公开(公告)号：JPH0313702B2

公开(公告)日：1991-02-25

申请号：JP19754683

申请日：1983-10-24

Applicant: ANELVA CORP

Inventor： SHIOKAWA YOSHIRO

IPC: G01N23/227 ,  H01J37/10 ,  H01J37/143 ,  H01J37/145 ,  H01J37/252 ,  H01J49/08 ,  H01J49/48

公开(公告)号：JPS6352428B2

公开(公告)日：1988-10-19

申请号：JP16823982

申请日：1982-09-27

Applicant: SIEMENS AG

Inventor： HANSUPEETAA FUOIERUBAUMU

IPC: G01R31/26 ,  G01Q30/02 ,  G01R31/28 ,  G01R31/302 ,  H01J37/252 ,  H01J49/08 ,  H01J49/44 ,  H01L21/66

公开(公告)号：JPS61105857U

公开(公告)日：1986-07-05

申请号：JP19325284

申请日：1984-12-19

IPC: H01J37/20 ,  G01N23/227 ,  H01J49/08

公开(公告)号：JP3055157B2

公开(公告)日：2000-06-26

申请号：JP23001790

申请日：1990-08-30

IPC: G01N23/225 ,  H01J49/08 ,  H01J49/44

公开(公告)号：JP2535694Y2

公开(公告)日：1997-05-14

申请号：JP3668892

申请日：1992-04-30

IPC: H01J49/08 ,  H01J37/065

公开(公告)号：JPH0955184A

公开(公告)日：1997-02-25

申请号：JP20706195

申请日：1995-08-14

Applicant: NIKKISO CO LTD

Inventor： HONDA YOSHIHISA ,  TAKAKUWA YASUSHI ,  AOKI YOSHIAKI

IPC: G01N27/62 ,  H01J49/08

Abstract: PROBLEM TO BE SOLVED: To improve the availability factor of a Fourier transform mass spectrograph by providing a controller controlling the current flowing in an electron emitting filament on the mass spectrograph. SOLUTION: A sample gas is guided into an analyzer cell 2 from a feed pipe 44, and it is ionized by a filament 2b and the electron beam emitted toward a collector Q. Cyclotron resonance occurs on the ionized sample gas on the plane perpendicular to the magnetic field. An output signal is sent from a receiving electrode R in the analyzer cell 2 to an electronic circuit outside a vacuum chamber 11 by the cyclotron resonance. An electric signal is sent from a vacuum detector 33 in the vacuum chamber 11 to an external vacuum gauge 36, and the degree of vacuum is determined by the vacuum gauge 36. A degree of vacuum signal is sent from the vacuum gauge 36 to a comparator 38. The comparator 38 compares the degree of vacuum with the set value of the degree of vacuum stored in the comparator 38, turns a relay on when the degree of vacuum is the set value or below, and turns the relay off when the degree of vacuum is the set value or above. When the degree of vacuum becomes the set value or below, the relay in a controller cuts off the current of a filament 43.

公开(公告)号：JPH04112445A

公开(公告)日：1992-04-14

申请号：JP23113490

申请日：1990-08-31

Applicant: SHIMADZU CORP

Inventor： SOEJIMA HIROYOSHI

IPC: G01N23/225 ,  H01J49/08 ,  H01J49/44

Abstract: PURPOSE:To observe, together with a photo-electron image of a specimen surface, a secondary electron or reflex electron image which represents the state of the specimen surface in the identical conditions with a higher resolution, by performing a scan with an electron beam in synchronization with scanning of photo-electron image on the specimen surface. CONSTITUTION:The output voltage from a voltage source of an energy analyzer 1 is set to an appropriate voltage which enables sensing of secondary electrons emitted by a specimen surface, and this surface is scanned with an electron beam (e), and now a secondary electron image of the specimen surface is obtained on a CRT 10. The specimen S is moved while watching this image for searching the place to be analyzed, and the place is brought to the center of view field of the CRT 10, and the surface is irradiated with X-rays. When irradiation with electron beam is stopped and the output voltage from the voltage source 14 of the energy analyzer is set to a voltage which provides sensibility for the photo-electrons of the element whose distribution is to be examined, an image to show distribution of the object element is given on the CRT 10. According to this constitution it is practicable to observe a photo-electron image and a secondary electron image, which are changed over at any desired time.

公开(公告)号：JPH0492399A

公开(公告)日：1992-03-25

申请号：JP20730290

申请日：1990-08-04

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： NISHIHARA SUSUMU

IPC: H05H9/00 ,  H01J3/02 ,  H01J23/06 ,  H01J37/06 ,  H01J49/08

Abstract: PURPOSE:To simplify a device as well as to make operations simpler with the effect of activities enhanced by controlling both electrons pulled out by a positive electric field and microwaves in phase so as to be put in the phase of a negative electric field, and thereby activating a cathode. CONSTITUTION:A high frequency electron gun 1 allows a microwave generating device 8 to generate microwaves within a high frequency cavity 6 by means of signals from a reference signal generator 10. In a phase shifting device 11, laser beams which are locked in mode by a laser beam generating device 9, are generated to the timing where these microwaves shall be in an accelerating phase for photo electrons to be generated later on. These laser beams are hit against a cathode 2 so that photo electrons are thereby generated, and these photo electrons are loaded on the accelerating phase of microwaves generated within the high frequency cavity 6 by the device 8 so as to be accelerated. When the cathode 2 is activated, generated electrons are pulled out by a positive electric field so as to be accelerated. These electrons go into the phase of a negative electric field because of change with time, they are decelerated, they are suspended, and they are finally accelerated to the reverse direction, so that electrons imparted with kinetic energy are hit against atoms in the cathode 2 so that the cathode 2 is thereby activated.

公开(公告)号：JPH03176957A

公开(公告)日：1991-07-31

申请号：JP31595089

申请日：1989-12-05

Applicant: JEOL LTD

Inventor： KUDOU MASATO

IPC: G01N23/225 ,  H01J49/08

Abstract: PURPOSE:To obtain a sufficient neutralizing effect without providing an electron beam generating means in an analyzing means by radiating an electron beam to a sample holder or a secondary electron emitting member to generate secondary electrons during the ion radiation of a sample, and neutralizing the static electricity of the insulating sample. CONSTITUTION:An electron beam E and a secondary ion beam I pass passing holes 11, 12 of an electrode 10 respectively, the secondary ions generated from a sample 3 by the radiation of the beam I pass the electrode 10 and are analyzed by a secondary ion analyzing means. The electron beam E is deflected by a deflecting system incorporated in an electron beam generating means 7 to radiate a secondary electron emitting member 6, a large quantity of secondary electrons are generated by the member 6 and used to neutralize the charged sample 3. For Auger analysis, the electrode 10 is separated from the sample 3, the sample 3 is inclined clockwise, the angle between the normal line on the sample surface and the electron beam E is set to about 75 deg., for example, thus the quantity of secondary electrons is made equal to the quantity of the incident electron beam, and the static electricity on the sample 3 is prevented.

公开(公告)号：JPH0323652Y2

公开(公告)日：1991-05-23

申请号：JP11409086

申请日：1986-07-25

IPC: G01N1/28 ,  G01N23/22 ,  H01J37/20 ,  H01J49/08