公开(公告)号：US09976991B2

公开(公告)日：2018-05-22

申请号：US14844773

申请日：2015-09-03

Applicant: Kalaga Venu Madhav ,  Swapnil Sushilendra Deshpande ,  Abhijeet Vikram Kshirsagar ,  Chinmaya Rajiv Dandekar ,  Yogesh Shinde ,  Sarin Kumar Anakkat Koyilothu

Inventor： Kalaga Venu Madhav ,  Swapnil Sushilendra Deshpande ,  Abhijeet Vikram Kshirsagar ,  Chinmaya Rajiv Dandekar ,  Yogesh Shinde ,  Sarin Kumar Anakkat Koyilothu

IPC: G01N29/24 ,  G01N21/17 ,  G01N29/22 ,  G01N29/02 ,  G01N29/036

CPC classification number: G01N29/2425 ,  G01N21/1702 ,  G01N29/022 ,  G01N29/036 ,  G01N29/222 ,  G01N2021/1704 ,  G01N2201/0637 ,  G01N2291/021 ,  G01N2291/0427

Abstract: A sensor head is described herein. The sensor head can include a first piece, where the first piece can include a body having an outer surface and an inner surface. The first piece can also include a light source cavity disposed in the body at the inner surface. The first piece can further include an optical device cavity disposed in the body at the inner surface. The first piece can also include an ellipsoidal cavity disposed in the body at the inner surface, where the ellipsoidal cavity is disposed adjacent to the optical device cavity. The first piece can further include a receiving device cavity disposed in the body adjacent to the inner surface that forms the ellipsoidal cavity. The first piece can also include at least one channel disposed in the body.

公开(公告)号：US20170023487A1

公开(公告)日：2017-01-26

申请号：US15003062

申请日：2016-01-21

Applicant: Lockheed Martin Corporation

Inventor： Brian P. Boesch

IPC: G01N21/87 ,  G01N21/55

CPC classification number: G01N21/87 ,  G01N21/55 ,  G01N2021/6469 ,  G01N2201/06113 ,  G01N2201/0637 ,  G01N2201/068 ,  G01R33/032 ,  G01R33/1284 ,  G01R33/26 ,  G01R33/60

Abstract: Methods and configurations are disclosed for an efficient collection of fluorescence emitted by the nitrogen vacancies of a diamond of a DNV sensor. Some implementations may include a diamond having a nitrogen vacancy and a reflector positioned about the diamond to reflect a portion of light emitted from the diamond. In some implementations the reflector may be parabolic or ellipsoidal. In some implementations, DNV sensor may have a reflector and a concentrator. Other implementations may include a diamond with a nitrogen vacancy and a reflector positioned about the diamond to reflect a portion of light emitted from the diamond using a dielectric mirror film applied to the reflector. Still other implementations may have a diamond with a nitrogen vacancy and a dielectric mirror film coated on the diamond.

Abstract translation: 公开了用于有效收集由DNV传感器的金刚石的氮空位发射的荧光的方法和构造。 一些实施方案可以包括具有氮空位的金刚石和围绕金刚石定位的反射器以反射从金刚石发射的光的一部分。 在一些实施方案中，反射器可以是抛物线形或椭球形的。 在一些实施方式中，DNV传感器可以具有反射器和集中器。 其他实施方案可以包括具有氮空位的金刚石和围绕金刚石定位的反射器，以使用施加到反射器的电介质镜膜反射从金刚石发射的一部分光。 还有其它实施方案可以具有氮空位的金刚石和涂覆在金刚石上的电介质镜膜。

公开(公告)号：US20160266039A1

公开(公告)日：2016-09-15

申请号：US15042354

申请日：2016-02-12

Applicant: Yokogawa Electric Corporation

Inventor： Yasuyuki SUZUKI ,  Yukihiro NAKAMURA ,  Tetsushi NAMATAME

IPC: G01N21/59 ,  G02B17/00 ,  G01N21/01

CPC classification number: G01N21/59 ,  G01N21/8507 ,  G01N2021/0307 ,  G01N2201/0637 ,  G01N2201/08 ,  G01N2201/086 ,  G02B17/006

Abstract: An optical element includes a main body formed of a light transmissive material and including an arc-shaped optical path, and a gap formed on the arc-shaped optical path in the main body. The gap may have a notch shape. The main body may have a semicircular plate shape. The main body may have a hemispherical shape.

Abstract translation: 光学元件包括由透光材料形成并包括弧形光路的主体以及形成在主体中的弧形光路上的间隙。 间隙可以具有凹口形状。 主体可以具有半圆形板形状。 主体可以具有半球形。

公开(公告)号：US08982345B2

公开(公告)日：2015-03-17

申请号：US14003201

申请日：2012-03-08

Applicant: Etsuo Kawate ,  Miroslav Hain

Inventor： Etsuo Kawate ,  Miroslav Hain

IPC: G01N21/49 ,  G01N21/47 ,  G01N21/59 ,  G02B19/00

CPC classification number: G01N21/4738 ,  G01N21/474 ,  G01N21/59 ,  G01N2021/4714 ,  G01N2201/0637 ,  G02B19/0023 ,  G02B19/0085

Abstract: In an apparatus for measuring an optical characteristic of a sample, one object of the present invention is to provide an apparatus capable of measuring hemispherical total reflectance, hemispherical total transmittance, and light distribution, and to achieve a reduction in measurement time and an improvement in precision of the quantitative analysis of hemispherical total reflectance (transmittance). In a double ellipsoidal optical system which is an optical system in which one focal points of two ellipsoidal mirrors are positioned as a common focal point, and three focal points are aligned in a straight line, the double ellipsoidal optical system is composed of a partial ellipsoidal mirror 2, such as a quarter ellipsoidal mirror, and a belt-shape ellipsoidal mirror 1. By disposing, on a position of a focal point of the partial ellipsoidal mirror, a hemispherical detection optical system having a hemispherical lens or a rotational parabolic mirror, light scattered by an object, reflected by the partial ellipsoidal mirror, and focused on the point is photographed by for example a CCD camera 6 via a hemispherical lens and a taper fiber 5 so as to measure an optical characteristic of the object.

Abstract translation: 在用于测量样品的光学特性的装置中，本发明的一个目的是提供一种能够测量半球形全反射率，半球形全透射率和光分布的装置，并且实现测量时间的减少和改进 精确定量分析了半球全反射率（透射率）。 在双椭圆光学系统中，两个椭圆面镜的一个焦点被定位为公共焦点并且三个焦点以直线对准的光学系统，双椭圆体光学系统由部分椭圆体 镜子2，例如四分之一椭圆镜和带状椭圆面镜1.通过在半椭球镜的焦点的位置上设置半球形检测光学系统，该半球形检测光学系统具有半球形透镜或旋转抛物面镜， 通过半球形透镜和锥形光纤5，通过例如CCD照相机6拍摄被物体散射的物体，被部分椭球镜反射并聚焦在该点上的光，以测量物体的光学特性。

公开(公告)号：US20150022805A1

公开(公告)日：2015-01-22

申请号：US14507758

申请日：2014-10-06

Applicant: KLA-Tencor Corporation

Inventor： Vladimir Dribinski ,  Yung-Ho Alex Chuang ,  J. Joseph Armstrong ,  John Fielden

IPC: G01N21/88 ,  G01N21/94

CPC classification number: H01S5/0092 ,  C03B33/02 ,  C30B1/02 ,  C30B29/10 ,  C30B29/14 ,  C30B29/22 ,  C30B29/30 ,  C30B33/02 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/0637 ,  G01N2201/068 ,  G02F1/353 ,  G02F1/3551 ,  G02F1/3553 ,  G02F1/37 ,  G02F2001/3505 ,  G02F2001/3507 ,  G02F2001/354 ,  G02F2202/20 ,  H01S3/0092 ,  H01S3/10 ,  H01S3/10038 ,  H01S3/10046 ,  H01S3/11

Abstract: An optical system for detecting contaminants and defects on a test surface includes an improved laser system for generating a laser beam and optics directing the laser beam along a path onto the test surface, and producing an illuminated spot thereon. A detector and ellipsoidal mirrored surface are also provided with an axis of symmetry about a line perpendicular to the test surface. In one embodiment, an optical system for detecting anomalies of a sample includes the improved laser system for generating first and second beams, first optics for directing the first beam of radiation onto a first spot on the sample, second optics for directing the second beam onto a second spot on the sample, with the first and second paths at different angles of incidence to the sample surface. In another embodiment, a surface inspection apparatus includes an illumination system configured to focus beams at non-normal incidence angles.

Abstract translation: 用于检测测试表面上的污染物和缺陷的光学系统包括用于产生激光束的改进的激光系统和将激光束沿着路径引导到测试表面上并在其上产生照明点的光学系统。 检测器和椭圆形镜面也具有围绕垂直于测试表面的线的对称轴。 在一个实施例中，用于检测样本异常的光学系统包括用于产生第一和第二光束的改进的激光系统，用于将第一辐射束引导到样品上的第一光点上的第一光学器件，用于将第二光束引导到 样品上的第二个点，第一和第二个路径与样品表面的入射角不同。 在另一个实施例中，表面检查装置包括被配置为以非正常入射角聚焦光束的照明系统。

公开(公告)号：US20140328579A1

公开(公告)日：2014-11-06

申请号：US13888007

申请日：2013-05-06

Applicant: Phoseon Technology, Inc.

Inventor： Doug Childers

IPC: G02B1/12 ,  H05B3/00 ,  G01J1/42

CPC classification number: G01J1/429 ,  B05D3/067 ,  B05D2256/00 ,  C03C25/12 ,  G01N21/274 ,  G01N21/8806 ,  G01N21/952 ,  G01N2021/8416 ,  G01N2201/062 ,  G01N2201/0637

Abstract: A system and method for monitoring and operating one or more light emitting devices is disclosed. In one example, light intensity within a dual elliptical reflecting chamber is sensed and operation of a fiber curing system is adjusted in response to an amount of sensed light energy.

Abstract translation: 公开了一种用于监测和操作一个或多个发光器件的系统和方法。 在一个示例中，感测双椭圆形反射室内的光强度并且响应于感测到的光能的量来调节光纤固化系统的操作。

公开(公告)号：US20130021602A1

公开(公告)日：2013-01-24

申请号：US13412564

申请日：2012-03-05

Applicant: Vladimir Dribinski ,  Yung-Ho Alex Chuang ,  J. Joseph Armstrong ,  John Fielden

Inventor： Vladimir Dribinski ,  Yung-Ho Alex Chuang ,  J. Joseph Armstrong ,  John Fielden

IPC: G01N21/94 ,  C03B25/00 ,  G01N21/88 ,  H01S3/098 ,  G02F1/35

CPC classification number: H01S5/0092 ,  C03B33/02 ,  C30B1/02 ,  C30B29/10 ,  C30B29/14 ,  C30B29/22 ,  C30B29/30 ,  C30B33/02 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2201/06113 ,  G01N2201/0637 ,  G01N2201/068 ,  G02F1/353 ,  G02F1/3551 ,  G02F1/3553 ,  G02F1/37 ,  G02F2001/3505 ,  G02F2001/3507 ,  G02F2001/354 ,  G02F2202/20 ,  H01S3/0092 ,  H01S3/10 ,  H01S3/10038 ,  H01S3/10046 ,  H01S3/11

Abstract: A mode-locked laser system operable at low temperature can include an annealed, frequency-conversion crystal and a housing to maintain an annealed condition of the crystal during standard operation at the low temperature. In one embodiment, the crystal can have an increased length. First beam shaping optics can be configured to focus a beam from a light source to an elliptical cross section at a beam waist located in or proximate to the crystal. A harmonic separation block can divide an output from the crystal into beams of different frequencies separated in space. In one embodiment, the mode-locked laser system can further include second beam shaping optics configured to convert an elliptical cross section of the desired frequency beam into a beam with a desired aspect ratio, such as a circular cross section.

Abstract translation: 可在低温下操作的模式锁定激光系统可以包括退火的频率转换晶体和壳体，以在低温下的标准操作期间保持晶体的退火状态。 在一个实施例中，晶体可以具有增加的长度。 第一光束整形光学元件可以被配置成将来自光源的光束聚焦到位于或接近晶体的光束腰部处的椭圆形横截面。 谐波分离块可以将来自晶体的输出分成在空间中分离的不同频率的波束。 在一个实施例中，锁模激光系统还可以包括第二光束整形光学器件，其被配置为将期望的频率波束的椭圆形横截面转换成具有期望的纵横比的光束，例如圆形横截面。

公开(公告)号：US07777887B2

公开(公告)日：2010-08-17

申请号：US12101557

申请日：2008-04-11

Applicant: Martin U. Pralle ,  Irina Puscasu ,  Peter Flowers

Inventor： Martin U. Pralle ,  Irina Puscasu ,  Peter Flowers

IPC: G01N21/00

CPC classification number: G01N21/0303 ,  G01N21/031 ,  G01N21/05 ,  G01N2021/0378 ,  G01N2201/0637

Abstract: An absorption spectroscopy apparatus including an elliptical mirror centered on the midpoint between a source/detector and a mirror. The cavity between the elliptical mirror and the source/bolometer and mirror defines an interior volume of a sample cell. Electromagnetic radiation from the source/detector travels along a multi-segment path starting from the source/bolometer toward the elliptical mirror, reflecting off of the elliptical mirror and traveling toward the mirror, reflecting off of the mirror and traveling back toward the elliptical mirror and finally reflecting off the elliptical mirror for a second time and returning toward the source/bolometer. The multiple reflections combined with the focusing effects of the elliptical mirrored surface result in an efficient sampling device. Among other aspects and advantages, the apparatus of the present disclosure is able to use incoherent, non-collimated light sources while maintaining high optical throughput efficiencies.

Abstract translation: 一种吸收光谱仪，包括以源/检测器和反射镜之间的中点为中心的椭圆镜。 椭圆镜和源/测辐射热计和反射镜之间的空腔限定了样品池的内部体积。 来自/检测器的电磁辐射沿着从光源/测辐射热计朝着椭圆镜开始的多段路径行进，从椭圆镜反射离开并朝向反射镜行进，反射离开反射镜并朝向椭圆镜返回， 终于从椭圆镜反射了第二次，并返回到源头/测辐射热计。 多重反射与椭圆形镜面的聚焦效应相结合形成了一种高效的采样装置。 除了其它方面和优点之外，本公开的装置能够使用非相干的非准直光源，同时保持高的光通量效率。

公开(公告)号：US20100118308A1

公开(公告)日：2010-05-13

申请号：US12436113

申请日：2009-05-05

Applicant: Tongxin Lu ,  Xiaohan Wang

Inventor： Tongxin Lu ,  Xiaohan Wang

IPC: G01N21/55

CPC classification number: G01B11/0625 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0216 ,  G01N21/9501 ,  G01N2021/8427 ,  G01N2201/0637

Abstract: The present invention is an optical system, comprising: a light source for providing light rays; a combined two or more parabolic reflectors or elliptical reflectors having inner reflecting surfaces, wherein the reflectors sharing a common focal point, and a device-under-test is disposed thereabout the focal point; wherein the collimated light rays coming into the parabolic reflector parallel to the axis of symmetry of each parabolic reflector would be directed to the focal point on the surface of the device-under-test. The reflected light rays from the device-under-test are directed by the other parabolic reflectors along the axes of symmetry of each parabolic reflector and generate information indicative of the device-under-test; wherein the reflected light rays exit the reflector; and a detector for receiving the exited light rays.

Abstract translation: 本发明是一种光学系统，包括：用于提供光线的光源; 具有内部反射表面的组合的两个或更多个抛物线反射器或椭圆形反射器，其中共享公共焦点的反射器和被测设备被布置在焦点附近; 其中进入抛物面反射器的平行于每个抛物面反射器的对称轴的准直光线将被引导到被测器件的表面上的焦点。 来自被测器件的反射光线被其他抛物面反射器沿着每个抛物面反射器的对称轴引导，并产生指示被测器件的信息; 其中所述反射光线离开所述反射器; 以及用于接收退出的光线的检测器。

公开(公告)号：US07643226B2

公开(公告)日：2010-01-05

申请号：US11542634

申请日：2006-10-02

Applicant: Dejan Vucinic ,  Thomas M. Bartol ,  Terrence J. Sejnowski

Inventor： Dejan Vucinic ,  Thomas M. Bartol ,  Terrence J. Sejnowski

IPC: G02B17/00

CPC classification number: G01N21/6458 ,  G01N2021/6478 ,  G01N2201/0637 ,  G02B21/04

Abstract: Objectives and other optical assemblies include a reflective surface that is truncated at or near a focus based on a curvature of the reflective surface. A specimen is situated at or near the focus of the reflective surface, so that the reflective surface captures and collimates optical radiation emitted from the specimen. The reflective surface can be defined on an optical substrate along with a lens surface, so that an illumination flux is focused on the specimen by the lens surface, and a secondary light flux produced in response to the illumination flux is captured and collimated by the reflective surface.

Abstract translation: 目标和其它光学组件包括基于反射表面的曲率在焦点处或焦点附近被截短的反射表面。 样本位于或靠近反射表面的焦点，使得反射表面捕获并准直从样本发射的光辐射。 反射表面可以与透镜表面一起限定在光学基底上，使得照射光束通过透镜表面聚焦在样本上，并且响应于照射光束产生的次级光束被反射 表面。