Abstract:
PROBLEM TO BE SOLVED: To provide a method of treating surface of a substrate on which a transparent electrode is formed which can improve the displaying quality of an organic EL element by flattening fine projections existing on the transparent electrode. SOLUTION: In the method of treating surface of substrate, the surface of a substrate 2 is flattened on which an ITO film 2a is formed and which constitutes a display device. In the method, the substrate 2 carrying the formed ITO film 2a is positioned between parallel electrodes 12 and 13 which are used as voltage applying electrodes and a carrying base 5 of a ground electrode, and an O 2 gas is supplied between the electrodes 12 and 13 and substrate 2 as a process gas 4a. At the same time, the process gas 4a is made into plasma by ionizing the gas 4a by applying a voltage from a power supply 7 across the electrodes 12 and 13. Then the surface of the ITO film 2a is flattened by removing fine projections existing on the surface by bringing the plasma of the process gas 4a into contact with the ITO film 2a. The arithmetic average roughness Ra of the flattened surface of the ITO film 2a is set within the range of 1-10 nm. It is preferable to perform this method under a pressure near the atmospheric pressure. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a thermo-hygrostat in an air atmosphere in which carbon dioxide gas is adjusted to low concentration.SOLUTION: The thermo-hygrostat includes: a gas supply line 2 for supplying air containing carbon dioxide which is adjusted to the predetermined concentration to a laboratory; a gas concentration sensor 17 for detecting the gas concentration in the air in a laboratory 1; a room purge damper 14 capable of changing the quantity of air in the laboratory 1 which is to be purged to the outside; and a controller 20 for controlling the purge quantity in the room purge damper 14. The controller 20 controls the purge quantity of the room purge damper 14 according to the leak quantity of air from the laboratory 1 and the quantity of the supply gas from the gas supply line 2.
Abstract:
PROBLEM TO BE SOLVED: To facilitate confirmation that there is no gas leakage from a replaced new glove or its attachment part due to a defect in the glove or a failure in attachment in order to prevent the atmosphere inside a body box from being destroyed.SOLUTION: An opening of a glove port is closed with a lid from the inside of a body box by using an old glove. Then, after the old glove is removed from the glove port, the rim of a new glove is fitted onto the peripheral wall of the glove port and the new glove is fixed onto the peripheral wall of the glove port. Subsequently, a decompression process is performed to discharge air in a space hermetically sealed by the new glove, the peripheral wall, and the lid. When the degree of vacuum in the space reaches a predetermined value, the gas discharge is stopped, and then, a pressurization process is performed to supply atmosphere gas into the space. The pressurization process is performed for a prescribed period of time based on the volume corresponding to the space. The pressure in the space after the elapse of the prescribed period of time is measured. If the measured pressure is within a predetermined range, it is determined that the glove replacement is normally performed.
Abstract:
PROBLEM TO BE SOLVED: To provide a humidity control device capable of corresponding to the humidity control in a wide range from low humidity to high humidity, without complicating a system. SOLUTION: This invention includes a box body 2 of a globe box 1 airtightly sectioned from the outside, and a humidity control device 20 disposed in this box body 2 in a communicable manner, and having a packed column 23 with an adsorbent inside thereof and a heater 24 for heating this adsorbent. In the device, a substituted gas is circulated between the box body 2 and the packed column 23, and the humidity in the box body 2 is controlled by adsorbing or discharging the water content to/from the adsorbent. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum glove box in which the occurrence of breakages of rubber gloves at the time of decompressing a body chamber is eliminated during the start-up of a device and the ventilation. SOLUTION: The vacuum glove box is provided with the body chamber 10, a glove mounting port 12 provided on the body chamber 10, the rubber glove 13 mounted to the glove mounting port 12, and a vacuum pump 7 for exhausting a pipe conduit for vacuum-drawing the body chamber made to communicate with the body chamber 10, a pipe conduit for vacuum-drawing the rubber glove made to communicate with the glove mounting port 12 part, the body chamber 10, and the glove mounting port 12 part. The upstream side of the pipe conduits 32, 32a, and 31a between the body chamber 10 and the glove mounting port 12 part is connected with a first common valve 3. The pipe conduit 31 connected to the first valve 3 is branched into two pipe conduits 31a, 31b. One branched pipe conduit is connected with the body chamber 10 via a second valve 1. The other branched pipe conduit 31a is made to communicate with the glove mounting port 12 part. COPYRIGHT: (C)2005,JPO&NCIPI