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    Image Inspection Apparatus, Image Inspection Method, Image Inspection Program, Computer-Readable Recording Medium And Recording Device
    83.
    发明申请
    Image Inspection Apparatus, Image Inspection Method, Image Inspection Program, Computer-Readable Recording Medium And Recording Device 有权
    图像检查装置，图像检查方法，图像检查程序，计算机可读记录介质和记录装置

    公开(公告)号：US20150355102A1

    公开(公告)日：2015-12-10

    申请号：US14716902

    申请日：2015-05-20

    Applicant: Keyence Corporation

    Inventor： Manabu Kido

    IPC: G01N21/88 ,  G06T7/00 ,  G01S3/786 ,  H04N13/02

    CPC classification number: G01N21/8806 ,  G01N21/8803 ,  G01N21/8851 ,  G01N2201/06 ,  G01S3/7864 ,  G06T7/0004 ,  G06T7/586 ,  G06T2207/10152 ,  G06T2207/30164

    Abstract: An inspection apparatus includes: an imaging section for capturing a first reference image by simultaneously turning on three or more illumination sections, and a second reference image at imaging timing temporally after the first reference image; a tracking target image designating section for designating a tracking target image in the first reference image and is used for tracking a position of the workpiece; a corresponding position estimating section for searching a position of the tracking target image designated by the tracking target image designating section from the second reference image, and specifying a position including the tracking target image in the second reference image, to estimate a corresponding relation of pixels that correspond among each of the partial illumination images; and an inspection image generating section for generating an inspection image for photometric stereo based on the corresponding relation of each of the pixels of the partial illumination images.

    Abstract translation: 检查装置包括：成像部，用于通过在第一参考图像之后的时间上同时打开三个或更多个照明部分和成像定时的第二参考图像来捕获第一参考图像; 跟踪目标图像指定部分，用于指定第一参考图像中的跟踪目标图像，并用于跟踪工件的位置; 对应位置估计部分，用于从第二参考图像中搜索由跟踪目标图像指定部分指定的跟踪目标图像的位置，并且在第二参考图像中指定包括跟踪目标图像的位置，以估计像素的对应关系 在每个部分照明图像中对应; 以及检查图像生成部，其基于所述部分照明图像的每个像素的对应关系来生成用于测光立体的检查图像。

    DEFECT INSPECTION METHOD AND DEVICE FOR SAME
    84.
    发明申请
    DEFECT INSPECTION METHOD AND DEVICE FOR SAME 有权
    缺陷检查方法及其设备

    公开(公告)号：US20140253912A1

    公开(公告)日：2014-09-11

    申请号：US14359221

    申请日：2012-10-22

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Toshifumi Honda ,  Yuta Urano ,  Hisashi Hatano

    IPC: G01N21/88 ,  G01N21/95

    CPC classification number: G01N21/9501 ,  G01N21/8851 ,  G01N21/956 ,  G01N2201/06

    Abstract: In defect scanning carried out in a process of manufacturing a semiconductor or the like, a light detection optical system comprising a plurality of photosensors is used for detecting scattered light reflected from a sample. The photosensors used for detecting the quantity of weak background scattered light include a photon counting type photosensor having few pixels whereas the photosensors used for detecting the quantity of strong background scattered light include a photon counting type photosensor having many pixels or an analog photosensor. In addition, nonlinearity caused by the use of the photon counting type photosensor as nonlinearity of detection strength of defect scattered light is corrected in order to correct a detection signal of the defect scattered light.

    Abstract translation: 在制造半导体等的过程中进行的缺陷扫描中，使用包含多个光电传感器的光检测光学系统来检测从样品反射的散射光。 用于检测弱背景散射光量的光传感器包括具有少量像素的光子计数型光电传感器，而用于检测强背景散射光量的光电传感器包括具有许多像素的光子计数型光电传感器或模拟光电传感器。 此外，为了校正缺陷散射光的检测信号，对使用光子计数型光电传感器作为非线性的缺陷散射光的检测强度引起的非线性进行了修正。

    SENSOR FOR IMAGING INSIDE EQUIPMENT
    85.
    发明申请
    SENSOR FOR IMAGING INSIDE EQUIPMENT 审中-公开
    传感器用于成像在设备内部

    公开(公告)号：US20140218500A1

    公开(公告)日：2014-08-07

    申请号：US14173113

    申请日：2014-02-05

    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

    Inventor： Chandrasekhar Narayanaswami ,  Mandayam Thondanur Raghunath ,  RAMON CACERES ,  STEFAN BERGER

    IPC: G01N21/88 ,  H04N7/18

    CPC classification number: G01N21/8803 ,  G01N21/954 ,  G01N2021/0118 ,  G01N2021/889 ,  G01N2201/06 ,  G01N2201/08 ,  G02B23/2484 ,  G06Q10/20 ,  G07C3/00 ,  H04N7/18

    Abstract: A system for monitoring performance of a machine for detection of visible signs of failure, includes: a machine enclosure housing machine parts; at least one canal through the machine enclosure acting as a visual conduit for providing a view into the interior of the machine; a guide rail within the canal for moving a camera into the interior; an interface to the machine configured to receive images from the visual conduit; and a repair network for linking the interface to a monitoring center that provides for the repair of problems with the machine.

    Abstract translation: 用于监测机器性能的系统，用于检测可见的故障迹象，包括：机器外壳，容纳机器部件; 通过机器外壳的至少一个管道用作视觉导管，用于提供机器内部的视野; 运河内的导轨将相机移入内部; 该机器的接口被配置为从视觉导管接收图像; 以及用于将接口链接到监视中心的维修网络，其提供对机器的问题的修复。

    Detector for clogged filters
    86.
    发明授权
    Detector for clogged filters 有权
    检测器堵塞过滤器

    公开(公告)号：US08744780B2

    公开(公告)日：2014-06-03

    申请号：US13457952

    申请日：2012-04-27

    Applicant: David J. Wilson, Jr. ,  Douglas Morris

    Inventor： David J. Wilson, Jr. ,  Douglas Morris

    IPC: G01N21/35 ,  G01N21/88

    CPC classification number: B01D46/0086 ,  G01N21/59 ,  G01N2201/06

    Abstract: A clogged filter detector has a transmitter and a sensor which are held in place by a transmitter bracket and a sensor bracket, respectively. The transmitter emits a beam of electromagnetic radiation, and the sensor is positioned in the path of this beam at a point such that the beam travels through a filter between the transmitter and the sensor. The transmitter and sensor are misaligned with the air flow at the point where the beam contacts the filter. The transmitter alternates between a transmitting mode and a dormant mode, and the transmitter emits a plurality of electromagnetic pulses during each transmitting mode.

    Abstract translation: 堵塞的过滤器检测器具有分别由变送器支架和传感器支架保持在适当位置的变送器和传感器。 发射器发射电磁辐射束，并且传感器定位在该光束的路径中，使得光束传播通过发射器和传感器之间的滤光器。 变送器和传感器与光束接触过滤器的点处的气流不对齐。 发射机在发射模式和休眠模式之间交替，并且发射机在每个发射模式期间发射多个电磁脉冲。

    Optical sample detection system and sample analysis device
    87.
    发明授权
    Optical sample detection system and sample analysis device 有权
    光学样本检测系统和样品分析装置

    公开(公告)号：US08705030B2

    公开(公告)日：2014-04-22

    申请号：US13085343

    申请日：2011-04-12

    Applicant: Yang Zhou ,  Zefei Jiang ,  Jinhong Qiu

    Inventor： Yang Zhou ,  Zefei Jiang ,  Jinhong Qiu

    IPC: G01J3/28

    CPC classification number: G01N21/01 ,  G01N21/31 ,  G01N2201/06 ,  G01N2201/0642

    Abstract: An optical sample detection system is provided, including a light source; a convergence projection component for converging light rays emitted by the light source; a sample accommodation component for accommodating a detected sample; a light beam collection component for receiving light rays carrying sample characteristic information and transmitted from the sample accommodation component; a light splitting component for splitting polychromatic lights collected by the light beam collection component into independent spectrums or spectral bands; and a photoelectric detection component for receiving optical signals of different wavelengths separated through the light splitting component.

    Abstract translation: 提供了一种光学样本检测系统，包括光源; 用于会聚由光源发射的光线的会聚投影部件; 用于容纳检测到的样本的样本容纳部件; 光束采集部件，用于接收携带样品特征信息并从样品容纳部件传输的光线; 用于将由光束收集部件收集的多色光分解成独立光谱或光谱带的光分离部件; 以及用于接收通过分光部件分离的不同波长的光信号的光电检测部件。

    Systems for and methods of illumination at a high optical solid angle
    89.
    发明申请
    Systems for and methods of illumination at a high optical solid angle 审中-公开
    高光学立体角的照明系统和照明方法

    公开(公告)号：US20110280038A1

    公开(公告)日：2011-11-17

    申请号：US13068179

    申请日：2011-05-04

    Applicant: Hwan J. Jeong

    Inventor： Hwan J. Jeong

    IPC: F21V33/00

    CPC classification number: G01N21/6458 ,  G01N21/65 ,  G01N2201/06 ,  G01N2201/0826

    Abstract: Illumination systems and methods that utilize the higher or outer portions of the optical solid-angle space to increase the illumination intensity are disclosed. The illumination systems and methods include introducing illumination light through at least one side surface of a transparent slide that operably supports a sample on its top surface. The light fills at least a portion of the optical solid-angle space between 1 and n, and extends out to n. Light from the filled portion of the optical solid-angle space illuminates the sample through the top surface of the transparent slide. The disclosed illumination systems and methods are suitable for use in applications, such as dark-field imaging, fluorescence imaging, Raman spectroscopy, DNA analysis and like applications requiring high-intensity illumination.

    Abstract translation: 公开了利用光学立体角空间的较高或外部增加照明强度的照明系统和方法。 照明系统和方法包括通过在其顶表面上可操作地支撑样品的透明滑块的至少一个侧表面引入照明光。 光填充1和n之间的光学立体角空间的至少一部分，并延伸到n。 来自光学立体角空间的填充部分的光通过透明滑块的顶表面照射样品。 所公开的照明系统和方法适用于诸如暗场成像，荧光成像，拉曼光谱，DNA分析等需要高强度照明的应用。

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