公开(公告)号：DE3447541A1

公开(公告)日：1985-07-04

申请号：DE3447541

申请日：1984-12-27

Applicant: ANELVA CORP

Inventor： SHIOKAWA YOSHIRO

IPC: G01N23/225 ,  G01N27/62 ,  H01J37/252 ,  H01J49/14 ,  H01J49/28 ,  H01J49/42 ,  H01J49/44 ,  H01J49/48 ,  H01J49/00

Abstract: In a mass spectrometer having an ion gun 10 for directing an ion beam onto the surface of a sample 12, so that said sample 12 emits secondary ions, having a detector 18 for the secondary ions and directing means 20a, 25a, for directing the secondary ions onto the detector, a specific energy bandwidth can be defined on the basis of the energy distribution of the secondary ions with respect to the maximum of the energy distribution. The energy region of the mass spectrometer which can be analysed can be expanded, according to the invention, to at least double the specific energy bandwidth by means of expansion devices which are coupled to the directing means. Using the expansion devices, the pass bandwidth of an energy filter belonging to the directing means can be enlarged in that the resolution and the mean energy of the pass band are increased. The expansion means can also increase the maximum energy of a quadrupole mass filter which can be analysed, especially by modifying the length of the electrode elements of the mass filter and/or by modifying the frequency of an alternating voltage which is supplied to these electrode elements.

公开(公告)号：DE3429599A1

公开(公告)日：1985-02-21

申请号：DE3429599

申请日：1984-08-10

Applicant: ANELVA CORP

Inventor： SHIOKAWA YOSHIRO

IPC: G01N23/227 ,  G01Q30/02 ,  G01Q90/00 ,  H01J37/252 ,  H01J49/44 ,  H01J49/48

Abstract: In an analyzing apparatus for use in analyzing a surface of an object by the use of Auger electrons resulting from impingement of an electron beam, outer and inner cylindrical electrode members are placed to define outer and inner rooms, respectively, and have a common cylindrical axis. The outer and the inner rooms have first outer and first inner ends adjacent to the object, respectively, and second outer and second inner ends remote from the object, respectively. An electron gun is operable to radiate the electron beam and is entered at least partly in the outer room with an electron gun axis noncoincident with the common cylinder axis. The electron gun axis and the common cylinder axis form a predetermined angle. An ion gun is also entered at least partly in the outer room with an ion gun axis noncoincident with the electron gun axis. Various kinds of detectors may be placed in the inner room.

公开(公告)号：DE3438987A1

公开(公告)日：1985-05-02

申请号：DE3438987

申请日：1984-10-24

Applicant: ANELVA CORP

Inventor： SHIOKAWA YOSHIRO

IPC: G01N23/227 ,  H01J37/10 ,  H01J37/143 ,  H01J37/145 ,  H01J37/252 ,  H01J49/08 ,  H01J49/48

公开(公告)号：EP2330414A4

公开(公告)日：2017-10-04

申请号：EP09817398

申请日：2009-08-28

Applicant: CANON ANELVA CORP

Inventor： SHIOKAWA YOSHIRO ,  HIRANO YOSHIKI ,  NAKAMURA MEGUMI ,  TANEDA YASUYUKI ,  PENG QIANG ,  MARUYAMA HARUMI

IPC: G01N27/62 ,  H01J49/04 ,  H01J49/14

CPC classification number: H01J49/147 ,  H01J49/0468

公开(公告)号：JP2011086403A

公开(公告)日：2011-04-28

申请号：JP2009236405

申请日：2009-10-13

Applicant: Canon Anelva Corp ,  キヤノンアネルバ株式会社

Inventor： SHIOKAWA YOSHIRO ,  NAKAMURA MEGUMI ,  HO TSUYOSHI

IPC: H01J49/06 ,  H01J43/20 ,  H01J49/42

Abstract: PROBLEM TO BE SOLVED: To provide a conversion-type ion detection unit including a mechanism for converting ions into electrons and amplifying the electrons obtained by the conversion, which enables a reduction in noise caused by stray light. SOLUTION: The ion detection unit 101 includes: an aperture 113a as an opening for allowing an ion flux 107 to enter the ion detection unit 101 therethrough; a conversion electrode 103 for converting the ion flux entering through the aperture 113a into electrons; and a secondary electron multiplier 102 for amplifying the converted electrons 109. Furthermore, the area of the conversion electrode 103 irradiated with ions is equal to or smaller than the area of the aperture 113a. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供一种转换型离子检测单元，其包括用于将离子转换成电子并放大通过转换获得的电子的机构，这使得能够降低由杂散光引起的噪声。 解决方案：离子检测单元101包括：开口113a，用于允许离子通量107进入离子检测单元101的开口; 用于将通过孔113a进入的离子通量转换为电子的转换电极103; 以及用于放大转换的电子109的二次电子倍增器102.此外，用离子照射的转换电极103的面积等于或小于孔113a的面积。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2004039400A

公开(公告)日：2004-02-05

申请号：JP2002193665

申请日：2002-07-02

Applicant: Anelva Corp ,  アネルバ株式会社

Inventor： HIRANO YOSHIKI ,  SHIOKAWA YOSHIRO ,  FUJII TOSHIHIRO ,  NAKADA MUNETAKA ,  TAKAYANAGI MASAO

IPC: G01N27/62 ,  B01D59/44 ,  H01J49/00 ,  H01J49/10

CPC classification number: H01J49/105

Abstract: PROBLEM TO BE SOLVED: To provide a device for ion adhesion mass spectrometry with enhanced measuring sensitivity, by improving efficiency for transporting metal ions to an ion adhering region, by improving efficiency for making the metal ions adhere to a sample gas, and by improving efficiency for transporting adhesion ions to a mass spectrograph, and also to provide an ionizing device and an ionizing method.
SOLUTION: This device for ion adhesion mass spectrometry is equipped with a first chamber 13 and a second chamber 14 partitioned by a partition wall 12 having an opening (nozzle) 11, an emitter 16, a mass spectrograph 17, a vacuum pump 19, and a sample introducing mechanism to introduce a sample, and a metal ions are made to adhere to a sample element and the sample is made to carry positive ions to carry out mass spectrometry in the device. The Knudsen number of the opening is kept at 0.01 or less, a pressure in the first chamber 13 is kept at 1/10 of the pressure in the second chamber 14 or less, and the gas of the sample in the first chamber is blown out to the second chamber to provide a region of supersonic jet 21 formed in the second chamber. The sample gas and the metal ions are injected in the supersonic jet region to make the metal ions adhere to the sample element.
COPYRIGHT: (C)2004,JPO

公开(公告)号：JP2003031178A

公开(公告)日：2003-01-31

申请号：JP2001216866

申请日：2001-07-17

Applicant: Anelva Corp ,  アネルバ株式会社

Inventor： SHIOKAWA YOSHIRO ,  HAMADA KAZUHIKO

IPC: G01N27/62 ,  H01J49/06 ,  H01J49/42

Abstract: PROBLEM TO BE SOLVED: To provide a quadrupole mass spectrometer suppressing the noise caused by the light generated at an area to be measured or at an ion source, with few sensitivity loss. SOLUTION: For the quadrupole mass spectrometer, impressing high frequency voltage to a quadrupole electrode 10 composed of 4 pieces of rod-shaped electrodes arranged parallel with each other, emitting only the ion having specified mass, ionized at an ionizing part, from an outlet of the quadrupole electrode 10, and detecting the emitted ion by an ion detector 11 located at the back side of an outlet part as a current, a light receiving surface 16 of the ion detector 11 is formed into ring-shape, and the center axis of the light receiving surface 16 and the axis of the quadrupole electrode 10 are arranged so as to coincide with each other, and an electric field, guiding the ion to the part located between the outlet of the quadrupole electrode 10 and the light receiving surface 16 of the ion detector 11, is formed.

Abstract translation: 要解决的问题：提供一种四极质谱仪，其抑制由待测区域或离子源产生的光产生的噪声，具有很少的灵敏度损失。 解决方案：对于四极质谱仪，将高频电压施加到由彼此平行布置的4个棒状电极组成的四极电极10，仅从离子化部分离子化而离子化， 四极电极10，并且通过位于出口部的背侧的离子检测器11作为电流检测发射的离子，离子检测器11的受光面16形成为环状，中心轴 光接收表面16和四极电极10的轴线被布置成彼此重合，并且将电场引导到位于四极电极10的出口与光接收表面16之间的部分 形成离子检测器11。

公开(公告)号：JP2002150992A

公开(公告)日：2002-05-24

申请号：JP2000342346

申请日：2000-11-09

Applicant: ANELVA CORP

Inventor： SHIOKAWA YOSHIRO ,  NAKAMURA MEGUMI ,  HIRANO YOSHIKI ,  FUJII TOSHIHIRO

IPC: G01N27/62 ,  H01J49/10 ,  H01J49/42

Abstract: PROBLEM TO BE SOLVED: To provide an ionizer and an ionization method for mass spectrometry, wherein an accurate separation of ions to be analyzed and ions to be trapped in an ion mass spectrometry is made possible, using a simple structure and at a relatively low resolution, and where analytical sensitivity is improved. SOLUTION: An ion trap structural part is used as an ion source 10, and an ion emitter 15, emitting a metal ion inside or outside of the ion source, is installed. The metal ions, emitted from the ion emitter, are made to adhere to a constituting component of sample gas, so as to ionize the sample gas, and sorting parameters preset are made to change, so as to short out the ion and the metal ion related to an analytically objective substance, and ions related to the analysis object substance are emitted to a mass analyzer part 20, while the metal ions are trapped and pooled inside the ion source.

公开(公告)号：JP2001351568A

公开(公告)日：2001-12-21

申请号：JP2000169644

申请日：2000-06-06

Applicant: ANELVA CORP

Inventor： SHIOKAWA YOSHIRO ,  NAKAMURA MEGUMI ,  SASAKI TORU ,  FUJII TOSHIHIRO

IPC: G01N27/62 ,  G01N30/72 ,  H01J49/26 ,  H01J49/42

Abstract: PROBLEM TO BE SOLVED: To permit quantitative analysis in a method and a device for ion attached mass spectrometry. SOLUTION: This device for ion attached mass spectrometry is provided with a reaction chamber 11 for attaching metal ion of positive charge to detected gas; a mass spectrometer 51 for separating and detecting the mass of the detected gas; an analysis chamber 14 where the mass spectrometer is installed; differential exhaust chambers 12, 13 connecting the reaction chamber to the analysis chamber; and a data processor 17 for inputting and computing mass signals from the mass spectrometer. A vacuum gages 24, 33 are further provided for measuring the total pressure of a pressure reduced atmosphere of the reaction chamber, differential exhaust chambers and analysis chamber in the pressure reduced atmosphere, and a measured total pressure signal from the vacuum gages during measurement is inputted to one of the data processor, a lead-in mechanism and an exhaust mechanism. The data processor includes an arithmetic means 17a for quantitatively analyzing each component making use of the fact that the sensitivity of each component has total pressure dependency of the pressure reduced atmosphere and that the total pressure dependency is different component by component.

公开(公告)号：JP2001351567A

公开(公告)日：2001-12-21

申请号：JP2000169645

申请日：2000-06-06

Applicant: ANELVA CORP

Inventor： SHIOKAWA YOSHIRO ,  NAKAMURA MEGUMI ,  FUJII TOSHIHIRO

IPC: G01N27/62 ,  H01J49/10

Abstract: PROBLEM TO BE SOLVED: To provide an ion source for an ion attached mass spectrometer capable of forming a sufficient quantity of detected gas ion in mass spectrometry to feed it to the outside of the ion source by preventing the formation of space charge in the ion source. SOLUTION: This ion source is provided with a gas lead-in part 16 for leading detected gas into an internal space, an emission body 14 for generating metal ion by the feed of a voltage applying part 13, and a first aperture 11 with an aperture 11a. The metal ion is attached to the detected gas to generate the detected gas ion, and the detected gas ion is fed to an external mass spectrometric mechanism through the aperture 11a. Further, an electrode is disposed either near the emission body or near the aperture 11a of the first aperture 11.