公开(公告)号：JP2012233900A

公开(公告)日：2012-11-29

申请号：JP2012105844

申请日：2012-05-07

Applicant: Axetris Ag ,  アクセトリス アクチエンゲゼルシャフトAxetris AG

Inventor： ANDREAS WITTMANN ,  STEFAN MANZENEDER ,  RUI PROTASIO ,  MICHEL STUDER ,  HESSLER THOMAS

IPC: G01N21/39

CPC classification number: G01N21/39 ,  G01N2021/399

Abstract: PROBLEM TO BE SOLVED: To provide a method that enables the measurement of a trace gas concentration invariant or at least less affected to gas pressure changes and atmospheric pressure changes.SOLUTION: The method neither requires a pressure sensor nor a pressure calibration. Furthermore, the method can be applied to other gas species present in the background gas or to the background gas itself that cross-interferes with the target gas of interest. This allows removing any pressure dependency of cross-interference parameters of other gas species and/or the background gas. The new method for accurately measuring a gas concentration is based on optimizing the wavelength modulation amplitude of the laser to minimum pressure dependency.

Abstract translation: 要解决的问题：提供一种能够测量痕量气体浓度不变量或至少较小地影响气体压力变化和大气压力变化的方法。

解决方案：该方法既不需要压力传感器也不需要压力校准。 此外，该方法可以应用于背景气体中存在的其它气体物质或与目标气体交叉干扰的背景气体本身。 这允许消除其他气体种类和/或背景气体的交叉干扰参数的任何压力依赖性。 用于精确测量气体浓度的新方法是基于将激光器的波长调制幅度优化为最小压力依赖性。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP6195947B2

公开(公告)日：2017-09-13

申请号：JP2016019942

申请日：2016-02-04

Applicant: アクセトリス アクチエンゲゼルシャフト ,  Axetris AG

Inventor： アンドレアス ヴィトマン ,  マーク−オリヴァー ツフェライ ,  ウアス ベーグリ ,  カイ ハスラー

IPC: G01B9/02 ,  G01N21/39

CPC classification number: G01N21/3504 ,  G01J3/4338 ,  G01N21/39 ,  G01N2021/0396

公开(公告)号：JP2012108124A

公开(公告)日：2012-06-07

申请号：JP2011242111

申请日：2011-11-04

Applicant: Axetris Ag ,  アクセトリス アーゲー

Inventor： WIELATH THOMAS ,  STEPHEN BURGI

IPC: G01F1/00

CPC classification number: G01F5/00

Abstract: PROBLEM TO BE SOLVED: To provide a flow sensor that does not depend on pressure and temperature as little as possible.SOLUTION: A flow sensor for measuring flow rate of a gas or liquid includes a housing. In the housing, a flow channel having a main flow channel 2 and a measurement flow channel 3 in parallel with the main flow channel 2 extends between an introduction path 15 and an exhaust path 16. In the main flow channel 2, at least one diaphragm part 17 is provided. In the measurement flow channel 3, one sensor element for measuring flow rate is provided. At each entrance side and exit side of the measurement flow channel 3, a diaphragm part 18 is provided. The diaphragm part 17 of the main flow channel has at least one passage channel 19. The diaphragm part 18 of the measurement flow channel has at least one passage channel 20. Each passage channel has the same shape and extends in parallel with the flow direction.

Abstract translation: 要解决的问题：尽可能少地提供不依赖于压力和温度的流量传感器。 解决方案：用于测量气体或液体的流量的流量传感器包括壳体。 在壳体中，具有与主流路2平行的主流路2和测量流路3的流路在导入路径15和排气通路16之间延伸。在主流路2中，至少一个隔膜 提供了第17部分。 在测量流路3中，设置有用于测量流量的一个传感器元件。 在测量流动通道3的每个入口侧和出口侧设有隔膜部分18。 主流道的隔膜部分17具有至少一个通道19.测量流动通道的隔膜部分18具有至少一个通道20。每个通道具有相同的形状并且与流动方向平行地延伸。 版权所有（C）2012，JPO＆INPIT

公开(公告)号：JP2016142738A

公开(公告)日：2016-08-08

申请号：JP2016019942

申请日：2016-02-04

Applicant: アクセトリス アクチエンゲゼルシャフト ,  Axetris AG

Inventor： アンドレアス ヴィトマン ,  マーク−オリヴァー ツフェライ ,  ウアス ベーグリ ,  カイ ハスラー

IPC: G01B9/02 ,  G01N21/39

CPC classification number: G01N21/3504 ,  G01J3/4338 ,  G01N21/39 ,  G01N2021/0396

Abstract: 【課題】気体検出のための光学式測定システムおよび方法である。 【解決手段】この光学式測定システムは、ハウジング内に配置されている光源と光検出器とを含む。光源は平均波長λ 0 と変調スパンΔλとを有している変調された主要光線を放出する。光学機械部品、例えば、光学的に作用する境界表面を含むハウジングウィンドウが、光源と光検出器との間に配置され、散乱光線を生じさせる。散乱光線は、主要光線と干渉し、自己混合が生じるおよび/またはエタロンが引き起こされる。従って、光検出器の測定信号は、主要信号の部分と不所望の干渉信号の部分とを含む。光学機械部品が、最適な距離Lで、光源および/または光検出器に対して相対的に配置されている。距離Lは、主要光線の波長λ 0 と変調スパンΔλとの関数である。選択された距離Lによって、復調された信号に対する散乱光線の影響が最小化され、センサ感度が上昇する。 【選択図】図1

Abstract translation: 要解决的问题：提供一种用于检测气体的光学测量系统和方法。解决方案：光学测量系统包括：光源; 以及布置在壳体中的光电检测器。 光源发射具有平均波长λ和调制范围Δλ的调制主波束。 在光源和光电检测器之间设置有光学机械部件，例如包括光学作用的边界面的壳体窗，并产生散射光束。 散射的光束干扰主光束，发生自我混合和/或标准具。 因此，光检测器的测量信号包括：主信号的一部分; 以及不期望的干扰信号的一部分。 光学机械部件在最佳距离L处相对地布置到光源和/或光电检测器。距离L是主光束的波长λ和调制范围Δλ之间的函数。 散射光束对解调信号的影响被最小化，传感器的灵敏度上升了所选择的距离L。图1

公开(公告)号：JP5528497B2

公开(公告)日：2014-06-25

申请号：JP2012105844

申请日：2012-05-07

Applicant: アクセトリス アクチエンゲゼルシャフトAxetris AG

Inventor： ヴィトマン アンドレアス ,  マンツェネーダー シュテファン ,  プロタシオ ルイ ,  ステュデ ミシェル ,  ヘスラー トーマス

IPC: G01N21/39

CPC classification number: G01N21/39 ,  G01N2021/399

公开(公告)号：US20170153651A1

公开(公告)日：2017-06-01

申请号：US15363640

申请日：2016-11-29

Applicant: Axetris AG

Inventor： Stefan BÜRGI ,  Adrian DÄNZER ,  Christoph BÄCHLER

IPC: G05D7/06 ,  G01F1/40 ,  G01F1/684 ,  G01F5/00

CPC classification number: G05D7/0635 ,  G01F1/40 ,  G01F1/6842 ,  G01F5/00 ,  G01F15/00

Abstract: A flow rate measuring unit, comprising a housing, which is composed of at least two housing parts that can be connected to one another and in which a flow passage extends, which branches off into a measuring channel branch and at least one bypass channel branch, wherein a substrate comprising a sensor system is disposed in the measuring channel branch. According to the invention, the flow passage includes a channel widening chamber in which an insert plate stack composed of at least two insert plates is disposed, which each include at least one plate-longitudinal recess extending in the longitudinal direction as the measuring channel branch and/or as the bypass channel branch. The insert plates are provided as insert parts for the channel widening chamber.

公开(公告)号：US10175166B1

公开(公告)日：2019-01-08

申请号：US15928425

申请日：2018-03-22

Applicant: Axetris AG

Inventor： Andreas Wittmann ,  Sven Schlesinger ,  Torsten Platz

IPC: G01N21/39

Abstract: A method for operating an optical measuring system for measuring the concentration of a gas component in a measured gas, based on wavelength modulation spectroscopy, wherein a laser light source is operated in a current-modulated manner with a base current IDC and a modulation current IAC and a laser beam of the wavelength λ0 having a wavelength modulation amplitude ΔλAC is emitted, and the wavelength modulation amplitude ΔλAC of the laser light is kept constant by way of variable setting of the current modulation amplitude ΔIAC. The method provides for keeping a modulated power ΔPAC at an internal resistor RI of the laser light source constant at the operating point so as to stabilize the wavelength modulation amplitude ΔλAC.

公开(公告)号：US20200103342A1

公开(公告)日：2020-04-02

申请号：US16149295

申请日：2018-10-02

Applicant: Axetris AG

Inventor： Andreas Wittmann ,  Sven Schlesinger ,  Torsten Platz

IPC: G01N21/39 ,  G01J3/10 ,  H01S5/068 ,  H01S5/12

Abstract: A method for operating an optical measuring system including a wavelength-tunable temperature-stabilized laser light source for measuring the concentration of a target gas component in a measured gas, wherein an instantaneous base current IDC_ZG,act corresponding to a wavelength λZG of a target gas absorption line is set so that a wavelength distance ΔλDC defined during calibration between a target gas absorption line for a target gas component and a reference gas absorption line for a reference gas component is maintained. During operation, a relative temperature difference in the laser light source, defined in advance during calibration, between the operating points selected at the time of calibration of the reference gas, with a base current IDC_RG,cal, and the target gas component, with a base current IDC_ZG,cal, is maintained by determining the required instantaneous base current IDC_ZG,act for the target gas component, as a function of an instantaneous base current IDC_RG,act for the reference gas. The system includes a measuring system for carrying out the method.

公开(公告)号：US09995607B2

公开(公告)日：2018-06-12

申请号：US15363498

申请日：2016-11-29

Applicant: Axetris AG

Inventor： Stefan Bürgi ,  Adrian Dänzer ,  Christoph Bächler

IPC: G01F1/42 ,  G01F5/00

CPC classification number: G01F1/42 ,  G01F1/6842 ,  G01F5/00 ,  G01F5/005

Abstract: A flow rate measuring unit, comprising a housing, which is composed of at least two housing parts that can be connected to one another and in which a flow passage extends, which branches off into a measuring channel branch and at least one bypass channel branch, wherein a substrate comprising a sensor system is disposed in the measuring channel branch. According to the invention, the flow passage includes a channel widening chamber in which an insert plate stack composed of at least two insert plates is disposed, which each include at least one plate-longitudinal recess extending in the longitudinal direction as the measuring channel branch and/or as the bypass channel branch. The insert plates are provided as insert parts for the channel widening chamber.

公开(公告)号：US20130112896A1

公开(公告)日：2013-05-09

申请号：US13670652

申请日：2012-11-07

Applicant: Axetris AG

Inventor： Olivier DUBOCHET ,  Stefan KREBS

IPC: H05B33/04

CPC classification number: G01J3/02 ,  G01J3/108 ,  G01J3/42 ,  G01N21/3504 ,  G01N2201/0238 ,  H01K1/08 ,  H01K1/14 ,  H01K1/50 ,  H01K1/52 ,  H01K3/22 ,  H01K3/26 ,  H01L2224/48091 ,  H01L2924/10253 ,  H01L2924/3011 ,  H01L2924/00014 ,  H01L2924/00

Abstract: An infrared radiation source for gas detection, with a thin layer infrared radiator that is arranged in the interior chamber of a protective housing that includes a support surface for the thin layer infrared radiator and an exit window for the infrared radiation arranged at a distance opposite the support surface. The thin layer infrared radiator includes a platinum layer and at least one structurally defined de-gassing canal with an entry opening and an exit opening that leads from the interior chamber of the protective housing to the outside. For non-critical applications, the de-gassing canal is not sealed. For critical applications, it may be sealed by a sealing membrane that is water impermeable, water vapor permeable and open for gas diffusion, with the sealing membrane preferably being semi-permeable.

Abstract translation: 一种用于气体检测的红外辐射源，其具有布置在保护壳体的内部腔室中的薄层红外辐射器，该保护壳体包括用于薄层红外线辐射器的支撑表面和用于红外辐射的出射窗， 支撑面。 薄层红外辐射器包括铂层和至少一个结构上限定的除气槽，其具有从保护壳体的内部腔室引导到外部的入口和出口。 对于非关键应用，除气管没有密封。 对于关键应用，其可以通过不透水，水蒸汽可渗透并且用于气体扩散的密封膜被密封，密封膜优选是半透性的。