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公开(公告)号：WO2010030162A2
公开(公告)日：2010-03-18
申请号：PCT/MY2009/000135
申请日：2009-09-03
Applicant: MIMOS BERHAD , SULAIMAN, Suraya , TAMSIR, Agus, Santoso , MANUT, Azrif , ALIAS, Dzuzlindah, Muhamad , ZAIN, Azlina, Mohd
Inventor： SULAIMAN, Suraya , TAMSIR, Agus, Santoso , MANUT, Azrif , ALIAS, Dzuzlindah, Muhamad , ZAIN, Azlina, Mohd
CPC classification number: G01N27/223 , G01N27/225
Abstract: The present invention relates to capacitive sensors for measuring humidity and moisture and to an improved process for making the same. The fabrication process for a capacitive sensor having a multi-layer electrodes for measuring humidity and moisture comprising disposing the multi-layer interdigitated electrodes in a multi-layer polyimides; providing a plurality of trenches on the surface of the electrode by lift off process; and covering the sensor with photosensitive negative polyimide.
Abstract translation: 本发明涉及用于测量湿度和湿度的电容式传感器及其制造方法的改进方法。 具有用于测量湿度和湿度的多层电极的电容式传感器的制造工艺包括将多层叉指电极设置在多层聚酰亚胺中; 通过剥离工艺在电极表面上提供多个沟槽; 并用光敏负性聚酰亚胺覆盖传感器。
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公开(公告)号：WO2010030162A3
公开(公告)日：2010-05-14
申请号：PCT/MY2009000135
申请日：2009-09-03
Applicant: MIMOS BERHAD , SULAIMAN SURAYA , TAMSIR AGUS SANTOSO , MANUT AZRIF , ALIAS DZUZLINDAH MUHAMAD , ZAIN AZLINA MOHD
Inventor： SULAIMAN SURAYA , TAMSIR AGUS SANTOSO , MANUT AZRIF , ALIAS DZUZLINDAH MUHAMAD , ZAIN AZLINA MOHD
CPC classification number: G01N27/223 , G01N27/225
Abstract: The present invention relates to capacitive sensors for measuring humidity and moisture and to an improved process for making the same. The fabrication process for a capacitive sensor having a multi-layer electrodes for measuring humidity and moisture comprising disposing the multi-layer interdigitated electrodes in a multi-layer polyimides; providing a plurality of trenches on the surface of the electrode by lift off process; and covering the sensor with photosensitive negative polyimide.
Abstract translation: 本发明涉及用于测量湿度和湿度的电容传感器及其制造方法。 具有用于测量湿度和湿度的多层电极的电容传感器的制造过程包括将多层交叉电极设置在多层聚酰亚胺中; 通过剥离工艺在电极的表面上提供多个沟槽; 并用感光负聚酰亚胺覆盖传感器。
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公开(公告)号：WO2009157754A3
公开(公告)日：2010-04-22
申请号：PCT/MY2009000084
申请日：2009-06-26
Applicant: MIMOS BERHAD , TAMSIR AGUS SANTOSO , ALIAS DZUZLINDAH MUHAMAD , SULAIMAN SURAYA , MANUT AZRIF , ZAKARIA AZLAN , SYONO MOHD ISMAHADI , RANI ROZINA ABDUL
Inventor： TAMSIR AGUS SANTOSO , ALIAS DZUZLINDAH MUHAMAD , SULAIMAN SURAYA , MANUT AZRIF , ZAKARIA AZLAN , SYONO MOHD ISMAHADI , RANI ROZINA ABDUL
IPC: H01L29/772
CPC classification number: G01N27/414
Abstract: An improved field-effect transistor for measuring biochemic properties in aqueous form by detecting the dielectric of the objects.
Abstract translation: 一种改进的场效应晶体管，用于通过检测物体的电介质来测量水性形式的生物化学性质。
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公开(公告)号：WO2009157754A2
公开(公告)日：2009-12-30
申请号：PCT/MY2009/000084
申请日：2009-06-26
Applicant: MIMOS BERHAD , TAMSIR, Agus, Santoso , ALIAS, Dzuzlindah, Muhamad , SULAIMAN, Suraya , MANUT, Azrif , ZAKARIA, Azlan , SYONO, Mohd, Ismahadi , RANI, Rozina, Abdul
Inventor： TAMSIR, Agus, Santoso , ALIAS, Dzuzlindah, Muhamad , SULAIMAN, Suraya , MANUT, Azrif , ZAKARIA, Azlan , SYONO, Mohd, Ismahadi , RANI, Rozina, Abdul
IPC: H01L29/772
CPC classification number: G01N27/414
Abstract: An improved field-effect transistor for measuring biochemic properties in aqueous form by detecting the dielectric of the objects.
Abstract translation: 一种改进的场效应晶体管，用于通过检测物体的电介质来测量水性形式的生物化学性质。
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