公开(公告)号：WO2006094927A3

公开(公告)日：2007-05-03

申请号：PCT/EP2006060397

申请日：2006-03-02

Applicant: INFICON GMBH ,  WETZIG DANIEL ,  GERDAU LUDOLF

Inventor： WETZIG DANIEL ,  GERDAU LUDOLF

IPC: H01J41/06

CPC classification number: G01L21/34 ,  H01J41/06

Abstract: A cold cathode pressure sensor (10) comprises a gas-tight housing (12), a test gas inlet (18), an anode (14) and a cathode (16, 17) arranged in the housing (12), and a radiation source (20) directed towards the cathode (16, 17) in order to ignite a cold cathode discharge. The housing (12) is at least in part made of glass. The radiation source (20) is arranged outside the housing (12) and irradiates the cathode (16, 17) through the glass which makes up the housing. The wavelength of the radiation from the radiation source (20) ranges substantially from more than 350 nm to less than 1400 nm.

Abstract translation: 本发明涉及一种冷阴极压力传感器（10）与气密壳体（12），具有一个标定气体入口（18），阳极（14）和在壳体（12）的阴极（16,17）和一个 涉及用于点亮冷阴极放电的阴极（16,17）的辐射源（20）。 所述壳体（12）至少部分地由玻璃形成。 所述辐射源（20）布置在所述壳体（12）的外侧，并通过在阴极（16,17）的外壳玻璃辐射。 所述辐射源（20）发射辐射基本上波长大于350nm且小于1400纳米更长。

公开(公告)号：WO1997005645A1

公开(公告)日：1997-02-13

申请号：PCT/EP1996003185

申请日：1996-07-19

Applicant: LEYBOLD VAKUUM GMBH ,  GERDAU, Ludolf

Inventor： LEYBOLD VAKUUM GMBH

IPC: H01J41/06

CPC classification number: H01J41/06 ,  G01L21/34

Abstract: The invention concerns a vacuum-technology device (1) with a housing (3) and, inside the housing, electrodes between which a gas discharge is maintained while the device is operating, the device also having at least one magnet (4) whose field extends the path of the ionizing electrons. In order to simplify the design of a device of this kind, the invention proposes that the magnet (4) is located inside the housing (3) and forms one of the electrodes.

Abstract translation: 本发明涉及在真空技术装置，包括一个外壳（3）的可插入（1），具有位于壳体电极的装置的操作期间，气体放电被保持在它们之间内，以及与所述至少一个磁体（4），其磁场具有 离子化电子的路径的作用延伸; 为了简化这种类型的装置的结构，提出的是，壳体（3）内的磁铁（4）位于与形成所述电极中的一个。

公开(公告)号：EP3803934B1

公开(公告)日：2024-03-27

申请号：EP19730606.1

申请日：2019-05-21

Inventor： BRUCKER, Gerardo, A. ,  SWINNEY, Timothy, C. ,  PERCY, Clinton, L.

IPC: H01J41/06 ,  G01M3/20 ,  G01L21/34

公开(公告)号：EP4031846A1

公开(公告)日：2022-07-27

申请号：EP19774085.5

申请日：2019-09-20

Applicant: Inficon AG

Inventor： KAISER, Stefan ,  ANDREAUS, Bernhard

IPC: G01L21/34 ,  H01J41/06 ,  H01J27/14

公开(公告)号：EP2232224A4

公开(公告)日：2015-07-01

申请号：EP08868368

申请日：2008-12-17

Applicant: MKS INSTR INC

Inventor： BRUCKER GERARDO A

IPC: G01L21/34 ,  G01N27/64 ,  H01J41/06

CPC classification number: G01L21/34 ,  G01N27/64 ,  H01J41/06

公开(公告)号：EP0622621B1

公开(公告)日：1998-07-15

申请号：EP94301848.1

申请日：1994-03-15

Applicant: THE FREDERICKS COMPANY

Inventor： Drubetsky, Emil ,  Taylor, Donald R., Jr.

IPC: G01L21/34 ,  H01J41/06

CPC classification number: H01J41/06 ,  G01L21/34

公开(公告)号：EP0622621A2

公开(公告)日：1994-11-02

申请号：EP94301848.1

申请日：1994-03-15

Applicant: THE FREDERICKS COMPANY

Inventor： Drubetsky, Emil ,  Taylor, Donald R., Jr.

IPC: G01L21/34 ,  H01J41/06

CPC classification number: H01J41/06 ,  G01L21/34

Abstract: A cold cathode ionization gauge includes a first electrode (12) and a second electrode (20) which are spaced apart and insulated from one another and have a common axis. A magnetic field generator surrounds the gauge and applies a magnetic field along the common axis of the electrodes. The magnetic field generator includes at least one pair of opposed axially magnetized magnets (32, 34) adjacent to each other. The magnet arrangement minimizes magnetic flux outside the gauge while increasing the strength of the magnetic flux inside the gauge. The magnetic arrangement also allows the gauge to be ignited in a very high vacuum, thereby extending the operating range of the gauge.

Abstract translation: 冷阴极电离计包括第一电极（12）和第二电极（20），第一电极（12）和第二电极（20）彼此间隔开并且彼此绝缘并具有公共轴线。 磁场发生器围绕测量仪并沿着电极的公共轴施加磁场。 磁场发生器包括彼此相邻的至少一对相对的轴向磁化磁体（32,34）。 磁体布置使仪表外侧的磁通量最小化，同时增加了量规内的磁通量的强度。 磁性装置还允许在非常高的真空中点燃仪表，从而延长量规的工作范围。

公开(公告)号：US11268997B1

公开(公告)日：2022-03-08

申请号：US16996561

申请日：2020-08-18

Applicant: Keysight Technologies, Inc.

Inventor： Jan Verspecht ,  Augustine Stav

IPC: G01L21/32 ,  G01R23/20 ,  H04L27/38 ,  G01R27/28 ,  G01R35/00 ,  H01J41/04 ,  H01J41/06 ,  H01J41/16 ,  H01J41/14 ,  G01L21/00 ,  G01L21/34 ,  G01L19/08

Abstract: A system of measuring and correcting for distortions in homodyne systems and a method for operating a data processing system to provide an estimate of distortions in homodyne systems are disclosed. The method for operating a data processing system to provide an estimate of a distortion introduced by a homodyne system when the homodyne system processes a time a multi-tone time domain input signal, x(t), to obtain a time domain output signal, y(t) includes receiving a frequency spectrum, X(f), of the multi-tone time domain input signal, x(t) and measuring an output frequency spectrum, Y(f), when the homodyne system operates on x(t). A plurality of parameters of a model that represents a linear frequency response of the homodyne system when operating on X(f) to arrive at Y(f) by fitting the model to Y(f) and X(f) is determined, and the model is applied to X(f) and Y(f) to estimate the distortions.

公开(公告)号：US10914649B1

公开(公告)日：2021-02-09

申请号：US17060436

申请日：2020-10-01

Applicant: Canon Anelva Corporation

Inventor： Yohsuke Kawasaki

IPC: G01L21/34 ,  H01J41/06 ,  G01L19/06

Abstract: An ionization gauge includes an anode having a rod shape, and a cathode including a cathode plate having a through hole through which the anode extends. A shape of the through hole on a section along an axial direction of the anode includes a concave portion sandwiched between two convex portions.

公开(公告)号：US20050028602A1

公开(公告)日：2005-02-10

申请号：US10910104

申请日：2004-08-03

Applicant: Raffaele Correale

Inventor： Raffaele Correale

IPC: G01L21/34 ,  H01J41/06 ,  H01J41/10 ,  H01J1/62

CPC classification number: B82Y10/00 ,  H01J41/06

Abstract: An ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump comprises an electron-emitting cathode (31) made by exploiting the nanotube technology, a grid (13; 33; 133; 133′) for accelerating the electrons emitted by the cathode, and a plate (15; 35) collecting the ions and/or the ionised positive molecules of the gas. Measuring the plate current by a galvanometer allows for determining the value of the residual pressure inside the container.

Abstract translation: 用于测量残留在容器（10）中的气态材料的残余压力的电离真空计更具体地在真空泵的操作之后包括通过利用纳米管技术制成的电子发射阴极（31），栅格（13; 33; 133; 133'），用于加速由阴极发射的电子;以及板（15; 35），其收集气体的离子和/或电离的正分子。 用电流计测量板电流可以确定容器内残余压力的值。