公开(公告)号：US20160097696A1

公开(公告)日：2016-04-07

申请号：US14503951

申请日：2014-10-01

Applicant: Mueller International, LLC

Inventor： George V. Zusman

IPC: G01M3/24 ,  G01H11/08 ,  G01N29/04

CPC classification number: G01M3/24 ,  E03B7/003 ,  F16L55/28 ,  F16L2101/30 ,  F17D5/06 ,  G01H11/08 ,  G01L1/183 ,  G01M3/005 ,  G01M3/243 ,  G01M3/246 ,  G01N29/04 ,  H04R17/00

Abstract: A vibration sensor includes at least one piezoelectric crystal having an upper surface and a lower surface; a base having an attachment section defining an attachment surface and an at least one calibration mass; wherein a one of the at least one piezoelectric crystal upper surface and lower surface attaches to the attachment surface of the base; and wherein the at least one calibration mass is external to the piezoelectric crystal.

Abstract translation: 振动传感器包括具有上表面和下表面的至少一个压电晶体; 具有限定附接表面的附接部分和至少一个校准块的基座; 其中，所述至少一个压电晶体上表面和下表面中的一个附接到所述基座的附接表面; 并且其中所述至少一个校准质量体在所述压电晶体的外部。

公开(公告)号：US20120203474A1

公开(公告)日：2012-08-09

申请号：US13226199

申请日：2011-09-06

Applicant: Grzegorz Marian Kawiecki ,  Rosa Maria Rodriguez ,  Pawel Kudela ,  Wieslaw Ostachowicz

Inventor： Grzegorz Marian Kawiecki ,  Rosa Maria Rodriguez ,  Pawel Kudela ,  Wieslaw Ostachowicz

IPC: G06F19/00 ,  G01N29/04

CPC classification number: G01N29/07 ,  G01L1/16 ,  G01L1/183 ,  G01M5/00 ,  G01N2291/0258 ,  G01N2291/103 ,  G01N2291/2694

Abstract: The present invention relates to a structural health monitoring system, for example a system used in the non-destructive evaluation of an aircraft structure. The present invention provides a method and apparatus for evaluating one or more anomalies within a structure using a structural health monitoring system that includes at least three transducers arranged in operative contact with the structure such that no two transducers are aligned to be parallel. A transducer excites an elastic wave that propagates through the structure, and reflections from any anomalies within the structure are collected by the three transducers. These collected signals are analysed to identify an anomaly within the structure. Time of flight techniques are used to determine the location of the anomaly.

Abstract translation: 本发明涉及一种结构健康监测系统，例如用于飞机结构的非破坏性评估的系统。 本发明提供一种用于使用结构健康监测系统评估结构内的一个或多个异常的方法和装置，所述结构健康监测系统包括布置成与所述结构有效接触的至少三个换能器，使得没有两个换能器对齐成平行。 传感器激发通过结构传播的弹性波，并且由三个换能器收集结构内任何异常的反射。 分析这些收集的信号以识别结构内的异常。 飞行时间技术用于确定异常的位置。

公开(公告)号：US20110259101A1

公开(公告)日：2011-10-27

申请号：US13089557

申请日：2011-04-19

Applicant: Kenta SATO

Inventor： Kenta SATO

IPC: G01P15/10

CPC classification number: G01C19/5656 ,  G01L1/165 ,  G01L1/183 ,  G01P15/097

Abstract: A vibration-type force detection sensor includes: a piezoelectric resonator element provided with a vibration portion and a support portion connected to one end of the vibration portion; and a base which is provided with one main surface which is connected to the support portion and the piezoelectric resonator element is arranged, wherein the piezoelectric resonator element is in a state where the other end side of the vibration portion can oscillate so that the size of a gap between the vibration portion and the one main surface changes when a force acts in a direction which is orthogonal with the one main surface of the base, and is supported in parallel with the one main surface of the base so that an electric equivalent resistance of the vibration portion changes according to the change in the size of the gap.

Abstract translation: 振动型力检测传感器包括：压电谐振元件，设置有振动部分和与振动部分的一端连接的支撑部分; 并且设置有与支撑部分连接的一个主表面和压电谐振元件的基座，其中压电谐振元件处于振动部分的另一端侧可以摆动的状态， 当力作用在与基座的一个主表面正交的方向上时，振动部分和一个主表面之间的间隙变化，并且与基座的一个主表面平行地支撑，使得电等效电阻 振动部分根据间隙尺寸的变化而变化。

公开(公告)号：US07698962B2

公开(公告)日：2010-04-20

申请号：US11615341

申请日：2006-12-22

Applicant: William LeFebvre ,  Michael J. McCann ,  Frank Backo, III ,  Andrew H. Martin

Inventor： William LeFebvre ,  Michael J. McCann ,  Frank Backo, III ,  Andrew H. Martin

IPC: G01L1/04 ,  G01G19/12

CPC classification number: G01D21/02 ,  B61F5/305 ,  B61F5/32 ,  B61L15/0027 ,  B61L15/0081 ,  B61L27/0094 ,  F16C41/007 ,  F16C41/008 ,  F16C2326/10 ,  G01D11/245 ,  G01G19/12 ,  G01G23/3728 ,  G01L1/183 ,  G01L5/0085 ,  G01L5/107 ,  G01L5/243 ,  G01L5/28 ,  G01L9/0022

Abstract: A sensor interface is disclosed including a flexible substrate in which are embedded sensors for measuring physical parameters such as temperature, displacement, velocity, acceleration, stress, strain, pressure and force present between objects such as a railcar bearing and a truck side frame. The substrate is positioned between the objects of interest Electronic components such as a data processing unit, a data storage device, a communication device and a power source may also be embedded within the substrate. The electronic devices communicate with one another and the sensors to process signals generated by the sensors indicative of the parameters being measured.

Abstract translation: 公开了一种传感器接口，其包括柔性基板，其中嵌入有传感器，用于测量诸如轨道车轴承和卡车侧框架之类的物体之间的物理参数，例如温度，位移，速度，加速度，应力，应变，压力和力。 衬底位于感兴趣的对象之间也可以嵌入在衬底内的电子部件，例如数据处理单元，数据存储设备，通信设备和电源。 电子设备彼此通信，并且传感器处理由传感器产生的指示所测量的参数的信号。

公开(公告)号：US07444883B2

公开(公告)日：2008-11-04

申请号：US11317384

申请日：2005-12-22

Applicant: Mitchell J. Novack

Inventor： Mitchell J. Novack

IPC: G01N3/08

CPC classification number: G01L1/106 ,  G01L1/162 ,  G01L1/183

Abstract: An apparatus and method for monolithic force transducers in which a sensed force is applied across only two ends of a pair of force sensing elements so that the pair of force sensing elements are loaded in series with one in compression and the other in tension, whereby the force sensed by each of the two force sensing elements are identically equal in magnitude but opposite in sense.

Abstract translation: 一种用于单片力传感器的装置和方法，其中感测的力仅施加在一对力感测元件的两端上，使得一对力感测元件与压缩装置中的一对力被加载，另一个在张力下被加载，由此 两个力感测元件中的每一个感测到的力在大小上是相同的，但在意义上是相反的。

公开(公告)号：US06662657B2

公开(公告)日：2003-12-16

申请号：US10183312

申请日：2002-06-25

Applicant: Rand H. Hulsing, II ,  Randy Sprague

Inventor： Rand H. Hulsing, II ,  Randy Sprague

IPC: G01P904

CPC classification number: G01P15/097 ,  G01C19/5719 ,  G01L1/183 ,  G01P2015/0828

Abstract: Performance-enhancing, reduced-area metalization adhesion areas in force-sensing transducers are described.

公开(公告)号：US06576968B2

公开(公告)日：2003-06-10

申请号：US09855113

申请日：2001-05-14

Applicant: Terje Kvisteroey ,  Jacobsen Henrik

Inventor： Terje Kvisteroey ,  Jacobsen Henrik

IPC: H01L2982

CPC classification number: G01P21/00 ,  G01F1/28 ,  G01L1/183 ,  G01P15/097 ,  G01P2015/0828

Abstract: A sensor formed from a semiconductor material. The device comprises a support frame, a sensing element; and means for vibrating the sensing element at a frequency corresponding generally to a first resonant frequency vibration mode. Error detection means detects the resonant frequency vibration mode, the output of the error detection means being indicative of existence or otherwise an expected response of the resonant frequency vibration mode to the excitation. Means for detecting the deformation of the sensing element provides an output indicative of the parameter to be sensed, the deformation detecting means and error detection means being formed from the same elements.

公开(公告)号：US20030005768A1

公开(公告)日：2003-01-09

申请号：US10183225

申请日：2002-06-26

Inventor： John Christopher Greenwood

IPC: G01P015/125

CPC classification number: G01P15/123 ,  G01L1/106 ,  G01L1/183 ,  G01L9/0016 ,  G01L9/0019 ,  G01P15/097

Abstract: A resonant sensor comprises a support structure comprising two support points; a laminar resonator suspended between said two support points of said support structure and comprising a plurality of substantially parallel flexural members which are responsive to relative movement of said support points; means for exciting said resonator into a balanced mode of oscillation and means for sensing motion of said resonator. Said means for sensing motion of said resonator is or are spaced from, and linked to, said flexible area of said resonator by means of levers. Said support points are preferably adapted to move relative to each other in response to a difference in pressure, force or acceleration.

Abstract translation: 谐振传感器包括包括两个支撑点的支撑结构; 悬挂在所述支撑结构的所述两个支撑点之间的层状谐振器，并且包括响应于所述支撑点的相对运动的多个基本平行的弯曲构件; 用于将所述谐振器激发成平衡振荡模式的装置和用于感测所述谐振器运动的装置。 用于感测所述谐振器的运动的所述装置是借助于杠杆与所述谐振器的所述柔性区域间隔开并与之相连接的。 所述支撑点优选地适于响应于压力，力或加速度的差异而相对于彼此移动。

公开(公告)号：US20010049193A1

公开(公告)日：2001-12-06

申请号：US09908112

申请日：2001-07-17

Inventor： Ilan Golecki ,  Margaret Eagan

IPC: H01L021/44

CPC classification number: B81C1/00666 ,  B81C2201/017 ,  G01L1/183 ,  G01P15/0802 ,  G01P15/097 ,  G01P2015/0828 ,  H01L21/28506 ,  H01L21/2855 ,  H01L21/32051

Abstract: A method of forming a thin film metallization layer having a predetermined residual stress and a predetermined sheet resistance and force measuring devices formed using the methods.

公开(公告)号：US5188983A

公开(公告)日：1993-02-23

申请号：US816972

申请日：1992-01-03

Applicant: Henry Guckel ,  Jeffry Sniegowski

Inventor： Henry Guckel ,  Jeffry Sniegowski

IPC: B81B3/00 ,  B81B7/00 ,  G01L1/18 ,  G01L9/00 ,  H03H3/007 ,  H03H9/02

CPC classification number: H03H9/02259 ,  G01L1/183 ,  G01L1/186 ,  G01L9/0019 ,  G01L9/002 ,  H03H3/0072 ,  B81C2203/0145 ,  H03H2009/02511 ,  Y10T29/49103

Abstract: Force transducers are formed of a beam of polysilicon which is mounted at its ends to a silicon substrate and is encapsulated within a polysilicon shell which defines, with the substrate, a cavity around the resonating beam. The cavity is sealed off from the atmosphere and evacuated to maximize the Q of the resonating beam. The beam is produced by deposition of polysilicon in such a way that, combined with subsequent annealing steps, the beam is in zero or low tensile strain. Resonant excitation of the beam may be accomplished in various ways, including capacitive excitation, and the vibratory motion of the beam may be detected utilizing an implanted resistor which is piezoresistive. Formation of the beam is carried out by depositing the beam on a sacrificial layer and surrounding it in a second sacrificial layer before the encapsulating polysilicon shell is formed. The sacrificial layers are etched out with liquid etchant which passes through channels in the periphery of the shell. Following etching, the interior of the cavity surrounding the beam is maintained in a wash liquid so that the beam is not deflected toward any of the adjacent surfaces, and the wash liquid is removed by freezing and suThis invention was made with United States government support awarded by the National Science Foundation (NSF), Grant # EET-88-15285. The United States Government has certain rights in this invention.

Abstract translation: 力传感器由多晶硅束形成，多晶硅束的端部安装在硅衬底上，并被封装在多晶硅外壳内，该多晶硅外壳与衬底在共振梁周围形成空腔。 将空腔从大气中密封并抽真空以最大化谐振梁的Q。 光束是通过沉积多晶硅制成的，其结合随后的退火步骤，光束处于零或低拉伸应变。 可以以各种方式实现光束的共振激励，包括电容激发，并且可以使用压阻式的注入电阻器来检测光束的振动运动。 通过在形成封装多晶硅壳之前将光束沉积在牺牲层上并将其围绕在第二牺牲层中来进行光束的形成。 牺牲层用液体蚀刻剂蚀刻出来，其通过壳体周边的通道。 在蚀刻之后，围绕光束的空腔的内部保持在洗涤液体中，使得光束不会朝向任何相邻的表面偏转，并且通过冷冻和升华除去洗涤液体。 空腔的内表面和梁的外表面被钝化，并且通向空腔的通道可以在氧化气氛中通过氧化而被密封，这也导致空腔内的氧气的消耗。