公开(公告)号：US20040141177A1

公开(公告)日：2004-07-22

申请号：US10748975

申请日：2003-12-29

Inventor： Guoheng Zhao ,  Kenneth P. Gross ,  Rodney Smedt ,  Mehrdad Nikoonahad

IPC: G01J004/00

CPC classification number: G01N21/21 ,  G01B11/00 ,  G01N21/4788 ,  G01N21/956

Abstract: A periodic structure is illuminated by polychromatic electromagnetic radiation. Radiation from the structure is collected and divided into two rays having different polarization states. The two rays are detected from which one or more parameters of the periodic structure may be derived. In another embodiment, when the periodic structure is illuminated by a poly chromatic electromagnetic radiation, the collected radiation from the structure is passed through a polarization element having a polarization plane. The element and the polychromatic beam are controlled so that the polarization plane of the element are at two or more different orientations with respect to the plane of incidence of the polychromatic beam. Radiation that has passed through the element is detected when the plane of polarization is at the two or more positions so that one or more parameters of the periodic structure may be derived from the detected signals. At least one of the orientations of the plane of polarization is substantially stationary when the detection takes place. To have as small a footprint as possible, one employs an optical device that includes a first element directing a polychromatic beam of electromagnetic radiation to the structure and a second optical element collecting radiation from the structure where the two elements form an integral unit or are attached together to form an integrated unit. To reduce the footprint, the measurement instrument and the wafer are both moved. In one embodiment, both the apparatus and the wafer undergo translational motion transverse to each other. In a different arrangement, one of the two motions is translational and the other is rotational. Any one of the above-described embodiments may be included in an integrated processing and detection apparatus which also includes a processing system processing the sample, where the processing system is responsive to the output of any one of the above embodiments for adjusting a processing parameter.

公开(公告)号：US20040090626A1

公开(公告)日：2004-05-13

申请号：US10276353

申请日：2003-06-10

Inventor： Uwe Wielsch ,  Michael Arena ,  Uwe Richter ,  Georg Dittmar ,  Albrecht Kruger ,  Helmut Witek

IPC: G01J004/00

CPC classification number: G01N21/211

Abstract: This invention concerns an ellipsometer for the examination of a sample (50) whereby the ellipsometer has a broadband light source (1) on the emitter side (A) and a detector (8) on the receiver side (B) for a receiver light beam reflected (3B) from the sample (50). A refractive optic for the generation of a measuring spot on the sample and a first aperture (2) arranged on the emitter side (A) for the definition of a measuring spot on the sample. nullsicnull Using the spectroscopic ellipsometer makes it possible to easily produce a precisely defined measuring spot on the sample (50).

Abstract translation: 本发明涉及用于检查样品（50）的椭偏仪，其中椭偏仪在发射器侧（A）上具有宽带光源（1）和用于接收器光束的接收器侧（B）上的检测器（8） 从样品（50）反射（3B）。 用于在样品上产生测量点的折射光学元件和布置在发射器侧（A）上的第一孔（2），用于定义样品上的测量点。 [sic]使用分光椭偏仪可以容易地在样品（50）上产生精确定义的测量点。

公开(公告)号：US20040066513A1

公开(公告)日：2004-04-08

申请号：US10678194

申请日：2003-10-02

Inventor： Satoshi Okumura ,  Toyohiro Usui ,  Toshiaki Iwai

IPC: G01J004/00

CPC classification number: G01N21/21 ,  G01N15/0211 ,  G01N2015/0046

Abstract: A pollen sensor and method for detecting pollen which discriminates pollen particles floating in air from other particles on a real time basis. The pollen sensor includes an illumination position for generating a light beam, a first receiver for measuring the intensity (I) or (Ip) of a light beam scattered by floating particles in a detection zone, a second receiver for measuring the intensity (Is) of a polarized light beam in a direction perpendicular to light illuminated by the light beam and means for measuring the degree of polarization of the particles for distinguishing pollen particles from other particles.

Abstract translation: 一种用于检测花粉的花粉传感器和方法，其实时地鉴别浮在空气中的花粉颗粒与其他颗粒。 花粉传感器包括用于产生光束的照明位置，用于测量由检测区域中的浮动粒子散射的光束的强度（I）或（Ip）的第一接收器，用于测量强度（Is）的第二接收器， 的偏振光束在垂直于由光束照射的光的方向上的偏振光束，以及用于测量用于区分花粉粒子与其他粒子的粒子的偏振度的装置。

公开(公告)号：US20040042009A1

公开(公告)日：2004-03-04

申请号：US10653306

申请日：2003-09-02

Inventor： David E. Aspnes ,  Jon Opsal

IPC: G01J004/00

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135null to 225null, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

Abstract translation: 用于使用宽波长范围分析样品的椭偏仪的椭偏仪和椭偏仪的方法包括用于产生具有用于与样品相互作用的光波长范围的多色光束的光源。 在光束与样品相互作用之前，偏振器使光束偏振。 旋转补偿器引起光束的偏振状态的相位延迟，其中选择波长范围和补偿器，使得至少引入第一相位延迟值，该值在大致135°至225°的有效延迟的主要范围内 °，并且引起超出初级范围的至少第二相位延迟值。 在光束与样品相互作用后，分析仪与光束相互作用。 检测器测量与分析仪相互作用后的光强度，作为补偿器角度和波长的函数，优选同时在所有波长处。 处理器确定当光束从由检测器测量的光强度撞击分析仪时的偏振状态。

公开(公告)号：US20040008349A1

公开(公告)日：2004-01-15

申请号：US10409411

申请日：2003-04-07

Applicant: KLA-Tencor Corporation

Inventor： Adam E. Norton

IPC: G01J004/00

CPC classification number: G02B17/0884 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/42 ,  G01N21/211 ,  G01N21/47 ,  G02B17/08 ,  G02B17/0852

Abstract: Achromatic optics may be employed in spectroscopic measurement systems. The achromatic optics comprises a spherical mirror receiving a beam of radiation in a direction away from its axis and a pair of lenses: a positive lens and a negative meniscus lens. The negative meniscus lens corrects for the spherical aberration caused by off-axis reflection from the spherical mirror. The positive lens compensates for the achromatic aberration introduced by the negative lens so that the optics, as a whole, is achromatic over visible and ultraviolet wavelengths. Preferably, the two lenses combined have zero power or close to zero power. By employing a spherical mirror, it is unnecessary to employ ellipsoidal or paraboloidal mirrors with artifacts of diamond turning which limit the size of the spot of the sample that can be measured in ellipsometry, reflectometry or scatterometry.

Abstract translation: 消色差光学器件可用于光谱测量系统。 消色差光学器件包括接收沿其轴线的方向的辐射束的球面镜和一对透镜：正透镜和负弯月形透镜。 负弯月透镜校正由球面镜的离轴反射引起的球面像差。 正透镜补偿由负透镜引入的消色差，使得光学元件作为整体在可见光和紫外波长上是消色差的。 优选地，组合的两个透镜具有零功率或接近零功率。 通过使用球面镜，不需要使用具有金刚石车削伪影的椭圆形或抛物面镜，这限制了可以椭偏仪，反射测量或散射测量法测量的样品点的尺寸。

公开(公告)号：US20040008348A1

公开(公告)日：2004-01-15

申请号：US10610986

申请日：2003-06-30

Inventor： Yasuhiro Kishikawa ,  Seiji Takeuchi

IPC: G01J004/00

CPC classification number: G03F7/70566 ,  G01J4/04 ,  G01N21/23 ,  G03F7/70591 ,  G03F7/70966

Abstract: A birefringence measurement apparatus for calculating information of polarization of light emitted from an object to be measured includes a light source, a first polarization element for extracting a beam in a specific polarization direction from light emitted from the light source, a sample stage that holds an object to be measured, at least one beam splitting unit that splits the light emitted from the object into two beams having the same polarization as that of the light emitted from the object, at least two second polarization elements for extracting beams in a specific polarization direction of the light split by the beam splitting unit, at least two light-quantity detectors for detecting light quantity of beams that have transmitted through the second polarization element, and an operation part for operating a light quantity received by the light-quantity detectors.

Abstract translation: 用于计算从待测物体发射的光的偏振信息的双折射测量装置包括光源，用于从光源发射的光中提取特定偏振方向的光束的第一偏振元件，保持 至少一个光束分离单元，其将从物体发射的光分解成具有与从物体发射的光的偏振相同的偏振光束的至少两个第二偏振元件，用于提取特定偏振方向的光束 通过分束单元分离的光，至少两个用于检测透射通过第二偏振元件的光束的光量的光量检测器和用于操作由光量检测器接收的光量的操作部分。

公开(公告)号：US20030234930A1

公开(公告)日：2003-12-25

申请号：US10177714

申请日：2002-06-21

Inventor： Hans Pallingen

IPC: G01J004/00

CPC classification number: G01N21/21

Abstract: A device for the photoelectric measurement of a measured object constructed especially as densitometer or color measurement device includes a light source (1, 2) for exposure of the measured object (6) to measurement light, a polarization filter (8) located between the light source (1, 2) and the measured object (6), a photoelectric sensor (4), a second polarization filter (9) located between the measured object (6) and the sensor (4), a measurement lens (3), which directs the measurement light originating from a measurement location from the measurement object (6) through the second polarization filter (9) onto the sensor (4), and a control electronic (5) cooperating with the sensor (4) for the processing of the electrical signals produced thereby. At least one of the two polarization filters (9) is electronically controllable, whereby its polarization plane can be rotated by the controlled electronic (5) by 90null relative to that the other of the two polarization filters. The polarization filter(s) is (are) thereby constructed according to liquid crystal technology and preferably consist of several layers in order to reliably suppress light portions which are not located in the polarization plane. The rotation of the polarization plane and thereby the activation or deactivation of the shine suppression can be easily and quickly achieved purely electronically due to the electronically controllable construction of the polarization filter and by the application of suitable electrical signals.

Abstract translation: 用于特别用作密度计或颜色测量装置的测量对象的光电测量装置包括用于将测量对象（6）暴露于测量光的光源（1,2），位于光之间的偏振滤光器（8） 源（1,2）和测量对象（6），位于测量对象（6）和传感器（4）之间的光电传感器（4），第二偏振滤光器（9），测量透镜（3） 其将来自测量位置的测量位置从测量对象（6）通过第二偏振滤光器（9）引导到传感器（4）上;以及控制电子（5），与传感器（4）配合用于处理 由此产生的电信号。 两个偏振滤光器（9）中的至少一个是电子可控的，由此其相对于两个偏振滤光器中的另一个可以将受控电子（5）的偏振面旋转90°。 因此，根据液晶技术构造偏振滤光器，优选由几层组成，以便可靠地抑制不位于偏振面内的光部分。 由于偏振滤光器的电子控制结构和适当的电信号的应用，偏振平面的旋转以及因此抑制光的激活或去激活可以容易且快速地以电子方式实现。

公开(公告)号：US20030231310A1

公开(公告)日：2003-12-18

申请号：US10174772

申请日：2002-06-18

Inventor： Rodney S. Tucker ,  Douglas Michael Baney

IPC: G01J004/00

CPC classification number: G01M11/33

Abstract: Method and apparatus for determining scattering parameters of a scattering matrix of an optical device. A method according to the present invention comprises applying an optical stimulus to a plurality of ports of the optical device, measuring optical fields emerging from the plurality of ports in amplitude and phase, and calculating the scattering parameters using the measured optical fields. The applying step includes applying the optical stimulus to the plurality of ports simultaneously. The method ensures a consistent phase reference for measurement of all of the scattering parameters so that all measurable characteristics of the device can be calculated directly from the scattering parameters.

Abstract translation: 用于确定光学装置的散射矩阵的散射参数的方法和装置。 根据本发明的方法包括对光学装置的多个端口应用光学激励，测量在幅度和相位上从多个端口出现的光场，并使用所测量的光场计算散射参数。 应用步骤包括同时将光学刺激应用于多个端口。 该方法确保了用于测量所有散射参数的一致的相位参考，从而可以直接从散射参数计算器件的所有可测量特性。

公开(公告)号：US20030227623A1

公开(公告)日：2003-12-11

申请号：US10388857

申请日：2003-03-14

Applicant: Regents of the University of Minnesota

Inventor： Qiwen Zhan ,  James R. Leger

IPC: G01J004/00

CPC classification number: G01N21/211 ,  G01J4/00

Abstract: A solid immersion tunneling ellipsometer and methods relating thereto may include a solid immersion apparatus (e.g., a prism or an objective lens in combination with a solid immersion lens) that facilitates optical tunneling and provide information that can be used in the determination of one or more characteristics (e.g., thickness, index of refraction, etc.) of samples (e.g., thin films, ultrathin films, etc.).

Abstract translation: 固体浸入式隧道椭偏仪及其相关方法可以包括便于光学隧穿的固体浸没装置（例如，棱镜或物镜与固体浸没透镜组合），并提供可用于确定一个或多个 样品的特性（例如，厚度，折射率等）（例如，薄膜，超薄膜等）。

公开(公告)号：US20030184749A1

公开(公告)日：2003-10-02

申请号：US10391912

申请日：2003-03-19

Inventor： Shuichi Yabu

IPC: G01J004/00

CPC classification number: G03F7/70966 ,  G01J4/00

Abstract: A birefringence measurement apparatus includes a measurement part for measuring a birefringence azimuth and a birefringence amount of an object to first and second light having different wavelengths from each other, and a determination part for calculating at least one of a birefringence azimuth and a birefringence amount to third light different in wavelength from the first and second light based on the birefringence azimuth and birefringence amount of the object to the first and second light.

Abstract translation: 双折射测量装置包括用于测量彼此具有不同波长的第一和第二光的物体的双折射方位角和双折射量的测量部分，以及用于计算双折射方位角和双折射量中的至少一个的判定部分， 基于物体的双折射方位和双折射量与第一和第二光不同的第一光和第二光的第三光。