油回転真空ポンプ用台車および油回転真空ポンプユニット

    公开(公告)号:JP2017154540A

    公开(公告)日:2017-09-07

    申请号:JP2016037489

    申请日:2016-02-29

    Inventor: 江頭 哲也

    Abstract: 【課題】油交換を簡便に行えるようにした油回転真空ポンプ用台車を提供する。 【解決手段】ポンプ本体100および駆動モータ150を含む油回転真空ポンプ10を搭載するための台車200であって、油回転真空ポンプ10を支持するための支持台210と、支持台210の下面に取付けられた複数の車輪220,230と、を有し、かつ、支持台210の端部を持ち上げるジャッキ・アップ機構300が付設されている。 【選択図】 図1

    Method of treating surface of substrate with transparent electrode formed thereon and display device
    3.
    发明专利
    Method of treating surface of substrate with transparent electrode formed thereon and display device 审中-公开
    用形成的透明电极和显示器件处理衬底表面的方法

    公开(公告)号:JP2006120739A

    公开(公告)日:2006-05-11

    申请号:JP2004304875

    申请日:2004-10-19

    Abstract: PROBLEM TO BE SOLVED: To provide a method of treating surface of a substrate on which a transparent electrode is formed which can improve the displaying quality of an organic EL element by flattening fine projections existing on the transparent electrode. SOLUTION: In the method of treating surface of substrate, the surface of a substrate 2 is flattened on which an ITO film 2a is formed and which constitutes a display device. In the method, the substrate 2 carrying the formed ITO film 2a is positioned between parallel electrodes 12 and 13 which are used as voltage applying electrodes and a carrying base 5 of a ground electrode, and an O 2 gas is supplied between the electrodes 12 and 13 and substrate 2 as a process gas 4a. At the same time, the process gas 4a is made into plasma by ionizing the gas 4a by applying a voltage from a power supply 7 across the electrodes 12 and 13. Then the surface of the ITO film 2a is flattened by removing fine projections existing on the surface by bringing the plasma of the process gas 4a into contact with the ITO film 2a. The arithmetic average roughness Ra of the flattened surface of the ITO film 2a is set within the range of 1-10 nm. It is preferable to perform this method under a pressure near the atmospheric pressure. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种处理其上形成有透明电极的基板的表面的方法,其可以通过使存在于透明电极上的微细突起变平而提高有机EL元件的显示质量。 解决方案:在处理衬底表面的方法中,衬底2的表面被平坦化,其上形成有ITO膜2a并构成显示装置。 在该方法中,携带形成的ITO膜2a的基板2位于平行电极12和13之间,该电极用作电压施加电极和接地电极的承载基座5,以及O SB SB 被供给在电极12和13之间以及作为处理气体4a的基板2。 同时,通过在电极12和13上施加来自电源7的电压使气体4a离子化,将工艺气体4a制成等离子体。然后,通过除去存在于 通过使处理气体4a的等离子体与ITO膜2a接触来进行表面处理。 ITO膜2a的平坦化表面的算术平均粗糙度Ra设定在1-10nm的范围内。 优选在接近大气压的压力下进行该方法。 版权所有(C)2006,JPO&NCIPI

    Thermo-hygrostat
    4.
    发明专利
    Thermo-hygrostat 有权
    恒温器

    公开(公告)号:JP2013108712A

    公开(公告)日:2013-06-06

    申请号:JP2011255908

    申请日:2011-11-24

    Abstract: PROBLEM TO BE SOLVED: To provide a thermo-hygrostat in an air atmosphere in which carbon dioxide gas is adjusted to low concentration.SOLUTION: The thermo-hygrostat includes: a gas supply line 2 for supplying air containing carbon dioxide which is adjusted to the predetermined concentration to a laboratory; a gas concentration sensor 17 for detecting the gas concentration in the air in a laboratory 1; a room purge damper 14 capable of changing the quantity of air in the laboratory 1 which is to be purged to the outside; and a controller 20 for controlling the purge quantity in the room purge damper 14. The controller 20 controls the purge quantity of the room purge damper 14 according to the leak quantity of air from the laboratory 1 and the quantity of the supply gas from the gas supply line 2.

    Abstract translation: 要解决的问题:为了在二氧化碳气体被调节到低浓度的空气气氛中提供一种恒温恒湿器。 解决方案:恒温恒湿器包括:气体供应管线2,用于向实验室供应含有二氧化碳的空气,其被调节到预定浓度; 用于检测实验室1中的空气中的气体浓度的气体浓度传感器17; 能够改变实验室1中被吹扫到外部的空气量的室内吹扫阻尼器14; 以及用于控制室内吹扫阻尼器14中的吹扫量的控制器20.控制器20根据来自实验室1的空气泄漏量和来自气体的供给气体的量来控制室内吹扫阻尼器14的吹扫量 供应线2.版权所有(C)2013,JPO&INPIT

    Glove replacement method for glove box
    6.
    发明专利
    Glove replacement method for glove box 有权
    GLOVE BOX的GLOVE替代方法

    公开(公告)号:JP2013215819A

    公开(公告)日:2013-10-24

    申请号:JP2012086530

    申请日:2012-04-05

    Abstract: PROBLEM TO BE SOLVED: To facilitate confirmation that there is no gas leakage from a replaced new glove or its attachment part due to a defect in the glove or a failure in attachment in order to prevent the atmosphere inside a body box from being destroyed.SOLUTION: An opening of a glove port is closed with a lid from the inside of a body box by using an old glove. Then, after the old glove is removed from the glove port, the rim of a new glove is fitted onto the peripheral wall of the glove port and the new glove is fixed onto the peripheral wall of the glove port. Subsequently, a decompression process is performed to discharge air in a space hermetically sealed by the new glove, the peripheral wall, and the lid. When the degree of vacuum in the space reaches a predetermined value, the gas discharge is stopped, and then, a pressurization process is performed to supply atmosphere gas into the space. The pressurization process is performed for a prescribed period of time based on the volume corresponding to the space. The pressure in the space after the elapse of the prescribed period of time is measured. If the measured pressure is within a predetermined range, it is determined that the glove replacement is normally performed.

    Abstract translation: 要解决的问题:为了便于确认,由于手套缺陷或附件故障,更换的新手套或其附件部分没有气体泄漏,以防止体内箱体内的气氛被破坏。 :手套口的开口用一个老手套从身体箱体的内部用盖子封闭。 然后,将旧手套从手套口中取出后,将新手套的边缘安装在手套口的周壁上,将新手套固定在手套口的周壁上。 随后,进行减压处理以排出由新手套,周壁和盖子密封的空间中的空气。 当空间中的真空度达到预定值时,停止气体放电,然后进行加压处理以将气氛气体供应到空间中。 基于对应于该空间的体积,进行加压处理规定的时间。 测量经过规定时间段后的空间压力。 如果测量的压力在预定范围内,则确定手套更换正常进行。

    Humidity control device of hermetic chamber
    7.
    发明专利
    Humidity control device of hermetic chamber 有权
    湿度调节器的湿度控制装置

    公开(公告)号:JP2006142238A

    公开(公告)日:2006-06-08

    申请号:JP2004337594

    申请日:2004-11-22

    Inventor: WADA SHIRO

    Abstract: PROBLEM TO BE SOLVED: To provide a humidity control device capable of corresponding to the humidity control in a wide range from low humidity to high humidity, without complicating a system. SOLUTION: This invention includes a box body 2 of a globe box 1 airtightly sectioned from the outside, and a humidity control device 20 disposed in this box body 2 in a communicable manner, and having a packed column 23 with an adsorbent inside thereof and a heater 24 for heating this adsorbent. In the device, a substituted gas is circulated between the box body 2 and the packed column 23, and the humidity in the box body 2 is controlled by adsorbing or discharging the water content to/from the adsorbent. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种能够在从低湿度到高湿度的宽范围内对应于湿度控制的湿度控制装置,而不会使系统复杂化。 解决方案:本发明包括从外部气密分割的球形盒1的箱体2​​和以可通信的方式设置在该箱体2中的调湿装置20,并且具有内部具有吸附剂的填充塔23 和用于加热该吸附剂的加热器24。 在该装置中,取代气体在盒体2和填充柱23之间循环,并且箱体2中的湿度通过吸附或排出吸附剂的水分而被控制。 版权所有(C)2006,JPO&NCIPI

    Vacuum glove box
    8.
    发明专利
    Vacuum glove box 有权
    真空玻璃盒

    公开(公告)号:JP2005081452A

    公开(公告)日:2005-03-31

    申请号:JP2003313292

    申请日:2003-09-04

    Inventor: EGASHIRA JUNYA

    Abstract: PROBLEM TO BE SOLVED: To provide a vacuum glove box in which the occurrence of breakages of rubber gloves at the time of decompressing a body chamber is eliminated during the start-up of a device and the ventilation.
    SOLUTION: The vacuum glove box is provided with the body chamber 10, a glove mounting port 12 provided on the body chamber 10, the rubber glove 13 mounted to the glove mounting port 12, and a vacuum pump 7 for exhausting a pipe conduit for vacuum-drawing the body chamber made to communicate with the body chamber 10, a pipe conduit for vacuum-drawing the rubber glove made to communicate with the glove mounting port 12 part, the body chamber 10, and the glove mounting port 12 part. The upstream side of the pipe conduits 32, 32a, and 31a between the body chamber 10 and the glove mounting port 12 part is connected with a first common valve 3. The pipe conduit 31 connected to the first valve 3 is branched into two pipe conduits 31a, 31b. One branched pipe conduit is connected with the body chamber 10 via a second valve 1. The other branched pipe conduit 31a is made to communicate with the glove mounting port 12 part.
    COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种真空手套箱,其中在装置启动和通风期间消除了在减压身体腔室时橡胶手套破裂的发生。 解决方案:真空手套箱设置有主体室10,设置在主体室10上的手套安装口12,安装在手套安装口12上的橡胶手套13和用于排出管道的真空泵7 用于真空抽吸与体腔10连通的体腔的导管,用于真空吸附与手套安装口12部分,体腔10和手套安装口12部分连通的橡胶手套的管道 。 主体室10和手套安装口12部分之间的管道32,32a和31a的上游侧与第一公共阀3连接。连接到第一阀3的管道31分支成两个管道 31a,31b。 一个分支管道通过第二阀1与主体腔室10连接。另一个分支管道管道31a与手套安装口12部分连通。 版权所有(C)2005,JPO&NCIPI

    手袋交換用蓋装置
    10.
    发明专利

    公开(公告)号:JP2018015840A

    公开(公告)日:2018-02-01

    申请号:JP2016148158

    申请日:2016-07-28

    Inventor: 江頭 哲也

    Abstract: 【課題】手袋交換時の作業性を改善するのに適した手袋交換用蓋装置を提供する。 【解決手段】手袋取付用の筒状体12に装着することで本体ボックス1内を外部から遮断する、手袋交換用蓋装置B1であって、本体ボックス1に近接する内蓋5および離間する外蓋6と、内蓋5に対して相対回転可能に支持される、操作ハンドル72を有する回転操作体7と、回転操作体7に設けられたネジ軸713が外蓋6に設けられたネジ孔622に螺合するネジ機構と、内蓋5および外蓋6の各々の外周部に跨って支持された環状シール部材8と、内蓋5と外蓋6が近づくにつれて環状シール部材8を径方向外方に変位させるシール部材変位機構と、内蓋5および外蓋6の互いの相対回転を阻止する相対回転阻止機構と、を備え、筒状体12は突出部124を有し、内蓋5は、突出部124の内径寸法d2よりも大きい外径寸法d1を有して径方向外方に延びる延出部53を有する。 【選択図】図2

Patent Agency Ranking