公开(公告)号：EP0634008A1
公开(公告)日：1995-01-18
申请号：EP93906618.0
申请日：1993-03-24
Inventor： DOUMA, Bindert, Sjoerd , EIGENRAAM, Peter
Abstract: In a method for monitoring strain variations of a strain responsive element of a micromachined sensor device while subjected to outside parameter conditions, at least two oscillation resonance modes of said element are activated and interrogated optically. Thereby correspondingly at least two resonance frequencies are obtained. From parameter/frequency characteristics of said device correspondingly at least two parameter values are derived.
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公开(公告)号：EP0381309A2
公开(公告)日：1990-08-08
申请号：EP90300101.4
申请日：1990-01-04
Applicant: LUCAS INDUSTRIES PUBLIC LIMITED COMPANY
Inventor： Cook, Alan James
IPC: G01D5/26
Abstract: A resonant beam sensor (1, 10, 34) is excited into resonance by directing onto it a drive signal comprising light which has been amplitude modulated at the resonant frequency. A portion of the drive signal reflected by the sensor (1, 10, 34) is demodulated by a photodetector (15, 32) to provide a measurement signal.
Abstract translation: 谐振光束传感器（1，10,34）通过将谐振频率上已被调幅的光驱动到驱动信号上而被激发成谐振。 由传感器（1，10,34）反射的驱动信号的一部分由光电检测器（15,32）解调，以提供测量信号。
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公开(公告)号：EP0266974A3
公开(公告)日：1989-06-21
申请号：EP87309603.6
申请日：1987-10-30
Applicant: NORTHERN TELECOM LIMITED
CPC classification number: G01L1/103 , G01D5/268 , G01L1/186 , G01L9/0017 , G01L9/002 , G01L9/0077 , G01L11/02
Abstract: A pressure sensor includes a resonator element (14) mounted on an optical fibre ferrule (11) whereby light signals for maintaining the resonator in a state of oscillation and for returning a modulated signal to a remite station are coupled to the resonator. The resonator is located in an evacuated cavity (16) and is mounted on a flexible diaphragm (13) whereby pressure changes may be detected as changes in the resonant frequency.
Abstract translation: 压力传感器包括安装在光纤套管（11）上的谐振器元件（14），由此用于将谐振器保持在振荡状态并且用于将调制信号返回到远离站的光信号耦合到谐振器。 谐振器位于真空腔体（16）中并且安装在柔性膜片（13）上，由此可以检测压力变化作为谐振频率的变化。
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公开(公告)号：EP0244086A2
公开(公告)日：1987-11-04
申请号：EP87302706.4
申请日：1987-03-30
Applicant: STC PLC
Inventor： Greenwood, John Christopher
CPC classification number: G01L9/0014 , G01L1/103 , G01L1/186 , G01L9/002 , Y10S73/01
Abstract: A strain or pressure responsive transducer comprises a pair of elongate beam resonators arranged end to end and provided with a flexible coupling therebetween. The arrangement oscillates e.g. in a double see-saw or butterfly mode. The transducer is disposed on a diaphragm whereby strain may be transmitted to the oscillatory system. The frequency of oscillation is a function of this strain.
Abstract translation: 应变或压力响应换能器包括一对细长的束谐振器，它们端对端布置并且在它们之间设置有柔性耦合。 该装置例如振荡。 在双锯或蝴蝶模式。 换能器设置在隔膜上，因此应变可以传递到振荡系统。 振荡的频率是该应变的函数。
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公开(公告)号：WO2014058952A1
公开(公告)日：2014-04-17
申请号：PCT/US2013/063993
申请日：2013-10-09
Applicant: BOSCH AUTOMOTIVE SERVICE SOLUTIONS LLC
Inventor： THEMM, Jeremy , WITTLIFF, III, William W. , SELKIRK, Reed , GRAY, Kevin
IPC: G01L5/00
CPC classification number: G01L1/00 , G01H1/00 , G01H3/00 , G01H9/00 , G01H11/00 , G01L1/10 , G01L1/103 , G01L5/042 , G01L5/105
Abstract: A measuring system including a sensor positioned to a belt to measure an oscillation or vibration of the belt based at least in part on a trigger threshold. Also, the measuring system may include a diagnostic tool coupled the sensor to receive a plurality of measurements of the oscillation or vibration of the belt, wherein the diagnostic tool may determine a tension of the belt based at least in part on an average of the plurality of measurements of the oscillation or vibration of the belt.
Abstract translation: 一种测量系统，包括至少部分地基于触发阈值定位到皮带上以测量皮带的振动或振动的传感器。 此外，测量系统可以包括诊断工具，耦合传感器以接收带的振荡或振动的多个测量值，其中诊断工具可以至少部分地基于多个平均值来确定皮带的张力 测量皮带的振动或振动。
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